JPH0424254U - - Google Patents

Info

Publication number
JPH0424254U
JPH0424254U JP6461390U JP6461390U JPH0424254U JP H0424254 U JPH0424254 U JP H0424254U JP 6461390 U JP6461390 U JP 6461390U JP 6461390 U JP6461390 U JP 6461390U JP H0424254 U JPH0424254 U JP H0424254U
Authority
JP
Japan
Prior art keywords
holder
filament
control circuit
ion implantation
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6461390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6461390U priority Critical patent/JPH0424254U/ja
Publication of JPH0424254U publication Critical patent/JPH0424254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6461390U 1990-06-19 1990-06-19 Pending JPH0424254U (th)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6461390U JPH0424254U (th) 1990-06-19 1990-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6461390U JPH0424254U (th) 1990-06-19 1990-06-19

Publications (1)

Publication Number Publication Date
JPH0424254U true JPH0424254U (th) 1992-02-27

Family

ID=31595712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6461390U Pending JPH0424254U (th) 1990-06-19 1990-06-19

Country Status (1)

Country Link
JP (1) JPH0424254U (th)

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