JPH04277746A - Film tool for production of printed wiring board and its expansion and contraction measuring method - Google Patents

Abstract

PURPOSE:To offer the film tool for printed wiring board manufacture whose expansion/contraction extent can easily be controlled and its expansion and contraction measuring method. CONSTITUTION:A positive type scale 22 where opaque parts 22a and transparent parts 22b having constant width respectively arrayed at constant pitches is formed on the film tool 20. A scale 26 having a negative scale 24 where transparent parts 24b which are wider or narrower than the opaque parts 22a of the positive type scale 22 are arrayed at the same pitches with the positive type scale 22 alternately with opaque parts 24a is superposed and the expansion/ contraction extent of the film tool 20 for printed wiring board manufacture is measured from the extent of the passage of light.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film tool for manufacturing printed wiring boards and a method for measuring its expansion and contraction. A working photomask that has a target circuit pattern and is provided with reference holes and the like is called a film tool or a photo tool. Methods for obtaining circuit patterns for printed wiring boards include dry film methods, screen printing methods, and offset printing methods, each of which has a different method of creating a resist pattern.

[0002] Usually, a mask film used when processing a circuit pattern using the dry film method is called a film tool. Circuit patterns are created through various processes from design to completion of film tools, and the manufacturing method has progressed from manual work to automation using CAD/CAM, making it possible to create high-density wiring.

[0003]Therefore, there is an increasing need for film tools to reproduce circuit patterns with high precision, and strict control of the expansion and contraction state of film tools is required as the density of printed wiring boards increases.

For this reason, it is necessary to always accurately and easily measure the expansion and contraction state of the film tool and to control the degree of expansion and contraction of the film tool.

[0005]

2. Description of the Related Art Conventionally, as a method for managing the expansion/contraction state of a film tool, a method has been used in which the length of the expansion/contraction of the film tool is measured using a two-dimensional length measuring machine or the like.

[0006]

[Problem to be solved by the invention] Conventionally, the degree of expansion and contraction of the film tool was measured using a two-dimensional length measuring machine, but since the two-dimensional length measuring machine aligns one point with the origin, it is possible to measure the degree of expansion and contraction of the film tool with high accuracy. It required a long time to measure. Therefore, there is a problem in that it takes a long time to constantly measure the expansion and contraction states of a large number of film tools and to manage the film tools.

The present invention has been made in view of the above points, and its object is to provide a film tool that can easily control the degree of expansion and contraction of a film tool for manufacturing printed wiring boards, and to provide a film tool that can easily control the degree of expansion and contraction of the film tool for manufacturing printed wiring boards. The objective is to provide a measurement method.

[0008]

[Means for Solving the Problems] According to a first aspect of the present invention, in order to solve the above-mentioned problems, at least two vernier scales are provided at predetermined intervals in both the X direction and the Y direction. A film tool for manufacturing printed wiring boards is provided, which is characterized by:

According to a second aspect of the present invention, one or more positive type scales each having a constant width of opaque portions and transparent portions arranged at a constant pitch are provided in the X direction and the Y direction. A film tool for manufacturing printed wiring boards is provided.

0010

[Operation] In the film tool for manufacturing printed wiring boards according to the first aspect, the scale is applied to the two vernier scales, and the distance between the origins of the two vernier scales can be determined from the difference in the readings of the scales.

In the film tool for manufacturing printed wiring boards according to the second aspect, the transparent portions, which are wider or narrower by a certain width than the width of the opaque portion of the positive scale of the film tool, alternate with the opaque portions and have the same width as the positive scale. A scale with pitch-aligned negative graduations is used. This scale is superimposed on a positive scale, and the degree of expansion and contraction of the film for manufacturing printed wiring boards can be measured by the degree of light passage. That is, if no light passes through the film tool, the degree of expansion and contraction is within the permissible range, and if it passes, the film tool is determined to be outside the permissible range.

0012

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an explanatory diagram of a measuring method according to a first embodiment of the present invention. The film tool 10 is provided with a pair of verniers 12a and 12b spaced apart by a predetermined distance in the X direction. Although not particularly shown, the vernier pair 12a,
12b is also provided in the Y direction.

When measuring the expansion/contraction state of the film tool 10, the scale 14 is attached to a pair of verniers 12a, 12.
b, the reading of scale 14 with vernier 12b,
The distance between the coordinates A and B can be quickly and accurately measured from the difference in the reading of the scale 14 on the vernier 12a.

If the degree of expansion and contraction of the film tool 10 measured in this way is within a predetermined tolerance range, this film tool can be used as a photomask;
If it is outside the allowable range, it is easy to select not to use the film tool, making it easier to manage the film tool.

