JPH04243571A - Continuous coating method and apparatus - Google Patents
Continuous coating method and apparatusInfo
- Publication number
- JPH04243571A JPH04243571A JP2535491A JP2535491A JPH04243571A JP H04243571 A JPH04243571 A JP H04243571A JP 2535491 A JP2535491 A JP 2535491A JP 2535491 A JP2535491 A JP 2535491A JP H04243571 A JPH04243571 A JP H04243571A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- continuous film
- substrate
- continuous
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000576 coating method Methods 0.000 title claims description 73
- 239000011248 coating agent Substances 0.000 claims abstract description 106
- 239000007788 liquid Substances 0.000 claims abstract description 66
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 86
- 238000001035 drying Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 abstract description 11
- 239000010408 film Substances 0.000 description 88
- 238000004804 winding Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- 238000007611 bar coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007610 electrostatic coating method Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、例えば合成樹脂の連続
フィルム状基体に液状レジストその他の液状塗布剤を連
続的に塗布する方法、およびその方法の実施に使用する
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for continuously applying a liquid resist or other liquid coating agent to a continuous film substrate made of, for example, a synthetic resin, and an apparatus used to carry out the method.
【0002】0002
【従来の技術】連続フィルム状基体の表面に液状レジス
ト等の液状塗布剤を塗布する技術は、プリント配線基板
の製造をはじめとして各種の産業において実施されてお
り、そのとき用いられる液状塗布剤の種類、要求される
塗膜の厚さ、さらには各種塗布剤の塗布方法は多種多様
にわたっている。[Prior Art] The technique of applying a liquid coating agent such as a liquid resist to the surface of a continuous film substrate is practiced in various industries including the manufacture of printed wiring boards. There are a wide variety of types, required coating thicknesses, and coating methods for various coating agents.
【0003】現在一般に実施されている連続フィルム状
基体に対する液状レジスト等の液状塗布剤の連続塗布方
法については、
(1)ロールの表面に液状レジストの膜を均一に形成し
、それを被塗布基体に転写する要領で該基体の表面に液
状レジストを塗布するロールコート法(2)被塗布基体
を、液状レジストを溜めた槽内を通過させることにより
、該基体の表面に液状レジストを付着させる浸漬塗布法
(3)被塗布基体の表面に液状レジストを滴下し、所望
の厚みの塗膜を形成するのに必要な溝を持ったバーで、
該基体表面の液状レジストを均すことにより基体表面に
液状レジストを塗布するバーコート法
(4)液状レジストに高電圧を印加して霧状に散布する
ことにより、該基体の表面にレジスト膜を形成する静電
塗布法
(5)予め固形化したレジスト(以下ドライフィルムと
称する)を被塗布基体の表面に貼合わせて、該基体表面
にレジストの均一膜を形成するラミネート法等が知られ
ている。[0003] Regarding the method of continuously applying a liquid coating agent such as a liquid resist to a continuous film-like substrate that is currently generally practiced, (1) a film of liquid resist is uniformly formed on the surface of a roll, and the film is applied to the substrate to be coated. Roll coating method (2) Roll coating method in which a liquid resist is applied to the surface of the substrate in a manner similar to transferring the liquid resist onto the surface of the substrate (2) Immersion in which the liquid resist is adhered to the surface of the substrate by passing the substrate to be coated through a tank containing liquid resist Coating method (3) Drop liquid resist onto the surface of the substrate to be coated, using a bar with grooves necessary to form a coating film of the desired thickness.
Bar coating method (4) Applying a liquid resist to the surface of the substrate by leveling the liquid resist on the surface of the substrate (4) A resist film is applied to the surface of the substrate by applying a high voltage to the liquid resist and dispersing it in the form of a mist. Electrostatic coating method (5) A laminating method is known in which a pre-solidified resist (hereinafter referred to as dry film) is laminated onto the surface of a substrate to be coated to form a uniform film of resist on the surface of the substrate. There is.
【0004】0004
【発明が解決しようとする課題】しかしながら、上記(
1)乃至(5)の各レジスト連続塗布方法には、次に述
べる種々の問題点がある。[Problem to be solved by the invention] However, the above (
Each of the continuous resist coating methods 1) to (5) has various problems as described below.
【0005】(1)のロールコート法は、一度の塗布操
作で通常最大10μmまでの厚さのレジスト膜を形成す
ることが可能であるが、それ以上の厚さのレジスト膜を
得るには、複数回の塗布操作を繰り返す必要がある。し
かも、各回のレジスト塗布操作の間に、必ず前回の塗布
によって形成したレジスト膜を乾燥させる必要があり、
それに要する乾燥時間は作業性を著しく低下させる。そ
のため20μm以上の厚さを持つレジスト膜の形成には
適さない。[0005] The roll coating method (1) can normally form a resist film with a maximum thickness of 10 μm in a single coating operation, but in order to obtain a resist film with a thickness greater than that, It is necessary to repeat the coating operation multiple times. Moreover, between each resist coating operation, it is necessary to dry the resist film formed by the previous coating.
The drying time required thereby significantly reduces workability. Therefore, it is not suitable for forming a resist film having a thickness of 20 μm or more.
