JPH04240753A - Temperature detecting structure for integrated circuit package and temperature sensor carrier - Google Patents

Temperature detecting structure for integrated circuit package and temperature sensor carrier

Info

Publication number
JPH04240753A
JPH04240753A JP3006750A JP675091A JPH04240753A JP H04240753 A JPH04240753 A JP H04240753A JP 3006750 A JP3006750 A JP 3006750A JP 675091 A JP675091 A JP 675091A JP H04240753 A JPH04240753 A JP H04240753A
Authority
JP
Japan
Prior art keywords
temperature sensor
integrated circuit
temperature
sensor carrier
circuit package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3006750A
Other languages
Japanese (ja)
Other versions
JP2927975B2 (en
Inventor
Hironobu Ikeda
博伸 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3006750A priority Critical patent/JP2927975B2/en
Publication of JPH04240753A publication Critical patent/JPH04240753A/en
Application granted granted Critical
Publication of JP2927975B2 publication Critical patent/JP2927975B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent damage of a temperature sensor signal system due to a handling mistake by providing a pad connected to a bump of a board of A temperature sensor carrier in a recess formed on the board of the carrier through the leads of a temperature sensor and inner wirings, and transmitting the signal of the sensor to a circuit board through the bump. CONSTITUTION:A recess is provided on a board 6 of a temperature sensor carrier 1, and a temperature sensor 3 is adhered with a thermal conductive adhesive. A pad 2 is provided in the recess, and connected to the lead 8 of the sensor 3 by soldering of Au/Sn (80/20wt%), etc. Further, a plurality of bumps 7 are provided on the lower surface of the board 6, and connected to the pads 2 though the inner wirings 9 of the board 6. Further, thermal conductive compound 17 is filled in a microscopic gap between the upper surface of the carrier 1 and a cooler 12. The output of the sensor 3 is transmitted to a circuit board 18 through the wirings 9 and the bumps 7, and input from input/output pins 10 to an external circuit.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、大型の情報処理装置等
の電子機器を構成する集積回路パッケージの温度を測定
する温度検出構造およびこれに用いられる温度センサキ
ャリアに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature detection structure for measuring the temperature of an integrated circuit package constituting an electronic device such as a large information processing device, and a temperature sensor carrier used therein.

【0002】0002

【従来の技術】情報処理装置等の電子装置では多数の集
積回路素子を搭載した基板を複数枚、架に実装し、架に
取り付けたファンにより強制空冷を行い、その排気温度
を観測し、排気温度が規定値以上になると、集積回路素
子の破壊を防ぐ為に、装置への給電を停止する等の処置
を行うのが一般的である。
[Prior Art] In electronic equipment such as information processing equipment, multiple boards carrying a large number of integrated circuit elements are mounted on a rack, forced air cooling is performed using a fan attached to the rack, and the temperature of the exhaust air is monitored. When the temperature exceeds a specified value, it is common to take measures such as stopping power supply to the device to prevent damage to the integrated circuit elements.

【0003】近年、素子の大規模集積化,実装の高密度
化に伴い、架内の発熱密度が極度に高くなっており、こ
れらを使用した装置では液体冷却方式を採用した集積回
路パッケージを使用している。この方式では集積回路パ
ッケージ毎に温度センサを用意し集積回路パッケージの
温度を検出し、温度が規定以上になると、給電を停止す
る等の保護処理を行っている。
[0003] In recent years, with the large-scale integration of devices and the increasing density of packaging, the density of heat generation inside racks has become extremely high. are doing. In this method, a temperature sensor is provided for each integrated circuit package to detect the temperature of the integrated circuit package, and when the temperature exceeds a specified value, protective processing such as stopping power supply is performed.

【0004】従来の集積回路パッケージの温度検出構造
を図3を参照して説明する。
A conventional temperature detection structure for an integrated circuit package will be explained with reference to FIG.

【0005】すなわち配線基板301上の集積回路パッ
ケージ302に細い通し溝303を用意する。この溝3
03に、温度センサ304をセンサ出力を伝える為のフ
レキシブルプリント板305に接続し、又センサ出力を
外部へ伝える為の接続用コネクタ306をフレキシブル
プリント板305の補強板307に接続したサブアッセ
ンブリ(図4にサブアッセンブリのみの斜視図を示す)
を挿入固定する。
That is, a narrow through groove 303 is prepared in the integrated circuit package 302 on the wiring board 301 . This groove 3
In 2003, a subassembly (Fig. 4 shows a perspective view of only the subassembly)
Insert and fix.

