JPH04244289A - Treatment of washing water - Google Patents

Treatment of washing water

Info

Publication number
JPH04244289A
JPH04244289A JP3008738A JP873891A JPH04244289A JP H04244289 A JPH04244289 A JP H04244289A JP 3008738 A JP3008738 A JP 3008738A JP 873891 A JP873891 A JP 873891A JP H04244289 A JPH04244289 A JP H04244289A
Authority
JP
Japan
Prior art keywords
activated carbon
washing water
washing
water
hollow fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3008738A
Other languages
Japanese (ja)
Other versions
JP3128249B2 (en
Inventor
Hiroshi Kobayashi
博司 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP03008738A priority Critical patent/JP3128249B2/en
Publication of JPH04244289A publication Critical patent/JPH04244289A/en
Application granted granted Critical
Publication of JP3128249B2 publication Critical patent/JP3128249B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption
    • C02F1/283Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/42Treatment of water, waste water, or sewage by ion-exchange
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00Multistage treatment of water, waste water or sewage

Landscapes

  • Treatment Of Water By Ion Exchange (AREA)
  • Water Treatment By Sorption (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PURPOSE:To reduce the load of org. matter to activated carbon to a large extent and to recycle and utilize washing water of good quality by subjecting washing water to ultrafiltration using a hollow fiber ultrafiltration membrane and subsequently treating the same with activated carbon and an ion exchange resin in succession to return the treated water to a washing process. CONSTITUTION:Washing water containing emulsified matter due to a surfactant or alkali is subjected to ultrafiltration by an ultrafiltration device 1 using a hollow fiber ultrafiltration membrane and subsequently treated with activated carbon in an activated carbon column 2. Next, when a large amount of ions are contained in the washing water treated with activated carbon, ion components are removed by an ion exchange resin column 3 and the treated water is returned to a washing process 4 to be circulated and used as washing water. When the hollow fiber ultrafiltration membrane is used, a cylindrical container is packed with a large number of hollow fibers in order to obtain a large filtering area and said fibers are pref. used in such a state that both ends thereof are sealed with a sealant such as an epoxy or urethane resin in an open state.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、界面活性剤水溶液、エ
マルジョン洗浄剤、アルカリ洗浄剤等の水系洗浄剤や水
すすぎを必要とする有機溶剤を主体として準水系洗浄剤
による、金属、ガラス、プラスチック、セラミックス等
の脱脂洗浄やプリント基板のはんだフラックス洗浄の水
洗工程の水洗水を処理して水洗工程に戻し、水洗水とし
て循環使用する方法に関するものである。
[Industrial Application Field] The present invention is applicable to the cleaning of metals, glass, etc. using semi-aqueous cleaning agents mainly consisting of aqueous cleaning agents such as surfactant aqueous solutions, emulsion cleaning agents, alkaline cleaning agents, and organic solvents that require water rinsing. The present invention relates to a method of treating rinsing water from the rinsing process for degreasing plastics, ceramics, etc. and cleaning solder flux for printed circuit boards, returning it to the rinsing process, and recycling it as rinsing water.

【0002】0002

【従来の技術】水系洗浄剤または準水系洗浄剤による脱
脂洗浄やフラックス洗浄の水洗工程から排出される水洗
水には、洗浄剤や汚れに由来する界面活性剤、有機溶剤
、油、ロジン、アルカリ金属塩、乳化物等が多量に混入
してくる。この水洗水を循環使用するためには、循環機
構の中で、これらの混入物を除去処理する必要がある。
[Prior Art] Washing water discharged from the washing process of degreasing and flux cleaning using aqueous or semi-aqueous detergents contains surfactants, organic solvents, oils, rosins, alkalis, etc. derived from detergents and dirt. A large amount of metal salts, emulsions, etc. are mixed in. In order to reuse this washing water, it is necessary to remove these contaminants in the circulation mechanism.