【0006】(2)の浸漬塗布法は、液状レジストの粘
度等の調節によって1回の塗布操作によって10μm以
上の厚さのレジスト膜を形成することが可能であるが、
この方法は液状レジストを大量に使用するので液状レジ
ストの粘度の管理が難しい。したがって、これにより得
られるレジスト膜の厚さの制御を難しくする。また、こ
の方法は、被塗布基体が液状レジストの溜まりの中を通
過するため複数回の塗布操作は不可能であり、この方法
で得られるレジスト膜の厚さの上限は20μm程度と考
えられる。In the dip coating method (2), it is possible to form a resist film with a thickness of 10 μm or more in a single coating operation by adjusting the viscosity of the liquid resist, etc.
Since this method uses a large amount of liquid resist, it is difficult to control the viscosity of the liquid resist. Therefore, this makes it difficult to control the thickness of the resist film obtained. Further, in this method, since the substrate to be coated passes through a pool of liquid resist, it is impossible to perform multiple coating operations, and the upper limit of the thickness of the resist film obtained by this method is considered to be about 20 μm.
【0007】(3)のバーコート法は、最長数メートル
の連続塗布が可能と考えられるが、被塗布基体の長さが
数十メートルの場合には対応できない。さらに、バーに
形成された溝が直接被塗布基体の表面に接触するため、
基体表面に傷が付く虞があり、比較的厚いレジスト膜を
連続的に形成するのには適さない。The bar coating method (3) is considered to be capable of continuous coating over a maximum length of several meters, but cannot be applied when the length of the substrate to be coated is several tens of meters. Furthermore, since the grooves formed in the bar directly contact the surface of the substrate to be coated,
There is a risk of scratching the substrate surface, and it is not suitable for continuously forming a relatively thick resist film.
【0008】(4)の静電塗布法は、一般的に可燃物で
ある液状レジストに高電圧を印加することは、放電によ
る火災を引き起こす虞があり、作業の安全上問題である
。また、液状レジストを霧状にするためのノズルにレジ
ストが付着するため、レジストの種類によってはかなり
の頻度でノズルの清掃や交換をしなければならず、作業
能率が低下する。[0008] In the electrostatic coating method (4), applying a high voltage to liquid resist, which is generally a combustible material, may cause a fire due to electric discharge, which poses a safety problem during work. Furthermore, since the resist adheres to the nozzle for atomizing the liquid resist, the nozzle must be cleaned or replaced quite frequently depending on the type of resist, which reduces work efficiency.
【0009】(5)のラミネート法は、上記(1)乃至
(4)の各方法に比較して、予め厚さを均一化したドラ
イフィルムを用いるため、40μm程度の厚さのレジス
ト膜を連続的に形成できる特徴がある。しかし、このド
ライフィルムは、その性質上、解像度が低く、今後のフ
アイン化に対応できない欠点がある。Compared to the methods (1) to (4) above, the laminating method (5) uses a dry film with a uniform thickness in advance, so a resist film with a thickness of about 40 μm is continuously formed. It has the characteristic of being able to be formed. However, this dry film has a drawback that its resolution is low due to its nature, and it cannot be adapted to future refinement.
【0010】以上述べたように、現在一般に行われてい
るレジストの連続塗布方法では、1回の塗布操作によっ
て40μm以上の比較的厚い均一な厚さを持ったレジス
ト膜を形成することが困難であった。[0010] As described above, with the currently commonly used continuous resist coating method, it is difficult to form a relatively thick and uniform resist film of 40 μm or more in a single coating operation. there were.
【0011】本発明は以上の知見に基づき、液状レジス
ト等の液状塗布剤を連続フィルム状基体に連続的に塗布
する新規な方法、並びにその方法の実施に使用する新規
な装置を提供することを目的としたものである。Based on the above findings, the present invention aims to provide a new method for continuously applying a liquid coating agent such as a liquid resist to a continuous film-like substrate, and a new apparatus used to carry out the method. This is the purpose.
【0012】0012
【課題を解決するための手段】上記の目的を達成するた
め本発明は、連続フィルム状基体を一方向に移動させ、
その移動の途中において連続フィルム状基体を、水平に
支持されている少なくとも両端にフランジが付いたロー
ルの該フランジの略下半周に接触させて上方に反転させ
ることにより、上記フランジ付きロールの胴と連続フィ
ルム状基体との間の空間に供給された液状塗布剤を連続
フィルム状基体に付着させ、その後、連続フィルム状基
体の移動を水平に転向させるようにしたものである。[Means for Solving the Problems] In order to achieve the above object, the present invention moves a continuous film-like substrate in one direction,
During the movement, the continuous film substrate is brought into contact with approximately the lower half of the flange of a horizontally supported roll having flanges at least on both ends, and is turned upward, whereby the continuous film substrate is connected to the body of the flanged roll. The liquid coating agent supplied into the space between the continuous film-like substrate is attached to the continuous film-like substrate, and then the movement of the continuous film-like substrate is turned horizontally.
【0013】上記フランジ付きロールとの接触によって
液状塗布剤を塗布された連続フィルム状基体の移動を案
内ロールを介して水平に転向させ、その水平転向案内ロ
ールのフランジ付きロールに対する位置を調整して液状
塗布剤の膜厚を設定するようにしたものである。[0013] The movement of the continuous film-like substrate coated with a liquid coating agent is turned horizontally via a guide roll by contact with the flanged roll, and the position of the horizontal turning guide roll with respect to the flanged roll is adjusted. The film thickness of the liquid coating agent is set.