【0006】この集積回路パッケージ302に、冷媒の
供給口308,排出口309を持つ冷却器310を固定
用ネジ311を用いて密着させ、供給口308,排出口
309の間に冷媒を循環させることにより集積回路パッ
ケージ302を冷却し、接続用コネクタ306にセンサ
信号取り出し用のケーブル・コネクタ312を接続し、
信号を取り出すことにより集積回路パッケージ302の
温度を検出監視し必要な保護処置を行っていた。
A cooler 310 having a refrigerant supply port 308 and a refrigerant discharge port 309 is tightly attached to the integrated circuit package 302 using fixing screws 311, and the refrigerant is circulated between the supply port 308 and the discharge port 309. to cool the integrated circuit package 302, connect the cable connector 312 for sensor signal extraction to the connection connector 306,
By extracting the signal, the temperature of the integrated circuit package 302 is detected and monitored, and necessary protective measures are taken.

【0007】[0007]

【発明が解決しようとする課題】上述した従来の集積回
路パッケージの温度検出構造ではフレキシブルプリント
板305の一部、補強板307、接続用コネクタ306
、すなわちセンサ出力の信号経路の一部が集積回路パッ
ケージ302より部分的に飛び出ることになる。このよ
うに飛び出し部分があると、集積回路パッケージ302
の着脱持ち運び時等に、この飛び出し部分がぶつかり、
上記信号経路の構成部品に損傷を与えるという問題点が
あった。
[Problems to be Solved by the Invention] In the conventional integrated circuit package temperature detection structure described above, a part of the flexible printed board 305, the reinforcing plate 307, and the connecting connector 306
That is, a portion of the signal path of the sensor output partially protrudes from the integrated circuit package 302. If there is a protruding part like this, the integrated circuit package 302
This protruding part may hit when you put on or take off the
There is a problem in that the component parts of the signal path are damaged.

【0008】又信号取り出し用のケーブル・コネクタ3
12を接続用コネクタ306に接続したまま集積回路パ
ッケージ302の取りはずしを行い、上記信号経路の構
成部品及びケーブル・コネクタ312に損傷を与えるこ
ともあるという問題点もあった。
[0008] Also, cable connector 3 for signal extraction
There is also a problem in that the integrated circuit package 302 is removed while the cable connector 312 is connected to the connector 306, which may damage the components of the signal path and the cable connector 312.

【0009】さらに冷却器310を集積回路パッケージ
302に密着させる時、ケーブル・コネクタ312のケ
ーブルを間にはさんだまま密着させ前記ケーブルを切る
こともあるという欠点もあった。
Furthermore, when the cooler 310 is closely attached to the integrated circuit package 302, there is a drawback that the cable of the cable connector 312 is sandwiched between the cooler 310 and the integrated circuit package 302, and the cable may be cut.

【0010】0010

【課題を解決するための手段】本発明の集積回路パッケ
ージの温度検出構造は、集積回路素子を搭載する配線基
板と、前記集積回路素子の上面と熱的に連結して前記集
積回路素子を冷却する冷却器と、前記配線基板に搭載さ
れ上面が前記冷却器に熱的に連結された温度センサキャ
リアの基板と、この温度センサキャリアの基板に設けら
れた凹部に固着された温度センサと、この温度センサの
リードおよび前記温度センサキャリアの基板のバンプと
内部配線で接続され前記凹部に設けられたパッドとを含
み、前記温度センサの信号を前記温度センサキャリアの
基板のバンプを介して前記配線基板に伝えさらに前記配
線基板の入出力ピンを経て外部に伝えることを特徴とす
る。
[Means for Solving the Problems] A temperature detection structure for an integrated circuit package of the present invention thermally connects a wiring board on which an integrated circuit element is mounted and an upper surface of the integrated circuit element to cool the integrated circuit element. a temperature sensor carrier substrate mounted on the wiring board and whose upper surface is thermally connected to the cooler; a temperature sensor fixed to a recess provided in the substrate of the temperature sensor carrier; a pad provided in the recess and connected to a temperature sensor lead and a bump on the substrate of the temperature sensor carrier by internal wiring, and transmits a signal from the temperature sensor to the wiring board via the bump on the substrate of the temperature sensor carrier. The signal is further transmitted to the outside via input/output pins of the wiring board.