【0003】その処理方法として、界面活性剤、油、有
機溶剤、ロジン等の有機成分に対しては、活性炭、活性
汚泥、逆浸透、凝集沈殿等があり、金属イオン、アルカ
リ金属塩等のイオン成分に対しては、イオン交換樹脂、
電気透析、逆浸透等がある。これらのうち、脱脂用洗浄
やフラックス洗浄の水洗工程における水洗水の循環使用
の処理方法を考えた場合、短時間のうちに高度の処理を
行い、水洗水として使用可能なまでに上記混入成分を除
去できること、さらに、処理装置がコンパクトで、洗浄
機の附属設備として簡単に設置可能なことが望まれる。 この観点から活性炭とイオン交換樹脂を組合せた方法が
用いられている。この場合、通常、水洗水を、活性炭を
充填したカラムに通して有機物を除去した後に、イオン
交換樹脂を充填したカラムに通してイオンを除去する方
法が取られる。
Treatment methods include activated carbon, activated sludge, reverse osmosis, coagulation and precipitation for organic components such as surfactants, oils, organic solvents, and rosin, and ions such as metal ions and alkali metal salts. For the ingredients, ion exchange resin,
Examples include electrodialysis and reverse osmosis. Among these, when considering a treatment method that recycles washing water in the washing process for degreasing and flux cleaning, it performs a high level of treatment in a short period of time and removes the above-mentioned contaminants before it can be used as washing water. It is desired that the treatment equipment be able to be removed, and that the treatment equipment be compact and easily installed as an accessory to a washing machine. From this point of view, a method combining activated carbon and ion exchange resin is used. In this case, a method is usually used in which the washing water is passed through a column filled with activated carbon to remove organic substances, and then passed through a column filled with an ion exchange resin to remove ions.

【0004】0004

【発明が解決しようとする課題】しかしながら、水系洗
浄剤または準水系洗浄剤による脱脂洗浄やフラックス洗
浄から出る水洗水中には、洗浄剤中の界面活性剤やアル
カリによる、油、ロジン等の乳化物が含まれ、活性炭に
対する有機物の負荷が非常に高い。このため、吸着容量
の限られた活性炭の有機物除去能力が早期に低下し、活
性炭を新しい活性炭と交換する頻度が高くなる。活性炭
の交換頻度が高いと、活性炭の再生維持費用がかかるだ
けでなく、生産にも支障をきたすという問題が起きる。
[Problems to be Solved by the Invention] However, the washing water from degreasing and flux cleaning using aqueous or semi-aqueous detergents contains emulsions of oil, rosin, etc. due to surfactants and alkalis in the detergent. , and the load of organic matter on activated carbon is very high. For this reason, the ability of activated carbon to remove organic matter, which has a limited adsorption capacity, quickly decreases, and the activated carbon must be replaced with new activated carbon more frequently. Frequent replacement of activated carbon not only increases the cost of regenerating and maintaining the activated carbon, but also causes problems in production.

【0005】また、活性炭が処理する排水中の界面活性
剤、油分、有機溶剤、乳化物等の有機成分の濃度が高い
と、処理後の排水中の有機成分濃度も高くなり,乳化物
が完全には除去できず、続いてイオン交換樹脂による処
理を行う場合、イオン交換樹脂が有機汚染され、イオン
交換能力が低下するという問題も起きる。これらの見地
から、水洗水中の乳化物を除去し、活性炭への有機物負
荷をできる限り減らすことが望まれる。
[0005] Furthermore, if the concentration of organic components such as surfactants, oils, organic solvents, and emulsions in the wastewater treated by activated carbon is high, the concentration of organic components in the wastewater after treatment will also be high, and the emulsions will not be completely formed. If the ion-exchange resin cannot be removed and is subsequently treated with an ion-exchange resin, the ion-exchange resin will be contaminated with organic matter and the ion-exchange capacity will be reduced. From these viewpoints, it is desirable to remove emulsions in the washing water and reduce the organic matter load on activated carbon as much as possible.