【0014】上記の方法を実施する装置として、一方向
に移動する連続フィルム状基体の移動を下向きに転向さ
せる案内ロールと、その下向きに移動する連続フィルム
状基体の移動を上向きに転向させる案内兼塗布ロールと
、上向きに転向移動する連続フィルム状基体を水平移動
に転向させる案内ロールとを互いに平行に配置し、上記
案内兼塗布ロールの少なくとも両端にフランジを設けて
、そのフランジの略下半周と連続フィルム状基体の接触
によって案内兼塗布ロールの胴と連続フィルム状基体の
間に液状塗布剤を溜める空間を形成し、連続フィルム状
基体の移動速度が制御可能の駆動装置と、連続フィルム
状基体に付着した液状塗布剤の乾燥装置を備えたことを
特徴とする。The apparatus for carrying out the above method includes a guide roll that redirects the movement of the continuous film substrate moving in one direction downward, and a guide roller that turns the movement of the continuous film substrate moving downward in the upward direction. A coating roll and a guide roll for horizontally moving the continuous film substrate that is moving upward are arranged parallel to each other, and a flange is provided at least at both ends of the guide and coating roll, and approximately the lower half circumference of the flange is provided. A drive device that forms a space for storing a liquid coating agent between the cylinder of a guide/applying roll and the continuous film substrate by contact of the continuous film substrate, and can control the moving speed of the continuous film substrate; The present invention is characterized by being equipped with a drying device for drying the liquid coating agent adhered to the surface.
【0015】上記の本発明方法およびその方法を実施す
る装置は、連続フィルム状基体に液状のレジストを塗布
して、該レジストの均一な薄膜層を形成する場合に好適
な方法並びに装置である。The method of the present invention and the apparatus for carrying out the method described above are suitable for applying a liquid resist to a continuous film substrate to form a uniform thin film layer of the resist.
【0016】[0016]
【作用】一方向に移動する連続フィルム状基体が案内兼
塗布ロールの下半周に接触して上向きに反転するとき、
液状塗布剤がすくい上げられるようにして連続フィルム
状基体の表面に塗布される。また、上向きに移動する過
程で塗膜の厚さが略均一になる。そして次の案内ロール
によって連続フィルム状基体は水平移動に変わり、塗膜
の厚さが一定化するとともに塗膜は乾燥装置によって乾
燥させられる。[Operation] When the continuous film-like substrate moving in one direction contacts the lower half of the guide/coating roll and turns upward,
The liquid coating agent is scooped up and applied to the surface of the continuous film substrate. Further, the thickness of the coating film becomes approximately uniform in the process of moving upward. Then, the continuous film-like substrate is moved horizontally by the next guide roll, the thickness of the coating film becomes constant, and the coating film is dried by a drying device.
【0017】塗膜の厚さは、液状塗布剤の粘度、その液
状塗布剤と連続フィルム状基体の被塗布面との濡れ性、
案内兼塗布ロールに対する水平転向案内ロールの位置に
よって決まる。The thickness of the coating film depends on the viscosity of the liquid coating agent, the wettability between the liquid coating agent and the coated surface of the continuous film substrate,
Depends on the position of the horizontal turning guide roll relative to the guide and applicator roll.
【0018】[0018]
【実施例】次に、本発明による連続塗布方法と、その方
法を実施するための装置を図面を参照して詳細に説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a continuous coating method according to the present invention and an apparatus for carrying out the method will be explained in detail with reference to the drawings.
【0019】図1は連続フィルム状基体に液状塗布剤を
塗布する部分の縦断側面図を示したもので、3本のロー
ル1・2・3が逆三角形の各頂点に位置して互いに平行
に配置されている。そして矢示した一方向に略水平に移
動する連続フィルム状基体4の途中が、上側の一方のロ
ール2から下側のロール1、そして上側の他方のロール
3へと略V字形に卷掛けられている。すなわち、下面を
ロール2で支持されて下向きに転向した連続フィルム状
基体4は、その上面が下側のロール1の略下半周に接触
して上方に反転し、更に下面をロール3で支持されて水
平移動に転向するように、ロール1・2・3に卷掛けら
れている。FIG. 1 shows a longitudinal cross-sectional side view of the part where a liquid coating agent is applied to a continuous film-like substrate, in which three rolls 1, 2, and 3 are located at each apex of an inverted triangle and are parallel to each other. It is located. The continuous film-like substrate 4, which moves approximately horizontally in one direction indicated by the arrow, is wound in a substantially V-shape from one roll 2 on the upper side to the other roll 1 on the lower side and then to the other roll 3 on the upper side. ing. That is, the continuous film substrate 4 whose lower surface is supported by the roll 2 and turned downward, its upper surface contacts approximately the lower half of the lower roll 1 and is turned upward, and further whose lower surface is supported by the roll 3. It is wrapped around rolls 1, 2, and 3 so that it turns into horizontal movement.
