JPH04270592A - Evaluation method for solid-state image pickup element - Google Patents

Evaluation method for solid-state image pickup element

Info

Publication number
JPH04270592A
JPH04270592A JP3030518A JP3051891A JPH04270592A JP H04270592 A JPH04270592 A JP H04270592A JP 3030518 A JP3030518 A JP 3030518A JP 3051891 A JP3051891 A JP 3051891A JP H04270592 A JPH04270592 A JP H04270592A
Authority
JP
Japan
Prior art keywords
solid
color
state image
data
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3030518A
Other languages
Japanese (ja)
Other versions
JP2730806B2 (en
Inventor
Hiroshi Nakayama
博史 中山
Tomoya Tanaka
田中 知哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP3030518A priority Critical patent/JP2730806B2/en
Publication of JPH04270592A publication Critical patent/JPH04270592A/en
Application granted granted Critical
Publication of JP2730806B2 publication Critical patent/JP2730806B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)

Abstract

PURPOSE:To discriminate a small defect of contrast such as color stain or uneven color being a problem in a color picture resulting from a solid-state image pickup element automatically, quickly and accurately. CONSTITUTION:A color use solid-state image pickup element 1 is divided into plural areas by a picture division means 4, a mean value of color data in each area is calculated by a mean value calculation means 5, the maximum value and the. minimum value of the above mean values between areas are calculated by a comparator means 6, a difference data between the maximum value and the minimum value is calculated by a difference data calculation means 7, the result is compared with a preset threshold level at a comparison discrimination means 8, an electric characteristic of the solid-state image pickup element is discriminated by a discrimination means 9 to discriminate the propriety of the solid-state image pickup element.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、固体撮像素子の電気的
特性を検査し、判定する固体撮像素子の評価方法に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state imaging device evaluation method for testing and determining the electrical characteristics of a solid-state imaging device.

【0002】0002

【従来の技術】近年、固体撮像素子の民生、産業分野へ
の進出は目覚ましく、特に、民生用のビデオカメラにお
いては、ほぼ100 %固体撮像素子が使用されている
2. Description of the Related Art In recent years, solid-state imaging devices have made remarkable advances in the consumer and industrial fields, and in particular, solid-state imaging devices are used almost 100% of the time in consumer video cameras.

【0003】ビデオカメラ用の固体撮像素子は通常、カ
ラーフィルタによりカラー化されており、カラー信号が
得られる構造になっているため、電気的特性の中にカラ
ー画像の画質に対する規定が設けられており、これらの
規定を満足する製品を正確かつ迅速に検査し、選別する
ことが必要である。
[0003] Solid-state image sensors for video cameras are usually colored using color filters and have a structure that allows color signals to be obtained, so regulations regarding the image quality of color images are set in the electrical characteristics. Therefore, it is necessary to accurately and quickly inspect and select products that meet these regulations.

【0004】固体撮像素子の電気的特性を検査して選別
する手段としては、まず、ウェハ状態でテスタにより自
動選別し、次に組立後にテスタまたは実装評価装置によ
り選別するのが一般的である。
[0004] As means for inspecting and sorting the electrical characteristics of solid-state image sensing devices, it is common to first automatically sort them in a wafer state using a tester, and then after assembly to sort them using a tester or a mounting evaluation device.

【0005】ここで、テスタを用いた固体撮像素子の欠
陥検査方法を図2のブロック図に基づいて説明する。ま
ず、固体撮像素子10からの信号である画像データがテ
スタ内部または外部の画像記憶装置11に画素毎に記憶
される。次に、この記憶された画像データの欠陥を検出
するために、平均値算出手段12で上記記憶された画像
データの平均値が算出される。そして上記平均値とあら
かじめ定められた定数を用いてしきい値算出手段13に
より欠陥判定用のしきい値が算出される。さらに比較手
段14により、上記画素毎に記憶された画像データと上
記欠陥判定用のしきい値を画素毎に比較し、しきい値を
越える画素データを欠陥として判定手段15で判定して
いた。
[0005] Here, a method for inspecting defects in a solid-state image sensor using a tester will be explained based on the block diagram of FIG. First, image data, which is a signal from the solid-state image sensor 10, is stored for each pixel in the image storage device 11 inside or outside the tester. Next, in order to detect defects in the stored image data, the average value calculation means 12 calculates the average value of the stored image data. Then, the threshold value calculation means 13 calculates a threshold value for defect determination using the average value and a predetermined constant. Further, the comparison means 14 compares the image data stored for each pixel with the threshold value for defect determination for each pixel, and the determination means 15 determines that pixel data exceeding the threshold value is defective.

