JPH04271317A - Optical scanning mirror - Google Patents

Abstract

PURPOSE:To provide the optical scanning mirror which has a simple structure, can execute optical scanning at an extremely high speed and can make scanning in arbitrary directions vertical and horizontal to an X-Y plane. CONSTITUTION:This mirror has a reflection mirror 1, a means 2 which freely tiltably supports a mirror at a fulcrum set in nearly the central position of the reflection mirror, supermagnetostrictive materials 4, 5 fixed at one end to the mirror on the respective axes of the cruciform axes having the fulcra at the intersected point and coils 7, 8 for applying magnetic fields to the respective supermagnetostrictive materials 4, 5. The supermagnetostrictive materials 4, 5 are subjected to the reflected light of the reflection mirror 1 can be deflected and scanned at a high speed with high accuracy in arbitrary directions and positions. This mirror lends itself to various kinds of applications including lithography, optical scanners, plot typing, laser beam processing, laminating, and others.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning mirror.

0002

[Prior Art] Conventionally, as shown in FIG.
A coil 13 is provided in the magnetic field, and a mirror 14 is attached to the coil 13.
A scanning mirror is known in which the mirror 14 is rotated around a vertical support shaft by the action of a magnetic field by applying a current to a coil 13, but in this case, the deflection scanning of the mirror 14 is It has the disadvantage that it only rotates around an axis, and the accuracy of scanning angle control is also low.

Regarding the processing of polymeric resist materials for integrated circuits such as ICs and LSIs, as integrated circuits become further miniaturized in the future, finer processing of resists will be increasingly required. Photolithography technology is used for this resist processing, but when a reflecting mirror is used for this optical scanning, there is a problem with its accuracy. Furthermore, when drawing by optical scanning, a circuit pattern cannot be arbitrarily drawn unless it is scanned vertically and horizontally along the X-Y axes.

0004

[Problems to be Solved by the Invention] The present invention provides an optical scanning mirror that can be used in such lithography, can perform highly accurate optical scanning, and can scan in arbitrary directions vertically and horizontally with respect to the X-Y plane. The purpose is to

[0005]

[Means for Solving the Problems] The above object is to provide a reflecting mirror, a means for supporting the mirror in a tiltable manner at a fulcrum set approximately at the center of the reflecting mirror, and a cross whose intersection is the fulcrum. This can be achieved with an optical scanning mirror characterized by comprising giant magnetostrictive materials having one end fixed to a mirror on each axis, and a coil for applying a magnetic field to each of the giant magnetostrictive materials. Furthermore, it is recommended to provide a drive device that moves the entire optical scanning mirror configured as described above in an axial direction perpendicular to the cross axis.

[0006]

[Operation] As described above, the reflecting mirror of the optical scanning mirror according to the present invention is provided so as to be tiltable in any direction around the fulcrum set at approximately the center position, and each of the cross axes with the fulcrum as the intersection Since we installed a giant magnetostrictive material with one end fixed on the axis and controlled its tilting, the light reflected by the mirror can be deflected and scanned in any direction and position, and the magnetostrictive material can be controlled magnetostrictively by coil excitation. This makes it possible to increase the expansion/contraction stroke due to magnetostrictive changes, thereby making it possible to make the optical scanning angle extremely large, that is, to make the scanning amount extremely large, and to perform highly accurate scanning control. Furthermore, the high response speed of the giant magnetostrictive material allows for high response speed and highly sensitive control.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to the drawings. FIG. 1 is an overall perspective view of an embodiment of an optical scanning mirror according to the present invention, and FIG. 2 is a back view of the mirror.
is a concave reflective mirror that can be tilted freely around a central fulcrum. 2 is a support rod that supports the central fulcrum of the mirror. 3 is a support frame that supports the outer periphery of the mirror 1 in a freely tiltable manner; 4 and 5 are giant magnetostrictive materials having one end fixed to the support frame on the X-axis and Y-axis of a cross whose intersection is the fulcrum at the center of the mirror; As the giant magnetostrictive material, a TbDyFe type material is mainly used. For example, Tb0.3 Dy0.7 Fe1
．． The columnar crystal material No. 9 is formed into a rod-shaped body and used. The other ends of the giant magnetostrictive materials 4 and 5 are fixed to the device main body 6. Further, the other end of the support rod 2 that supports the central fulcrum of the mirror 1 is also fixed to the main body 6 of the apparatus. 7 and 8 are magnetic field generating coils wound around a rod of giant magnetostrictive material, and magnetostriction is controlled by this excitation control. Reference numeral 9 denotes a drive motor that feeds the main body 6 of the apparatus along the Z-axis, which is perpendicular to the cross axis of the mirror 1.

When the giant magnetostrictive material 4 is magnetostrictively controlled by exciting the coil 7, the mirror 1 can be tilted left and right about the fulcrum, and when the coil 8 is excited and the giant magnetostrictive material 5 is magnetostrictively controlled, the mirror 1 The tilt can be controlled up and down.

As shown in FIG. 3, the mirror 1 is a concave mirror,
The focal length when the parallel light beam 10 from the laser oscillator is reflected by this mirror 1 and focused on the focal point 11 is, for example, 50
0 mm, and the amount of deformation of the giant magnetostrictive material 4 at a position 5 mm on the X-axis from the central fulcrum of the mirror is 0.01 mm, the focal point 11 of the focused beam can be scanned approximately 1 mm in the X-axis direction of the irradiation plane. When the giant magnetostrictive material 5 is deformed, the focal point 11 can be scanned by about 1 mm in the Y-axis direction.

