JPH04288952A - Manufacture of fe basis soft magnetic alloy strip - Google Patents

Abstract

PURPOSE:To provide the above manufacturing method, in which unevenness of surface roughness on both surfaces of a strip is reduced and an Fe basis soft magnetic alloy strip having high saturation magnetic flux density together with high magnetic permeability, high mechanical strength and high thermal stability can be provided. CONSTITUTION:The surface of a cooling roll is made to have roughness corresponding to the roughness obtd. by grinding with an abrassive paper having No. 600-1000 of abrassive grain and the strip is manufactured by ejecting the molten Fe basis soft magnetic alloy on the cooling roll. As it is restrained that the strip slips with respect to the cooling roll, the surface roughness on both side surfaces of the manufactured strip is effectively made sufficiently fine and uniform. Particularly, as the used molten metal has the specific composition of Fe basis soft magnetic alloy, the obtd. strip has the high saturation magnetic flux density, excellent magnetic permeability and also high hardness, and therefore, the Fe basis soft magnetic alloy strip being suitable to use for magnetic head, etc., is obtd.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and method for continuously producing Fe-based soft magnetic alloy ribbons used as materials for magnetic heads and transformers, for example.

0002

2. Description of the Related Art As an apparatus for continuously producing thin strips (ribbons) of amorphous alloys, a so-called single roll method shown in FIG. 3 is known. This is done by spraying molten metal 3 from a nozzle 2 placed close to the top of a cooling roll 1 made of Cu while rotating it at high speed.
The molten metal 3 is rapidly cooled and solidified on the surface of the cooling roll 1, and is drawn out in a band shape in the rotational direction of the cooling roll 1.

In the case of the apparatus shown in FIG. 3, the surface of the cooling roll 1 is mirror finished, and the nozzle 2 is connected to the cooling roll 1.
It is provided so as to be substantially vertical at the top of the cooling roll 1, and the distance between the tip and the surface of the cooling roll 1 is set to about 1 mm or less.

The molten metal 3 projected from the nozzle 2 forms a substantially stationary puddle 4 between the tip of the nozzle 2 and the surface of the cooling roll 1. As it rotates, the molten metal 3 is drawn out from the pool 4, cooled on the surface of the cooling roll 1, and solidified into a strip, thereby forming a continuous ribbon 5. There is.

[0005]

By the way, the soft magnetic alloy used as the material for the magnetic head is particularly required to have a sufficiently flat surface, that is, a sufficiently small surface roughness. The ribbon produced by the conventional apparatus has a problem in that the surface roughness on both sides of the ribbon varies greatly. That is, there is a drawback that the surface roughness of the free solidification surface formed by solidification without contacting the roll is greater than that of the roll contact surface formed by solidification while contacting the roll. For this reason, there was a problem in that it was difficult to use as a material for magnetic heads.

By the way, the following characteristics are generally required for soft magnetic alloys used in magnetic heads, transformers, choke coils, etc. (1) High saturation magnetic flux density. ■High magnetic permeability. ■Have low coercive force. ■It is easy to obtain a thin shape.

[0007] Also, for magnetic heads, the above
In addition to the properties described above, the following properties are required from the viewpoint of wear resistance. ■High hardness.

Therefore, when manufacturing soft magnetic alloys or magnetic heads, material research is being conducted on various alloy systems from these viewpoints.

[0009] Therefore, the present inventors previously filed a patent application on March 18, 1991 for a high saturation magnetic flux density Fe-based soft magnetic alloy that solved the problems of the conventional alloys and amorphous alloys. There is.

One of the alloys related to this patent application was a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. (Fe1-a Co a)b Bx Ly T'zHowever, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and N.
One or more elements selected from the group consisting of i, Pd, and Pt, a≦0.05, b≦92 atomic%, x=
6.5-18 at%, y=4-10 at%, z=4.5
It is less than atomic percent.

