JPH04267030A - Impregnated cathode structure - Google Patents

Impregnated cathode structure

Info

Publication number
JPH04267030A
JPH04267030A JP3028477A JP2847791A JPH04267030A JP H04267030 A JPH04267030 A JP H04267030A JP 3028477 A JP3028477 A JP 3028477A JP 2847791 A JP2847791 A JP 2847791A JP H04267030 A JPH04267030 A JP H04267030A
Authority
JP
Japan
Prior art keywords
sleeve
heater
cathode
substrate
impregnated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3028477A
Other languages
Japanese (ja)
Other versions
JP3353303B2 (en
Inventor
Ryoichi Seura
瀬浦 良一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2847791A priority Critical patent/JP3353303B2/en
Publication of JPH04267030A publication Critical patent/JPH04267030A/en
Application granted granted Critical
Publication of JP3353303B2 publication Critical patent/JP3353303B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To transfer the heat from a heater to a cathode substrate via the conduction with good thermal efficiency, lower the heater temperature, and reduce power consumption by inserting and fixing a metal cup buried with a heater via alumina in advance into a sleeve supporting the impregnated cathode substrate. CONSTITUTION:Electron emitting materials BaO, CaO, Al2O3 are impregnated at the ratio 4:1:1 into porous tungsten to form a cathode substrate 1, and Os-Rh is coated on an electron emitting face. The substrate 1 is brazed to a sleeve 2 made of molybdenum with a brazing filler metal 3 made of Mo-Ru, and the back face of the electron emitting face of the substrate 1 is sealed by the brazing filler metal 3. A cylindrical heating element 10 sintered and fixed with a heater 5 by a burying agent 6 of alumina powder is inserted into a molybdenum metal cup 4 inscribed in the sleeve 2 in advance, and the outside opening end of the heating element 10 and the substrate 1 of the sleeve 2 are fixed to the opening end on the opposite side with a Ni brazing filler metal 7.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は含浸型陰極構体に関し、
特に消費電力を少くした含浸型陰極構体に関する。
[Field of Industrial Application] The present invention relates to an impregnated cathode structure,
In particular, the present invention relates to an impregnated cathode assembly with reduced power consumption.

【0002】0002

【従来の技術】従来、この種の含浸型陰極構体は、図3
に示すような構造よりなる。すなわち、電子放射物質が
含浸された陰極基体31がモリブデン等の高融点金属か
らなるスリーブ32の一端開口部にろう材33にてろう
接され、また、スリーブ32の内部には、ヒータ34が
スリーブ32の他端開口部より挿入され内蔵された構造
となっている。
[Prior Art] Conventionally, this type of impregnated cathode structure is shown in FIG.
It consists of the structure shown in . That is, a cathode substrate 31 impregnated with an electron emitting substance is soldered to one end opening of a sleeve 32 made of a high melting point metal such as molybdenum using a brazing material 33, and a heater 34 is installed inside the sleeve 32. It has a structure in which it is inserted through the opening at the other end of 32 and built-in.

【0003】0003

【発明が解決しようとする課題】従来のこのような構造
の含浸型陰極構体では、スリーブ32内に配置されたヒ
ータ34からの熱は、輻射によりスリーブ32並びに陰
極基体31に伝えられる為、所定の陰極動作温度を得る
為にはヒータ34の温度をかなり高温にする必要があり
、大きなヒータ電力を必要とするばかりではなく、ヒー
タ34自体のショートや断線等の不具合が発生するとい
う問題点があった。
[Problems to be Solved by the Invention] In the conventional impregnated cathode assembly having such a structure, heat from the heater 34 disposed within the sleeve 32 is transmitted to the sleeve 32 and the cathode base 31 by radiation, so To obtain a cathode operating temperature of there were.

【0004】例えば、直径2mmのMタイプと呼ばれる
含浸型陰極と外径3mmのスリーブとから成る陰極構体
で、電流密度J=2A/平方cm,陰極動作輝度温度1
,000℃を得る時のヒータ34の温度は、約1,40
0℃でヒータ電力は約4Wを要し、この動作条件で約0
.5%の割合でヒータ34の線間のショートの不具合が
発生していた。
For example, in a cathode assembly consisting of an impregnated cathode called M type with a diameter of 2 mm and a sleeve with an outer diameter of 3 mm, the current density J = 2 A/cm2, and the cathode operating brightness temperature 1.
,000°C, the temperature of the heater 34 is approximately 1,40°C.
The heater power requires approximately 4 W at 0°C, and under this operating condition approximately 0
.. Short circuits between the lines of the heater 34 occurred at a rate of 5%.