【0020】下側のロール1は連続フィルム状基体4に
対する案内兼塗布ロールで、そのロール1の少なくとも
両端にフランジ5を設けている。連続フィルム状基体4
の幅が広い場合等、必要に応じて図2のようにロール1
の両端以外にもフランジ5を設ける。このフランジ5は
、連続フィルム状基体4がロール1に平行を保って接触
するように設けるものであり、中間部分のフランジ5の
数・間隔等は、連続フィルム状基体4の幅、剛性に応じ
て決める。The lower roll 1 is a guide and coating roll for the continuous film substrate 4, and is provided with flanges 5 on at least both ends thereof. Continuous film substrate 4
If the width of the roll is wide, roll 1 as necessary as shown in Figure 2
A flange 5 is provided at other than both ends. The flanges 5 are provided so that the continuous film base 4 contacts the roll 1 while remaining parallel to the roll 1, and the number and spacing of the flanges 5 in the middle portion are determined depending on the width and rigidity of the continuous film base 4. Decide.
【0021】また、フランジ5の張り出し高さは、ロー
ル1の胴と連続フィルム状基体4との間に液状塗布剤6
(図1参照)が溜まる空間7を確保できる高さであれば
よく、特に制限はないが塗膜の厚さが通常数μm乃至数
百μmであるので、望ましくは1mm乃至10mm程度
が良い。Furthermore, the projecting height of the flange 5 is determined by the amount of liquid coating agent 6 between the body of the roll 1 and the continuous film substrate 4.
(See FIG. 1) The height may be sufficient as long as it can secure the space 7 in which the particles accumulate. Although there is no particular limit, since the thickness of the coating film is usually several μm to several hundred μm, the height is desirably about 1 mm to 10 mm.
【0022】上記塗布剤溜め空間7には常時一定量の液
状塗布剤が溜まっているように、図1に示すようにノズ
ル管8等を介して液状塗布剤を適量を供給するが、具体
的には、塗布剤溜め空間7内に液面センサーを設置し、
液状塗布剤6の下限および上限を検知して外部に設けた
定量ポンプ等で必要量の液状塗布剤を空間7に供給する
手段や、一定時間毎に一定量の液状塗布剤をポンプで供
給する手段があるが、これらの手段に限られるものでは
なく、他の方法を用いて空間7内の液状塗布剤6の量を
制御しても良い。As shown in FIG. 1, an appropriate amount of the liquid coating agent is supplied through the nozzle pipe 8 etc. so that a certain amount of the liquid coating agent is always stored in the coating agent storage space 7. A liquid level sensor is installed in the coating agent reservoir space 7,
A means for detecting the lower and upper limits of the liquid coating agent 6 and supplying the required amount of the liquid coating agent to the space 7 using an external metering pump, etc., or supplying a fixed amount of the liquid coating agent by a pump at regular intervals. Although there are means, the amount of the liquid coating agent 6 in the space 7 may be controlled using other methods without being limited to these means.
【0023】上側の一対のロール2および3は連続フィ
ルム状基体4に対する案内ロールで、ロール2とロール
3は同一の高さに配置されているが、その必要はない。
上記一対の案内ロール2および3の内、案内兼塗布ロー
ル1に対し連続フィルム状基体4の進行方向側の案内ロ
ール3の案内兼塗布ロール1に対する高さおよび前後位
置は、連続フィルム状基体4に塗布形成しようとする液
状塗布剤の膜厚に応じて決める。The upper pair of rolls 2 and 3 are guide rolls for the continuous film substrate 4, and although rolls 2 and 3 are arranged at the same height, this is not necessary. Among the pair of guide rolls 2 and 3, the height and longitudinal position of the guide roll 3 on the traveling direction side of the continuous film substrate 4 with respect to the guide/coating roll 1 with respect to the guide/coating roll 1 are as follows. It is determined according to the film thickness of the liquid coating agent to be applied.
【0024】ロール1・2および3を構成する材質は、
塗布するレジストその他の塗布剤の性質によって決定す
ればよく、通常、材質として金属を用いる場合には、銅
、チタン、ステンレス等を、プラスチックスを用いる場
合には、塩化ビニール、ポリプロピレン、フッ素樹脂等
が採用される。また、案内兼塗布ロール1は本体部を金
属あるいはプラスチックスで構成し、フランジ5のみを
プラスチックあるいは金属で構成する金属とプラスチッ
クスの複合体としてもよい。さらには、ロール1の両端
に設けたフランジ5の内側に、液状塗布剤(レジスト等
)6のしみ出しを防止するためにゴム製のОリングを設
けることもある。The materials constituting the rolls 1, 2 and 3 are as follows:
This can be determined depending on the properties of the resist and other coating agents to be applied. Usually, when metal is used as the material, copper, titanium, stainless steel, etc. are used, and when plastic is used, vinyl chloride, polypropylene, fluororesin, etc. will be adopted. Further, the guide/coating roll 1 may be a composite body of metal and plastic, with the main body made of metal or plastic, and only the flange 5 made of plastic or metal. Furthermore, a rubber O-ring may be provided inside the flanges 5 provided at both ends of the roll 1 to prevent the liquid coating agent (resist, etc.) 6 from seeping out.