[0011] Another alloy according to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. Fe b Bx Ly T'z However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
species or two or more kinds of elements, T' is Cu, Ag, Au
, one or two selected from the group consisting of Ni, Pd, and Pt.
It is an element more than a species, b≦92 atomic%, x=6.5-1
8 at%, y=4 to 10 at%, and z=4.5 at% or less.

[0012] Another alloy according to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. (Fe1-a Co a)b Bx Ly T'z
D s X However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu
, Ag, Au, Ni, Pd, Pt, and D is Zr and Hf.
X is at least one of Cr, Mo, W, Ru,
An element selected from Rh and Ir, a≦0.0
5, b≦92 atom%, x=6.5-18 atom%, y=4
~10 at%, z=4.5 at% or less, and s=4 to 10 at%.

Another alloy related to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. Fe b Bx Ly T'z D s XHowever,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, and Pt, D is at least one of Zr and Hf, and X is selected from Cr, Mo, W, Ru, Rh, and Ir. b≦92 atomic%, x=6.5~
18 atom%, y=4 to 10 atom%, z=4.5 atom% or less, and s=4 to 10 atom%.

Furthermore, the present inventors filed a patent application on March 18, 1991 for an alloy having the composition shown below as an advanced alloy of the above-mentioned alloy.

One of the alloys related to this patent application was a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. (Fe1-a M a)b Bx LyHowever, M is Co
, Ni, or both, and L is Ti, N
b, one or more elements selected from the group consisting of Ta, a≦0.05, b≦93 atomic%, x=6.5
~10 atom%, y=4 to 9 atom%.

[0016] Another alloy according to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. Fe b Bx Ly where L is 1 selected from the group consisting of Ti, Nb, and Ta
species or two or more types of elements, b≦93 atomic%, x=6
．． 5 to 10 atom%, and y=4 to 9 atom%.

Another alloy related to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. (Fe1-a M a) b Bx Ly Ds X However, M is either Co or Ni, or both,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta; D is at least one of Zr and Hf; and X is one of Cr, Mo, W, Ru, Rh, and Ir. An element selected from among a≦0.05, b≦93 atom%, x=6.5 to 10 atom%, y=4 to 9 atom%, s
is 4 to 10 at%.

Another alloy related to the patent application is a high saturation magnetic flux density Fe-based soft magnetic alloy characterized by having a composition represented by the following formula. Fe b Bx Ly D s X However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
a species or two or more elements, D is at least one of Zr and Hf, and X is Cr, Mo, W, Ru, Rh, I
An element selected from r, b≦93 atomic%, x
= 6.5 to 10 at%, y = 4 to 9 at%, s is 4 to 1
It is 0 atom%.

As described above, the present inventors have developed various Fe-based soft magnetic alloys having the above-mentioned compositions, and using these alloys, a thin ribbon was manufactured using the manufacturing apparatus shown in FIG. It was found that the present invention can be produced.

The present invention was made in view of the above circumstances, and it reduces the variation in surface roughness on both sides of the ribbon, has both high saturation magnetic flux density and high magnetic permeability, and has high mechanical strength and high magnetic permeability. It is an object of the present invention to provide a manufacturing method that can provide a Fe-based soft magnetic alloy ribbon having thermal stability.

[0021]

[Means for Solving the Problems] In order to solve the above-mentioned problems, the invention as set forth in claim 1 is such that the cooling roll is arranged on the surface of the rotationally driven cooling roll so that the tip thereof faces the surface of the cooling roll. In the method for producing a Fe-based soft magnetic alloy ribbon, the molten metal is cooled on the surface of a cooling roll by spraying the molten metal of the Fe-based soft magnetic alloy from a nozzle and drawn out in the rotational direction of the cooling roll. A cooling roll made of an Fe-based alloy, the outer peripheral surface of which is coated with abrasive grain numbers 600 to 1000.
Using a cooling roll finished to a roughness equivalent to that obtained by polishing with No. 3 abrasive paper, the molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll, and the composition is expressed by the following formula: This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy consisting of: (Fe1-a Co a)b Bx Ly T'z However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, Pt, a≦0.05, b≦92 atomic%, x=6
．． 5 to 18 atom%, y=4 to 10 atom%, and z=4.5 atom% or less.

