JPH0424548A - Co2 sensor and co2 detecting method - Google Patents
Co2 sensor and co2 detecting methodInfo
- Publication number
- JPH0424548A JPH0424548A JP12942990A JP12942990A JPH0424548A JP H0424548 A JPH0424548 A JP H0424548A JP 12942990 A JP12942990 A JP 12942990A JP 12942990 A JP12942990 A JP 12942990A JP H0424548 A JPH0424548 A JP H0424548A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- metal oxide
- capacitance
- oxide
- perovskite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 22
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 22
- 239000002131 composite material Substances 0.000 claims abstract description 15
- 239000000203 mixture Substances 0.000 claims abstract description 9
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005755 formation reaction Methods 0.000 claims description 5
- 230000002441 reversible effect Effects 0.000 claims description 5
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 3
- 150000002602 lanthanoids Chemical class 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- 229910052745 lead Inorganic materials 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 13
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 7
- 150000001875 compounds Chemical class 0.000 abstract description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052709 silver Inorganic materials 0.000 abstract description 3
- 239000004332 silver Substances 0.000 abstract description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 229910000873 Beta-alumina solid electrolyte Inorganic materials 0.000 description 1
- 229910004774 CaSnO3 Inorganic materials 0.000 description 1
- 229910002971 CaTiO3 Inorganic materials 0.000 description 1
- 229910002254 LaCoO3 Inorganic materials 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052588 hydroxylapatite Inorganic materials 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- XYJRXVWERLGGKC-UHFFFAOYSA-D pentacalcium;hydroxide;triphosphate Chemical compound [OH-].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O XYJRXVWERLGGKC-UHFFFAOYSA-D 0.000 description 1
- -1 plain pbo Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の利用分野１
この発明は、金属酸化物の静電容量の変化を用いたＣＯ
，の検出に関する。Detailed Description of the Invention [Field of Application of the Invention 1] This invention is a CO
, concerning the detection of .
［従来技術Ｉ
ＣＯ２は化学的に極めて安定なガスであり、検出が最も
雌しいガスである。現在検討されているＣＯ２センサに
は、β−アルミナやに、ＣＯ３等のｃｏ、！−イオン導
電体を用し）るものがある。このセンサでは、参照雰囲
気とＣＯ２含有雰囲気とのＣＯｒ濃度の相違により、導
電体に起電力を発生させ、ＣＯ２を検出する。[Prior Art I CO2 is a chemically extremely stable gas and is the most difficult gas to detect. CO2 sensors currently being considered include β-alumina, CO3, etc. - There are some that use ionic conductors). This sensor detects CO2 by generating an electromotive force in the conductor due to the difference in COr concentration between the reference atmosphere and the CO2-containing atmosphere.
これ以外に特公昭５２−、ＩＩ ３．５９１号は、Ｂａ
Ｔ１０３等のペロブスカイト化合物を、ガスセンサに用
いることを提案している。センサの出力には、ペロブス
カイト化合物の抵抗値を用いる。しかしＢａＴｉ○、の
抵抗値は、ＣＯｌによってはほとんど変化しない。これ
とは別に、特開昭６１−２６２゜６４７号は、水酸化ア
パタイトの抵抗値からＣＯ３を検出することを提案して
いる。In addition to this, Special Publication No. 52-, II 3.591 is Ba
It is proposed that perovskite compounds such as T103 be used in gas sensors. The resistance value of the perovskite compound is used for the sensor output. However, the resistance value of BaTi○ hardly changes depending on COl. Separately, Japanese Patent Application Laid-Open No. 61-262゜647 proposes detecting CO3 from the resistance value of hydroxyapatite.
［発明の課題］
この発明の課題は、高感度でかつ応答速度が速く、ＣＯ
７に選択的な、ＣＯ，センサとＣＯ□検出方法とを得る
ことにある。[Problem of the invention] The object of the invention is to provide high sensitivity and fast response speed, and to
The object of the present invention is to obtain a CO sensor and a CO□ detection method that are selective to 7.