FIG. 2 shows a configuration diagram of a second embodiment of the present invention. The film tool 20 has a certain width, for example 200μ.
m opaque portion 22a and also a constant width, for example, 400 mm.
A positive scale 22 is formed in which transparent portions 22b of μm are lined up at a constant pitch.

26 is a scale, with positive scale 22
A transparent portion 24 that is narrower by a certain width than the width of the opaque portion 22a of
b alternately with the opaque portions 24a, the positive scale 22
It has negative type scales 24 formed in line at the same pitch. For example, in this embodiment, the transparent portion of scale 26 is 180 μm and the opaque portion is 420 μm. It is desirable that the scale 26 be made of glass or the like having a small coefficient of thermal expansion.

As shown in FIG. 3, two positive scales 22 in the X direction are formed on one diagonal of the film tool 20, and two positive scales 22 in the Y direction are formed on the other diagonal. Individually formed. The reason for forming a plurality of positive type scales 22 in this way is that the degree of expansion and contraction of the film tool 20 differs depending on the direction and location.
This is because it is necessary to measure whether the degree of expansion and contraction of the film tool 20 is within an allowable range at a plurality of locations.

Next, a method for measuring expansion and contraction of a film tool according to a second embodiment will be described with reference to FIG. The degree of expansion and contraction of the film tool 20 is measured by placing the scale 26 over the positive scale 22 formed on the film tool 20. As shown in FIG. 4(A), when the scale 26 is superimposed on the positive scale 22, the entire area becomes opaque and no light passes through, indicating that the degree of expansion and contraction of the film tool 20 is within the permissible range. shall be.

On the other hand, as shown in FIG. 4(B),
If some transparent portions appear and light is transmitted, it is assumed that the degree of expansion and contraction of the film tool 20 is outside the allowable range. In this case, it is easier to measure by placing the film tool 20 on a transparent or translucent measuring table and shining light from the back side of the measuring table.

As an alternative, a transparent or translucent measuring table is provided with negative scales at positions and numbers corresponding to the positive scales of the film tool, and by shining light from the back of the measuring table, expansion and contraction of multiple points can be performed at once. It is also possible to measure.

In the above-described embodiment, the width of the transparent portion 24b of the scale 26 is narrower than the width of the opaque portion 22a provided on the film tool 20. part 2
It may be formed wider than the width of 2a. In this case, of course, the width of the opaque portion 24a of the scale 26 is narrower than the width of the transparent portion 22b of the film tool 20, and the pitch intervals of the positive scale 22 and the negative scale 24 need to be the same. Further, the negative type and positive type of the scale may be reversed between the film tool and the scale.

[0022]

Effects of the Invention As detailed above, the present invention provides a film tool with a vernier or a positive scale in which transparent parts and opaque parts are arranged at predetermined pitch intervals, so that the degree of expansion and contraction of the film tool can be controlled. It is possible to quickly determine whether the film is within the allowable range, and the film tool can be easily managed.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a measurement method according to a first embodiment of the present invention.

FIG. 2 is a configuration explanatory diagram of a second embodiment of the present invention.

FIG. 3 is a diagram showing the arrangement of positive scales according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram of a measurement method in a second embodiment.

[Explanation of symbols]

10, 20 Film tool 12a, 12b Vernier (vernier) 14, 26 scale 22 Positive type scale 22a, 24a Opaque part 22b, 24b Transparent part 24 Negative scale

Claims (3)

[Claims] 1. In a film tool (10) for manufacturing a printed wiring board on which a target circuit pattern is formed, at least two vernier scales (12a, 12b) are installed at a predetermined distance in both the X direction and the Y direction. A film tool for manufacturing printed wiring boards, which is characterized by the following: 2. A film tool for manufacturing a printed wiring board on which a target circuit pattern is formed, each having an opaque part (22a) and a transparent part (22a) of a certain width.
b) A positive scale (22
) in each of the X direction and the Y direction. Claim 3: Each opaque portion (22a
) and transparent portions (22b) are arranged alternately at a constant pitch, and one or more positive type scales (22) are provided in each of the X direction and the Y direction. and the positive type scale (
The transparent portion (24b) is a certain width or narrower than the width of the opaque portion (22a) of the opaque portion (22).
) and negative scales (24) arranged alternately with the positive scales (22) at the same pitch (26).
is superimposed on the positive type scale (22), and the degree of expansion and contraction of the film tool (20) for manufacturing printed wiring boards is measured by the degree of passage of light. Method.