[0022] In order to solve the above problem, the invention as set forth in claim 2 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. Fe b Bx Ly T'z However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
species or two or more kinds of elements, T' is Cu, Ag, Au
, one or two selected from the group consisting of Ni, Pd, and Pt.
It is an element more than a species, b≦92 atomic%, x=6.5-1
8 at%, y=4 to 10 at%, and z=4.5 at% or less.

[0023] In order to solve the above problem, the invention set forth in claim 3 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. (Fe1-a M a)b Bx LyHowever, M is Co
, Ni, or both, and L is Ti, N
b, one or more elements selected from the group consisting of Ta, a≦0.05, b≦93 atomic%, x=6.5
~10 atom%, y=4 to 9 atom%.

[0024] In order to solve the above problem, the invention as set forth in claim 4 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. Fe b Bx Ly where L is one or more elements selected from the group consisting of Ti, Nb, and Ta, b≦93 atomic %, x=6.
5 to 10 atom%, and y=4 to 9 atom%.

[0025] In order to solve the above-mentioned problem, the invention set forth in claim 5 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
Using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, as a molten Fe-based soft magnetic alloy that is sprayed from the nozzle onto the cooling roll. , a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. (Fe1-a Co a)b Bx Ly T'z
D s X However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu
, Ag, Au, Ni, Pd, Pt, and D is Zr and Hf.
X is at least one of Cr, Mo, W, Ru,
An element selected from Rh and Ir, a≦0.0
5, b≦92 atom%, x=6.5-18 atom%, y=4
~10 at%, z=4.5 at% or less, and s=4 to 10 at%.

[0026] In order to solve the above problem, the invention as set forth in claim 6 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. Fe b Bx Ly T'z D s XHowever,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, and Pt, D is at least one of Zr and Hf, and X is selected from Cr, Mo, W, Ru, Rh, and Ir. b≦92 atomic%, x=6.5~
18 atom%, y=4 to 10 atom%, z=4.5 atom% or less, and s=4 to 10 atom%.

[0027] In order to solve the above-mentioned problem, the invention set forth in claim 7 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. (Fe1-a M a) b Bx Ly Ds X However, M is either Co or Ni, or both,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta; D is at least one of Zr and Hf; and X is one of Cr, Mo, W, Ru, Rh, and Ir. An element selected from among a≦0.05, b≦93 atom%, x=6.5 to 10 atom%, y=4 to 9 atom%, s
is 4 to 10 at%.

[0028] In order to solve the above problem, the invention as set forth in claim 8 injects Fe-based soft magnetic material onto the surface of a rotationally driven cooling roll from a nozzle arranged such that its tip faces the surface of the cooling roll. A method for producing a Fe-based soft magnetic alloy ribbon by spraying a molten alloy onto the surface of a cooling roll to form a strip and drawing the molten metal in the rotational direction of the cooling roll, wherein at least the outer peripheral surface is made of an Fe-based alloy. A cooling roll whose outer peripheral surface is
A molten Fe-based soft magnetic alloy is sprayed from the nozzle onto the cooling roll using a cooling roll finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000. This is a method for producing a Fe-based soft magnetic alloy ribbon, characterized by using a molten Fe-based soft magnetic alloy having a composition represented by the following formula. Fe b Bx Ly D s X However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
a species or two or more elements, D is at least one of Zr and Hf, and X is Cr, Mo, W, Ru, Rh, I
An element selected from r, b≦93 atomic%, x
= 6.5 to 10 at%, y = 4 to 9 at%, s is 4 to 1
It is 0 atom%.