【0025】連続フィルム状基体4の移動は、一般市販
の巻取り用のコイラーによって行うのが簡便である。案
内兼塗布ロール1で連続フィルム状基体4に均一な厚さ
に塗布された液状塗布剤(レジスト等)6の乾燥は一般
市販のヒーターで足りる。[0025] The continuous film substrate 4 can be easily moved using a generally commercially available winding coiler. A commercially available heater suffices for drying the liquid coating agent (resist, etc.) 6 coated to a uniform thickness on the continuous film substrate 4 by the guide/coating roll 1.
【0026】図1において、連続フィルム状基体4が案
内兼塗布ロール1の下半周に接触して上向きに反転移動
する過程で、液状塗布剤6がすくい上げられるようにし
て連続フィルム状基体4の表面に塗布され、且つ塗膜6
Aの厚さが略均一になる。そして次の案内ロール3によ
って連続フィルム状基体4の移動が水平に転向した後、
塗膜6Aの厚さが固定し、その塗膜6Aは次の乾燥過程
で漸次乾燥する。In FIG. 1, in the process of the continuous film substrate 4 contacting the lower half circumference of the guide/coating roll 1 and moving upward, the liquid coating agent 6 is scooped up onto the surface of the continuous film substrate 4. and coating film 6
The thickness of A becomes approximately uniform. After the movement of the continuous film substrate 4 is turned horizontally by the next guide roll 3,
The thickness of the coating film 6A is fixed, and the coating film 6A gradually dries in the next drying process.
【0027】上記塗膜6Aの厚さは、液状塗布剤6の粘
度、その液状塗布剤6と連続フィルム状基体4の被塗布
面との濡れ性、案内兼塗布ロール1および水平転向案内
ロール3の回転軸を結ぶ線と案内兼塗布ロール1の回転
軸を通る鉛直線とがなす角度θ、および案内兼塗布ロー
ル1と水平転向案内ロール3の軸間距離によって決定さ
れる。すなわち、液状塗布剤6の粘度が高い程、濡れ性
が大きい程、θが大きい程、ロール1とロール3の軸間
距離が短い程、塗膜6Aは厚くなる。The thickness of the coating film 6A depends on the viscosity of the liquid coating agent 6, the wettability between the liquid coating agent 6 and the coated surface of the continuous film substrate 4, the guide/coating roll 1 and the horizontal turning guide roll 3. It is determined by the angle θ between a line connecting the rotational axis of the guide and coating roll 1 and a vertical line passing through the rotational axis of the guide and coating roll 1, and the distance between the axes of the guide and coating roll 1 and the horizontal turning guide roll 3. That is, the higher the viscosity of the liquid coating agent 6, the higher the wettability, the larger θ, and the shorter the distance between the axes of the rolls 1 and 3, the thicker the coating film 6A becomes.
【0028】塗膜6Aが形成された連続フィルム状基体
4が案内ロール3を通過した後、水平を保って移動する
ことは、形成された塗膜6Aが流れないようにして膜厚
を均一に固定させるのに役立っている。After the continuous film-like substrate 4 on which the coating film 6A has been formed passes through the guide roll 3, it moves while keeping it horizontal to prevent the formed coating film 6A from flowing and to make the film thickness uniform. It helps keep it fixed.
【0029】図3は本発明による液状塗布剤連続塗布装
置の構成の概略を示したもので、前述した案内兼塗布ロ
ール1と案内ロール2・3から成る塗布部を主要部とし
、その前後に連続フィルム状基体4の繰り出し用コイラ
ー9と巻取り用コイラー10を設けている。そして後部
案内ロール3と巻取り用コイラー10の間で水平移動し
ている連続フィルム状基体4の上方に、すなわち、連続
フィルム状基体4の塗膜6Aに面する側に塗膜乾燥用の
ヒーター11が設けられている。塗膜の乾燥を促進する
ために、必要に応じて遠赤外線ヒーター等を併設するこ
ともできる。FIG. 3 schematically shows the structure of the liquid coating agent continuous coating device according to the present invention, in which the coating section consisting of the above-mentioned guide and coating roll 1 and guide rolls 2 and 3 is the main part, and there are A coiler 9 for feeding out the continuous film-like substrate 4 and a coiler 10 for winding it up are provided. A heater for drying the coating film is installed above the continuous film substrate 4 that is moving horizontally between the rear guide roll 3 and the winding coiler 10, that is, on the side of the continuous film substrate 4 facing the coating film 6A. 11 are provided. In order to accelerate the drying of the coating film, a far-infrared heater or the like may be installed as needed.
【0030】上記のコイラー9・10は、連続フィルム
状基体4の移動速度を適宜制御できる機構を備えており
、その移動速度の調整によっても塗膜6Aの厚さを変え
ることができる。また、塗膜6Aの乾燥速度も調節可能
である。The coilers 9 and 10 described above are equipped with a mechanism that can appropriately control the moving speed of the continuous film substrate 4, and the thickness of the coating film 6A can also be changed by adjusting the moving speed. Moreover, the drying speed of the coating film 6A can also be adjusted.
【0031】本発明の液状塗布剤連続塗布装置は、上記
図3に示した構成を満足するものであれば、特に、その
形状、大きさ、装置を構成する材質に限定はない。The liquid coating agent continuous coating device of the present invention is not particularly limited in its shape, size, and material of construction as long as it satisfies the configuration shown in FIG. 3 above.
