JPH04265064A - Laser beam scanner - Google Patents

Abstract

PURPOSE:To easily miniaturize a laser beam scanner. CONSTITUTION:The recording laser beam which is emitted from a solid-state laser 12 and is optically modulated by an AOM 18 is synthesized with the reference laser beam emitted from a semiconductor laser 13 by a dichroic mirror 25. The synthesized laser beam is deflected in the main scanning direction by a polygon mirror 28 and is branched by a dichroic mirror 32. The branched reference laser beam is made incident on a linear encoder 33, and a synchronizing signal is outputted from a photoelectric transducer 31 in accordance with scanning of the laser beam.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam scanning device.

0002

[Prior Art] In a laser beam scanning device such as a laser beam recording device, a laser beam emitted from a laser generator is modulated by an acousto-optic device (AOM), and the main beam is modulated by a deflection means such as a polygon mirror (rotating polygon mirror). After being deflected in the scanning direction, it is irradiated onto a recording medium such as a photosensitive material. Deflection in the sub-scanning direction is performed by a galvanometer mirror or by transporting the recording medium at a constant speed. As a result, the laser beam is scanned in a plane on the recording medium, and images can be recorded using the laser beam.

Conventionally, in order to synchronize the deflection in the main scanning direction by the deflection means and the deflection in the sub-scanning direction, and to synchronize the deflection by the deflection means and the modulation in the acousto-optic element, one main scanning scan of the laser beam has been performed. The start point or end point is detected and the above control is performed based on this detection signal. but,
For example, when a laser beam is deflected by a polygon mirror or the like, uneven rotation of a motor or the like that rotates the polygon mirror causes uneven scanning speed. Since the above detection method only detects the start or end of one main scan of the laser beam, it cannot detect unevenness in the scanning speed during one main scan. Furthermore, even if the beam is deflected at a constant angular velocity, the scanning speed when irradiating a flat surface will not be constant. For this reason, it is not possible to control the modulation in the acousto-optic element so as to generate pixels (dots) at equal intervals on the scanning line, and distortion occurs in the recorded image.

For this reason, the present applicant has already proposed a light beam recording device that solves the above problem (Japanese Patent Publication No. 61-1
(See Publication No. 9018). The above-mentioned optical beam recording device is equipped with two gas lasers emitting laser beams with different wavelengths, for example, an Ar laser and a He-Ne laser, and a recording laser beam emitted from one and a reference laser emitted from the other. After combining the beams and deflecting them with a polygon mirror, they are split with a dichroic mirror, and the reference laser beam is scanned on a linear encoder to detect the position on the scanning line. This makes it possible to eliminate the influence of uneven scanning speed during one main scan.

[0005]

However, in the gas laser, the length of the discharge tube filled with gas is long, and it is difficult to reduce the external size. For this reason, it has been difficult to downsize the laser beam scanning device using two gas lasers.

The present invention has been made in consideration of the above facts, and an object of the present invention is to obtain a laser beam scanning device that can be easily miniaturized.

[0007]

[Means for Solving the Problems] In order to achieve the above object, a laser beam scanning device according to the present invention includes a solid-state laser that emits a laser beam of a predetermined wavelength, and a laser beam that is inputted from the solid-state laser. a semiconductor laser that emits a laser beam having a wavelength different from the predetermined wavelength; a laser beam emitted from a solid-state laser and modulated by the light modulation means; a combining means for combining and emitting a laser beam emitted from the combining means; a deflecting means for deflecting the laser beam combined by the combining means; a demultiplexing means for demultiplexing a laser beam emitted from the laser and a laser beam emitted from the semiconductor laser and emitting the same in different directions; and a laser beam emitted from the semiconductor laser and split by the demultiplexing means being incident. and a recording medium that is irradiated with a laser beam emitted from a solid-state laser and split by a splitter.

Further, it is preferable that the solid-state laser emits a laser beam with a wavelength in the visible light range, and that the recording medium is sensitive to light with a wavelength in the visible light range.