【0006】[0006]

【発明が解決しようとする課題】しかし、上記従来の評
価方法によると、画像データの平均値に基づいて算出さ
れたしきい値により欠陥の判定が行われているため、平
均値に対して明瞭なコントラストを持つ欠陥の判定は可
能であるが、カラー画像で問題となるコントラストの弱
い欠陥、いわゆる色シミ、色ムラの判定は不可能である
。そのため、色シミ、色ムラの検査は、固体撮像素子1
0からの画像データをモニタテレビに入力し、目視によ
り行わねばならず、正確かつ迅速な選別が困難であった
[Problems to be Solved by the Invention] However, according to the conventional evaluation method described above, defects are determined based on a threshold value calculated based on the average value of image data. Although it is possible to determine defects with high contrast, it is impossible to determine defects with low contrast, so-called color spots and color unevenness, which are problematic in color images. Therefore, when inspecting color stains and color unevenness, the solid-state image sensor 1
Image data from 0 must be input into a monitor television and visually checked, making it difficult to perform accurate and rapid sorting.

【0007】本発明は上記問題を解消するもので、コン
トラストの弱い欠陥いわゆる色シミ、色ムラの判定を自
動的に行うことができる固体撮像素子の評価方法を提供
することを目的とするものである。
The present invention solves the above-mentioned problem, and aims to provide a method for evaluating a solid-state image sensor that can automatically determine defects with low contrast, so-called color spots, and color unevenness. be.

【0008】[0008]

【課題を解決するための手段】上記課題を解決するため
に本発明の固体撮像素子の評価方法は、カラー化された
固体撮像素子からの画像データを複数個の領域に分割し
、分割された各領域内に複数種存在する色データについ
て、同種の色データ毎に上記各領域内での平均値を算出
し、上記平均値を全領域において同種の色データ毎に比
較して最大値と最小値を全種の色データについて算出し
、同種の色データ毎に上記最大値と上記最小値の差デー
タを全種の色データについて算出し、この差データとあ
らかじめ設定されたしきい値とを比較して電気的特性を
判定するものである。
[Means for Solving the Problems] In order to solve the above problems, the solid-state image sensor evaluation method of the present invention divides image data from a colored solid-state image sensor into a plurality of regions, and For multiple types of color data in each area, calculate the average value within each area for each color data of the same type, compare the above average value for each color data of the same type in all areas, and compare the maximum and minimum values. The value is calculated for all types of color data, the difference data between the above maximum value and the above minimum value is calculated for all types of color data for each color data of the same type, and this difference data and a preset threshold value are calculated. The electrical characteristics are determined by comparison.

【0009】[0009]

【作用】上記構成のように、カラー化された固体撮像素
子からの画像データを複数個の領域に分割し、分割され
た各領域内に複数種存在する色データについて、同種の
色データ毎に上記各領域内での平均値を算出し、上記平
均値を全領域において同種の色データ毎に比較して最大
値と最小値を全種の色データについて算出し、同種の色
データ毎に上記最大値と上記最小値の差データを全種の
色データについて算出し、この差データとあらかじめ設
定されたしきい値とを比較してその合否の判定をするこ
とにより、カラー画像で問題となるコントラストの弱い
欠陥いわゆる色シミ、色ムラの判定を自動的に行う。
[Operation] As in the above configuration, the image data from the colored solid-state image sensor is divided into multiple areas, and for each of the multiple types of color data existing in each divided area, each color data of the same type is divided into two or more areas. Calculate the average value within each area, compare the average value for each color data of the same type in all areas, calculate the maximum value and minimum value for all types of color data, and calculate the average value for each color data of the same type. The difference data between the maximum value and the above minimum value is calculated for all types of color data, and this difference data is compared with a preset threshold value to determine whether it is acceptable or not. Automatically determines defects with low contrast, so-called color stains and color unevenness.