【0011】[0011]

【実施例】次に本発明について図面を参照して説明する
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be explained with reference to the drawings.

【0012】図1(a)および(b)は本発明の一実施
例の温度センサキャリアを示す縦断面図及び上面図であ
る。図1に示す温度センサキャリア1の基板6には、凹
部5が設けてあり、凹部5に温度センサ3が熱伝導性の
接着剤4で接着される。また、凹部5には、パッド2が
設けてあり、温度センサ3のリード8と接続される。パ
ッド2と、リード8との接続方法としては、Au/Sn
(80/20wt%)等の半田付けによるが、金金熱圧
着法でもよい。基板6の下面には、複数のバンプ7が設
けてあり、基板6の内部配線9を介してパッド2と接続
される。
FIGS. 1(a) and 1(b) are a longitudinal sectional view and a top view showing a temperature sensor carrier according to an embodiment of the present invention. The substrate 6 of the temperature sensor carrier 1 shown in FIG. Further, a pad 2 is provided in the recess 5 and is connected to a lead 8 of the temperature sensor 3. The connection method between pad 2 and lead 8 is Au/Sn.
(80/20wt%) or the like, but a gold-gold thermocompression method may also be used. A plurality of bumps 7 are provided on the lower surface of the substrate 6 and are connected to the pads 2 via internal wiring 9 of the substrate 6.

【0013】図2は図1に示す温度センサキャリア1を
実装した集積回路パッケージの縦断面図である。19は
チップキャリアに搭載された集積回路素子である。
FIG. 2 is a longitudinal sectional view of an integrated circuit package in which the temperature sensor carrier 1 shown in FIG. 1 is mounted. 19 is an integrated circuit element mounted on a chip carrier.

【0014】18は複数個の集積回路素子19と温度セ
ンサキャリア1を搭載する配線基板であり、集積回路素
子19が搭載された面と反対の面には多数の入出力ピン
10が設けられ、外部との信号接続,電源供給を行い、
また外周を囲むよう基板枠11を固着する。12は冷却
器で液体冷媒の入口13出口14および内部の冷媒流路
15を有する。冷却器12は集積回路素子19の上面に
対向し、微小な間隙を保つよう基板枠11にねじ16に
て固定される。冷却器12と集積回路素子19との微小
間隙にはペースト状の熱伝導性コンパウンド17を充填
する。本実施例では液冷方式を採用した場合を述べるが
、空冷とする場合は冷却器12の代わりに例えばフィン
を設けたヒートシンクを取り付ければよい。
Reference numeral 18 denotes a wiring board on which a plurality of integrated circuit elements 19 and the temperature sensor carrier 1 are mounted, and a large number of input/output pins 10 are provided on the surface opposite to the surface on which the integrated circuit elements 19 are mounted. Connect external signals and supply power.
Further, the substrate frame 11 is fixed so as to surround the outer periphery. 12 is a cooler having an inlet 13 and an outlet 14 for liquid refrigerant, and an internal refrigerant flow path 15. The cooler 12 faces the upper surface of the integrated circuit element 19 and is fixed to the substrate frame 11 with screws 16 so as to maintain a small gap. The minute gap between the cooler 12 and the integrated circuit element 19 is filled with a paste-like thermally conductive compound 17. In this embodiment, a case will be described in which a liquid cooling method is adopted, but if air cooling is used, a heat sink provided with fins, for example, may be attached instead of the cooler 12.

【0015】集積回路素子19で発生した熱は熱伝導性
コンパウンド17を介して冷却器12へと伝わり冷媒流
路15内を流れる液体冷媒へと排熱される。このとき冷
却器12の集積回路素子19との対向面の温度は集積回
路素子19内のP−N接合の温度とある一定の温度差を
持つ。したがって計算または実験によりこの温度差を求
めれば、冷却器12の集積回路素子19との対向面の温
度を測定することにより集積回路素子19のP−N接合
の温度を算出することができる。
The heat generated by the integrated circuit element 19 is transferred to the cooler 12 via the thermally conductive compound 17 and is dissipated into the liquid refrigerant flowing in the refrigerant flow path 15. At this time, the temperature of the surface of the cooler 12 facing the integrated circuit element 19 has a certain temperature difference from the temperature of the PN junction within the integrated circuit element 19. Therefore, if this temperature difference is determined by calculation or experiment, the temperature of the PN junction of the integrated circuit element 19 can be calculated by measuring the temperature of the surface of the cooler 12 facing the integrated circuit element 19.