[0029]

[Function] When we observed a thin strip produced by the conventional method of mirror-finishing the surface of the cooling roll, we observed wavy irregularities in the length direction on its free-solidifying surface. It is thought that this was caused by slight slippage on the roll as it was being pulled out. On the other hand, on the roll contact surface that solidifies while in contact with the roll, some unevenness seen on the free solidification surface is also observed;
Basically, the unevenness on the surface of the cooling roll is transferred as is, so the surface roughness is smaller than that of the free solidification surface.

Therefore, in the method of the present invention, the surface of the cooling roll is finished to be rougher than a mirror surface to increase the friction between the ribbon and the roll surface, thereby preventing the ribbon from slipping on the cooling roll and making it free. This prevents the occurrence of unevenness on the solidified surface, thereby improving the surface roughness of the free solidified surface.

Since the surface roughness of the cooling roll contact surface depends on the roughness of the cooling roll surface, by setting the cooling roll surface roughness optimally, both surface roughnesses can be made equal. As a result, F is suitable for magnetic heads, etc.
An e-based soft magnetic ribbon is obtained.

Furthermore, since a molten metal of a soft magnetic alloy with a specific composition is used, the Fe-based soft magnetic alloy exhibits high saturation magnetic flux density and high magnetic permeability, has high hardness, and is suitable for use in magnetic heads with excellent heat resistance. A thin strip is obtained.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below with reference to the drawings. FIG. 1 shows an embodiment of an apparatus used in the method of the present invention. This apparatus has a configuration substantially equivalent to the conventional apparatus shown in FIG.
By spraying the molten metal 30 from the nozzle 20 disposed close to the top of the cooling roll 1, the molten metal 30 is
This device rapidly cools and solidifies the material on the surface of the cooling roll 10 and draws it out in a band shape in the rotational direction of the cooling roll 10.

The apparatus of this embodiment is different from the conventional apparatus in that the cooling roll 10 is made of an Fe-based alloy. That is, the cooling roll 10 is made of an Fe-based alloy such as stainless steel. Of course, only the outer peripheral portion of the cooling roll 10 may be made of the Fe-based alloy.

Further, the outer peripheral surface of the cooling roll 10 has an abrasive grain number of No. 600 to No. 1000, preferably No. 800.
By being polished with abrasive paper, the surface is finished to be rougher than a mirror surface, and thus the surface roughness of both sides of the manufactured ribbon 50 can be made almost uniform.

As explained above, the surface of the cooling roll 10 is coated with abrasive grain numbers 600 to 1000, preferably 8.
The surface roughness on both sides of the ribbon 50 can be made sufficiently small and uniform by achieving a roughness equivalent to that obtained by polishing with No. 00 abrasive paper. This apparatus is particularly suitable for manufacturing a thin ribbon of soft magnetic alloy as a material for an audio magnetic head.

