JPH0429045B2 - - Google Patents
Info
- Publication number
- JPH0429045B2 JPH0429045B2 JP2198586A JP2198586A JPH0429045B2 JP H0429045 B2 JPH0429045 B2 JP H0429045B2 JP 2198586 A JP2198586 A JP 2198586A JP 2198586 A JP2198586 A JP 2198586A JP H0429045 B2 JPH0429045 B2 JP H0429045B2
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- glass substrate
- groove
- optical
- directional coupler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013307 optical fiber Substances 0.000 claims description 46
- 239000011521 glass Substances 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 28
- 238000005498 polishing Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 230000000694 effects Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005253 cladding Methods 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、慣性航法装置として用いられる光フ
アイバジヤイロに組込まれる光方向性結合器の製
造方法及びその装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method and apparatus for manufacturing an optical directional coupler incorporated in an optical fiber pilot used as an inertial navigation device.
〔発明の技術的背景とその問題点〕
近時、Sagnac（サニヤツク）効果を利用した光
ジヤイロが航空機の慣性航法装置用の角速度セン
サとして、採用されつつある。このSagnac効果
とは、閉光路内を伝搬する左回りと右回りの光の
光路長が、閉光路の回転により異なるという現象
のことをいい、この効果を利用して回転の角度の
検出が可能となる。現在、光ジヤイロには、リン
グレーザジヤイロおよび光フアイバジヤイロの２
種類がある。このうち、後者は、光をフアイバル
ープの左回り光と右回り光に分岐し、戻つてきた
光を合成することにより、Sagnac効果による角
速度を示す位相差を求めるようにしている。この
ような光の分岐・合成に用いられているのが、第
９図に示す光方向性結合器である。この光方向性
結合器は、光フアイバＡ，Ａを円弧状に埋め込ん
だ石英ガラス基板Ｂ，ＢをコアＣが露出しないま
で鏡面研磨し、この状態で二枚のガラス基板Ｂ，
Ｂをオプテイカルコンタクトさせたものである。[Technical background of the invention and its problems] Recently, optical gyros that utilize the Sagnac effect are being adopted as angular velocity sensors for inertial navigation systems of aircraft. The Sagnac effect is a phenomenon in which the optical path lengths of counterclockwise and clockwise light propagating in a closed optical path differ depending on the rotation of the closed optical path, and this effect can be used to detect the angle of rotation. becomes. Currently, there are two types of optical gyros: ring laser gyros and optical fiber gyros.
There are different types. Of these, the latter splits the light into a left-handed light and a right-handed light from the fiber loop, and combines the returned light to find the phase difference that indicates the angular velocity due to the Sagnac effect. An optical directional coupler shown in FIG. 9 is used for branching and combining such light. This optical directional coupler is made by mirror-polishing the quartz glass substrates B, B, in which the optical fibers A, A are embedded in an arc shape until the core C is not exposed, and in this state, the two glass substrates B, B,
B is made into optical contact.
しかしながら、従来においては、ガラス基板
Ｂ，Ｂに光フアイバＡ，Ａを埋設するために、有
機系の接着剤を用いているが、信頼性の高い接合
を得ることはできない。たとえば、耐環境試験
（−30℃〜80℃）を行うと、石英ガラスと接着剤
との熱膨張係数の差により、光フアイバＡ，Ａが
ガラス基板Ｂ，Ｂから剥離してしまう不具合をも
つている。また、接着剤として、無機系アルミ
ナ・シリカを用いた場合は、流動性が悪く気泡が
生成してしまう欠点をもつている。同様に、接着
剤として無機系のソーダガラス（水ガラス）を用
いた場合は、流動性は良好であるが、鏡面加工中
の研磨液により接着剤が溶解してしまう欠点をも
つている。 However, conventionally, an organic adhesive is used to embed the optical fibers A, A in the glass substrates B, B, but highly reliable bonding cannot be obtained. For example, when performing an environmental resistance test (-30℃ to 80℃), optical fibers A and A may peel off from glass substrates B and B due to the difference in thermal expansion coefficient between silica glass and adhesive. ing. Furthermore, when inorganic alumina/silica is used as an adhesive, it has the disadvantage of poor fluidity and the formation of bubbles. Similarly, when inorganic soda glass (water glass) is used as an adhesive, it has good fluidity, but has the disadvantage that the adhesive is dissolved by the polishing liquid during mirror polishing.