［発明の構成］
この発明では、ペロブスカイト金属酸化物と非複合系金
属酸化物とを混合し、その静電容量の変化から、ＣＯ３
を検出する。静電容量の変化は、非複合系金属酸化物と
ＣＯ３との可逆的炭酸塩形成反応に基づくものと考えら
れる。単味のペロブスカイト金属酸化物や単味の非複合
系金属酸化物では、ＣＯ２と接触しても、静電容量はほ
とんど変化しない。[Structure of the invention] In this invention, a perovskite metal oxide and a non-composite metal oxide are mixed, and from the change in capacitance, CO3
Detect. The change in capacitance is believed to be based on the reversible carbonate formation reaction between the non-composite metal oxide and CO3. In a simple perovskite metal oxide or a simple non-composite metal oxide, the capacitance hardly changes even if it comes into contact with CO2.
用いる非複合系金属酸化物は、可逆的な炭酸塩形成反応
が容易なものが好ましい。このようなものには、アルカ
リ土類金属の酸化物、Ｃｒ及びＦｅ。The non-composite metal oxide used is preferably one that can easily undergo a reversible carbonate formation reaction. These include oxides of alkaline earth metals, Cr and Fe.
Ｃｏ、 Ｎｉ、 Ｃｕ、の酸化物、Ｙ及びＺｒの酸化物
、Ｐｂ及びＢ１の酸化物、原子番号５７〜７２のランタ
ニド元素の酸化物等がある。Examples include oxides of Co, Ni, and Cu, oxides of Y and Zr, oxides of Pb and B1, and oxides of lanthanide elements having atomic numbers of 57 to 72.
［実施例］ （ガスセンサの調製） ペロブスカイト化合物として、ＢａＴｉＯ３を選んだ。[Example] (Preparation of gas sensor) BaTiO3 was chosen as the perovskite compound.
ペロブスカイト化合物には、これ以外にＣａＴｉＯ３，
５ｒＴｉＯｘ等のアルカリ土類とＴｉとのペロブスカイ
ト、Ｂａ５ｎＯ，、ＣａＳｎＯ３等のアルカリ土類とＳ
ｎとのペロブスカイト、ＬａＮｉ０＋ＬａＣｏＯ３，Ｌ
ａＭｎＯｓ等の、ランタニド元素と遷移金属元素とのペ
ロブスカイト、あるいはＣａＺｒ○３＋ ５ｒＣｅＯ
ｓ等がある。In addition to this, perovskite compounds include CaTiO3,
Perovskite of alkaline earth such as 5rTiOx and Ti, alkaline earth such as Ba5nO, CaSnO3 and S
Perovskite with n, LaNi0+LaCoO3,L
Perovskites of lanthanide elements and transition metal elements such as aMnOs, or CaZr○3+ 5rCeO
There are s etc.
ＢａｃＯ３とＴ ｉ Ｏｚとの等モル混合物を１２００
°Ｃで１２時間焼成し、ＢａＴｉ０．を得た。ＢａＴｉ
０１に各種の非複合系金属酸化物を等モル量混合し、デ
ィスク状に圧縮成型して、５００℃で１時間焼成した。An equimolar mixture of BacO3 and T i Oz was added to 1200
℃ for 12 hours, BaTi0. I got it. BaTi
01 was mixed with equimolar amounts of various non-composite metal oxides, compression molded into a disk shape, and fired at 500° C. for 1 hour.
混合比は等モル量でなくても良い。The mixing ratio does not have to be equimolar.
焼成後のディスクの両面に銀ペーストを塗布し、第５図
のＣ０２センサとした。図において、２はペロブスカイ
ト金属酸化物と非複合系金属酸化物との混合焼結ディス
ク（直径１３１ｍ、厚さ１ ａｍ）、４は銀電極である
。Silver paste was applied to both sides of the fired disk to form the C02 sensor shown in FIG. In the figure, 2 is a mixed sintered disk of perovskite metal oxide and non-composite metal oxide (diameter 131 m, thickness 1 am), and 4 is a silver electrode.
ＣＯ２センサを流通系に設置し、ヒータで加熱して、２
端子法で抵抗値や静電容量の変化を測定した。試料ガス
には、乾燥空気でＣＯ２を希釈したものを用いた。抵抗
値の変化は一般に僅かであっｌこ。Install the CO2 sensor in the distribution system, heat it with a heater, and
Changes in resistance and capacitance were measured using the terminal method. The sample gas used was CO2 diluted with dry air. The change in resistance value is generally small.
第１図に、単味のＢａＴｉＯ３，単味のｐｂｏと、Ｂａ
Ｔｉ０．とｐｂｏとの等モル混合物との、ＣＯ。Figure 1 shows plain BaTiO3, plain pbo, and BaTiO3.