Next, as the molten metal 30, a molten Fe-based soft magnetic alloy having the composition shown in the following formula can be used. (Fe1-a Co a)b Bx Ly T'z However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, Pt, a≦0.05, b≦92 atomic%, x=6
．． 5 to 18 atom%, y=4 to 10 atom%, and z=4.5 atom% or less.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. Fe b Bx Ly T'z However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
species or two or more kinds of elements, T' is Cu, Ag, Au
, one or two selected from the group consisting of Ni, Pd, and Pt.
It is an element more than a species, b≦92 atomic%, x=6.5-1
8 at%, y=4 to 10 at%, and z=4.5 at% or less.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. (Fe1-a M a)b Bx LyHowever, M is Co
, Ni, or both, and L is Ti, N
b, one or more elements selected from the group consisting of Ta, a≦0.05, b≦93 atomic%, x=6.5
~10 atom%, y=4 to 9 atom%.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. Fe b Bx Ly where L is one or more elements selected from the group consisting of Ti, Nb, and Ta, b≦93 atomic %, x=6.
5 to 10 atom%, and y=4 to 9 atom%.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. (Fe1-a Co a)b Bx Ly T'z
D s X However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu
, Ag, Au, Ni, Pd, Pt, and D is Zr and Hf.
X is at least one of Cr, Mo, W, Ru,
An element selected from Rh and Ir, a≦0.0
5, b≦92 atom%, x=6.5-18 atom%, y=4
~10 at%, z=4.5 at% or less, and s=4 to 10 at%.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. Fe b Bx Ly T'z D s XHowever,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, and Pt, D is at least one of Zr and Hf, and X is selected from Cr, Mo, W, Ru, Rh, and Ir. b≦92 atomic%, x=6.5~
18 atom%, y=4 to 10 atom%, z=4.5 atom% or less, and s=4 to 10 atom%.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. (Fe1-a M a) b Bx Ly Ds X However, M is either Co or Ni, or both,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta; D is at least one of Zr and Hf; and X is one of Cr, Mo, W, Ru, Rh, and Ir. An element selected from among a≦0.05, b≦93 atom%, x=6.5 to 10 atom%, y=4 to 9 atom%, s
is 4 to 10 at%.

Further, as the molten metal 30, a molten Fe-based soft magnetic alloy having a composition represented by the following formula can be used. Fe b Bx Ly D s X However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
a species or two or more elements, D is at least one of Zr and Hf, and X is Cr, Mo, W, Ru, Rh, I
An element selected from r, b≦93 atomic%, x
= 6.5 to 10 at%, y = 4 to 9 at%, s is 4 to 1
It is 0 atom%.

The Fe-based soft magnetic alloy produced according to the present invention can be obtained by rapidly cooling an amorphous alloy having the above composition or a crystalline alloy containing an amorphous phase from a molten metal, and by heating it to obtain a fine grain. It can usually be obtained by a heat treatment process that forms crystal grains.

In order to easily obtain an amorphous phase in the present invention, it is necessary to contain at least one of Ti, Nb, Ta and B, which have the ability to form an amorphous phase.

B is believed to have the effect of enhancing the amorphous formation ability of the alloy of the present invention and the effect of suppressing the formation of compound phases that adversely affect magnetic properties in the heat treatment process, and therefore the addition of B is essential. It is. Similar to B, A1, S
i, C, P, etc. are also generally used as amorphous forming elements, and the addition of these elements can be considered to be the same as the present invention.

[0048] Ti, Nb, and Ta have similar effects, but among these elements, Nb and Ta are metal materials with high melting points, are thermally stable, and are difficult to oxidize during manufacturing. be. Therefore, if these elements are added, the inventors of this application should first file a patent application (Japanese Patent Application No. 2-10830).
No. 8) materials containing Hf or Zr can be manufactured under easier manufacturing conditions and at lower cost, and are also advantageous in terms of cost. That is, in the alloy of the type for which the present inventors previously applied for a patent, it was necessary to supply an inert gas in a vacuum atmosphere and manufacture it while paying attention to oxidation, but in the alloy of the present invention, Manufacturing conditions can be relaxed. Specifically, it can be manufactured in the atmosphere while partially supplying an inert gas to the nozzle tip, or it can be manufactured in the atmosphere.

In the present invention, at least one or two selected from Cu, Ni, and their homologous elements
O. It is preferable to contain 2 to 4.5 at%. If the amount added is less than 0.2 at%, it will be difficult to obtain excellent soft magnetic properties through the heat treatment process described above, but since the saturation magnetic flux density will be slightly higher, the addition amount of these elements will be less than 0.2 at%.
The following is also fine. Among these elements, Cu is particularly suitable.

