JPH0426525U - - Google Patents

Info

Publication number
JPH0426525U
JPH0426525U JP6839890U JP6839890U JPH0426525U JP H0426525 U JPH0426525 U JP H0426525U JP 6839890 U JP6839890 U JP 6839890U JP 6839890 U JP6839890 U JP 6839890U JP H0426525 U JPH0426525 U JP H0426525U
Authority
JP
Japan
Prior art keywords
processing chamber
stage
heating section
semiconductor wafer
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6839890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6839890U priority Critical patent/JPH0426525U/ja
Publication of JPH0426525U publication Critical patent/JPH0426525U/ja
Pending legal-status Critical Current

Links

JP6839890U 1990-06-27 1990-06-27 Pending JPH0426525U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6839890U JPH0426525U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6839890U JPH0426525U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Publications (1)

Publication Number Publication Date
JPH0426525U true JPH0426525U (enrdf_load_stackoverflow) 1992-03-03

Family

ID=31602806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6839890U Pending JPH0426525U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Country Status (1)

Country Link
JP (1) JPH0426525U (enrdf_load_stackoverflow)

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