【0005】本発明の目的は、ヒータからの熱効率が良
く、大きなヒータ電力を要せずヒータショートや断線の
ない含浸型陰極構体を提供することにある。
An object of the present invention is to provide an impregnated cathode structure which has good heat efficiency from a heater, does not require large heater power, and is free from heater short-circuits and disconnections.

【0006】[0006]

【課題を解決するための手段】本発明は、電子放射物質
が含浸された陰極基体と、該陰極基体を一端開口部に接
合するスリーブと、該スリーブ内に挿入されたヒータと
を具備する含浸型陰極構体において、前記ヒータが前記
スリーブと内接する金属カップ内に埋込剤にて固定され
、かつ前記金属カップが前記スリーブ内に挿入固定され
該スリーブの前記一端開口部に接合された前記陰極基体
を熱伝導により加熱する構造を有する。
[Means for Solving the Problems] The present invention provides an impregnation method comprising a cathode substrate impregnated with an electron-emitting substance, a sleeve that joins the cathode substrate to an opening at one end, and a heater inserted into the sleeve. In the cathode structure, the heater is fixed with an embedding agent in a metal cup inscribed with the sleeve, and the metal cup is inserted and fixed into the sleeve and joined to the opening at one end of the sleeve. It has a structure that heats the base by thermal conduction.

【0007】[0007]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments Next, embodiments of the present invention will be described with reference to the drawings.

【0008】図1(a),(b)は本発明の第1の実施
例を説明する断面図である。
FIGS. 1(a) and 1(b) are cross-sectional views illustrating a first embodiment of the present invention.

【0009】第1の実施例は、図1(a),(b)に示
すように、陰極基体1は、ポーラスタングステンに電子
放射物質であるBaO,CaO,Al2 O3 を4:
1:1の割合で含浸させ、電子放射面にはOs−Rhが
約5,000オングストロームコーティングされている
。 この陰極基体1は、モリブデンからなるスリーブ2にM
o−Ruのろう材3を用いてろう接されていると同時に
、陰極基体1の電子放射面の裏面は、このMo−Ruろ
う材3で封孔処理されている。
In the first embodiment, as shown in FIGS. 1(a) and 1(b), the cathode substrate 1 is composed of porous tungsten and electron emitting substances such as BaO, CaO, and Al2O3.
The electron emitting surface is coated with approximately 5,000 angstroms of Os-Rh by impregnation at a ratio of 1:1. This cathode substrate 1 is attached to a sleeve 2 made of molybdenum.
While the cathode substrate 1 is soldered using the o-Ru brazing material 3, the back surface of the electron emitting surface of the cathode substrate 1 is sealed with the Mo-Ru brazing material 3.

【0010】また、このスリーブ2の内部には、予め、
スリーブ2に内接するモリブデン製の金属カップ4にヒ
ータ5をアルミナ粉末の埋込剤6で焼結固定された円筒
状発熱体10が挿入されており、挿入後、この円筒状発
熱体10の外側開口端とスリーブ2の陰極基体1と反対
側の開口端とが、Niろう材7を用いて、高周波加熱等
によりろう接され固定支持されている。
[0010] Also, inside this sleeve 2, in advance,
A cylindrical heating element 10 in which a heater 5 is sintered and fixed with an alumina powder embedding agent 6 is inserted into a metal cup 4 made of molybdenum inscribed in the sleeve 2. After insertion, the outside of this cylindrical heating element 10 is inserted. The open end and the open end of the sleeve 2 on the side opposite to the cathode base 1 are fixedly supported by being brazed using Ni brazing material 7 by high frequency heating or the like.

【0011】Mo−Re等の金属支持体8は、スリーブ
2と外側支持筒体9とを連結支持するもので、それぞれ
に電気抵抗溶接で接続されている。
A metal support 8 made of Mo-Re or the like connects and supports the sleeve 2 and the outer support cylinder 9, and is connected to each other by electric resistance welding.