【0006】[0006]

【課題を解決するための手段】本発明者らは、鋭意検討
した結果、中空繊維状の限外濾過膜で限外濾過すること
により、簡単かつコンパクトな装置を用いる方法で、水
洗水中に含まれる乳化物を除去し、活性炭への有機物負
荷を大幅に軽減することを見いだし、本発明を完成する
に至った。
[Means for Solving the Problems] As a result of intensive studies, the present inventors have found that by ultrafiltration with a hollow fiber ultrafiltration membrane, the amount of water contained in washing water can be The present inventors have discovered that the organic matter load on activated carbon can be significantly reduced by removing the emulsions that are present in the activated carbon, and have completed the present invention.

【0007】すなわち、本発明は、脱脂洗浄またはフラ
ックス洗浄の水洗工程の、界面活性剤および/またはア
ルカリによる乳化物を含む水洗水を処理して水洗工程に
戻し、循環再使用する方法において、この水洗水を、中
空繊維状の限外濾過膜で限外濾過した後に、活性炭処理
し、水洗工程に戻すことを特徴とする水洗水の処理方法
、及び上記方法により活性炭処理した水洗水をイオン交
換樹脂処理し、水洗工程に戻すことを特徴とする水洗水
の処理方法である。
That is, the present invention provides a method for treating wash water containing an emulsion of a surfactant and/or alkali in the water washing process of degreasing or flux cleaning, returning it to the washing process, and recycling and reusing this water. A washing water treatment method characterized by ultrafiltering washing water with a hollow fiber ultrafiltration membrane, treating it with activated carbon, and returning it to the washing step, and ion-exchanging the washing water treated with activated carbon by the above method. This is a method for treating washing water characterized by treating it with a resin and returning it to the washing step.

【0008】本発明で用いる中空繊維状の限外濾過膜の
素材は、ポリアクリロニトリル、酢酸セルロース、ポリ
スルホン等の従来の限外濾過に用いられているものを用
いることができる。中空繊維状の限外濾過膜を用いるに
あたっては、大きな濾過膜面積を得るために、この中空
繊維を円筒形の容器の中に多数充填し、中空繊維の両端
が、開口した状態でエポキシ樹脂やポリウレタン樹脂等
のシール材でシールされたものとして用いるのが好まし
い。
As the material for the hollow fiber ultrafiltration membrane used in the present invention, those used in conventional ultrafiltration, such as polyacrylonitrile, cellulose acetate, and polysulfone, can be used. When using a hollow fiber ultrafiltration membrane, in order to obtain a large filtration membrane area, a large number of these hollow fibers are filled in a cylindrical container, and both ends of the hollow fibers are left open and filled with epoxy resin. It is preferable to use one sealed with a sealing material such as polyurethane resin.

【0009】本発明で用いる中空繊維状の限外濾過膜の
膜厚は10〜400μmが好ましく、20〜100μm
がさらに好ましい。また、中空繊維状の限外濾過膜の内
径は100〜1000μmが好ましく、100〜400
μmがさらに好ましい。また、中空繊維状の限外濾過膜
の分画分子量は、5,000〜15,000が好ましく
、6,000〜13,000がさらに好ましい。さらに
、中空繊維状の限外濾過膜の水の濾過速度は、膜面積1
m2 あたり10l/h以上あるのが好ましく、100
l/h以上あるのがさらに好ましい。
[0009] The thickness of the hollow fiber ultrafiltration membrane used in the present invention is preferably 10 to 400 μm, and preferably 20 to 100 μm.
is even more preferable. Further, the inner diameter of the hollow fiber ultrafiltration membrane is preferably 100 to 1000 μm, and 100 to 400 μm.
μm is more preferable. Further, the molecular weight cutoff of the hollow fiber ultrafiltration membrane is preferably from 5,000 to 15,000, more preferably from 6,000 to 13,000. Furthermore, the water filtration rate of a hollow fiber ultrafiltration membrane is
It is preferable that the flow rate is 10 l/h or more per m2, and 100 l/h or more.
More preferably, it is 1/h or more.

【0010】なお、限外濾過の前に、ゴミを除くための
、膜状、わた状、ワインド型等のプレフィルターを置く
ことが好ましい。本発明で用いる中空繊維状の限外濾過
膜については、特開昭47−50398号公報、特開昭
57−136903号公報に開示された方法によって製
造したものを用いることができる。
[0010] Before ultrafiltration, it is preferable to place a pre-filter in the form of a membrane, cotton, wind, etc. to remove dust. As for the hollow fiber ultrafiltration membrane used in the present invention, those manufactured by the methods disclosed in JP-A-47-50398 and JP-A-57-136903 can be used.

【0011】上記特定の中空繊維状の限外濾過膜によっ
て限外濾過された水洗水は、次いで活性炭処理される。 通常、これには活性炭カラムが用いられる。活性炭カラ
ムに充填される活性炭としては、水処理粒状活性炭を用
いるのが一般的である。活性炭の量は、個々の場合によ
り、処理水量、設置スペース、交換頻度等により決めら
れる。
[0011] The washing water ultrafiltered by the above-mentioned specific hollow fiber ultrafiltration membrane is then treated with activated carbon. Usually an activated carbon column is used for this. Water-treated granular activated carbon is generally used as the activated carbon packed in the activated carbon column. The amount of activated carbon is determined in each case depending on the amount of water to be treated, the installation space, the frequency of replacement, etc.

【0012】このようにして活性炭処理された水洗水中
に多量のイオンが含まれている場合は、イオン交換樹脂
等でイオン成分を除去してから水洗工程に戻し、水洗水
として循環使用することができる。イオン成分の除去は
、この他、電気透析や、逆浸透によって可能である。
[0012] If the rinse water treated with activated carbon contains a large amount of ions, it is possible to remove the ionic components with an ion exchange resin, etc., and then return it to the washing process and reuse it as rinse water. can. Ionic components can also be removed by electrodialysis or reverse osmosis.

【0013】[0013]

【実施例】以下、実施例により、本発明を具体的に説明
する。
[Examples] The present invention will be specifically explained below with reference to Examples.

【0014】[0014]

【実施例1〜5および比較例】炭酸ソーダ、ケイ酸ソー
ダ、界面活性剤、油、ロジンを含む水洗水モデル液(透
過率44%、COD640ppm)を、表2に示す中空
繊維状の限外濾過膜A〜Eで限外濾過し、ついで、水処
理用の粒状活性炭(クラレ(株)製、商品名:クラレコ
ールKW10〜30メッシュ)を充填したカラムに通し
た。限外濾過後の水洗水の透過率およびCOD、活性炭
カラム通過後の水洗水の透過率及びCODを測定した。 その結果を表1に示す。
[Examples 1 to 5 and Comparative Examples] A washing water model solution (transmittance 44%, COD 640 ppm) containing soda carbonate, sodium silicate, surfactant, oil, and rosin was used to form hollow fiber-like ultraviolet particles shown in Table 2. The mixture was ultrafiltered using filter membranes A to E, and then passed through a column filled with granular activated carbon for water treatment (manufactured by Kuraray Co., Ltd., trade name: Kuraray Coal KW 10-30 mesh). The transmittance and COD of the washing water after ultrafiltration and the transmittance and COD of the washing water after passing through the activated carbon column were measured. The results are shown in Table 1.

【0015】上記方法で乳化物および有機物を除去した
水洗水中には、まだアルカリ塩が含まれ、導電率1,6
70μS/cmという高い値を示し、水洗水として再使
用できなかったため、この水洗水をカチオン交換樹脂カ
ラムおよびアニオン交換樹脂カラムに通したところ、導
電率10μS/cmの水洗水が得られ、再使用可能な水
洗水とすることができた。
Washing water from which emulsions and organic matter have been removed by the above method still contains alkali salts and has a conductivity of 1.6.
It showed a high value of 70 μS/cm and could not be reused as washing water, so when this washing water was passed through a cation exchange resin column and an anion exchange resin column, washing water with a conductivity of 10 μS/cm was obtained and could be reused. It was possible to use water for washing.