本発明は、上記事情を参酌してなされたもの
で、光フアイバのガラス基板への接着を確実に行
うことのできる光方向性結合器の製造方法及びそ
の装置を提供することを目的とする。
The present invention has been made in consideration of the above-mentioned circumstances, and an object of the present invention is to provide a method and apparatus for manufacturing an optical directional coupler that can reliably bond an optical fiber to a glass substrate.
本発明の光方向性結合器の製造方法は、光フア
イバのガラス基板への固着をガラス基板とほぼ同
程度の熱膨張率を有するガラス粉末をレーザ光に
より溶融・固化させることにより行うようにした
ものである。
In the method for manufacturing an optical directional coupler of the present invention, an optical fiber is fixed to a glass substrate by melting and solidifying glass powder having a coefficient of thermal expansion approximately the same as that of the glass substrate using a laser beam. It is something.
また、本発明の光方向性結合器の製造装置は、
ガラス基板の溝に挿入された光フアイバをガラス
基板が取付けられた固定治具に設けられた張設具
により張設するようにするとともに、レーザ照射
装置を上記溝に沿つて相対的に進退させるように
したものである。 Furthermore, the optical directional coupler manufacturing apparatus of the present invention includes:
The optical fiber inserted into the groove of the glass substrate is stretched by a tensioning tool provided on a fixing jig to which the glass substrate is attached, and the laser irradiation device is moved relatively back and forth along the groove. This is how it was done.
以下、本発明の一実施例の光方向性結合器の製
造方法を図面を参照して詳述する。
Hereinafter, a method for manufacturing an optical directional coupler according to an embodiment of the present invention will be described in detail with reference to the drawings.
第１図ないし第８図は、この実施例の光方向性
結合器の製造方法を示している。この製造方法
は、円弧状に埋設された光フアイバ１を石英ガラ
ス基板２に固着する光フアイバ固着工程（第１図
及び第２図参照）と、この光フアイバ固着工程後
に光フアイバ１のコア３が露出しない程度にクラ
ツド４部分を平面度λ／10程度に鏡面加工する研
磨工程（第３図及び第４図参照）と、この研磨工
程後に光フアイバ１，１が固着され研磨された一
対のガラス基板２，２を接合してオプテイカルコ
ンタクトするカツプリング工程（第５図及び第６
図参照）とからなつている。しかして、上記固着
工程は、ガラス基板２を台状の光フアイバ固定治
具５上の中央位置に載置・位置決めする工程と、
ガラス基板２に刻設されたＶ溝６に光フアイバ１
を嵌入する工程と、このＶ溝６に嵌入された光フ
アイバ１の両端を光フアイバ固定治具５の両端部
にて張設具１ａ，１ａを介して固定・張設し光フ
アイバ１にテンシヨンを付与する工程と、テンシ
ヨンが付加されＶ溝６に嵌入している光フアイバ
１上に石英からなるガラス粉末７をＶ溝６をこの
ガラス粉末７で充填するようにふりかける工程
（第７図参照）と、光フアイバ固定治具５を矢印
８方向に進退自在なテーブル９上にこの光フアイ
バ固定治具５に固定されているガラス基板２のＶ
溝６が矢印８方向に平行となるように載置する工
程と、テーブル９上に配設されている例えば
CO2，YAGなどのレーザ照射装置１０からレー
ザ光１１をガラス粉末７に照射させ溶融させると
ともにテーブル９を矢印８方向に動かしＶ溝６全
領域にわたつて例えば出力５〜10WのCO2レーザ
光１１を照射しガラス粉末７の溶融・固化により
光フアイバ１をガラス基板２に固着する工程（第
８図参照）とからなつている。上記ガラス基板２
に刻設されているＶ溝６は、縦断面が円弧状とな
つていて、その結果、光フアイバ１は、両端が張
設された状態で円弧状となつている。このとき、
光フアイバ１の中央部上端が、ガラス基板２のＶ
溝６が形成されている主面１２とほぼ同一レベル
となるように設定する。また、レーザ光１１の照
射において光フアイバ１のクラツド４およびガラ
ス粉末７のみが溶融するよう出力を調整する。つ
ぎに、前記研磨工程は、ガラス基板２の主面１２
側を研削により粗研磨する第１研磨工程と、この
第１研磨工程度にひきつづいて行われる中間仕上
げのためのラツプ加工からなる第２研磨工程と、
この第２の研磨工程にひきつづいて行われる最終
仕上げ（鏡面加工）のためのポリシング加工から
なる第３研磨工程とからなつている。ところで、
この研磨工程においては、光フアイバ１の入力側
１３より200nWの光信号を入れたとき、出力側
１４より100nWの出力信号が得られるように研
磨する。つまり、研磨による光フアイバ１のクラ
ツド露出面１５から100nW出力されるようにす
る。さらに、前記カツプリング工程においては、
一対のガラス基板２，２の光フアイバ１，１の露
出面１５，１５どうしをオプチカルコンタクトに
密接させ、有機接着剤により固定・結合する。 1 to 8 show a method of manufacturing the optical directional coupler of this embodiment. This manufacturing method includes an optical fiber fixing step (see FIGS. 1 and 2) in which an optical fiber 1 embedded in an arc shape is fixed to a quartz glass substrate 2, and a core 3 of the optical fiber 1 after this optical fiber fixing step. A polishing step is performed to mirror-finish the cladding 4 to a flatness of about λ/10 to the extent that the fibers are not exposed (see FIGS. 3 and 4), and after this polishing step, the optical fibers 1 and 1 are fixed and polished. A coupling process (see Figs. 5 and 6) in which the glass substrates 2 and 2 are joined together for optical contact.
