JPH0426526U - - Google Patents
Info
- Publication number
- JPH0426526U JPH0426526U JP6674490U JP6674490U JPH0426526U JP H0426526 U JPH0426526 U JP H0426526U JP 6674490 U JP6674490 U JP 6674490U JP 6674490 U JP6674490 U JP 6674490U JP H0426526 U JPH0426526 U JP H0426526U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- passage space
- rotating
- wafer
- mounting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000004140 cleaning Methods 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6674490U JPH0537470Y2 (https=) | 1990-06-26 | 1990-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6674490U JPH0537470Y2 (https=) | 1990-06-26 | 1990-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426526U true JPH0426526U (https=) | 1992-03-03 |
| JPH0537470Y2 JPH0537470Y2 (https=) | 1993-09-22 |
Family
ID=31599712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6674490U Expired - Lifetime JPH0537470Y2 (https=) | 1990-06-26 | 1990-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0537470Y2 (https=) |
-
1990
- 1990-06-26 JP JP6674490U patent/JPH0537470Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0537470Y2 (https=) | 1993-09-22 |
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