【0012】図2は本発明の第2の実施例の断面図であ
る。
FIG. 2 is a cross-sectional view of a second embodiment of the invention.

【0013】第2の実施例は、図2に示すように、陰極
基体21は、20wt%イリジウムと80wt%タング
ステンからなる多孔質の金属基体に電子放射物質である
BaO,CaO,Al2 O3 を4:1:1の割合で
含浸させ、Mo−Re製の金属カップ22に装着され、
さらに、金属カップ22は、Mo−Re製スリーブ23
にレーザ溶接される。このレーザ溶接のナゲット24は
、陰極基体21の外周部と金属カップ22とスリーブ2
3にわたる様にレーザ溶接されていることを示している
。ヒータ25は、スリーブ23に内接するMo−Re製
金属カップ26の中に、予め、アルミナの埋込剤27に
よって固定されている。
In the second embodiment, as shown in FIG. 2, the cathode substrate 21 is a porous metal substrate made of 20 wt% iridium and 80 wt% tungsten, and electron emitting substances such as BaO, CaO, and Al2 O3 are injected into the porous metal substrate. : Impregnated at a ratio of 1:1 and attached to a metal cup 22 made of Mo-Re,
Furthermore, the metal cup 22 has a sleeve 23 made of Mo-Re.
Laser welded. This laser welded nugget 24 consists of the outer periphery of the cathode base 21, the metal cup 22, and the sleeve 2.
It shows that laser welding is performed over 3 parts. The heater 25 is fixed in advance in a Mo-Re metal cup 26 inscribed in the sleeve 23 using an alumina embedding agent 27.

【0014】次に、ヒータ25を予め埋設した金属カッ
プ26をスリーブ23に挿入しそれぞれの開口端をレー
ザ溶接で接続させ固定する。
Next, the metal cup 26 in which the heater 25 is embedded in advance is inserted into the sleeve 23, and their open ends are connected and fixed by laser welding.

【0015】金属支持体並びに外側の陰極支持筒体への
接続方法は、前記の第1の実施例と同様に行われている
The method of connection to the metal support and the outer cathode support tube is the same as in the first embodiment.

【0016】このようにして製作した本実施例の含浸型
陰極構体と図3に示す従来の含浸型陰極構体とを真空ベ
ルジャーに設置し、所定の輝度動作温度1,000℃を
得る時のヒータ温度並びにヒータ電力を比較測定した結
果、本実施例の含浸型陰極構体の方がヒータ温度を平均
値で、約300℃下げる事ができた。又、ヒータ電力に
ついては、約10%ヒータの消費電力を少なくすること
ができた。これは、ヒータからの熱が従来タイプは、輻
射によって陰極基体に伝えられていたのに対し、本実施
例の含浸型陰極構体は、伝導によって陰極基体に伝えら
れる為、スリーブ開口部からの損失やヒータの足からの
熱損失が減少したためである。
The impregnated cathode structure of this example thus produced and the conventional impregnated cathode structure shown in FIG. As a result of comparative measurements of temperature and heater power, it was found that the impregnated cathode structure of this example was able to lower the heater temperature by about 300° C. on average. Furthermore, regarding the heater power, the power consumption of the heater could be reduced by about 10%. This is because the heat from the heater is transferred to the cathode substrate by radiation in the conventional type, but in the impregnated cathode structure of this example, it is transferred to the cathode substrate by conduction, so the loss from the sleeve opening is reduced. This is because heat loss from the heater legs has been reduced.

【0017】さらに、本実施例の含浸型陰極構体は、円
筒状発熱体を独立した部品として製造したものを陰極基
体を保持しているスリーブ組立て、装着,固定する方法
なので、部品の取扱いが容易となり自動化に適しており
量産性に優れている。
Furthermore, in the impregnated cathode assembly of this embodiment, the cylindrical heating element is manufactured as an independent component, and the sleeve holding the cathode base is assembled, attached, and fixed, making it easy to handle the components. Therefore, it is suitable for automation and has excellent mass production.

【0018】尚、電子放射材を陰極基体に含浸する工程
とこの円筒状発熱体の製造工程は独立しているので、ヒ
ータリード部に含浸材が付着する心配はなく、ヒータリ
ード線からのエミッションによる不具合はない。
[0018] Since the process of impregnating the cathode substrate with the electron emitting material and the process of manufacturing this cylindrical heating element are independent, there is no fear that the impregnating material will adhere to the heater lead portion, and emissions from the heater lead wire will be avoided. There are no problems caused by this.