[0009]

[Operation] In the present invention, a solid-state laser that emits a laser beam of a predetermined wavelength and a semiconductor laser that emits a laser beam of a wavelength different from the predetermined wavelength are used. The laser beam is combined with the laser beam, deflected, and then demultiplexed, and a synchronization signal is generated in accordance with the scanning of the demultiplexed laser beam emitted from the semiconductor laser. Semiconductor lasers are generally smaller than gas lasers because they do not require a discharge tube filled with gas, and can provide a laser beam with a long life and stable power. Further, since solid-state lasers do not require a gas-filled discharge tube, they can be easily miniaturized, and recently many solid-state lasers that are smaller than gas lasers have been developed. By using such solid-state lasers and semiconductor lasers, it is possible to easily downsize the laser beam scanning device. In addition, since solid-state lasers can change the oscillation wavelength, by increasing the difference in wavelength between the two laser beams emitted from the solid-state laser and the semiconductor laser, the demultiplexing means can more easily distinguish between the two types of laser beams. Beams can be split.

Preferably, the solid-state laser emits a laser beam with a wavelength in the visible light range, and the recording medium is sensitive to light with a wavelength in the visible light range. For example, when irradiating a photosensitive material as a recording medium with a long wavelength laser beam through a lens, it is necessary to use a photosensitive material with spectral sensitivity that is sensitive to long wavelength light. The material deteriorates to a large extent over time. Furthermore, it is difficult to design a lens that condenses a long wavelength laser beam. For this reason, by setting the wavelength of the laser beam emitted from the solid-state laser to the visible light range (approximately 400 to 700 nm), the above problem can be solved, and the presence or absence of the laser beam emitted from the solid-state laser can be visually checked, allowing work to be carried out. Highly sexual.

[0011] Furthermore, the deflection means may be one that deflects the incident laser beam only in the main scanning direction, or may also be one that deflects the incident laser beam in the sub-scanning direction. When the deflection means deflects only in the main scanning direction, a deflection means such as a vibrating mirror for deflecting the recording medium in the sub-scanning direction may be further provided at a subsequent stage, or the recording medium may be deflected in the main scanning direction based on a synchronization signal. By transporting the recording medium in synchronization with the recording medium, images and the like can be recorded on the recording medium. Further, when the deflection means performs deflection in the main scanning direction and deflection in the sub-scanning direction, the synchronization signal generation means may be configured to detect at least the deflection in the main scanning direction.

[0012] Furthermore, it is preferable that the synchronization signal generating means irradiates an incident laser beam onto a flat surface and outputs a signal corresponding to the position of the laser beam on a scanning line, and may be constituted by, for example, a linear encoder. Can be done.

[0013]

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a laser beam recording device 10 according to the present invention. This laser beam recording device 10
is equipped with a solid-state laser 12. The solid-state laser 12 is connected to and driven by the solid-state laser driver 14 . The solid-state laser 12 emits a laser beam with a predetermined wavelength within the visible light range. Note that a ruby laser, a YAG laser, a glass laser, etc. can be used as the solid-state laser. On the laser beam emission side of the solid-state laser 12, a lens 16 and a light modulating means A are provided.
OM (acousto-optic element) 18 and lens 24 are arranged in this order. The AOM 18 includes an acousto-optic medium 21 that produces an acousto-optic effect. A transducer 17 that outputs ultrasonic waves according to an input high-frequency signal and a sound absorber 19 that absorbs the ultrasonic waves that have passed through the acousto-optic medium 21 are attached to opposing surfaces of the acousto-optic medium 21. The transducer 17 is connected to an AOM driver 20 that drives the AOM 18, and the AOM driver 20 is connected to the control circuit 2.
Connected to 2. In this embodiment, a maximum of eight laser beams are diffracted from the laser beam incident on the AOM 18 and emitted as recording laser beams.

On the laser beam exit side of the lens 24, there is a mirror 26 and a dichroic mirror 25 as a combining means.
, a polygon mirror (rotating polygon mirror) 28 as a deflecting means
, a lens 29, and a dichroic mirror 32 as a splitting means are arranged in this order. dichroic mirror 2
A lens 27 and a semiconductor laser 13 are arranged near the lens 5 . The semiconductor laser 13 is the semiconductor laser driver 1
5 and is driven by a semiconductor laser driver 15. The semiconductor laser 13 emits a laser beam having a wavelength significantly different from the predetermined wavelength as a reference laser beam. The laser beam emitted from the semiconductor laser 13 is incident on the dichroic mirror 25 via the lens 27 as a reference laser beam. The dichroic mirror 25 is configured to reflect light of a wavelength corresponding to the reference laser beam emitted from the semiconductor laser 13 and transmit light of other wavelengths. Therefore,
The recording laser beam incident on the dichroic mirror 25 is transmitted through the dichroic mirror 25, the reference laser beam is reflected by the dichroic mirror 25, and each beam is combined and emitted in the same direction, that is, toward the polygon mirror 28 side.