Although the mechanism by which the soft magnetic properties are significantly improved by the addition of Cu, Ni, etc. is not clear, when the crystallization temperature was measured by differential thermal analysis, it was found that Cu, Ni, etc.
The crystallization temperature of alloys to which Ni and the like were added was found to be slightly lower than that of alloys to which no Ni was added. This is because the amorphous phase becomes non-uniform due to the addition of the above elements, and as a result,
This is thought to be due to a decrease in the stability of the amorphous phase. Furthermore, when a non-uniform amorphous phase crystallizes, many regions where crystallization is likely to occur are formed locally, resulting in non-uniform nucleation, so that the resulting structure is considered to be a fine grain structure. In addition, especially in the case of Cu, which is an element with extremely low solid solubility in Fe, it tends to phase separate, so it is thought that heating will cause microscopic fluctuations in composition, making the amorphous phase more likely to become non-uniform. It is thought that this contributes to the refinement of the structure.

From the above point of view, Cu and its homologous elements, N
Similar effects can be expected for elements other than i, Pd, and Pt that lower the crystallization temperature. Further, similar effects can be expected with elements such as Cu, which have a small solid solubility limit with respect to Fe.

The reasons for limiting the alloying elements contained in the soft magnetic alloy of the present invention have been explained above, but in order to improve the corrosion resistance with elements other than these, Cr, Mo, Ru, R
It is also possible to add platinum group elements such as h and Ir, and if necessary, Y, rare earth elements, Zn, Cd,
Ga, In, Ge, Sn, Pb, As, Sb, Bi, S
Magnetostriction can also be adjusted by adding elements such as e, Te, Li, Be, Mg, Ca, Sr, and Ba. In addition, unavoidable impurities such as H, N, O, and S can be considered to have the same composition as the high saturation magnetic flux density Fe-based soft magnetic alloy of the present invention even if they are contained to the extent that desired characteristics are not deteriorated. Of course.

The amount b of Fe and Co in the molten Fe-based soft magnetic alloy used in the present invention is 92 atomic % or less in the molten alloy containing the element T'z. This is because high magnetic permeability cannot be obtained when b exceeds 92 atomic%.
In order to obtain a saturation magnetic flux density of 10 kG or more, it is more preferable that b is 75 atomic % or more. Also, the element T'z
In a molten alloy that does not contain Fe, Ni, and Co, the amount of Fe, Ni, and Co should be 93 atomic % or less.

If T'z exceeds 4.5 atomic %, the saturation magnetic flux density becomes low and the features of the present invention are lost.

Next, a case will be described in which a Fe-based soft magnetic alloy ribbon is manufactured using the apparatus shown in FIG.

When the cooling roll 10 is rotated at high speed in the direction of the arrow A shown in FIG. 10 to obtain a ribbon 50. The ribbon 50 is mostly composed of a non-uniform amorphous phase.

[0057] Here, the outer peripheral surface of the cooling roll 10 is made of Fe.
Since it is made of a Fe-based soft magnetic alloy and has good wettability with the Fe-based soft magnetic alloy, it is easy to separate the ribbon 50 from the cooling roll 10, and a ribbon 50 with a uniform thickness can be obtained. On the other hand, if a cooling roll other than Fe-based alloy such as Cu is used,
This is not preferable because the molten metal scatters when it is ejected and a ribbon with a good shape is not formed.

Furthermore, since the surface of the cooling roll 10 is formed to have an appropriate roughness, the ribbon 50 is prevented from slipping on the cooling roll 10, and as a result, the ribbon 50 is prevented from slipping on the cooling roll 10.
The surface roughness of both sides of 0 becomes sufficiently small.

For the ribbon 50 thus obtained, 50
If an annealing treatment is performed in which the ribbon is heated to 0 to 620°C and then slowly cooled, the non-uniform amorphous phase of the ribbon 50 will crystallize, resulting in the creation of many regions where it is easy to partially crystallize, resulting in non-uniform nucleation. In this case, the resulting structure becomes finer, resulting in a diameter of 100 to 200
It becomes a fine crystal structure of about angstroms. As a result, it is possible to obtain a Fe-based soft magnetic alloy ribbon that exhibits excellent soft magnetic properties with high saturation magnetic flux density and magnetic permeability, and also has high hardness and excellent heat resistance.

