JPH0428428U - - Google Patents
Info
- Publication number
- JPH0428428U JPH0428428U JP6941390U JP6941390U JPH0428428U JP H0428428 U JPH0428428 U JP H0428428U JP 6941390 U JP6941390 U JP 6941390U JP 6941390 U JP6941390 U JP 6941390U JP H0428428 U JPH0428428 U JP H0428428U
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas
- organometallic material
- carrier gas
- sealed container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 7
- 125000002524 organometallic group Chemical group 0.000 claims description 7
- 239000012159 carrier gas Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図はこの考案の一実施例による有機金属材
料容器の断面図、第２図は上記有機金属材料容器
に用いられているアダプタの底面構造を示す図、
第３図は従来の有機金属材料容器の断面図である
。
図において、１はキヤリアガス導入用配管、２
はキヤリアガス排出用配管、３はシリンダ（密封
容器）、４は有機金属材料、５はキヤアガスの気
泡、６はアダプタ（ガス流規制部材）、７はアダ
プタ可動部、８はアダプタガス導入口、９はアダ
プタガス排出口である。なお図中同一符号は同一
又は相当部分を示す。
FIG. 1 is a sectional view of an organometallic material container according to an embodiment of the invention, and FIG. 2 is a diagram showing the bottom structure of an adapter used in the organometallic material container.
FIG. 3 is a cross-sectional view of a conventional organometallic material container. In the figure, 1 is a carrier gas introduction pipe, 2
is a carrier gas discharge pipe, 3 is a cylinder (sealed container), 4 is an organic metal material, 5 is a carrier gas bubble, 6 is an adapter (gas flow regulating member), 7 is an adapter movable part, 8 is an adapter gas inlet, 9 is the adapter gas outlet. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
を有し、該密封容器内に液体の有機金属材料を溜
めた状態で、キヤリアガスを上記容器内に導入し
、排出用配管から金属材料の蒸気で飽和されたキ
ヤリアガスを得る有機金属材料容器において、 上記キヤリアガスの流れを有機金属材料表面近
傍のみに規制するガス流規制部材を上記密封容器
内に取り付けたことを特徴とする有機金属材料容
器。[Scope of Claim for Utility Model Registration] A sealed container to which gas introduction and discharge piping is connected, a carrier gas is introduced into the container with a liquid organometallic material stored in the sealed container, and the gas is discharged. In the organometallic material container for obtaining a carrier gas saturated with the vapor of a metal material from a commercial pipe, a gas flow regulating member for regulating the flow of the carrier gas only near the surface of the organometallic material is installed in the sealed container. organometallic material container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6941390U JPH0428428U (en) | 1990-06-28 | 1990-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6941390U JPH0428428U (en) | 1990-06-28 | 1990-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0428428U true JPH0428428U (en) | 1992-03-06 |
Family
ID=31604695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6941390U Pending JPH0428428U (en) | 1990-06-28 | 1990-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428428U (en) |
-
1990
- 1990-06-28 JP JP6941390U patent/JPH0428428U/ja active Pending