JPH0426537U - - Google Patents

Info

Publication number

JPH0426537U

JPH0426537U JP6811490U JP6811490U JPH0426537U JP H0426537 U JPH0426537 U JP H0426537U JP 6811490 U JP6811490 U JP 6811490U JP 6811490 U JP6811490 U JP 6811490U JP H0426537 U JPH0426537 U JP H0426537U

Authority

JP

Japan

Prior art keywords

position detection

aluminum

electrode

view

electrodes

Prior art date

1990-06-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
• 229910052782 aluminium Inorganic materials 0.000 claims description 6
• 238000001514 detection method Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 description 1

Cited By (1)