JPH08211253A - Optical module and its production - Google Patents

Abstract

PURPOSE: To join an optical element block and optical fiber array block without using adhesives and metallic holders. CONSTITUTION: Metallic thin films 1a, 2a are formed on the side faces of the optical element block 1 including a quartz glass substrate and the side faces of the optical fiber block 2 including a quartz glass substrate. The boundary part of both metallic thin films 1a, 2a is irradiated with a YAG laser beam of a small spot and thereafter, the irradiation with the laser beam is stopped.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical module and a method of manufacturing the same, and more specifically, an optical element block formed by forming a predetermined optical waveguide on a glass substrate and an optical fiber array block are integrated in series. The present invention relates to an optical module and a manufacturing method thereof. Here, the optical module is used as a generic term for a unit formed by integrating an optical element block in which an optical element such as an optical waveguide is formed and an optical fiber array block.

[0002]

2. Description of the Related Art Conventionally, as a method for manufacturing an optical module, an end surface of an optical element block and an optical fiber array block to be joined to each other is polished and mirror-finished, and then an adhesive agent such as an ultraviolet curable resin is used. And a method of bonding the both, and as described in JP-A-6-174967, the optical element block and the optical fiber array block are respectively housed in metal holders, and the optical element block and the optical fiber array block are combined. A method has been proposed in which metal holders are abutted with each other to optically couple the two, and the joint portion between the metal holders is laser-welded.

[0003]

However, when the former method is adopted, the long-term stability of the adhesive is low, and therefore the bonded part may peel off during long-term use. Therefore, the long-term reliability of the optical module is impaired. Specifically, if the bonded portion is peeled off, there is a high possibility that the optical axis shifts between the optical element block and the optical fiber array block. It will not be able to exert its performance.

Further, when the latter method is adopted, a metal holder is indispensable, so that the structure becomes complicated, and the optical element block and the optical fiber array block are accommodated and held in the metal holder, and the metal holder is used. Since it is necessary to accurately set the relative positions of the holders, the work becomes complicated. In addition, since the optical element block and the optical fiber array block are not directly joined, if the accommodating and holding accuracy of these blocks with respect to the metal holder is low, the optical axis of the optical element block and the optical fiber array block will shift. If the optical axis is deviated, the original performance of the optical module cannot be exhibited.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide an optical module which does not require a metal holder and is excellent in long-term stability, and a method of manufacturing the same. .

[0006]

According to another aspect of the present invention, there is provided an optical module, in which a side surface of an optical element block and an optical fiber array block is heated on condition that a laser beam of a small spot is irradiated to melt the glass substrate. Then, a metal thin film for integrating the optical element block and the optical fiber array block is formed.

According to a second aspect of the present invention, there is provided a method for manufacturing an optical module in which a plurality of optical fibers are held by a side surface of an optical element block formed by forming a predetermined optical waveguide on a glass substrate and not interfering with the optical waveguide. A metal thin film is formed on the side surface of the optical fiber array block that does not interfere with the optical fiber, and the optical element block and the optical fiber array block are arranged in series so that the metal thin film is located on the same plane. The glass substrate of the optical element block and the glass of the optical fiber array block by irradiating a laser beam of a small spot near the boundary between the glass substrate and the optical fiber array block to heat and melt the glass substrate It is a method of integrating with a substrate.

According to a third aspect of the present invention, there is provided a method of manufacturing an optical module, which employs YAG laser light as the laser light.

[0009]

According to the optical module of claim 1, the side surfaces of the optical element block and the optical fiber array block constituting the optical module are heated on condition that the laser light of a small spot is irradiated, and the glass substrate is heated. Since the metal thin film for melting and integrating the optical element block and the optical fiber array block is formed, the optical element block and the optical fiber array block can be reliably formed regardless of the type of the laser light used. Since it becomes an optical module that is bonded to a glass substrate and heats a narrow range, it is possible to greatly suppress the deviation of the optical axis due to the integration processing step due to melting and solidification of the glass substrate, and to stabilize the stability. The reliability can be remarkably enhanced, and the structure can be simplified and downsized due to the elimination of the need for the metal holder.