【0016】温度センサキャリア1は他の集積回路素子
19と同じ部品高さをもつよう設計されており、温度セ
ンサキャリア1の上面と冷却器12との微小間隙には熱
伝導性コンパウンド17を充填してある。また温度セン
サ3は図1に示したように基板6の凹部5に熱伝導性接
着剤4で接着されているため、集積回路パッケージが熱
的に平衡状態にあれば温度センサ3により冷却器12の
集積回路素子19との対向面の温度を測定できる。
The temperature sensor carrier 1 is designed to have the same component height as other integrated circuit elements 19, and a minute gap between the top surface of the temperature sensor carrier 1 and the cooler 12 is filled with a thermally conductive compound 17. It has been done. Furthermore, as shown in FIG. 1, the temperature sensor 3 is bonded to the recess 5 of the substrate 6 with a thermally conductive adhesive 4, so that if the integrated circuit package is in a thermally balanced state, the temperature sensor 3 will cause the temperature sensor 3 to The temperature of the surface facing the integrated circuit element 19 can be measured.

【0017】温度センサ3の出力を内部配線9,バンプ
7を介して配線基板18に伝え、入出力ピン10から外
部回路に入力するようにし、集積回路素子19のP−N
接合が許容最高温度に達したときの冷却器12の集積回
路素子19と対向面温度を温度センサ3が検知したとき
に集積回路素子19への電源供給を停止するよう外部回
路を構成することにより集積回路素子19の保護機構を
構成することができる。
The output of the temperature sensor 3 is transmitted to the wiring board 18 via the internal wiring 9 and bumps 7, and is inputted to the external circuit from the input/output pin 10.
By configuring the external circuit so that the power supply to the integrated circuit element 19 is stopped when the temperature sensor 3 detects the temperature of the surface facing the integrated circuit element 19 of the cooler 12 when the junction reaches the maximum allowable temperature. A protection mechanism for the integrated circuit element 19 can be configured.

【0018】温度センサキャリア1からの信号は他の集
積回路素子19の信号と同様配線基板18に設けられた
入出力ピン10により外部へ接続されるので温度検出の
ために専用のコネクタ等を設ける必要がない。したがっ
て集積回路パッケージの着脱は温度検出信号の接続を全
く意識せずに行うことができる。また集積回路パッケー
ジからの突出部も存在せず持運び時等に損傷を与えるこ
とがない。
Since the signal from the temperature sensor carrier 1 is connected to the outside through the input/output pin 10 provided on the wiring board 18 like the signals from other integrated circuit elements 19, a dedicated connector or the like is provided for temperature detection. There's no need. Therefore, the integrated circuit package can be attached and detached without being aware of the connection of the temperature detection signal. Furthermore, since there is no protrusion from the integrated circuit package, there is no possibility of damage during transportation.

【0019】[0019]

【発明の効果】以上説明したように、本発明の集積回路
パッケージの温度検出構造は、キャップ等を用いる封止
を必要としない構造であるため信頼性が高く、製造工程
も簡単であり、集積回路パッケージの脱着時に温度セン
サ専用のコネクタ等を操作する必要がなく、部品の突起
がないため取扱ミスによる温度センサ信号系の損傷のな
い温度検出構造を実現できるという効果がある。
As explained above, the temperature detection structure of the integrated circuit package of the present invention is highly reliable because it does not require sealing using a cap, etc., and the manufacturing process is simple. There is no need to operate a connector dedicated to the temperature sensor when attaching or detaching the circuit package, and since there are no protrusions on the parts, it is possible to realize a temperature detection structure that will not damage the temperature sensor signal system due to handling errors.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例の温度センサキャリアを示す
図である。
FIG. 1 is a diagram showing a temperature sensor carrier according to an embodiment of the present invention.

【図2】図1に示す温度センサキャリアを実装した集積
回路パッケージの断面図である。
FIG. 2 is a cross-sectional view of an integrated circuit package in which the temperature sensor carrier shown in FIG. 1 is mounted.

【図3】従来の集積回路パッケージの温度検出構造を示
す斜視図である。
FIG. 3 is a perspective view showing a temperature detection structure of a conventional integrated circuit package.

【図4】図3の温度センサ304を含むサブアッセンブ
リの斜視図である。
4 is a perspective view of a subassembly including temperature sensor 304 of FIG. 3. FIG.