The polygon mirror 28 is connected to a polygon mirror driver 30.
0 to deflect the incident laser beam in the main scanning direction. The polygon mirror driver 30 includes a rotation speed detection means (not shown) that detects the rotation speed of the polygon mirror 28, and controls the polygon mirror 28 so that it rotates at a constant speed.

The recording laser beam and the reference laser beam reflected by the polygon mirror 28 and deflected in the main scanning direction are incident on the dichroic mirror 32 via the lens 29. The dichroic mirror 32 is configured to reflect light of a wavelength corresponding to the recording laser beam and transmit light of other wavelengths. Therefore, the recording laser beam incident on the dichroic mirror 32 is reflected, and the reference laser beam is transmitted through the dichroic mirror 32 and separated. A linear encoder 33 and a photoelectric converter 31 constituting a synchronizing signal generating means are arranged in this order at a position where the reference laser beam transmitted through the dichroic mirror 32 can be received. Thereby, the reference laser beam transmitted through the dichroic mirror 32 is scanned onto the linear encoder 33.

The linear encoder 33 is composed of a flat plate in which transparent portions and opaque portions are alternately arranged in stripes at a constant pitch in the main scanning direction. When this linear encoder 33 is scanned with a reference laser beam reflected by a polygon mirror 28, the reference laser beam transmitted through the transparent part is photoelectrically converted by a photoelectric converter 31, and a signal generation circuit connected to the photoelectric converter 31 A pulse signal is output to 100. This pulse signal represents deflection in the main scanning direction; specifically, the number of pulses corresponds to the position on the main scanning line of the reference laser beam, and the interval between each pulse corresponds to the main scanning speed of the reference laser beam. are doing. Signal generation circuit 100
Now, based on the input pulse signal, a galvanometer mirror control signal for synchronizing the deflection in the sub-scanning direction by the galvanometer mirror 36, which will be described later, with the deflection in the main scanning direction, and the modulation of the laser beam in the AOM 18 are as described above. A video clock signal for synchronizing deflection in the main scanning direction is generated. The galvanometer mirror control signal is input to a galvanometer mirror driver 36A that controls the angle of the galvanometer mirror, and the video clock signal is input to a character generation circuit 94 (see FIG. 2), which will be described later.

On the reflection side of the dichroic mirror 32,
A mirror 34, a galvanometer mirror 36, and a mirror 38 are arranged in this order. Galvanometer mirror 36 is coupled to galvanometer mirror driver 36A. The galvanometer mirror driver 36A controls the operation of the galvanometer mirror 36 based on the aforementioned galvanometer mirror control signal so that the galvanometer mirror 36 deflects in the sub-scanning direction in synchronization with the deflection in the main-scanning direction. The recording laser beam that is deflected in the sub-scanning direction by the galvanometer mirror 36 and reflected by the mirror 38 is irradiated onto the stage 42 through the lens 40 . There is a gap between the mirror 38 and the lens 40 during non-recording (for example,
Shutter 6 that is closed to block the laser beam when changing the recording from one frame to another, when changing the recording from one fish to another, etc.)
1 is placed. A photoelectric converter 60 is attached to the surface of the shutter 61 on the laser beam incident side. A recording material 4 such as microfilm is placed on the stage 42.
4 is placed. The recording material 44 is composed of a silver halide film that is sensitive to light with wavelengths in the visible light range. The recording material 44 is wound in layers on a reel 46 and a reel 48, respectively.

As shown in FIG. 2, it is placed at the position described above and receives the recording laser beam emitted as diffracted light from the AOM 18 and outputs a voltage corresponding to the power of the laser beam. The photoelectric converter 60 is connected to the input side of the amplifier 88 of the control circuit 22 . An ADC (analog-to-digital converter) 82 and a register 90 are connected to the output side of the amplifier 88 in this order. ADC8
2 converts the signal output from the photoelectric converter 60 and amplified by the amplifier 88 into digital data representing the power of the received laser beam. A register 90 temporarily holds the digital data. Register 90 is connected to data bus line 92. A CPU (central processing unit) 80 is also connected to the data bus line 92, and data and commands can be input and output between them. The CPU 80 performs processing based on data representing the power of the laser beam held in the register 90.