Next, the effectiveness of this embodiment will be explained based on the experimental results shown in FIG.

FIG. 2 shows the relationship between the surface roughness of the cooling roll 10 and the surface roughness of both sides of the ribbon 50.
The horizontal axis is the abrasive grain number of the abrasive paper used for roll polishing, and the vertical axis is the maximum surface roughness Rmax measured with a contact type surface roughness meter and the ten-point average roughness specified in JISB0601. It is Rz. In this experiment, a molten Fe-based soft magnetic alloy having a composition of Fe80Nb7B12Cu1 was used.

From FIG. 2, it can be seen that the surface roughness of the free solidification surface improves as the surface roughness of the cooling roll increases (as the abrasive grain number of the abrasive paper decreases). It can be seen that the closer you get (the larger the abrasive grain number of the abrasive paper), the worse it tends to be.

On the other hand, the surface roughness of the cooling roll contact surface does not change much depending on the size of the abrasive grain number, but generally shows a tendency to improve as the cooling roll surface roughness decreases (the larger the abrasive grain number). I understand.

[0064] Then, the surface of the cooling roll was coated with abrasive grain number 8.
When polished with No. 00 abrasive paper, the surface roughness of both surfaces becomes almost equal, and the surface roughness in that case is the same as that of the cooling roll contact surface when the cooling roll surface is mirror-finished (conventional case). The surface roughness is almost the same as that of . In addition, almost the same results can be obtained when using abrasive paper with abrasive grain numbers of 600 to 1000, but outside this range, the surface roughness on the free solidification surface increases and the variation on both sides increases. It will expand.

By the way, as a result of holding the ribbon manufactured as described above at 650° C. for 1 hour, and then slowly cooling and annealing it,
A Fe-based soft magnetic alloy ribbon could be obtained.

The obtained Fe-based soft magnetic alloy ribbon exhibited a saturation magnetic flux density of 14.1 kG and a magnetic permeability of 28,800 at 1 kHz, and was found to have excellent soft magnetic properties.

It was also revealed that this Fe-based soft magnetic alloy ribbon had a Vickers hardness of 950 (DPN) and had sufficient hardness for use in magnetic heads.

As explained above, the surface of the cooling roll 10 is coated with abrasive grain numbers 600 to 1000, preferably 8.
The surface roughness on both sides of the ribbon 50 can be made sufficiently small and uniform by achieving a roughness equivalent to that obtained by polishing with No. 00 abrasive paper. The example apparatus is particularly suitable as an apparatus for producing a thin ribbon of soft magnetic alloy as a material for an audio magnetic head.

[0069]

[Effects of the Invention] As explained above, the method device of the present invention
The surface of the cooling roll is made to have a roughness equivalent to that obtained by polishing with abrasive paper with abrasive grain numbers 600 to 1000, and a thin ribbon can be produced by spouting molten Fe-based soft magnetic alloy onto the cooling roll. The slipping of the ribbon against the cooling roll is suppressed, and as a result, the surface roughness on both sides of the manufactured ribbon can be made sufficiently small and uniform.

In particular, since the molten metal used is a Fe-based soft magnetic alloy with a specific composition, the obtained ribbon has a high saturation magnetic flux density, excellent magnetic permeability, and high hardness, so it can be used for magnetic heads, etc. A ribbon of a Fe-based soft magnetic alloy suitable as a material is obtained.

[Brief explanation of the drawing]

FIG. 1 is a side view showing one embodiment of the present invention.

FIG. 2 is a graph showing the relationship between the roughness of the cooling roll surface and the roughness of the ribbon surface.

FIG. 3 is a side view showing a conventional device.