【0019】[0019]

【発明の効果】以上説明したように本発明は、含浸型陰
極基体を支持するスリーブに、予め、ヒータをアルミナ
で埋設固定してある金属カップを挿入後固定することに
より、熱効率の良い伝導でヒータからの熱を陰極基体へ
伝えられるので、ヒータの温度を従来より低くできると
共にヒータ5の消費電力を少なくできるという効果を有
する。
[Effects of the Invention] As explained above, the present invention achieves efficient thermal conduction by inserting and fixing a metal cup in which a heater is embedded and fixed with alumina in advance into a sleeve that supports an impregnated cathode substrate. Since the heat from the heater can be transmitted to the cathode base, the temperature of the heater can be lowered than before and the power consumption of the heater 5 can be reduced.

【0020】さらには、金属カップの中にヒータをアル
ミナで埋設固定させた円筒発熱体を独立した工程で製造
した後、陰極基体を支持するスリーブに組立,装着固定
することにより、自動化が容易に出来、量産性に優れて
いるという効果を有する。
Furthermore, automation is facilitated by manufacturing the cylindrical heating element in which the heater is embedded and fixed with alumina in a metal cup in an independent process, and then assembling and attaching it to the sleeve that supports the cathode base. It has the advantage of being excellent in terms of performance and mass production.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の第1の実施例を説明する断面図である
FIG. 1 is a sectional view illustrating a first embodiment of the present invention.

【図2】本発明の第2の実施例の断面図である。FIG. 2 is a sectional view of a second embodiment of the invention.

【図3】従来の含浸型陰極構体の一例の断面図である。FIG. 3 is a cross-sectional view of an example of a conventional impregnated cathode assembly.

【符号の説明】[Explanation of symbols]

1,21,31    陰極基体 2,23,32    スリーブ 3,7,33    ろう材 4,22,26    金属カップ 5,25,34    ヒータ 6,27    埋込剤 8,35    金属支持体 9,36    外側支持筒体 10    円筒状発熱体 1, 21, 31 Cathode substrate 2, 23, 32 Sleeve 3,7,33 Brazing filler metal 4, 22, 26 Metal cup 5, 25, 34 Heater 6,27 Implants 8,35 Metal support 9, 36 Outer support cylinder 10 Cylindrical heating element

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  電子放射物質が含浸された陰極基体と
、該陰極基体を一端開口部に接合するスリーブと、該ス
リーブ内に挿入されたヒータとを具備する含浸型陰極構
体において、前記ヒータが前記スリーブと内接する金属
カップ内に埋込剤にて固定され、かつ、前記金属カップ
が前記スリーブ内に挿入固定され該スリーブの前記一端
開口部に接合された前記陰極基体を熱伝導により加熱す
る構造を有することを特徴とする含浸型陰極構体。
1. An impregnated cathode assembly comprising a cathode substrate impregnated with an electron emitting substance, a sleeve joining the cathode substrate to an opening at one end, and a heater inserted into the sleeve, wherein the heater is The cathode base body is fixed with an embedding agent in a metal cup inscribed with the sleeve, and the metal cup is inserted and fixed into the sleeve and joined to the opening at one end of the sleeve, and the cathode base body is heated by thermal conduction. An impregnated cathode structure characterized by having a structure.
JP2847791A 1991-02-22 1991-02-22 Impregnated cathode structure Expired - Fee Related JP3353303B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2847791A JP3353303B2 (en) 1991-02-22 1991-02-22 Impregnated cathode structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2847791A JP3353303B2 (en) 1991-02-22 1991-02-22 Impregnated cathode structure

Publications (2)

Publication Number Publication Date
JPH04267030A true JPH04267030A (en) 1992-09-22
JP3353303B2 JP3353303B2 (en) 2002-12-03

Family

ID=12249730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2847791A Expired - Fee Related JP3353303B2 (en) 1991-02-22 1991-02-22 Impregnated cathode structure

Country Status (1)

Country Link
JP (1) JP3353303B2 (en)

Also Published As

Publication number Publication date
JP3353303B2 (en) 2002-12-03

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