(see figure). Therefore, the above-mentioned fixing step includes a step of placing and positioning the glass substrate 2 at the center position on the table-shaped optical fiber fixing jig 5;
An optical fiber 1 is inserted into a V-groove 6 carved in a glass substrate 2.
Both ends of the optical fiber 1 fitted into this V-groove 6 are fixed and stretched at both ends of the optical fiber fixing jig 5 via the tensioning tools 1a, 1a, and tension is applied to the optical fiber 1. and a step of sprinkling glass powder 7 made of quartz onto the tensioned optical fiber 1 fitted into the V-groove 6 so as to fill the V-groove 6 with the glass powder 7 (see FIG. 7). ), and the V of the glass substrate 2 fixed to the optical fiber fixing jig 5 is placed on a table 9 that can move the optical fiber fixing jig 5 back and forth in the direction of the arrow 8.
A step of placing the grooves 6 parallel to the direction of the arrow 8, and a step of placing the grooves 6 on the table 9, for example.
The glass powder 7 is irradiated with a laser beam 11 from a laser irradiation device 10 such as CO 2 or YAG to melt it, and the table 9 is moved in the direction of the arrow 8 to cover the entire area of the V-groove 6 with a CO 2 laser beam with an output of 5 to 10 W, for example. The process consists of a step of fixing the optical fiber 1 to the glass substrate 2 by irradiating the glass powder 11 and melting and solidifying the glass powder 7 (see FIG. 8). The above glass substrate 2
The V-groove 6 carved in the optical fiber 1 has an arcuate longitudinal section, and as a result, the optical fiber 1 has an arcuate shape with both ends stretched. At this time,
The upper end of the center part of the optical fiber 1 is connected to the V of the glass substrate 2.
The grooves 6 are set to be approximately at the same level as the main surface 12 on which the grooves 6 are formed. Further, the output is adjusted so that only the cladding 4 of the optical fiber 1 and the glass powder 7 are melted during the irradiation of the laser beam 11. Next, in the polishing step, the main surface 12 of the glass substrate 2 is
A first polishing step in which the side is roughly polished by grinding, and a second polishing step consisting of a lapping process for intermediate finishing performed subsequent to the first polishing step.
This second polishing step is followed by a third polishing step consisting of polishing for final finishing (mirror finish). by the way,
In this polishing step, the optical fiber 1 is polished so that when an optical signal of 200 nW is input from the input side 13, an output signal of 100 nW is obtained from the output side 14. In other words, the output is made to be 100 nW from the cladding exposed surface 15 of the optical fiber 1 by polishing. Furthermore, in the coupling step,
The exposed surfaces 15, 15 of the optical fibers 1, 1 of the pair of glass substrates 2, 2 are brought into close optical contact with each other, and fixed and bonded using an organic adhesive.
以上のように、この実施例の光方向性結合器の
製造方法は、光フアイバ１を石英からなるガラス
粉末７をレーザ光１１を照射して溶融・固化させ
ることにより石英ガラス基板２に固定するように
しているので、後工程である研磨工程において用
いられる加工液に対する耐水性が大きくなる。ま
た、ガラス粉末７とガラス基板２とは同質である
ので、熱膨脹差がなくなり、温度変化に対する耐
久性が向上する。また、接合剤が同質であるの
で、前記第１研磨工程における研削中に、砥石に
目づまりが生じ、光フアイバにクラツクなどの損
傷を与えることがなくなる。以上の諸効果が相俟
つて、歩留が高く、かつ、高信頼性の光方向性結
合器を得ることができる。 As described above, in the method of manufacturing the optical directional coupler of this embodiment, the optical fiber 1 is fixed to the quartz glass substrate 2 by irradiating the glass powder 7 made of quartz with the laser beam 11 to melt and solidify it. As a result, the water resistance against the machining fluid used in the polishing step, which is a subsequent step, is increased. Further, since the glass powder 7 and the glass substrate 2 are of the same quality, there is no difference in thermal expansion, and durability against temperature changes is improved. Furthermore, since the bonding agent is homogeneous, the grinding wheel will not become clogged during the grinding in the first polishing step, and damage such as cracks to the optical fiber will not occur. By combining the above effects, it is possible to obtain an optical directional coupler with high yield and high reliability.