【0032】次に本発明の連続塗布装置によって液状レ
ジストを実際に塗布した種々の実施例を説明する。
実施例1
はじめに、本発明連続塗布装置について主要部の構成の
具体例を説明する。フッ素樹脂を用いて直径100mm
、長さ200mmの円柱形ロールを母体とし、その両端
部にそれぞれ幅20mm、高さ5mmのフランジ5を有
する案内兼塗布ロール1を旋盤加工により製造し、その
中心部に直径5mmの回転軸用貫通孔を形成し、長さ2
50mm、直径49mmのステンレス製の棒を回転軸と
して挿入し、ロール1を水平に支持した。Next, various examples in which liquid resist was actually applied using the continuous coating apparatus of the present invention will be described. Example 1 First, a specific example of the configuration of the main parts of the continuous coating apparatus of the present invention will be described. Diameter 100mm using fluororesin
A guide/applying roll 1 is manufactured by lathe processing, using a cylindrical roll with a length of 200 mm as a base body, and having flanges 5 with a width of 20 mm and a height of 5 mm at both ends thereof, and a rotating shaft with a diameter of 5 mm in the center thereof. Form a through hole, length 2
A stainless steel rod with a length of 50 mm and a diameter of 49 mm was inserted as a rotating shaft to support the roll 1 horizontally.
【0033】次にフッ素樹脂を用いて直径100mm、
長さ200mmの円柱形の案内ロール2を製造し、その
中心部に直径5mmの回転軸用貫通孔を形成し、長さ2
50mm、直径49mmのステンレス製の棒を回転軸と
して挿入し、上記案内兼塗布ロール1と平行に、そして
上記ロール1の回転軸より300mm上方に、且つロー
ル1の回転軸とロール2の回転軸を結ぶ線とロール1を
通る鉛直線がなす角度が45度となるように支持した。
更に、上記案内ロール2と同仕様の案内ロール3を、案
内兼塗布ロール1の回転軸を含む鉛直平面を対称面とし
てロール2の反対側に設置した。Next, using fluororesin, a diameter of 100 mm,
A cylindrical guide roll 2 with a length of 200 mm was manufactured, and a through hole for a rotating shaft with a diameter of 5 mm was formed in the center of the roll.
A stainless steel rod with a diameter of 50 mm and a diameter of 49 mm was inserted as a rotating shaft, parallel to the guide and coating roll 1, and 300 mm above the rotating shaft of the roll 1, and between the rotating shaft of the roll 1 and the rotating shaft of the roll 2. The roll was supported so that the angle between the line connecting the two and the vertical line passing through the roll 1 was 45 degrees. Furthermore, a guide roll 3 having the same specifications as the guide roll 2 was installed on the opposite side of the roll 2 with a vertical plane containing the rotational axis of the guide/application roll 1 as a plane of symmetry.
【0034】次に連続フィルム状基体4の繰り出し用コ
イラー9を、案内兼塗布ロール1を基準として案内ロー
ル2の側に、該ロール2からの距離にして1mの位置に
設置した。また、連続フィルム状基体4の巻取り用コイ
ラー10を案内兼塗布ロール1を基準として案内ロ−ル
3の側に、該ロール3からの距離にして5mの位置に連
続フィルム状基体4がロール3を通過後水平に保たれる
ように設置した。Next, a coiler 9 for feeding out the continuous film substrate 4 was installed on the side of the guide roll 2 with respect to the guide/application roll 1 at a distance of 1 m from the roll 2. Further, a coiler 10 for winding the continuous film substrate 4 is placed on the side of the guide roll 3 with respect to the guide/applying roll 1, and the continuous film substrate 4 is placed on the roll at a distance of 5 m from the roll 3. It was installed so that it remained horizontal after passing 3.
【0035】更に、水平転向案内ロール3を通過した連
続フィルム状基体4の上方10cmに、上記ロール3か
ら50cmの位置より巻取り用コイラー10までの4m
の距離にわたって、長さ250mm、直径30mmの棒
状遠赤外線ヒーター(サーミック株式会社製)10本を
等間隔に配置してレジスト乾燥用とした。Further, 10 cm above the continuous film substrate 4 that has passed the horizontal turning guide roll 3, a distance of 4 m from a position 50 cm from the roll 3 to the winding coiler 10 is placed.
Ten rod-shaped far-infrared heaters (manufactured by Thermic Co., Ltd.) each having a length of 250 mm and a diameter of 30 mm were arranged at equal intervals over a distance of 250 mm for resist drying.
【0036】実施例2
幅200mm、厚さ50μmの連続フィルム状ポリイミ
ド樹脂(商品名 カプトン200H、東レ・デュポン
株式会社製)の片面に、常法により厚さ1μmの銅の層
を形成したものを被塗布基体4として、実施例1で説明
した本発明の連続塗布装置を用いて以下に示すレジスト
塗布試験を行った。Example 2 A 1 μm thick copper layer was formed on one side of a continuous film of polyimide resin (trade name Kapton 200H, manufactured by DuPont-Toray Co., Ltd.) with a width of 200 mm and a thickness of 50 μm. As the coated substrate 4, the following resist coating test was conducted using the continuous coating apparatus of the present invention described in Example 1.