[Explanation of symbols]

10 Cooling roll 20 Nozzle 30 Molten metal 40 Accumulation 50 thin strip

Claims (8)

[Claims] Claim 1: On the surface of a rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the molten Fe-based soft magnetic alloy that is sprayed from the nozzle onto the cooling roll. (Fe1-a Co a)b Bx Ly T'z However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, Pt, a≦0.05, b≦92 atomic%, x=6
．． 5 to 18 atom%, y=4 to 10 atom%, and z=4.5 atom% or less. [Claim 2] On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. Fe b Bx Ly T'z However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
species or two or more kinds of elements, T' is Cu, Ag, Au
, one or two selected from the group consisting of Ni, Pd, and Pt.
It is an element more than a species, b≦92 atomic%, x=6.5-1
8 at%, y=4 to 10 at%, and z=4.5 at% or less. 3. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. (Fe1-a M a)b Bx LyHowever, M is Co
, Ni, or both, and L is Ti, N
b, one or more elements selected from the group consisting of Ta, a≦0.05, b≦93 atomic%, x=6.5
~10 atom%, y=4 to 9 atom%. 4. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. Fe b Bx Ly where L is one or more elements selected from the group consisting of Ti, Nb, and Ta, b≦93 atomic %, x=6.
5 to 10 atom%, and y=4 to 9 atom%. 5. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the molten Fe-based soft magnetic alloy that is sprayed from the nozzle onto the cooling roll. (Fe1-a Co a)b Bx Ly T'z
D s X However, L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu
, Ag, Au, Ni, Pd, Pt, and D is Zr and Hf.
X is at least one of Cr, Mo, W, Ru,
An element selected from Rh and Ir, a≦0.0
5, b≦92 atom%, x=6.5-18 atom%, y=4
~10 at%, z=4.5 at% or less, and s=4 to 10 at%. 6. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. Fe b Bx Ly T'z D s XHowever,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta, and T' is Cu, Ag, Au, and Ni.
, Pd, and Pt, D is at least one of Zr and Hf, and X is selected from Cr, Mo, W, Ru, Rh, and Ir. b≦92 atomic%, x=6.5~
18 atom%, y=4 to 10 atom%, z=4.5 atom% or less, and s=4 to 10 atom%. 7. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. (Fe1-a M a) b Bx Ly Ds X However, M is either Co or Ni, or both,
L is one or more elements selected from the group consisting of Ti, Nb, and Ta; D is at least one of Zr and Hf; and X is one of Cr, Mo, W, Ru, Rh, and Ir. An element selected from among a≦0.05, b≦93 atom%, x=6.5 to 10 atom%, y=4 to 9 atom%, s
is 4 to 10 at%. 8. On the surface of the rotationally driven cooling roll,
Fe-based soft magnetic alloy molten metal is sprayed from a nozzle whose tip is arranged so as to face the surface of the cooling roll, and the molten metal is cooled on the surface of the cooling roll, formed into a band shape, and drawn out in the rotational direction of the cooling roll. In the method for producing a soft magnetic alloy ribbon, at least the outer peripheral surface is made of Fe.
A cooling roll made of a based alloy, the outer peripheral surface of which is finished to a roughness equivalent to that obtained by polishing with abrasive paper with an abrasive grain number of No. 600 to No. 1000, A method for producing a Fe-based soft magnetic alloy ribbon, characterized in that a molten Fe-based soft magnetic alloy having a composition represented by the following formula is used as the Fe-based soft magnetic alloy molten metal sprayed from the nozzle onto the cooling roll. Fe b Bx Ly D s X However, L is 1 selected from the group consisting of Ti, Nb, and Ta.
a species or two or more elements, D is at least one of Zr and Hf, and X is Cr, Mo, W, Ru, Rh, I
An element selected from r, b≦93 atomic%, x
= 6.5 to 10 at%, y = 4 to 9 at%, s is 4 to 1
It is 0 atom%.