According to the optical module manufacturing method of the second aspect, a plurality of optical fibers are held by the side surface of the optical element block formed by forming the predetermined optical waveguide on the glass substrate, which does not interfere with the optical waveguide, and the glass substrate. A metal thin film is formed on the side surface of the optical fiber array block which does not interfere with the optical fiber, and the optical element block and the optical fiber array block are arranged in series so that the metal thin film is located on the same plane. The glass substrate of the optical element block and the optical fiber array block are stopped by irradiating the glass substrate with a small spot of laser light in the vicinity of the boundary between the element block and the optical fiber array block, and then stopping the irradiation of the laser light. Since it is integrated with the glass substrate of, the optical element block and the optical fiber array block are irrespective of the type of laser light used. Since it is possible to obtain an optical module in which the and are reliably joined and the heating is performed in a narrow range, it is possible to significantly suppress the deviation of the optical axis due to the integration processing step due to melting and solidification of the glass substrate. Therefore, the stability and reliability of the optical module can be remarkably enhanced, and the structure of the optical module can be simplified and miniaturized due to the elimination of the metal holder.

In the method of manufacturing the optical module according to the third aspect, since the YAG laser beam is used as the laser beam, the spot diameter can be remarkably reduced as compared with the case of using the CO ₂ laser beam. As a result, the reliability of the obtained optical module can be significantly increased.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the accompanying drawings showing embodiments. FIG. 1 is a schematic perspective view showing an embodiment of the optical module of the present invention. This optical module is formed by integrally joining an optical element block 1 and an optical fiber array block 2, and an optical element such as a Y-branch optical waveguide formed in the optical element block 1 and the optical fiber array block 2 The optical axes of the optical fiber and the optical fiber are aligned with each other. Note that Pb and A are provided on the side surface of the optical element block 1 that does not interfere with the optical element such as the Y-branch optical waveguide and the side surface of the optical fiber array block 2 that does not interfere with the optical fiber.
Metal thin films 1a and 2a made of u, Al or the like are formed by vapor deposition, coating or the like. Then, by irradiating the boundary portion between the two metal thin films 1a and 2a with the YAG laser light narrowed down to a small spot as shown by a black circle in FIG.
By locally raising the temperature to melt the relevant portions of the quartz glass substrate of the optical element block 1 and the optical fiber array block 2, and then stopping the irradiation of the YAG laser light, the fused portion is solidified and both quartz glass substrates are separated. It is joined.

Although the connection of the optical module is not shown, the optical module is connected to an optical fiber (not shown) or another optical module. Therefore, a metal holder is not required, and the overall configuration of the optical module can be simplified and downsized. Further, since the joining of the optical element block 1 and the optical fiber array block 2 is achieved by melting and solidifying the quartz glass substrate, the stability can be remarkably enhanced as compared with the case of joining with an adhesive. At the same time, reliability can be significantly improved.

When manufacturing the optical module having the above-mentioned structure, Pb and Au are provided on the side surface of the optical element block 1 which does not interfere with the optical element such as the Y-branch optical waveguide and the side surface of the optical fiber array block 2 which does not interfere with the optical fiber. Metal thin films 1a and 2a (for example, the film thickness is preferably set to several μm) made of Al, Al or the like are formed by vapor deposition, coating, etc. so that both metal thin films 1a and 2a are located on the same plane. The optical element block 1 and the optical fiber array block 2 are butted and temporarily fixed. Then, both metal thin films 1a and 2a
A small spot of YAG laser light is radiated to a predetermined position on the boundary of the quartz glass substrate to melt the corresponding portion of the quartz glass substrate.
The irradiation of the AG laser light is stopped to solidify the molten portion.