【0037】上記の連続フィルム状基体4を、その銅層
側が被塗布面になるように実施例1の連続塗布装置に掛
けた。The continuous film-like substrate 4 described above was placed on the continuous coating apparatus of Example 1 so that the copper layer side was the surface to be coated.
【0038】レジスト(商品名 PMER・HC60
0、東京応化株式会社製)をシンナー(商品名 PM
ERシンナー、東京応化株式会社製)で粘度300セン
チポアズに調整したものを、案内兼塗布ロール1のレジ
スト溜め空間7に定量ポンプ(イワキ株式会社製)を用
いて供給しながら、連続フィルム状基体4をライン速度
0.18m/分で移動させ、塗布後のレジストに加わる
遠赤外線による乾燥温度が70℃になるように調整しつ
つ連続塗布を行ったところ、連続フィルム状基体4の銅
層側の面全面にわたって厚さ52±3μmのレジスト膜
を形成することができた。[0038] Resist (product name: PMER・HC60
0, manufactured by Tokyo Ohka Co., Ltd.) with thinner (product name: PM
While supplying ER thinner (manufactured by Tokyo Ohka Co., Ltd.) to a viscosity of 300 centipoise to the resist reservoir space 7 of the guide/application roll 1 using a metering pump (manufactured by Iwaki Co., Ltd.), the continuous film substrate 4 was moved at a line speed of 0.18 m/min, and continuous coating was performed while adjusting the drying temperature due to far infrared rays applied to the resist after coating to be 70°C. As a result, the copper layer side of the continuous film substrate 4 A resist film with a thickness of 52±3 μm could be formed over the entire surface.
【0039】実施例3
連続フィルム状基体・・・実施例2と同じレジスト
・・・ 同 上 (但し粘
度80センチポアズ)
ライン速度 ・・・ 同 上乾
燥温度 ・・・ 同 上レ
ジスト膜の厚さ ・・・16±2μmExample 3 Continuous film substrate: Same resist as Example 2
... Same as above (However, viscosity is 80 centipoise) Line speed ... Same as above Drying temperature ... Same as above Resist film thickness ...16 ± 2 μm
【0040】実
施例4
連続フィルム状基体・・・実施例2と同じレジスト
・・・ 同 上 (但し粘
度80センチポアズ)
ライン速度 ・・・0.33m/分乾燥
温度 ・・・実施例2と同じレジス
ト膜の厚さ ・・・28±2μmExample 4 Continuous film substrate: Same resist as Example 2
... Same as above (However, viscosity is 80 centipoise) Line speed ...0.33 m/min Drying temperature ... Same as Example 2 Thickness of resist film ...28 ± 2 μm
【0041】実施例
5
連続フィルム状基体・・・実施例2と同じレジスト
・・・ 同 上 (但し粘
度40センチポアズ)
ライン速度 ・・・0.18m/分乾燥
温度 ・・・実施例2と同じレジス
ト膜の厚さ ・・・11±2μmExample 5 Continuous film substrate: Same resist as Example 2
... Same as above (However, viscosity is 40 centipoise) Line speed ...0.18 m/min Drying temperature ... Same as Example 2 Thickness of resist film ...11 ± 2 μm
【0042】実施例
6
連続フィルム状基体・・・実施例2と同じレジスト
・・・ 同 上 (但し粘
度40センチポアズ)
ライン速度 ・・・0.33m/分乾燥
温度 ・・・実施例2と同じレジス
ト膜の厚さ ・・・22±2μmExample 6 Continuous film substrate: Same resist as Example 2
... Same as above (however, viscosity 40 centipoise) Line speed ...0.33 m/min Drying temperature ... Same as Example 2 Thickness of resist film ...22 ± 2 μm
【0043】実施例
7
連続フィルム状基体・・・実施例2と同じレジスト
・・・商品名FSR(富士薬品株式会
社製)
同 FSRシンナー(同上社製)
(粘度 30センチポアズ)
ライン速度 ・・・0.22m/分乾燥
温度 ・・・80℃レジスト膜の厚
さ ・・・7±1μmExample 7 Continuous film substrate: Same resist as Example 2
...Product name FSR (manufactured by Fuji Yakuhin Co., Ltd.) Same FSR thinner (manufactured by Fuji Pharmaceutical Co., Ltd.) (Viscosity 30 centipoise) Line speed ...0.22 m/min Drying temperature ...80°C Thickness of resist film ...・7±1μm
【0044】[0044]
【発明の効果】本発明に係る液状塗布剤の連続塗布方法
および連続塗布装置によれば、連続フィルム状基体上に
液状塗布剤を連続的に容易に塗布することができ、任意
の厚みの塗膜を均一に形成することができる工業的に優
れた効果がある。Effects of the Invention According to the continuous coating method and continuous coating device for a liquid coating agent according to the present invention, the liquid coating agent can be easily and continuously applied onto a continuous film-like substrate, and coatings of arbitrary thickness can be applied. It has an industrially excellent effect of being able to form a film uniformly.
【図1】本発明方法による連続塗布状態を説明する縦断
側面図。FIG. 1 is a vertical sectional side view illustrating a continuous coating state according to the method of the present invention.
