JPH04255652A - Fluorescent character display tube - Google Patents

Abstract

PURPOSE:To improve film adhesion on a translucent insulation substrate and etching workability by providing the surface of the substrate with a wiring conductor and an anode conductor of either ultra-fine granular or porous film comprising metal and metal compound. CONSTITUTION:A wiring conductor and an anode conductor 2 of a 1mum thick non-reflective aluminum film is formed on the entire surface of a translucent insulation substrate 1. In addition, a phosphor layer 5 is laid on the conductor 2, and an insulation layer 4 on a remaining area. In this case, an aluminum film containing many nitrogen or oxygen atoms is formed, and subjected to heat treatment for forming a fine granular or porous film, as a method for making a non-reflective film. The aforesaid film has a reflection prevention effect due to optical diffusion. Also, the non-reflective aluminum film is manufactured, using the same type of material as an aluminum film used in the anode substrate of a general fluorescent character display tube and, therefore, film adhesion to the substrate 1 and etching workability are improved. Furthermore, characteristic deterioration or the like for a fluorescent character display tube can be prevented and the characteristics thereof can be improved.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent display tube, and more particularly to a flat-emitting type fluorescent display tube in which an aluminum film is subjected to anti-reflection treatment.

0002

2. Description of the Related Art A flat-emitting type fluorescent display tube (hereinafter referred to as an NR flat-emitting fluorescent display tube) that has been subjected to a conventional anti-reflection treatment has a transparent material as shown in the anode substrate of a conventional fluorescent display tube in FIG. It has a structure in which a colored thin film 6, a wiring conductor made of an Al film, and an anode conductor 7 are disposed on a photosensitive insulating substrate 1, a phosphor layer 5 is disposed on the anode conductor part, and an insulating layer 4 is disposed on the other parts. Ta.

0003

[Problems to be Solved by the Invention] This conventional NR flat-emitting fluorescent display tube has an anti-reflection film in addition to the Al film.
Since a colored thin film is applied and different materials such as the Al film and the colored thin film are used, the following problems arise.

(1) The colored thin film not only becomes colored when deposited, but also has good adhesion to the Al film and the transparent insulating substrate.
Moreover, it is necessary to select a material with good etching processability.

(2) Generally, different etching solutions must be used for etching the Al film and the colored thin film, and selective etching solutions that do not cause damage to each other must be selected.

(3) For the colored thin film, a material must be selected that does not impair the characteristics of the fluorescent display tube (does not deteriorate the phosphor, etc.).

An object of the present invention is to provide a fluorescent display tube with good adhesion and etching processability, and excellent characteristics.

[0008]

[Means for Solving the Problems] The present invention provides a method in which a wiring conductor made of a metal thin film and a transparent anode conductor are disposed on one surface of a transparent insulating substrate, and a filament-shaped cathode is disposed on the anode conductor. A phosphor layer that emits light due to the impact of emitted electrons is deposited, and the light emitted from the phosphor layer is passed through the light-transmitting anode conductor and the light-transmitting insulating substrate to the other side of the light-transmitting insulating substrate. In a fluorescent display tube that is observed from the front side, a wiring conductor and an anode conductor are provided on the light-transmitting insulating substrate using either an ultrafine particle-like or porous thin film made of a metal or a metal compound. .

[0009]

Embodiments Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view of a main part of an anode substrate according to a first embodiment of the present invention.

In the first embodiment, as shown in FIG. 1, a wiring conductor and an anode conductor 2 made of a non-reflective Al film with a thickness of 1 μm are disposed on a transparent insulating substrate 1. It has a structure in which a phosphor layer 5 is provided on the anode conductor, and an insulating layer 4 is provided on the other parts.

FIG. 2 is a sectional view of a main part of an anode substrate according to a second embodiment of the present invention.

The difference between the second embodiment and the first embodiment shown in FIG. 1 is that, as shown in FIG. The only difference is that the wiring conductor and anode conductor 3 are made of a non-reflective Al film on which only the surface layer of the non-reflective Al film is formed.
The wiring conductor and anode conductor 3 are made of an Al film having a thickness of 1 .mu.m, of which 500 .ANG. on the transparent insulating substrate side is subjected to anti-reflection treatment.

[0014] As a method for anti-reflection treatment of an Al film, one of the following methods can be used to treat Al film containing a large amount of N or O atoms.
By forming a film and heat-treating it, a particulate or porous film is formed. This film has an antireflection effect due to optical scattering.

(1) Part or all of the Al film is heated (approximately 400 to 600° C.) in an N2 atmosphere.

(2) Using Al target, N2 +
In an Ar atmosphere or in an O2 + Ar atmosphere (flow rate ratio N2
/Ar=3/7, O2 /Ar=2/8), pressure about 2~
Pure Al was deposited on a film (100-1000 angstroms) obtained by reactive sputtering at 10 Torr.
A sputtered film (approximately 1 μm) was formed and heat treated (200 to 60 μm).
0°C).

(3) AlNx and AlOx (where x is 0<x<1
value) A pure Al sputtered film (approximately 1 μm) is formed on the reactive sputtered film, and heat treated (200 to 600°C
).

[0018]

Effects of the Invention As explained above, the present invention improves the conventional A
Due to the two-layer structure made of different materials, the l film and the colored thin film, A
Since the structure has been changed to a one-layer or two-layer structure made of the same material as the L film, the following effects can be obtained.

(1) Since the non-reflective Al film is made of only the same material as the Al film used for the anode substrate of general fluorescent display tubes, it has poor adhesion to the translucent insulating substrate and etching process. The quality is good with no problems at all.

(2) Since it is one type of material and is the same type of Al film that has been used conventionally, it can be processed at once using only a conventional Al etching solution (conventionally, colored thin film etching was a separate process).

(3) Since it is made of one type of material and is of the same type as the conventionally used Al film, there is no concern that the characteristics of the fluorescent display tube will be impaired (deterioration of the phosphor, etc.).

(4) Since there is no separate processing using a separate etching solution as in conventional colored thin film etching, there is no risk of damage to the Al film.

(5) Since there is no separate processing of the colored thin film, costs can be reduced by shortening the process and not using materials for the colored thin film or etching solution.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a main part of an anode substrate according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a main part of an anode substrate according to a second embodiment of the present invention.

FIG. 3 is a sectional view of a main part of an example of an anode substrate of a conventional fluorescent display tube.

[Explanation of symbols]

1 Transparent insulating substrates 2, 3 Wiring conductor and anode conductor made of non-reflective Al film 4 Insulating layer 5 Phosphor layer 6 Colored thin film

Claims (2)

[Claims] Claim 1: A wiring conductor made of a metal thin film and a transparent anode conductor are disposed on one surface of a transparent insulating substrate, and electrons emitted from a filament-shaped cathode are bombarded onto the anode conductor. A fluorescent display tube on which a light-emitting phosphor layer is deposited, and the light emission of the phosphor layer is observed from the other side of the light-transmitting insulating substrate through the light-transmitting anode conductor and the light-transmitting insulating substrate. A fluorescent display tube, characterized in that a wiring conductor and an anode conductor are provided on the light-transmitting insulating substrate by a thin film of either an ultrafine particle or a porous film made of a metal or a metal compound. 2. The fluorescent display tube according to claim 1, wherein the metal and the metal compound are mainly composed of aluminum (Al).