なお、上記実施例においては、ガラス粉末７と
ガラス基板２は同質材を用いているが、熱膨張率
が接近している限り、異質剤でもよい。さらに、
レーザ光１１の照射は、レーザ照射装置１０側を
Ｖ溝６沿つて動かすようにしてもよい。 In the above embodiment, the glass powder 7 and the glass substrate 2 are made of the same material, but they may be made of different materials as long as the coefficients of thermal expansion are close to each other. moreover,
The laser beam 11 may be irradiated by moving the laser irradiation device 10 along the V-groove 6.
つぎに、本発明の一実施例の光方向性結合器の
製造装置について第８図を参照して述べる。 Next, an apparatus for manufacturing an optical directional coupler according to an embodiment of the present invention will be described with reference to FIG.
この装置は、矢印８方向に進退駆動されるテー
ブル９と、このテーブル９上に固定され石英ガラ
ス基板２が真空の吸着により着脱自在に装着され
る固定治具５と、この固定治具５の上面両端に設
けられた一対の張設具１ａ，１ａと、固定治具５
上方に配設されたレーザ照射装置１０とから構成
されている。 This device includes a table 9 that is driven forward and backward in the direction of arrow 8, a fixture 5 that is fixed on the table 9 and on which a quartz glass substrate 2 is detachably attached by vacuum suction, and A pair of tensioning tools 1a, 1a provided at both ends of the upper surface and a fixing jig 5
It is composed of a laser irradiation device 10 disposed above.
この装置の作動については、前述したので省略
する。 The operation of this device has been described above and will therefore be omitted.
しかして、この装置は、光フアイバ１の石英ガ
ラス基板２への固定を高速かつ確実に行うことが
できる利点をもつている。とくに、量産工程に配
備したときに、その効果が倍化する。 Therefore, this device has the advantage that the optical fiber 1 can be fixed to the quartz glass substrate 2 quickly and reliably. In particular, when deployed in mass production processes, the effects are doubled.
なお、この実施例においてテーブル９を動かす
代りに、レーザ照射装置１０を矢印８方向に動か
すようにしてもよい。また、石英ガラス基板２の
固定治具への固着は、機械的治具によつてもよ
い。 In this embodiment, instead of moving the table 9, the laser irradiation device 10 may be moved in the direction of the arrow 8. Further, the quartz glass substrate 2 may be fixed to the fixing jig using a mechanical jig.
本発明の光方向性結合器の製造方法は、光フア
イバのガラス基板への接着をガラス基板とほぼ同
程度の熱膨張率を有するガラス粉末をレーザ光に
より溶融・固化させることにより行つているの
で、温度変化に対する耐久性が向上し、両者の接
合が完全なものとなる。さらに、後工程である研
磨工程において、光フアイバに損傷を与えたり、
光フアイバの接着が不安定化することがなくな
る。したがつて、製品歩留が高く、高信頼性の光
方向性結合器を得ることができる。
In the method for manufacturing an optical directional coupler of the present invention, an optical fiber is bonded to a glass substrate by melting and solidifying glass powder having a coefficient of thermal expansion approximately the same as that of the glass substrate using a laser beam. , durability against temperature changes is improved, and the bond between the two becomes perfect. Furthermore, in the polishing process, which is a post-process, the optical fiber may be damaged or
The adhesion of optical fibers will not become unstable. Therefore, it is possible to obtain a highly reliable optical directional coupler with a high product yield.
また、本発明の光方向性結合器の製造装置は、
ガラス基板への光フアイバの固着を確実かつ高能
率で行うことのできる利点を有する。 Furthermore, the optical directional coupler manufacturing apparatus of the present invention includes:
It has the advantage that the optical fiber can be fixed to the glass substrate reliably and with high efficiency.
第１図は本発明の一実施例の光方向性結合器の
光フアイバ固着工程を示す正面断面図、第２図は
第１図の−線矢視断面図、第３図は同じく研
磨工程を示す正面断面図、第４図は第３図の−
線矢視断面図、第５図は同じくカツプリング工
程を示す正面断面図、第６図は第５図の−線
矢視断面図、第７図は光フアイバ固着工程の説明
図、第８図は本発明の一実施例の光方向性結合器
の製造装置の構成図、第９図は光方向性結合器の
構成概略図である。
１……光フアイバ、１ａ……張設具、２……ガ
ラス基板、５……固定治具、６……Ｖ溝、７……
ガラス粉末、９……テーブル（移動機構）、１０
……レーザ照射装置、１１……レーザ光。
FIG. 1 is a front cross-sectional view showing the optical fiber fixing process of an optical directional coupler according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the - line in FIG. The front sectional view shown in Fig. 4 is - of Fig. 3.
5 is a front sectional view showing the coupling process, FIG. 6 is a sectional view taken along the - line in FIG. 5, FIG. 7 is an explanatory diagram of the optical fiber fixing process, and FIG. FIG. 9 is a block diagram of an apparatus for manufacturing an optical directional coupler according to an embodiment of the present invention. FIG. 9 is a schematic diagram of the configuration of the optical directional coupler. DESCRIPTION OF SYMBOLS 1...Optical fiber, 1a...Tension tool, 2...Glass substrate, 5...Fixing jig, 6...V groove, 7...
Glass powder, 9... Table (moving mechanism), 10
... Laser irradiation device, 11 ... Laser light.
Claims (1)
上記ガラス基板とほぼ同程度の熱膨張率を有する
ガラス粉末を上記溝部位に装填したのちレーザ光
の照射により溶融・固化させ上記光フアイバを上
記ガラス基板に固着する光フアイバ固着工程と、
この光フアイバ固着工程後に上記ガラス基板の溝
形側を鏡面加工して上記光フアイバの一部を露出
させる研磨工程とからなることを特徴とする光方
向性結合器の製造方法。 ２ 光フアイバが挿入される溝を有するガラス基
板が載置される固定治具と、この固定治具に設け
られ上記ガラス基板の溝に挿入された光フアイバ
を張設する一対の張設具と、上記固定治具の溝に
対向する位置に配設され上記溝部位にレーザ光を
照射するレーザ照射装置と、上記固定治具と上記
レーザ照射装置とを上記固定治具に保持されてい
るガラス板の溝に沿う方向に相対的に移動させ上
記レーザ光を上記溝に沿つて照射させる移動機構
とを具備することを特徴とする光方向性結合器の
製造装置。[Claims] 1. After inserting an optical fiber into a groove of a glass substrate, glass powder having a coefficient of thermal expansion approximately the same as that of the glass substrate is loaded into the groove portion, and then melted and solidified by irradiation with laser light. an optical fiber fixing step of fixing the optical fiber to the glass substrate;
A method for manufacturing an optical directional coupler, which comprises a polishing step of mirror-finishing the grooved side of the glass substrate to expose a part of the optical fiber after the optical fiber fixing step. 2. A fixing jig on which a glass substrate is placed having a groove into which an optical fiber is inserted, and a pair of tensioning tools provided on this fixing jig to stretch the optical fiber inserted into the groove of the glass substrate. a laser irradiation device disposed at a position facing the groove of the fixing jig and irradiating the groove portion with a laser beam; and a glass holding the fixing jig and the laser irradiation device together. 1. An apparatus for manufacturing an optical directional coupler, comprising: a moving mechanism that relatively moves in a direction along a groove of a plate and irradiates the laser beam along the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2198586A JPS62180308A (en) | 1986-02-05 | 1986-02-05 | Method and device for manufacturing optical directional coupler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2198586A JPS62180308A (en) | 1986-02-05 | 1986-02-05 | Method and device for manufacturing optical directional coupler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62180308A JPS62180308A (en) | 1987-08-07 |
| JPH0429045B2 true JPH0429045B2 (en) | 1992-05-15 |
Family
ID=12070318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2198586A Granted JPS62180308A (en) | 1986-02-05 | 1986-02-05 | Method and device for manufacturing optical directional coupler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180308A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH077136B2 (en) * | 1988-02-10 | 1995-01-30 | 株式会社フジクラ | Optical fiber coupler |
| JPH0262502U (en) * | 1988-10-31 | 1990-05-10 |
-
1986
- 1986-02-05 JP JP2198586A patent/JPS62180308A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62180308A (en) | 1987-08-07 |
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