The data bus line 92 has a register 84A.
, 84B, 84C, 84D, 84E, 84F, 84G,
84H is connected, and each register is connected to a DAC (digital-to-analog converter) 86A, 86B, 86C, 8
Connected to 6D, 86E, 86F, 86G, and 86H. Registers 84A, 84B, 84C, 84D, 84E
, 84F, 84G, and 84H are supplied with digital data for adjusting the level of each of the eight laser beams emitted from the AOM 18. This digital data is for each DA.
It is converted to an analog signal by C86 and sent to AOM driver 20.
The signal is output as a level control signal to each of local level control circuits 64A to 64H, which will be described later.

A character generation circuit 9 is connected to the data bus line 92.
4 is connected. Image data transferred from a host computer or the like is supplied to the character generation circuit 94, and the character generation circuit 94 temporarily stores this data. Character generation circuit 94
A delay circuit 58 and a signal number counting circuit 54 are connected to the circuit, and the aforementioned video clock signal is input thereto. The character generation circuit 94 generates image data (8
bit) and outputs it to the delay circuit 58 and signal number counting circuit 54 in synchronization with the video clock signal, that is, the deflection of the laser beam in the main scanning direction. The delay circuit 56 delays the input image data for a predetermined period of time, and then switches the AOM driver 20 to switch circuits 66A to 66A to be described later.
66H. Therefore, the switch circuit 66A
-66H are turned on and off in synchronization with the deflection of the laser beam in the main scanning direction. On the other hand, the signal number counting circuit 54 converts the input 8-bit image data into ON (1) bits of 8 bits.
is converted into 4-bit data representing the number of digits, and output to the second DAC (digital-to-analog converter) 56.

Further, a register 50 and a first DAC (digital-to-analog converter) 52 are sequentially connected to the data bus line 92. 8-bit correction data is supplied to the register 50 from the CPU 80. This correction data is a correction amount to make the power per laser beam emitted from the AOM 18 constant regardless of the number of laser beams emitted, even when the amplitude of the signal input to the AOM 18 is changed. represents. The register 50 temporarily holds this correction data, and the first DA
Output to C52. The first DAC 52 converts the input digital correction data into an analog signal having a voltage level corresponding to the correction amount. The output terminal of the first DAC 52 is connected to the reference voltage input terminal of the second DAC 56, and the first DAC 52 converts the analog signal of the voltage level corresponding to the correction amount into the reference voltage VREF to the second DAC 56
Supply to 6.

As shown in FIG. 4, the voltage level of the signal output from the second DAC 56 is determined by the signal number counting circuit 54.
The higher the value of the data input from , that is, the more the number of image data turns on, the higher the value becomes, and the degree of increase changes depending on the voltage level of the reference voltage VREF. That is, when the voltage level of the reference voltage VREF is high, the degree to which the output voltage level of the second DAC 56 increases (the slope becomes large) with respect to the increase in the number of turned-on image data. Also, the reference voltage V
When the voltage level of REF is small, the degree to which the output voltage level of the second DAC 56 increases with respect to the increase in the number of turned-on image data becomes small (the slope becomes small). The magnitude of this slope continuously changes depending on the voltage level of reference voltage VREF. Therefore, by changing the voltage level of the reference voltage VREF, that is, the value of the correction data supplied to the register 50, the slope can be changed. Note that the voltage level of the signal output from the second DAC 56 when the number of on-states of image data is 1 is set so as not to change even if the reference voltage VREF is changed.

The output signal from the second DAC 56 is sent to the amplifier 9.
After being amplified in step 6, the signal is supplied as an amplitude correction signal to each of total level control circuits 70AB to 70GH, which will be described later, of the AOM driver 20.

As shown in FIG. 3, the AOM driver 20 includes oscillation circuits 62A, 62B, and 6 having frequencies f1 to f8, respectively.
2C, 62D, 62E, 62F, 62G, 62H, local level control circuit 64A, 64B, 64C, 64D,
64E, 64F, 64G, 64H, switch circuit 66A
, 66B, 66C, 66D, 66E, 66F, 66G,
Equipped with 66H. Local level control circuit 64A~
Each of the circuits 64H is connected to the output terminals of the oscillation circuits 62A to 62H, and the switch circuits 66A to 66H are connected to the output terminals of the local level control circuits 64A to 64H, respectively. A double balanced mixer or a pin diode attenuator can be used as the local level control circuit. Local level control circuits 64A to 64
Each of the level control terminals of H has the above-mentioned DACs 86A to 8.
Level control signals from each of the 6Hs are input. Also,
One bit of the image data input as an 8-bit parallel signal from the delay circuit 58 is input to each of the control terminals of the switch circuits 66A to 66H.

Each output terminal of the switch circuits 66A and 66B is connected to a combiner 68 that mixes two signals at a ratio of 1:1.
They are respectively connected to the input terminals of AB. Similarly, each output terminal of the switch circuits 66C, 66D is connected to the input terminal of the combiner 68CD, each output terminal of the switch circuits 66E, 66F is connected to the input terminal of the combiner 68EF, and each output terminal of the switch circuits 66G, 66H is connected to the input terminal of the combiner 68EF. is combiner 68GH
is connected to the input end of the

The output end of combiner 68AB is connected to amplifier circuit 72AB via total level control circuit 70AB. Similarly, the output terminal of the combiner 68CD is connected to the amplifier circuit 72C via the total level control circuit 70CD.
The output end of combiner 68EF is connected to amplifier circuit 72EF via total level control circuit 70EF, and the output end of combiner 68GH is connected to amplifier circuit 72GH via total level control circuit 70GH. Each output terminal of the amplifier circuits 72AB, 72CD is connected to the input terminal of the combiner 74, and the amplifier circuits 72EF, 72CD are connected to the input terminal of the combiner 74.
Each output terminal of the 2GH is connected to an input terminal of the combiner 76. The output ends of combiners 74 and 76 are connected to combiner 7
8, and the output terminal of the combiner 78 is connected to the amplifier circuit 79.
is connected to the input end of the The amplifier circuit 79 amplifies the input signal at a constant amplification factor. The output terminal of the amplifier circuit 79 is connected to the transducer 17 of the AOM 18. The total level control circuits 70AB to 70GH are composed of double balanced mixers and pin diode attenuators, and the amplitude correction signal output from the amplifier circuit 96 of the control circuit 22 described above is distributed and supplied to each level control terminal. .

Next, the operation of this embodiment will be explained. A laser beam emitted from the solid-state laser 12 is incident on the AOM 18. On the other hand, the signals output from each oscillation circuit 62A-62H are output to local level control circuits 64A-64H. The local level control circuits 64A to 64H include
A level control signal is input from each of the DACs 86A to 86H, and the amplitude is adjusted based on this level control signal. The signals level-adjusted by the local level control circuits 64A to 64H are sent to the switch circuits 66A to 66H and the combiner 68.
AB~68GH, total level control circuit 70AB~7
0GH, amplifier circuits 72AB to 72GH, combiner 74
, 76, are mixed via a combiner 78, and the amplifier circuit 7
After being amplified at a constant amplification factor at step 9, the signal is supplied to the transducer 17 of the AOM 18. The transducer 17 converts the input signals into ultrasonic signals according to the number, frequency, and amplitude of the input signals. This ultrasonic signal is
The sound propagates through the acousto-optic medium 21 and is absorbed by the sound absorber 19 . As a result, the same number of laser beams as the number of input signals from the laser beam incident from the solid-state laser 12 are emitted as recording laser beams in a direction corresponding to the frequency of each signal with a power corresponding to the amplitude of the signal. be done.

The recording laser beam emitted from the AOM 18 is incident on the dichroic mirror 25 via the lens 24 and the mirror 26, and is transmitted through the dichroic mirror 25. Further, the reference laser beam emitted from the semiconductor laser 13 is also incident on the dichroic mirror 25 via the lens 27, reflected by the dichroic mirror 25, and combined with the recording laser beam. The combined laser beam is emitted toward the polygon mirror 28, reflected by the polygon mirror 28, and deflected in the main scanning direction. The laser beam deflected in the main scanning direction is incident on the dichroic mirror 32 via the lens 29, the recording laser beam is reflected by the dichroic mirror 32, and the reference laser beam is transmitted through the dichroic mirror 32 and demultiplexed. Ru. In addition, solid-state laser 1
Since the wavelength of the recording laser beam emitted from the laser beam 2 and the wavelength of the reference laser beam emitted from the semiconductor laser 13 are significantly different as described above, the dichroic mirror 32 easily and accurately separates the wavelengths. be able to.

The reference laser beam transmitted through the dichroic mirror 32 is scanned on a linear encoder 33. The reference laser beam transmitted through the transparent portion of the linear encoder 33 is photoelectrically converted by the photoelectric converter 31, and a pulse signal corresponding to scanning in the main scanning direction is output. The signal generation circuit 100 generates a galvanometer mirror control signal and a video clock signal based on this pulse signal, and sends each to the galvanometer mirror driver 36A and the character generation circuit 9.
Supply to 4. As a result, the galvanometer mirror 36
The deflection in the sub-scanning direction and the modulation of the laser beam in the AOM 18 are performed in synchronization with the deflection in the main-scanning direction.

When recording an image on the recording material 44, the character generation circuit 94 converts image data supplied from a host computer or the like into image data of every 8 bits and passes it through the delay circuit 58 and signal number counting in the order in which the image is recorded by the laser beam. Output to circuit 54. The output timing of the image data at this time is performed in synchronization with the input video clock signal. The 8-bit image data delayed for a certain period of time by the delay circuit 58 is distributed to each switch circuit 66A to 66H one bit at a time and input. Switch circuits 66A to 66
H allows the signal to pass when the input 1-bit image data is on (1), and blocks the signal when it is off (0). Since image data is input to the switch circuits 66A to 66H at a timing synchronized with the video clock signal as described above, the switch circuits 66A to 66H are turned on and off in synchronization with the video clock signal. For this reason,
Pixels (dots) can be generated at regular intervals on the main scanning line.

On the other hand, the signal number counting circuit 54 outputs to the second DAC 56 a digital signal corresponding to the number of ON signals inputted from the character generation circuit 94. The correction data converted into an analog signal via the register 50 and the first DAC 52 is inputted as a reference voltage VREF to the second DAC 56 together with a digital signal corresponding to the number of on-states of this signal. An amplitude correction signal is output to make the power per laser beam constant regardless of the number of laser beams to be emitted. This amplitude correction signal is transmitted to the total level control circuit 70.
It is input to each of the control terminals AB to 70GH. Total level control circuits 70AB to 70GH adjust the amplitudes of the signals that have passed through switch circuits 66A to 66H based on the input amplitude correction signals. Total level control circuit 7
Each signal whose amplitude has been adjusted from 0AB to 70GH is supplied to the transducer 17 of the AOM 18 via amplifier circuits 72AB to 72GH, combiners 74 and 76, combiner 78, and amplifier circuit 79. The AOM 18 modulates the laser beam according to the input signal and emits a recording laser beam corresponding to the image to be recorded.

As described above, the recording laser beam is deflected in the main scanning direction by the polygon mirror 28, reflected by the dichroic mirror 32, and then reflected by the galvanometer mirror 36.
is incident on the The galvanometer mirror 36 is driven based on the aforementioned galvanometer mirror control signal in synchronization with the deflection in the main scanning direction, and deflects the incident recording laser beam in the sub-scanning direction. The recording laser beam deflected in the sub-scanning direction is irradiated onto a recording material 44 via a mirror 38 and a lens 40. As a result, an image is recorded on the recording material 44 without distortion.

Further, in the present laser beam recording apparatus 10, the level adjustment process is performed with the shutter 61 closed during the non-recording period of the image. This level adjustment process is performed by the switch circuit 6
6A to 66H are turned on in order to emit one laser beam from the AOM 18, and the local level control is performed so that the power of each laser beam detected by the photoelectric converter 60 is equal to the reference value corresponding to the recording magnification. circuit 6
Sets the level of the level control signal input to 4A to 64H. The set level is stored in each of the registers 84A to 84H, and is applied to the local level control circuit 64 during image recording.
Level control signals of the set levels are input to A to 64H.