Giant magnetostrictive material Tb0.3 Dy0.7 Fe1
．． 9 When a magnetic field of 1500 oersted is applied to a rod with a length of 30 mm, the magnetostriction change is about 0.22 mm,
Therefore, when the above-mentioned mirror control is performed using this, the scanning distance of the focal point 11 is about 22 mm at maximum, which can be fully utilized for drawing scanning in lithography processing. In addition, giant magnetostrictive material Tb0.3 Dy0.7 Fe1.9
As for the frequency response, the magnetostriction amplitude changes almost constant up to a maximum of about 10 KHz, and the response speed to signals is high, allowing highly sensitive control.

Furthermore, since the position on the X-Y axis plane can be controlled as described above, it can also be used for removal processing such as laser processing. When removing material with light energy, the material is evaporated with intense focused energy. To control the focal position of the laser beam with respect to the thickness of the material, the drive motor 9 can be driven and controlled by controlling the feed in the Z-axis direction, and the giant magnetostrictive materials 4 and 5 can be controlled to control the focus position in the By performing the above control, the processing pattern can be scanned and cutting into an arbitrary shape can be performed.

[0012] It is also possible to carry out lamination processing by melting powder. For example, one layer of powder is spread on a substrate using a scraper, and the required pattern is irradiated with a laser to melt and solidify. A powder layer is further formed thereon and the same melting and solidifying operation is performed. By repeating this, the entire shape is modeled by lamination. Pattern control in this case is controlled by tilting the mirror 1 by controlling the excitation of the coils 7 and 8 of the giant magnetostrictive materials 4 and 5, and by driving the motor 9.
Precise lamination processing can be performed by controlling the focal position of each layer. Of course, the laminated material is not limited to powder, and a liquid thermosetting resin can be used, and the photocurable resin can be irradiated with light to cause the irradiated portion to undergo a polycondensation reaction and solidify.

[0013] Furthermore, giant magnetostrictive material Tb0.3 Dy0.7
As mentioned above, the response speed of Fe1.9 is as high as about 10 KHz, making it suitable for optical scanners (optical-s).
canner) or plot type (prot-
typing), etc. In this case, the light from the laser oscillator is narrowed down by a lens, and by shining it on a vibrating reflective mirror, it can be scanned vertically and horizontally. When used in a laser beam printer, when applying a laser beam to a cylindrical photosensitive drum built into the printer, turn the beam on and off while swinging it up, down, left and right using the optical scanning mirror according to the present invention, and a part of the drum will be exposed. Since the paper is charged in the shape of the characters to be printed, when the drum is sprayed with toner, the toner is deposited on the charged portion, and when the paper is pressed against the drum, the paper is printed. By focusing the light from a semiconductor laser using a Fresnel lens with a sufficiently short focal length and directing it to a reflecting mirror, the optical system can be made extremely small, and the high-speed response and high-frequency properties of giant magnetostrictive materials can make printers more compact. High performance can be achieved.

[0014]

[Effects of the Invention] As described above, in the optical scanning mirror according to the present invention, the reflecting mirror is provided so as to be tiltable in any direction around a fulcrum set approximately at the center thereof, and the fulcrum is the intersection point. Since we installed a giant magnetostrictive material with one end fixed on each axis of the cross axis and controlled its tilting, the light reflected by the mirror can be deflected and scanned in any direction and position, and the giant magnetostrictive material can be excited by the coil. Since the magnetostrictive control is carried out, it is possible to increase the expansion and contraction stroke due to the magnetostrictive change, thereby making it possible to make the optical scanning angle extremely large, that is, to make the scanning amount extremely large, making it possible to perform precise and highly accurate scanning control. Furthermore, the high response speed of the giant magnetostrictive material allows for high response speed and highly sensitive control.

Furthermore, by providing a drive device for controlling the movement of the mirror in the Z-axis direction perpendicular to the cross axis,
, Y and Z axes can be controlled three-dimensionally, and therefore it can be used for various purposes such as lithography, optical scanners, plot typing, laser processing, lamination processing, etc., and has a simple structure. It is possible to perform extremely high-speed and highly accurate processing. It should be noted that the present invention is not limited to the embodiments described above, but encompasses all modified embodiments that can be easily figured out by those skilled in the art from the above description within the scope of the purpose of the present invention.

[Brief explanation of the drawing]

FIG. 1 is an overall perspective view of an embodiment of an optical scanning mirror according to the present invention.

FIG. 2 is a back view of the mirror.

FIG. 3 is an explanatory diagram of an operating state.

FIG. 4 is an explanatory diagram of a conventional device.

[Explanation of symbols]

1 Mirror 2 Support rod 3 Support frame 4,5 Giant magnetostrictive material 6　　　　　　　Device body 7, 8 Coil 9 Motor 10 Input light 11 Focus

Claims (2)

[Claims] 1. A reflecting mirror (1), means (2) for tiltably supporting the mirror at a fulcrum set approximately at the center of the reflecting mirror, and each of a cross axis whose intersection is the fulcrum. Giant magnetostrictive material (4
, 5) and a coil (7, 8) for applying a magnetic field to each of the giant magnetostrictive materials. 2. A reflecting mirror (1), means (2) for tiltably supporting the mirror at a fulcrum set approximately at the center of the reflecting mirror, and each of a cross axis whose intersection is the fulcrum. Giant magnetostrictive material (4
, 5) and a coil (7, 8) that applies a magnetic field to each of the giant magnetostrictive materials. ) An optical scanning mirror characterized in that it is provided with: