JPH04244387A - Circle marking plate for positioning and method for positioning monocrystal bar relating to clamp rotary shaft - Google Patents

Abstract

PURPOSE:To facilitate positioning of a monocrystal bar relating to a clamp rotary shaft in a monocrystal bar peripheral surface grinding device used in the case of grinding a monocrystal bar peripheral surface of semiconductors or the like. CONSTITUTION:In a positioning marking plate 40, a marking hole 42 of diameter almost equal to a clamp rotary shaft for grinding a monocrystal bar peripheral surface is formed to draw a hole positioning circle 43, concentrical with this hole 42 and of diameter almost equal to a monocrystal bar 20, in a transparent plate 41. A circular mark is drawn in a monocrystal bar cut section 21L along a peripheral surface of the marking hole 42 to clamp the monocrystal bar 20 by the clamp rotary shaft by aligning the circular mark to a point end surface of the clamp rotary shaft so that this circular mark is concentrical with the clamp rotary shaft.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to a circular marking plate for positioning used when grinding the peripheral surface of a single crystal rod such as a semiconductor into a cylindrical shape, and a clamp rotating shaft of a device for grinding the peripheral surface of a single crystal rod. This invention relates to a method for positioning a single crystal rod.

0002

2. Description of the Related Art A single crystal rod grown by the CZ method or the FZ method is made into a cylindrical shape through the following steps.

(1) Both ends of a single crystal rod are cut in a direction perpendicular to the axis to make the single crystal rod into a substantially cylindrical shape.

(2) As shown in FIG. 5, clamp rotating shafts 31L and 31R are pressed against the cut surfaces 21L and 21R of the single crystal rod 20 to weakly clamp the single crystal rod 20. Gauges 70 and 71 are fixedly arranged above both ends of the single crystal rod 20, and these shape detection movable pins are brought into elastic contact with the circumferential surface of the single crystal rod 20. In this state, the single crystal rod 20 is rotated, and the circumferential shape of the single crystal rod 20 is measured using the gauges 70 and 71. Find the positional deviation between.

(3) The rotation of the single crystal rod 20 is stopped, and the end of the single crystal rod 20 is hit with a hammer to correct this positional deviation.

(4) The above (2) until the positional deviation is eliminated.
and repeat (3).

(5) The single crystal rod 20 is strongly clamped by the clamp rotation shafts 31L and 31R, the single crystal rod 20 is rotated, and a grindstone is pressed against the circumferential surface of the single crystal rod 20 to move the single crystal rod 20. Grind into a cylindrical shape.

[0008]

[Problem to be Solved by the Invention] However, when clamping the single crystal rod 20 in the above (1), the position of the single crystal rod 20 is determined by visual inspection by the operator, which results in relatively large positional deviations. In order to correct this, the single crystal rod 20 had to be hit many times with a hammer, which was unfavorable in terms of the quality of the single crystal rod 20.

[0009] Furthermore, since it is necessary to repeatedly perform the process (2) above, the work is complicated and the work time becomes long.

[0010] In view of these problems, the purpose of the present invention is to
It is an object of the present invention to provide a circular marking plate for positioning that facilitates positioning of a single crystal rod with respect to a clamp rotation axis, and a method for positioning a single crystal rod with respect to a clamp rotation axis.

[0011]

[Means for Solving the Problem] In order to achieve this object, a marking hole having approximately the same diameter as the rotation axis of the clamp for grinding the peripheral surface of a single crystal bar is formed in the transparent plate, and the marking hole is concentric with the hole. Provided is a positioning circle marking plate according to the present invention, on which a hole positioning circle having approximately the same diameter as a single crystal rod is drawn.

This circular marking plate for positioning is used in the following manner.

That is, the positioning circle marking plate is applied to the cut surface of the single crystal rod, and the marking hole is positioned based on the positional relationship between the hole positioning circle of the positioning circle marking plate and the outer periphery of the single crystal rod, Draw a circle mark on the cut surface of the single crystal rod along the circumferential surface of the marking hole of the circular marking plate for positioning, and draw the circle so that the circle mark and the rotation axis of the clamp for grinding the circumferential surface of the single crystal rod are concentric. The single crystal rod is clamped with the clamp rotation shaft by aligning the mark with the front end surface of the clamp rotation shaft.

[0014]

[Operation] By such an easy operation, the circle mark and the clamp rotation axis become concentric, and even if there is a deviation between them, the deviation will be only slight.

Furthermore, since a circle mark is drawn on the cut surface, this slight correction can be easily made.

Furthermore, since the work is easy, even an unskilled person can perform such positioning work accurately and in a short time.

[0017]

Embodiments Hereinafter, embodiments of the present invention will be explained based on the drawings.

(1) First embodiment As shown in FIG. 1, a circular marking plate 4 for positioning
0, a marking hole 42 is formed in the center of a rectangular transparent plate 41, for example, an acrylic plate. The inner diameter of this marking hole 42 is several mm larger than the outer diameter of the clamp rotating shafts 31L and 31R, which have the same diameter and are shown in FIG. 3. The circle marking plate 40 also has a hole positioning circle 43 drawn on the surface of a transparent plate 41, which is concentric with the marking hole 42. This hole positioning circle 43 can be accurately and easily marked using a lathe, for example. The diameter of the hole positioning circle 43 is, for example, equal to the target outer diameter of the single-crystal rod 20 that grinds the circumferential surface of the single-crystal rod 20 to form a cylindrical shape, and is equal to the average diameter of the single-crystal rod 20 at the cut surfaces 21L and 21R. A few mm smaller than the diameter.

Next, a method of using the circular marking plate 40 constructed as described above will be explained.

(1) In FIG. 1, a circular marking plate 40 is applied to the cut surface 21L of the single crystal rod 20.

(2) As shown in FIG. 2, the marking hole 42 is positioned based on the relationship between the cut surface 21L of the single crystal rod 20 and the hole positioning circle 43. For example, the marking hole 42 is positioned so that the hole positioning circle 43 and the assumed inscribed circle of the cut surface 21L are concentric.

(3) With the circle marking plate 40 pressed against the cut surface 21L, draw a circle mark along the circumferential surface of the marking hole 42 using, for example, a felt marker.

(4) The above (1) to (3) are combined into a single crystal rod 2
This is done for the other cut surface 21R of 0.

(5) In FIG. 3, the cut surface 21L of the single crystal rod 20 is brought into contact with the tip end surface of the clamp rotation shaft 31L, and the circle mark 22L and the clamp rotation shaft 31L are visually aligned to be concentric. In this state, the clamp rotation shaft 31R is brought close to the cutting surface 21R, and in this state, the clamp rotation shaft 31R and the circular mark 22R are concentric (center axis A).
), and press the tip of the clamp rotating shaft 31R against the cut surface 21R. In addition, the clamp rotation shaft 31L
is a rotation drive shaft, and the clamp rotation shaft 31R is a rotation driven shaft.

[0025] With such easy work, the circle mark 2
2L and the clamp rotation axis 31L, and the circular mark 22R and the clamp rotation axis 31R are concentric, and even if there is a deviation between them, the deviation will be very small.

Circular marks 22L and 22R are drawn on the cut surfaces 21L and 21R, respectively, and these circular marks 22L and 22R can be visually observed in the clamped state (the inner diameter of the marking hole 42 is the same as that of the clamp rotation shafts 31L and 31R). (It is several mm larger than the outer diameter.) Therefore, this slight correction can be easily made.

(2) Second Embodiment FIG. 4 shows a circular marking plate 50 of a second embodiment. In this circular marking plate 50, three marking holes 531, 532, and 533 are drawn concentrically with a marking hole 52 formed in the center of the transparent plate 51. The diameters of the marking holes 531, 532 and 533 are:
For example, the cylinder target outer diameters of the single crystal rod 20 are equal to 2 inches, 4 inches, and 5 inches, respectively.

Therefore, single crystal rods 20 of various diameters can be easily and accurately clamped to the clamp rotating shaft using one circular marking plate 50 as described above.

[0029]

As explained above, according to the circular marking plate for positioning and the method for positioning a single crystal bar with respect to the clamp rotating shaft according to the present invention, the circular mark and the clamp rotating shaft can be concentrically aligned by an easy operation. Even if there is a deviation between these, the deviation will be very small, and since a circle mark is drawn on the cut surface, this slight correction can be easily made, which is an excellent effect and saves work time. This greatly contributes to shortening the time and reducing single crystal manufacturing costs.

[Brief explanation of the drawing]

1 is a perspective view showing a circular positioning marking plate of a first embodiment in relation to a single crystal bar; FIG.

FIG. 2 is a plan view showing a state in which marking holes are positioned on a cut surface of a single crystal rod.

FIG. 3 is a perspective view showing a state before a single crystal rod with a circle mark drawn on its cut surface is clamped by a clamp rotating shaft.

FIG. 4 is a plan view of a circular marking plate for positioning according to a second embodiment.

[Figure 5] Diagram explaining the problems of the conventional method

[Explanation of symbols]

20 Single crystal rod 21L, 21R Cut surface 22L, 22R Yen mark 31L, 31R Clamp rotation axis 40, 50 circle marking plate 41, 51 Transparent plate 42, 52 Marking hole 43, 531-533 Hole positioning circle

[Outside 1]

Claims (2)

[Claims] 1. Marking holes (42, 52) having approximately the same diameter as the clamp rotating shafts (31L, 31R) for grinding the peripheral surface of a single-crystal rod are formed in the transparent plate (41, 51). A positioning circle marking plate characterized in that a hole positioning circle (43, 531 to 533) is drawn concentrically with the hole and having approximately the same diameter as the single crystal rod (20). [Claim 2] The circular marking plate for positioning (40
, 50), position the marking holes (42, 52) from the positional relationship between the hole positioning circles (43, 53) of the positioning circle marking plate and the outer periphery of the single crystal rod, and mark the positioning circle markings. Circle marks (22L, 2
2R), and align the circle mark and the end surface of the clamp rotation shaft so that the circle mark and the clamp rotation shaft (31L, 31R) for grinding the circumferential surface of the single crystal rod are concentric, and then grind the single crystal rod. A method for positioning a single crystal rod with respect to a clamp rotation axis, the method comprising: clamping the single crystal rod with the clamp rotation axis.