Further, amplitude correction processing is also performed during the non-recording period of the image. This amplitude correction process is performed after the level adjustment process, and the power when one laser beam is emitted from the AOM 18 and the power when multiple laser beams are emitted are measured, and the laser The data value of the correction data to be set in the register is set so that the power per beam is constant regardless of the number of laser beams emitted from the AOM 18. The set correction data is stored in the register 50 while recording the image, is converted into an analog signal by the first DAC 52, and is sent to the second DAC 5.
6 as a reference voltage VREF. 2nd DAC
56 is supplied with data representing the number of laser beams to be emitted from the AOM 18 from the signal number counting circuit 54, and the second
The DAC 56 inputs an amplitude control signal corresponding to the number of laser beams emitted from the AOM 18 to each of the total level control circuits 70AB to 70GH via an amplifier 96. As a result, the power per laser beam output from the AOM 18 is constant regardless of the number of laser beams emitted from the AOM 18. Therefore, uneven density of the image is prevented.

As described above, in this embodiment, the laser generator for emitting the recording laser beam is the solid-state laser 12, and the laser generator for emitting the reference laser beam is the semiconductor laser 13, so that the laser beam recording apparatus 10 can be downsized.

In the above embodiment, an example was explained in which sub-scanning is performed by the galvanometer mirror 36, but the recording material 44 is deflected in the main scanning direction in synchronization with the deflection in the main scanning direction based on the pulse signal output from the photoelectric converter 31. The recording material 44 is transported and a laser beam deflected only in the main scanning direction is
Alternatively, an image may be recorded on the recording material 44 by irradiating the same.

In addition, in the above, AOM (
Although an example using the acousto-optic device 18 has been described, an optical waveguide type modulator may also be used.

Furthermore, although a silver halide film is used as the recording material 44 in the above example, a heat mode recording material such as a laser direct recording film (LDF) may also be used.

[0040]

As explained above, in the present invention, a solid-state laser that emits a laser beam of a predetermined wavelength and a semiconductor laser that emits a laser beam of a wavelength different from the predetermined wavelength are used. The laser beam emitted from the semiconductor laser is combined, deflected, and then demultiplexed, and a synchronization signal is generated in accordance with the scanning of the demultiplexed laser beam emitted from the semiconductor laser. An excellent effect can be obtained in that the beam scanning device can be easily downsized.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of a laser beam recording device according to an embodiment.

FIG. 2 is a schematic block diagram showing a schematic configuration near a control circuit of the laser beam recording device.

FIG. 3 is a schematic block diagram showing a schematic configuration of an AOM driver.

FIG. 4 is a diagram showing a change in the relationship between the number of ON signals and the level of an output signal when the reference voltage VREF of a DAC (digital-to-analog converter) is changed.

[Explanation of symbols]

10 Laser beam recording device 12 Solid-state laser 13 Semiconductor laser 18 AOM (acousto-optic device) 25 Dichroic mirror 28 Polygon mirror 31 Photoelectric converter 32 Dichroic mirror 33 Linear encoder 36 Galvanometer mirror 44 Recording medium 100 Signal generation circuit

Claims (2)

[Claims] 1. A solid-state laser that emits a laser beam with a predetermined wavelength; an optical modulator that modulates the laser beam incident from the solid-state laser according to an input signal and emits the laser beam; and a light modulator that emits a laser beam with a wavelength different from the predetermined wavelength. a semiconductor laser that emits a laser beam; a combining means that combines and emits a laser beam that has been emitted from a solid-state laser and has been modulated by the optical modulation means; and a laser beam that has been emitted from the semiconductor laser; a deflecting means for deflecting the laser beam combined by the wave means; and a deflecting means for deflecting the laser beam that has been deflected by the deflecting means, and for separating the laser beam emitted from the solid-state laser and the laser beam emitted from the semiconductor laser into which the laser beam deflected by the deflecting means is incident. a synchronizing signal generating means that receives a laser beam emitted from a semiconductor laser and is split by the demultiplexing means and generates a synchronizing signal in accordance with the scanning of the laser beam; A laser beam scanning device comprising: a recording medium that is irradiated with a laser beam emitted from a laser and demultiplexed by a demultiplexer; 2. The laser beam scanning device according to claim 1, wherein the solid-state laser emits a laser beam with a wavelength in the visible light range, and the recording medium is sensitive to light with a wavelength in the visible light range.