【0016】比較のため限外濾過しない場合についても
実施した。その結果を表1に示す。なお、上記透過率は
、可視吸光計で550nmにて測定した値で、この数値
が大きいほど乳化物の量が少ないことを示し、透過率1
00%は乳化物が見られないことを示す。また、COD
は、JIS−K0102(1986)に記載の方法によ
り測定した値で、この数値が小さいほど有機物の量が少
ないことを示す。さらに、導電率は、電気化学計器製導
電率計AOL−40で測定した値である。
For comparison, a test was also carried out without ultrafiltration. The results are shown in Table 1. The above transmittance is a value measured at 550 nm using a visible absorption spectrometer, and the larger the value, the smaller the amount of emulsion.
00% indicates that no emulsion is seen. Also, COD
is a value measured by the method described in JIS-K0102 (1986), and the smaller this value is, the smaller the amount of organic matter is. Furthermore, the conductivity is a value measured with a conductivity meter AOL-40 manufactured by Electrochemical Keiki.

【0017】以上の水洗水循環フローの1形態を図1に
示した。
One form of the above-mentioned washing water circulation flow is shown in FIG.

【0018】[0018]

【表1】[Table 1]

【0019】[0019]

【表2】[Table 2]

【0020】[0020]

【発明の効果】本発明は、簡単な方法で、活性炭への有
機物負荷を大幅に低減することができ、活性炭の寿命を
伸ばし、活性炭の交換頻度を減らすと共に、活性炭処理
後の水洗水の有機物レベルをも低減し、良質な水洗水を
再生利用できる。
[Effects of the Invention] The present invention can significantly reduce the organic matter load on activated carbon using a simple method, extend the life of activated carbon, reduce the frequency of replacing activated carbon, and reduce organic matter in water washed after activated carbon treatment. This also reduces the water level and allows high-quality flushing water to be recycled.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】図1は、本発明の水洗水処理方法の1実施態様
を示したものである。
FIG. 1 shows one embodiment of the washing water treatment method of the present invention.

【符号の説明】[Explanation of symbols]

1  中空繊維状の限外濾過膜を用いた限外濾過器2 
 活性炭カラム 3  イオン交換樹脂カラム 4  水洗槽 5  水洗水循環経路
1 Ultrafilter using hollow fiber ultrafiltration membrane 2
Activated carbon column 3 Ion exchange resin column 4 Washing tank 5 Washing water circulation path

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  脱脂洗浄またはフラックス洗浄の水洗
工程の、界面活性剤および/またはアルカリによる乳化
物を含む水洗水を処理して水洗工程に戻し、循環再使用
する方法において、この水洗水を、中空繊維状の限外濾
過膜で限外濾過した後に活性炭処理し、水洗工程に戻す
ことを特徴とする水洗水の処理方法。
Claim 1. A method in which wash water containing an emulsion of a surfactant and/or alkali in a washing step of degreasing or flux cleaning is treated and returned to the washing step for circulation and reuse, comprising: A method for treating washing water, which comprises ultrafiltering using a hollow fiber ultrafiltration membrane, treating it with activated carbon, and returning the washing water to the washing step.
【請求項2】  脱脂洗浄またはフラックス洗浄の水洗
工程の、界面活性剤および/またはアルカリによる乳化
物を含む水洗水を処理して水洗工程に戻し、循環再使用
する方法において、この水洗水を、中空繊維状の限外濾
過膜で限外濾過した後に活性炭処理し、ついでイオン交
換樹脂処理し、水洗工程に戻すことを特徴とする水洗水
の処理方法。
2. A method in which the washing water containing an emulsion of a surfactant and/or alkali in the washing step of degreasing or flux cleaning is treated and returned to the washing step for circulation and reuse, wherein the washing water is A method for treating washing water, which comprises ultrafiltering using a hollow fiber ultrafiltration membrane, treating it with activated carbon, then treating it with an ion exchange resin, and returning it to the washing step.
JP03008738A 1991-01-28 1991-01-28 Wash water treatment method Expired - Fee Related JP3128249B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03008738A JP3128249B2 (en) 1991-01-28 1991-01-28 Wash water treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03008738A JP3128249B2 (en) 1991-01-28 1991-01-28 Wash water treatment method