Ti0. CO with an equimolar mixture of and pbo.
による容量の変化を示す。測定温度は５００℃、縦軸は
乾燥空気中を基準とするＣＯ２中での静電容量を、横軸
はＣＯ２濃度を表す。単味のＢａＴｉＯ３や単味のＰｂ
Ｏの容量はＣＯ３ではほとんど変化せず、ＢａＴｉ０．
−ＰｂＯ系の容量はＣＯ２で減少する。This shows the change in capacitance due to The measurement temperature was 500° C., the vertical axis represents the capacitance in CO2 based on dry air, and the horizontal axis represents the CO2 concentration. Plain BaTiO3 and plain Pb
The capacity of O hardly changes with CO3, and with BaTi0.
The capacity of the -PbO system decreases with CO2.
第２図に、ＣｕＯとＢａＴｉＯｓとの等モル混合物の、
ＣＯｌによる容量の変化を示す。測定温度は４５６℃で
ある。低濃度のＣＯ７へはこの系で最も高い感度が得ら
れ、他の系とは異なりＣＯｌとの接触で静電容量が増加
した。最適動作温度は４５６°Ｃと低い。FIG. 2 shows an equimolar mixture of CuO and BaTiOs.
It shows the change in capacitance due to CO1. The measurement temperature is 456°C. This system had the highest sensitivity to low concentrations of CO7, and unlike the other systems, the capacitance increased on contact with CO1. The optimum operating temperature is as low as 456°C.
第３図に、ＣｕＯ−ＢａＴｉＯ３系でのｃｏ、、ｃｏ。Figure 3 shows co, , co in the CuO-BaTiO3 system.
Ｈ，、ＣＨ，への応答波形を示す（測定温度４５６°Ｃ
）。ガス濃度は各２％で、ＣＯ，への感度が最も高く、
ＣＯへの感度がこれに次ぎ、Ｎ２やＣＨ。Shows the response waveform to H,,CH, (measured temperature 456°C
). The gas concentration is 2% each, and the sensitivity to CO is the highest.
Sensitivity to CO comes next, followed by N2 and CH.
にはほとんど感じない。ＣＯの一部はセンサとの接触で
ＣＯ７に酸化されており、ＣＯへの感度がセンサ表面で
のＣＯ−＋ＣＯ２酸化反応で発現することが分かる。セ
ンサはＮ７やＣＨｔには感じず、ＣＯ３の検出目標濃度
はＣＯの検出目標濃度に比べ充分高いので、このセンサ
は実質的にＣＯ２に選択的である。I hardly feel it. It can be seen that some of the CO is oxidized to CO7 upon contact with the sensor, and that sensitivity to CO is expressed through the CO-+CO2 oxidation reaction on the sensor surface. The sensor is not sensitive to N7 or CHt, and the detected target concentration of CO3 is sufficiently higher than that of CO, so the sensor is substantially selective to CO2.
２％のＣＯ２に対する８０％応答時間は２５秒、ＣＯ２
含有雰囲気から空気中へ雰囲気を変更した際の回復応答
時間は１８０秒程度である。応答速度は、充分に実用的
な速さである。80% response time for 2% CO2 is 25 seconds, CO2
The recovery response time when changing the atmosphere from a containing atmosphere to air is about 180 seconds. The response speed is fast enough for practical use.
第４図に、Ｎ１Ｏ−ＢａＴｉＯｓの等モル混合物での、
静電容量のＣＯ１濃度依存性を示す。図の上部には、静
電容量Ｃを縦軸にＣＯ２への応答波形を示す。測定温度
は５５５℃である。FIG. 4 shows that in an equimolar mixture of N1O-BaTiOs,
The dependence of capacitance on CO1 concentration is shown. At the top of the figure, the response waveform to CO2 is shown with capacitance C as the vertical axis. The measurement temperature is 555°C.
表１に、各種非複合系金属酸化物とＢａＴｉ０゜との等
モル混合物について、検出特性を示す。Table 1 shows the detection characteristics of equimolar mixtures of various non-composite metal oxides and 0° BaTi.