【図2】本発明方法に用いる塗布ロールの斜視図[Fig. 2] Perspective view of a coating roll used in the method of the present invention
【図3
】本発明による連続塗布装置の一実施例を示す側面図[Figure 3
]A side view showing an embodiment of a continuous coating device according to the present invention.
1 フランジ付案内兼塗布ロール 2 下向き転向案内ロール 3 水平転向案内ロール 4 連続フィルム状基体 5 フランジ 6 液状塗布剤 6A 塗膜 7 液状塗布剤溜め空間 8 液状塗布剤供給用ノズル管 9 繰り出し用コイラー 10 巻取り用コイラー 11 乾燥用ヒーター 1 Guide and application roll with flange 2 Downward turning guide roll 3 Horizontal turning guide roll 4 Continuous film-like substrate 5 Flange 6. Liquid coating agent 6A Paint film 7 Liquid coating agent reservoir space 8 Nozzle pipe for supplying liquid coating agent 9 Coiler for feeding out 10 Coiler for winding 11 Drying heater
Claims (5)
せ、その移動の途中において連続フィルム状基体を、水
平に支持されている少なくとも両端にフランジが付いた
ロールの該フランジの略下半周に接触させて上方に反転
させることにより、上記フランジ付きロールの胴と連続
フィルム状基体との間の空間に供給された液状塗布剤を
連続フィルム状基体に付着させ、その後、連続フィルム
状基体の移動を水平に転向させることを特徴とする連続
塗布方法。1. A continuous film-like substrate is moved in one direction, and during the movement, the continuous film-like substrate is brought into contact with approximately the lower half of the flange of a horizontally supported roll having flanges on at least both ends. The liquid coating agent supplied to the space between the flanged roll body and the continuous film substrate is attached to the continuous film substrate by rotating the flanged roll and turning it upward, and then the continuous film substrate is stopped from moving. Continuous application method characterized by horizontal turning.
状基体の移動を案内ロールを介して水平に転向させ、そ
の水平転向案内ロールのフランジ付きロールに対する位
置を調整して液状塗布剤の膜厚を設定することを特徴と
する請求項1記載の連続塗布方法。2. The movement of the continuous film substrate coated with the liquid coating agent is horizontally turned via a guide roll, and the position of the horizontal turning guide roll with respect to the flanged roll is adjusted to change the film thickness of the liquid coating agent. 2. The continuous coating method according to claim 1, wherein:
して、連続フィルム状基体に塗布された液状塗布剤の乾
燥管理を行うことを特徴とする請求項1記載の連続塗布
方法。3. The continuous coating method according to claim 1, wherein drying of the liquid coating agent applied to the continuous film-like substrate is controlled by controlling the moving speed of the continuous film-like substrate.
徴とする請求項1記載の連続塗布方法。4. The continuous coating method according to claim 1, wherein the coating agent is a liquid resist.
の移動を下向きに転向させる案内ロールと、その下向き
に移動する連続フィルム状基体の移動を上向きに転向さ
せる案内兼塗布ロールと、上向きに転向移動する連続フ
ィルム状基体を水平移動に転向させる案内ロールとを互
いに平行に配置し、上記案内兼塗布ロールの少なくとも
両端にフランジを設けて、そのフランジの略下半周と連
続フィルム状基体の接触によって案内兼塗布ロールの胴
と連続フィルム状基体の間に液状塗布剤を溜める空間を
形成し、連続フィルム状基体の移動速度が制御可能の駆
動装置と、連続フィルム状基体に付着した液状塗布剤の
乾燥装置を備えたことを特徴とする連続塗布装置。5. A guide roll that redirects the movement of the continuous film-like substrate moving in one direction downward, a guide/application roll that turns the movement of the continuous film-like substrate moving downward upward, and a guide roller that turns the movement of the continuous film-like substrate moving downward in the upward direction. Guide rolls for turning the moving continuous film substrate into horizontal movement are arranged parallel to each other, flanges are provided at least at both ends of the guide and coating roll, and approximately the lower half of the flange is brought into contact with the continuous film substrate. A driving device is provided, which forms a space for storing the liquid coating agent between the guide/coating roll cylinder and the continuous film substrate, and is capable of controlling the moving speed of the continuous film substrate. A continuous coating device characterized by being equipped with a drying device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2535491A JPH04243571A (en) | 1991-01-25 | 1991-01-25 | Continuous coating method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2535491A JPH04243571A (en) | 1991-01-25 | 1991-01-25 | Continuous coating method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04243571A true JPH04243571A (en) | 1992-08-31 |
Family
ID=12163521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2535491A Withdrawn JPH04243571A (en) | 1991-01-25 | 1991-01-25 | Continuous coating method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04243571A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7569250B2 (en) * | 2004-05-17 | 2009-08-04 | Hewlett-Packard Development Company, L.P. | Method, system, and apparatus for protective coating a flexible circuit |
-
1991
- 1991-01-25 JP JP2535491A patent/JPH04243571A/en not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7569250B2 (en) * | 2004-05-17 | 2009-08-04 | Hewlett-Packard Development Company, L.P. | Method, system, and apparatus for protective coating a flexible circuit |
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