Publications (2)

Publication Number Publication Date
JPH04244289A true JPH04244289A (en) 1992-09-01
JP3128249B2 JP3128249B2 (en) 2001-01-29

Family

ID=11701292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03008738A Expired - Fee Related JP3128249B2 (en) 1991-01-28 1991-01-28 Wash water treatment method

Country Status (1)

Country Link
JP (1) JP3128249B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06254595A (en) * 1993-03-01 1994-09-13 Daicel Chem Ind Ltd Method for purifying surface flow water
EP0647597A1 (en) * 1993-10-12 1995-04-12 AEROSPATIALE Société Nationale Industrielle Installation for treating and recycling washing water of a washing machine
JPH07204591A (en) * 1994-01-24 1995-08-08 Arakawa Chem Ind Co Ltd Cleaning system
WO2006076446A2 (en) * 2005-01-11 2006-07-20 3M Innovative Properties Company Treatment of wastewater streams containing surfactants
JP2020507466A (en) * 2017-02-13 2020-03-12 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung Method for producing ultrapure water
US11629071B2 (en) 2017-02-13 2023-04-18 Merck Patent Gmbh Method for producing ultrapure water
US11807556B2 (en) 2017-02-13 2023-11-07 Merck Patent Gmbh Method for producing ultrapure water
US11820676B2 (en) 2017-02-13 2023-11-21 Merck Patent Gmbh Method for producing ultrapure water
CN117361683A (en) * 2023-12-07 2024-01-09 陕西金河洗涤有限公司 Washing wastewater treatment device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06254595A (en) * 1993-03-01 1994-09-13 Daicel Chem Ind Ltd Method for purifying surface flow water
EP0647597A1 (en) * 1993-10-12 1995-04-12 AEROSPATIALE Société Nationale Industrielle Installation for treating and recycling washing water of a washing machine
FR2711129A1 (en) * 1993-10-12 1995-04-21 Aerospatiale Water treatment and recycling station for washing a washing machine.
JPH07204591A (en) * 1994-01-24 1995-08-08 Arakawa Chem Ind Co Ltd Cleaning system
JP3070379B2 (en) * 1994-01-24 2000-07-31 荒川化学工業株式会社 Cleaning system
WO2006076446A2 (en) * 2005-01-11 2006-07-20 3M Innovative Properties Company Treatment of wastewater streams containing surfactants
WO2006076446A3 (en) * 2005-01-11 2006-12-07 3M Innovative Properties Co Treatment of wastewater streams containing surfactants
JP2020507466A (en) * 2017-02-13 2020-03-12 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung Method for producing ultrapure water
US11629071B2 (en) 2017-02-13 2023-04-18 Merck Patent Gmbh Method for producing ultrapure water
US11807556B2 (en) 2017-02-13 2023-11-07 Merck Patent Gmbh Method for producing ultrapure water
US11820676B2 (en) 2017-02-13 2023-11-21 Merck Patent Gmbh Method for producing ultrapure water
CN117361683A (en) * 2023-12-07 2024-01-09 陕西金河洗涤有限公司 Washing wastewater treatment device
CN117361683B (en) * 2023-12-07 2024-03-08 陕西金河洗涤有限公司 Washing wastewater treatment device

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