表 Ｉ Ｃｏ２検出特性
酸化物１′ 誘電率２′ 動作温度（°ｃ） ３
１
ＣａＯｌ ９．６４ ＞９００”
ＭｇＯ２２，２１８７Ｏ
Ｌａ２０３ １１．２８ ７６６
ＮｄｚＯｓ １１．２７ ５５０ＹｚＯｓ
１０．２１ ７５９
ｃｅｔｏｓ ２２．０９ ６６１ＰｂＯ６６，９
４５０１
Ｎｉｏ ４７．８１ ５５５
ＣｕＯ１０９，６１４５６
Ｚｒ（Ｌ １７．４５ ６４２
Ｃｏｓｔ４１７１−９３ ５２８
Ｆｅｚｏｓ ２７．１７ ３４１Ｂｉ、Ｏ３２７
，８３４４５
ＶｘＯｓ １９．８６ ・・・Ｓｉｎｇ
１３．４２ ・・・ｌ）：非複合系金属酸化物
、
Ｃｏ３０．は ＢａＴｉ０ｓ ： Ｃｏ３Ｏ４−３＝Ｃ
Ｏ２感度０
０．８９１
０．３２９
０．４５１
０．６４１
０．７９４
０．４１０
０．７１１
０．４４１
２．８９２
０．７４０
０．３６２
０．６７８
０．８２４
１．００
１．００
１゜
２）：３００℃の空気中の誘電率
３）：最適動作温度。Table I Co2 detection characteristics Oxide 1' Dielectric constant 2' Operating temperature (°c) 3
1 CaOl 9.64 >900” MgO22,2187O La203 11.28 766 NdzOs 11.27 550YzOs
10.21 759 cetos 22.09 661PbO66,9
4501 Nio 47.81 555 CuO109,61456 Zr(L 17.45 642 Cost4171-93 528 Fezos 27.17 341Bi, O327
,83445 VxOs 19.86...Sing
13.42...l): Non-composite metal oxide, Co30. is BaTi0s: Co3O4-3=C
O2 sensitivity 0 0.891 0.329 0.451 0.641 0.794 0.410 0.711 0.441 2.892 0.740 0.362 0.678 0.824 1.00 1.00 1° 2): Dielectric constant in air at 300°C 3): Optimum operating temperature.
４）：２％のＣＯ２への感度、ＣＣＯ，／Ｃａ１ｒ。4): Sensitivity to 2% CO2, CCO,/Ca1r.
５）：感度の飽和が生じるＣＯ２濃度、％単位６）：９
００℃以上。5): CO2 concentration at which sensitivity saturation occurs, in % 6): 9
00℃ or higher.
表から明らかなように、Ｃｕ０−ＢａＴｉｏ、系で最も
高感度になり、ＣｕＯではＣ０２により容量が増加し、
他の酸化物ではＣＯ２で容量が減少する。As is clear from the table, the Cu0-BaTio system has the highest sensitivity, and in CuO, the capacity increases with CO2,
Other oxides have reduced capacity with CO2.
高い感度が得られる非複合系金属酸化物はＣｕ○ＭｇＯ
，Ｌａ、Ｏ，、ＣｅＯ，、Ｎｉ○、Ｃｏ、Ｏ，であり、
これらはいずれも可逆的な炭酸塩形成反応が容易な酸化
物である。炭酸塩が安定なＣａＯでは感度は低く、最適
動作温度も高い。また最適動作温度は、炭酸塩の安定性
が高い程高い。更に炭酸塩を形成しない、Ｖ２Ｏ，やＳ
１０．では感度が得られない。これらのことから、ＣＯ
，による容量の変化は、非複合系金属酸化物とＣＯ７と
の可逆的反応による炭酸塩の形成に基づくものと考えら
れる。A non-composite metal oxide that provides high sensitivity is Cu○MgO.
, La, O, , CeO, , Ni○, Co, O,
All of these are oxides that easily undergo a reversible carbonate formation reaction. For CaO, where the carbonate is stable, the sensitivity is low and the optimum operating temperature is high. Furthermore, the more stable the carbonate, the higher the optimum operating temperature. Additionally, V2O, and S, which do not form carbonates.
10. Sensitivity cannot be obtained. From these facts, CO
The change in capacity due to , is considered to be based on the formation of carbonate due to the reversible reaction between the non-complex metal oxide and CO7.