【0010】0010

【実施例】以下、本発明の一実施例を図面に基づいて説
明する。図1は本発明の一実施例における固体撮像素子
の評価方法を説明するブロック図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram illustrating a method for evaluating a solid-state image sensor according to an embodiment of the present invention.

【0011】図1において、カラー化された固体撮像素
子1からの画像データ全体はテスタに取り込まれ、この
画像データはテスタの内部または外部の画像記憶装置2
に記憶される。この記憶された画像データは色データ変
換手段3に送られ、ここで複数種の色データに変換され
る。その後、画像分割手段4により色データ全体は複数
個の領域に分割され、さらに平均値算出手段5により同
種の色データ毎に上記領域内での平均値が算出される。 そして比較手段6により上記平均値は全領域において同
種の色データ毎に比較され、最大値と最小値が全種の色
データについて算出される。そして、差データ算出手段
7により、同種の色データ毎に上記最大値と上記最小値
の差データが全種の色データについて算出される。この
後、比較判定手段8により上記差データとあらかじめ設
定されたしきい値とが比較され、その比較結果に基づい
て判定手段9で電気的特性の判定が行われ、合否の判定
が行われる。
In FIG. 1, the entire colorized image data from a solid-state image sensor 1 is taken into a tester, and this image data is stored in an image storage device 2 inside or outside the tester.
is memorized. This stored image data is sent to the color data conversion means 3, where it is converted into a plurality of types of color data. Thereafter, the entire color data is divided into a plurality of regions by the image dividing means 4, and the average value within the region is calculated by the average value calculating means 5 for each color data of the same type. Then, the comparison means 6 compares the average value for each type of color data in the entire area, and calculates the maximum value and minimum value for all types of color data. Then, the difference data calculation means 7 calculates difference data between the maximum value and the minimum value for each type of color data for all types of color data. Thereafter, the comparison/determination means 8 compares the difference data with a preset threshold value, and based on the comparison result, the determination means 9 makes a determination of the electrical characteristics to determine pass/fail.

【0012】このように本実施例によれば、色データの
全画像領域内での最大値と最小値の差を算出し、その差
とあらかじめ設定されたしきい値とを比較するため、カ
ラー画像で問題となるコントラストの弱い欠陥、いわゆ
る色シミ、色ムラの判定を自動的に行うことができる。
As described above, according to this embodiment, the difference between the maximum value and the minimum value of color data within the entire image area is calculated, and the difference is compared with a preset threshold value. Defects with low contrast that cause problems in images, so-called color stains and color unevenness, can be automatically determined.

【0013】[0013]

【発明の効果】以上のように本発明によれば、カラー化
された固体撮像素子を複数個の領域に分割し、各領域に
おける色データの平均値を算出し、領域間での上記平均
値の最大値と最小値を算出し、その差データを使用して
固体撮像素子の合否の判定を行うため、従来のようにデ
ータ平均値からしきい値を算出し、このしきい値と上記
データ平均値を比較する使用する方法とは異なり、カラ
ー画像で問題となるコントラストの弱い欠陥、いわゆる
色シミ、色ムラの判定をテスタにより自動的に正確かつ
迅速に行うことができる。
As described above, according to the present invention, a colored solid-state image sensor is divided into a plurality of regions, the average value of color data in each region is calculated, and the above average value between the regions is calculated. In order to calculate the maximum and minimum values of , and use the difference data to determine whether the solid-state image sensor passes or fails, a threshold value is calculated from the data average value as in the past, and this threshold value and the above data are used. Unlike the method used to compare average values, the tester can automatically, accurately and quickly determine defects with low contrast that are a problem in color images, so-called color spots and color unevenness.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例における固体撮像素子の評価
方法を説明するブロック図である。
FIG. 1 is a block diagram illustrating a method for evaluating a solid-state image sensor according to an embodiment of the present invention.