【符号の説明】[Explanation of symbols]

1    温度センサキャリア 2    パッド 3,304    温度センサ 4    接着剤 5    凹部 6    基板 7    バンプ 8    リード 9    内部配線 10    入出力ピン 11    枠 12,310    冷却器 13    冷媒入口 14    冷媒出口 15    冷媒流路 16    ネジ 17    熱伝導コンパウンド 18,301  配線基板 19    集積回路 302    集積回路パッケージ 303    通し溝 305    フレキシブルプリント板306    
接続用コネクタ 307    補強板 308    供給口 309    排出口 311    固定用ネジ 302    ケーブルコネクタ
1 Temperature sensor carrier 2 Pad 3, 304 Temperature sensor 4 Adhesive 5 Recess 6 Board 7 Bump 8 Lead 9 Internal wiring 10 Input/output pin 11 Frame 12, 310 Cooler 13 Refrigerant inlet 14 Refrigerant outlet 15 Refrigerant flow path 16 Screw 17 Heat Conductive compound 18, 301 Wiring board 19 Integrated circuit 302 Integrated circuit package 303 Through groove 305 Flexible printed board 306
Connection connector 307 Reinforcement plate 308 Supply port 309 Discharge port 311 Fixing screw 302 Cable connector

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  集積回路素子を搭載する配線基板と、
前記集積回路素子の上面と熱的に連結して前記集積回路
素子を冷却する冷却器と、前記配線基板に搭載され上面
が前記冷却器に熱的に連結された温度センサキャリアの
基板と、この温度センサキャリアの基板に設けられた凹
部に固着された温度センサと、この温度センサのリード
および前記温度センサキャリアの基板のバンプと内部配
線で接続され前記凹部に設けられたパッドとを含み、前
記温度センサの信号を前記温度センサキャリアの基板の
バンプを介して前記配線基板に伝えさらに前記配線基板
の入出力ピンを経て外部に伝えることを特徴とする集積
回路パッケージの温度検出構造。
[Claim 1] A wiring board on which an integrated circuit element is mounted;
a cooler thermally coupled to an upper surface of the integrated circuit element to cool the integrated circuit element; a substrate of a temperature sensor carrier mounted on the wiring board and having an upper surface thermally coupled to the cooler; a temperature sensor fixed to a recess provided in a substrate of a temperature sensor carrier; and a pad provided in the recess connected to a lead of the temperature sensor and a bump of the substrate of the temperature sensor carrier through internal wiring; A temperature detection structure for an integrated circuit package, characterized in that a signal from a temperature sensor is transmitted to the wiring board via a bump on the substrate of the temperature sensor carrier, and further transmitted to the outside via an input/output pin of the wiring board.
【請求項2】  凹部にパッドを形成しこのパッドとバ
ンプとを内部配線を介して接続した基板と、前記パッド
とリードが接続され前記凹部に固着された温度センサを
含むことを特徴とする温度センサキャリア。
2. A temperature sensor comprising: a substrate having a pad formed in a recess and connecting the pad and a bump via internal wiring; and a temperature sensor having the pad and a lead connected and fixed to the recess. sensor carrier.
JP3006750A 1991-01-24 1991-01-24 Temperature detection structure of integrated circuit package and temperature sensor carrier Expired - Lifetime JP2927975B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3006750A JP2927975B2 (en) 1991-01-24 1991-01-24 Temperature detection structure of integrated circuit package and temperature sensor carrier

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JP3006750A JP2927975B2 (en) 1991-01-24 1991-01-24 Temperature detection structure of integrated circuit package and temperature sensor carrier

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016003937A (en) * 2014-06-16 2016-01-12 住友電気工業株式会社 Temperature measuring module, printed-circuit board, and manufacturing method of temperature measuring module

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61276242A (en) * 1985-05-30 1986-12-06 Hitachi Ltd Semiconductor module
JPH0260151A (en) * 1988-08-26 1990-02-28 Nec Corp Temperature sensing structure for integrated circuit package

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61276242A (en) * 1985-05-30 1986-12-06 Hitachi Ltd Semiconductor module
JPH0260151A (en) * 1988-08-26 1990-02-28 Nec Corp Temperature sensing structure for integrated circuit package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016003937A (en) * 2014-06-16 2016-01-12 住友電気工業株式会社 Temperature measuring module, printed-circuit board, and manufacturing method of temperature measuring module

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