［発明の効果］
この発明では、ＣＯ７に選択的で応答速度が速く、かつ
高感度な、ＣＯ２センサとＣＯ２検出方法とが得られる
。この発明では金属酸化物の容量の変化を利用し、β−
アルミナやに２Ｃ○１等の固体電解質センサとは異なり
、標準雰囲気を必要としない。[Effects of the Invention] The present invention provides a CO2 sensor and a CO2 detection method that are selective to CO7, have a fast response speed, and are highly sensitive. In this invention, β-
Unlike solid electrolyte sensors such as alumina and 2C○1, it does not require a standard atmosphere.
第１図はＢａＴｉ０ｓ−ＰｂＯ系ｃｏ、センサの濃度特
性を示す特性図、
第２図はＣｕＯ−ＢａＴ ｉｏ 、系ＣＯ，センサの濃
度特性を示す特性図、
第３図はＣｕ０−ＢａＴｉｏ３系ＣＯ□センサの応答波
形を示す特性図、
第４図はＮ１Ｏ−ＢａＴｉＯｘ系ＣＯ，センサの濃度特
性を示す特性図、
第５図は、実施例のＣＯ，センサの斜視図である。
第
図
第
図
ｒｎ。
（’／、 ）
第
図
第
図
第４
図
ＣＯ２（’１０）Figure 1 is a characteristic diagram showing the concentration characteristics of BaTi0s-PbO system CO, sensor. Figure 2 is a characteristic diagram showing the concentration characteristics of CuO-BaTio, system CO, sensor. Figure 3 is Cu0-BaTio3 system CO□. FIG. 4 is a characteristic diagram showing the response waveform of the sensor; FIG. 4 is a characteristic diagram showing the concentration characteristics of the N1O-BaTiOx-based CO sensor; FIG. 5 is a perspective view of the CO sensor of the example. Figure Figure rn. ('/, ) Figure Figure 4 Figure CO2 ('10)
Claims (3)
物との混合物の、静電容量の変化を用いたＣＯ＿２セン
サ。(1) A CO_2 sensor that uses changes in capacitance of a mixture of a perovskite metal oxide and a non-composite metal oxide.
の酸化物、Ｃｒ及びＦｅ、Ｃｏ、Ｎｉ、Ｃｕ、の酸化物
、Ｙ及びＺｒの酸化物、Ｐｂ及びＢｉの酸化物、原子番
号５７〜７２のランタニド元素の酸化物、からなる群の
少なくとも一員の酸化物としたことを特徴とする、請求
項１のＣＯ＿２センサ。(2) The non-composite metal oxide may be an alkaline earth metal oxide, an oxide of Cr and Fe, Co, Ni, Cu, an oxide of Y and Zr, an oxide of Pb and Bi, or an atom. 2. The CO_2 sensor according to claim 1, wherein the CO_2 sensor is an oxide of at least one member of the group consisting of oxides of lanthanide elements numbered 57 to 72.
物とを混合して、ＣＯ＿２センサとし、センサ中の非複
合系金属酸化物と、ＣＯ＿２との可逆的な炭酸塩形成反
応により、センサの静電容量を変化させ、 この静電容量の変化から、ＣＯ＿２を検出する、ＣＯ＿
２検出方法。(3) A CO_2 sensor is made by mixing a perovskite metal oxide and a non-composite metal oxide, and a reversible carbonate formation reaction between the non-composite metal oxide in the sensor and CO_2 causes the sensor to CO_2 is detected by changing the capacitance and from this change in capacitance.
2 detection method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12942990A JP2911962B2 (en) | 1990-05-18 | 1990-05-18 | CO Bottom 2 sensor and CO Bottom 2 detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12942990A JP2911962B2 (en) | 1990-05-18 | 1990-05-18 | CO Bottom 2 sensor and CO Bottom 2 detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0424548A true JPH0424548A (en) | 1992-01-28 |
| JP2911962B2 JP2911962B2 (en) | 1999-06-28 |
Family
ID=15009273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12942990A Expired - Lifetime JP2911962B2 (en) | 1990-05-18 | 1990-05-18 | CO Bottom 2 sensor and CO Bottom 2 detection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2911962B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5993624A (en) * | 1995-12-07 | 1999-11-30 | Matsushita Electric Industrial Co., Ltd. | Carbon dioxide gas sensor |
-
1990
- 1990-05-18 JP JP12942990A patent/JP2911962B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5993624A (en) * | 1995-12-07 | 1999-11-30 | Matsushita Electric Industrial Co., Ltd. | Carbon dioxide gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2911962B2 (en) | 1999-06-28 |
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