【図2】従来の固体撮像素子の評価方法を説明するブロ
ック図である。
FIG. 2 is a block diagram illustrating a conventional evaluation method for a solid-state image sensor.

【符号の説明】[Explanation of symbols]

1  カラー化された固体撮像素子 2  画像記憶装置 3  色データ変換手段 4  画面分割手段 5  平均値算出手段 6  比較手段 7  差データ算出手段 8  比較判定手段 9  判定手段 1 Colored solid-state image sensor 2 Image storage device 3 Color data conversion means 4 Screen splitting means 5 Average value calculation means 6 Comparison means 7 Difference data calculation means 8 Comparative judgment means 9 Judgment means

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  カラー化された固体撮像素子からの画
像データを複数個の領域に分割し、分割された各領域内
に複数種存在する色データについて、同種の色データ毎
に上記各領域内での平均値を算出し、上記平均値を全領
域において同種の色データ毎に比較して最大値と最小値
を全種の色データについて算出し、同種の色データ毎に
上記最大値と上記最小値の差データを全種の色データに
ついて算出し、この差データとあらかじめ設定されたし
きい値とを比較して電気的特性を判定する固体撮像素子
の評価方法。
Claim 1: Colorized image data from a solid-state image sensor is divided into a plurality of regions, and for each of the plurality of types of color data existing in each divided region, each color data of the same type is divided into each region. Calculate the average value for each type of color data, compare the above average value for each color data of the same type in all areas, calculate the maximum value and minimum value for all types of color data, and calculate the maximum value and the above value for each color data of the same type. A solid-state imaging device evaluation method that calculates minimum value difference data for all types of color data and compares this difference data with a preset threshold value to determine electrical characteristics.
JP3030518A 1991-02-26 1991-02-26 Evaluation method of solid-state imaging device Expired - Lifetime JP2730806B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3030518A JP2730806B2 (en) 1991-02-26 1991-02-26 Evaluation method of solid-state imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3030518A JP2730806B2 (en) 1991-02-26 1991-02-26 Evaluation method of solid-state imaging device

Publications (2)

Publication Number Publication Date
JPH04270592A true JPH04270592A (en) 1992-09-25
JP2730806B2 JP2730806B2 (en) 1998-03-25

Family

ID=12306034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3030518A Expired - Lifetime JP2730806B2 (en) 1991-02-26 1991-02-26 Evaluation method of solid-state imaging device

Country Status (1)

Country Link
JP (1) JP2730806B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222514A (en) * 2005-02-08 2006-08-24 Nikon Corp Method of inspecting solid-state imaging device, inspection program, and electronic camera
JP2007093304A (en) * 2005-09-27 2007-04-12 Sharp Corp Apparatus, method, and program for detecting defect, image sensor device and module, image processing apparatus, digital image-quality tester, computer-readable recording medium
CN112903703A (en) * 2021-01-27 2021-06-04 广东职业技术学院 Ceramic surface defect detection method and system based on image processing

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006222514A (en) * 2005-02-08 2006-08-24 Nikon Corp Method of inspecting solid-state imaging device, inspection program, and electronic camera
JP4595576B2 (en) * 2005-02-08 2010-12-08 株式会社ニコン Solid-state image sensor inspection method, inspection program, and electronic camera
JP2007093304A (en) * 2005-09-27 2007-04-12 Sharp Corp Apparatus, method, and program for detecting defect, image sensor device and module, image processing apparatus, digital image-quality tester, computer-readable recording medium
US7783103B2 (en) 2005-09-27 2010-08-24 Sharp Kabushiki Kaisha Defect detecting device, image sensor device, image sensor module, image processing device, digital image quality tester, and defect detecting method
CN112903703A (en) * 2021-01-27 2021-06-04 广东职业技术学院 Ceramic surface defect detection method and system based on image processing

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