JPH0425234U - - Google Patents

Info

Publication number
JPH0425234U
JPH0425234U JP6569390U JP6569390U JPH0425234U JP H0425234 U JPH0425234 U JP H0425234U JP 6569390 U JP6569390 U JP 6569390U JP 6569390 U JP6569390 U JP 6569390U JP H0425234 U JPH0425234 U JP H0425234U
Authority
JP
Japan
Prior art keywords
heater
flange
attached
tube
soaking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6569390U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6569390U priority Critical patent/JPH0425234U/ja
Publication of JPH0425234U publication Critical patent/JPH0425234U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例を示す断面図、第2
図は従来例の断面図である。 2はヒータ受台、3は均熱管受座、4は外輪断
熱材、5は内輪断熱材、7は反応管、8はフラン
ジ部、14は防塵フランジを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ヒータ受台に中空のヒータを立設し、該ヒータ
    受台の下面に均熱管受座を取付け、該均熱管受座
    に断熱材を介して前記ヒータの内部に配した均熱
    管を載設し、該均熱管内部に挿入される反応管を
    該反応管の下部に形成したフランジ部を介して前
    記ヒータ受台に取付けると共に該フランジ部の上
    方に防塵フランジを形成し、該防塵フランジを前
    記均熱管受座に当接可能にしたことを特徴とする
    縦型熱処理炉。
JP6569390U 1990-06-21 1990-06-21 Pending JPH0425234U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6569390U JPH0425234U (ja) 1990-06-21 1990-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6569390U JPH0425234U (ja) 1990-06-21 1990-06-21

Publications (1)

Publication Number Publication Date
JPH0425234U true JPH0425234U (ja) 1992-02-28

Family

ID=31597750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6569390U Pending JPH0425234U (ja) 1990-06-21 1990-06-21

Country Status (1)

Country Link
JP (1) JPH0425234U (ja)

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