Further, since the YAG laser light is not absorbed by the quartz glass but is transmitted as it is, the quartz glasses cannot be welded to each other even if the quartz glass is directly irradiated with the YAG laser light. However, in this embodiment, since the YAG laser light is applied to the metal thin films 1a and 2a formed on the side surfaces of the quartz glass substrate, plasma generated when the YAG laser light hits the metal thin film and the YAG laser light is generated. It is absorbed and produces a localized high temperature.
Therefore, the quartz glass substrates 1a and 2a can be locally melted and then solidified.
It is possible to join a and 2a.

Furthermore, since the YAG laser has a wavelength of about 1/10 that of the CO ₂ laser, the spot diameter becomes about 1/10. Therefore, the melting and solidifying range can be remarkably reduced, and the metal thin films 1a and 2a can be reduced.
By virtue of the fact that the heat dissipation can be improved, the deviation of the optical axis due to melting and solidification can be significantly suppressed, and a highly reliable optical module can be obtained. Although the melting and solidifying points can be arbitrarily determined, it is preferable to set at least two points per one side surface of the optical module, and it is more preferable to set the corner points. of course,
It is preferable to set the opposite side surfaces so as to be symmetrical.

Further, since the YAG laser can simplify and downsize the device structure for generating the laser light of the same output as compared with the CO ₂ laser and the like, the entire structure of the optical module manufacturing device can be simplified and downsized. Can be achieved.

[0018]

According to the first aspect of the present invention, it is possible to obtain an optical module in which an optical element block and an optical fiber array block are securely joined to each other regardless of the type of laser light employed, and in a narrow range. Since heating is performed, it is possible to significantly suppress the deviation of the optical axis caused by the integration processing step of melting and solidifying the glass substrate, and it is possible to significantly improve the stability and reliability of the optical module, Due to the elimination of the metal holder, the structure of the optical module can be simplified and downsized.

According to the second aspect of the present invention, it is possible to obtain an optical module in which the optical element block and the optical fiber array block are securely joined to each other regardless of the type of the laser beam employed, and heating of a narrow range is possible. Since it is performed, it is possible to significantly suppress the deviation of the optical axis due to the integration processing step by melting and solidifying the glass substrate, and it is possible to significantly improve the stability and reliability of the optical module,
Due to the elimination of the metal holder, the structure of the optical module can be simplified and downsized.

The invention of claim 3 has a peculiar effect that the spot diameter can be remarkably reduced as compared with the case where the CO ₂ laser beam is adopted, and the reliability of the obtained optical module can be remarkably enhanced. Play.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of an optical module of the present invention.

[Explanation of symbols]

 1 Optical element block 2 Optical fiber array block

Claims (3)

[Claims] 1. An optical module in which an optical element block (1) formed by forming a predetermined optical element on a glass substrate and an optical fiber array block (2) are integrated in series. 1) and the side surfaces of the optical fiber array block (2) are heated on condition that a laser beam of a small spot is irradiated, the glass substrate is melted, and the optical element block (1) and the optical fiber array block (2 )
An optical module, characterized in that metal thin films (1a) and (2a) are formed for integrating the two. 2. A side surface of an optical element block (1) formed by forming a predetermined optical waveguide on a glass substrate, which does not interfere with the optical waveguide, and an optical fiber array block (a plurality of optical fibers held by a glass substrate ( A metal thin film is formed on the side surface that does not interfere with the optical fiber of 2), and the optical element block (1) and the optical fiber array block (2) are arranged in series so that the metal thin film is located on the same plane. A small spot of laser light is irradiated near the boundary between the optical element block (1) and the optical fiber array block (2) to heat and melt the glass substrate, and then the irradiation of the laser light is stopped to stop the optical element block ( A method for producing an optical module, characterized in that the glass substrate of 1) and the glass substrate of the optical fiber array block (2) are integrated. 3. The method for manufacturing an optical module according to claim 2, wherein the laser light is YAG laser light.