JPH0428429U - - Google Patents
Info
- Publication number
- JPH0428429U JPH0428429U JP7131090U JP7131090U JPH0428429U JP H0428429 U JPH0428429 U JP H0428429U JP 7131090 U JP7131090 U JP 7131090U JP 7131090 U JP7131090 U JP 7131090U JP H0428429 U JPH0428429 U JP H0428429U
- Authority
- JP
- Japan
- Prior art keywords
- organometallic
- material container
- organometallic material
- raw material
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000002524 organometallic group Chemical group 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
Description
第１図はこの考案の一実施例である有機金属材
料容器の構造を示す断面図、第２図は従来の有機
金属材料容器の構造を示す断面図である。図にお
いて、１はキヤリアガス導入用配管、２は原料ガ
ス排出用配管、３は有機金属材料容器の内壁、４
は容器内に詰められた有機金属材料、６は有機金
属材料４内を通過する多孔質配管を示す。なお、
図中、同一符号は同一、または相当部分を示す。
FIG. 1 is a sectional view showing the structure of an organometallic material container which is an embodiment of this invention, and FIG. 2 is a sectional view showing the structure of a conventional organometallic material container. In the figure, 1 is a carrier gas introduction pipe, 2 is a raw material gas discharge pipe, 3 is an inner wall of an organometallic material container, and 4 is a pipe for discharging raw material gas.
6 shows the organometallic material packed in the container, and 6 shows the porous piping passing through the organometallic material 4. In addition,
In the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
内部配管の一部が多孔質構造としたことを特徴と
する有機金属材料容器。 An organometallic material container characterized in that a part of the internal piping passing through the organometallic raw material of the organometallic material container has a porous structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7131090U JPH0428429U (en) | 1990-07-02 | 1990-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7131090U JPH0428429U (en) | 1990-07-02 | 1990-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0428429U true JPH0428429U (en) | 1992-03-06 |
Family
ID=31608221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7131090U Pending JPH0428429U (en) | 1990-07-02 | 1990-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428429U (en) |
-
1990
- 1990-07-02 JP JP7131090U patent/JPH0428429U/ja active Pending