JPH04240505A - Device for measuring dimension of transmission type - Google Patents

Device for measuring dimension of transmission type

Info

Publication number
JPH04240505A
JPH04240505A JP2527791A JP2527791A JPH04240505A JP H04240505 A JPH04240505 A JP H04240505A JP 2527791 A JP2527791 A JP 2527791A JP 2527791 A JP2527791 A JP 2527791A JP H04240505 A JPH04240505 A JP H04240505A
Authority
JP
Japan
Prior art keywords
light
amount
light receiving
received
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2527791A
Other languages
Japanese (ja)
Inventor
Tomiyoshi Yoshida
吉田 富省
Yasumasa Sakai
酒井 泰誠
Hiroaki Takimasa
宏章 滝政
Koichi Tsujino
辻野 孝一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2527791A priority Critical patent/JPH04240505A/en
Publication of JPH04240505A publication Critical patent/JPH04240505A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable highly-precise measurement of a dimension without being affected by a change in the quantity of sensed light when the change occurs due to deterioration of a light projecting part or a light sensing part, a change in characteristics caused by a change in temperature or the like, stain of a lens or others. CONSTITUTION:When an object 12 comes onto this side of a slit 10, it is detected by an auxiliary light-sensing element 8 and a sensed-light voltage VA of the whole quantity of sensed light before the slit 10 is shaded is stored and held in a hold circuit 16. When the object 12 reaches the slit 10, the quantity of the sensed light shaded by the object 12 is measured and a voltage VB of the sensed light is inputted to a division part 14. In the division part 14, a ratio between this sensed-light voltage VB and the sensed-light voltage VA of the whole quantity of the sensed light held in the hold circuit 16 is computed. The dimension of the object 12 is determined on the basis of the value (VB/VA) of this ratio.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、投光部から物体に平行
光を照射させ、その物体で遮蔽されることにより変化す
る受光量を受光部で検出して物体の寸法を測定する透過
型寸法測定装置に関する。
[Industrial Application Field] The present invention is a transmission type that measures the dimensions of an object by emitting parallel light from a light projecting section onto an object, and detecting the amount of received light that changes when the object blocks it, using a light receiving section. It relates to a dimension measuring device.

【0002】0002

【従来の技術】図5に従来の透過型寸法測定装置51の
構成を示す。寸法測定装置51は、投光部52と受光部
53とからなり、互いに向かい合わせに配置されている
。投光部52内には、半導体レ−ザ素子等の発光源54
と発光源54から放射された光を平行光に変換するため
のレンズ55が内蔵されている。しかして、駆動回路5
6によって発光源54を駆動すると、投光部52からは
平行光の投光ビームαが出射される。また、受光部53
の前面にはスリット57が開口されており、内部にはス
リット57から入射した光を受光して受光量を検出する
ためのフォトダイオード(PD)等の受光素子58と入
射光を受光素子58に集光させるためのレンズ59が内
蔵されており、受光部53から受光回路60へは検出信
号が出力され、受光回路60からは受光電圧Vが出力さ
れている。
2. Description of the Related Art FIG. 5 shows the configuration of a conventional transmission type dimension measuring device 51. The dimension measuring device 51 includes a light projecting section 52 and a light receiving section 53, which are arranged facing each other. Inside the light projecting section 52, a light emitting source 54 such as a semiconductor laser element is provided.
A lens 55 is built in to convert the light emitted from the light emitting source 54 into parallel light. However, the drive circuit 5
When the light emitting source 54 is driven by 6, a collimated light beam α is emitted from the light projecting section 52. In addition, the light receiving section 53
A slit 57 is opened in the front surface of the slit 57, and inside there is a light receiving element 58 such as a photodiode (PD) for receiving the light incident from the slit 57 and detecting the amount of received light. A lens 59 for condensing light is built in, a detection signal is output from the light receiving section 53 to a light receiving circuit 60, and a light receiving voltage V is output from the light receiving circuit 60.

【0003】図6に受光回路60から出力される受光電
圧Vと遮光量(または、物体61の外形寸法)との関係
を示す。受光電圧Vは、物体61の外形寸法が大きくな
って遮光量が増大すると、直線的に減少してゆく。した
がって、受光回路60から出力される受光電圧に基づき
、遮光量(外形寸法)が求められる。
FIG. 6 shows the relationship between the light receiving voltage V output from the light receiving circuit 60 and the amount of light shielding (or the external dimensions of the object 61). The light receiving voltage V decreases linearly as the external dimensions of the object 61 increase and the amount of light shielding increases. Therefore, based on the light receiving voltage output from the light receiving circuit 60, the amount of light shielding (outer dimensions) is determined.

【0004】しかして、投光部52から出射された投光
ビームαは、図4に示すように、受光部53のスリット
57を含む領域に照射されている。この時、例えばコン
ベア等によって搬送されている不透明もしくは半透明の
物体61が、投光部52と受光部53との間を通過する
と、投光部52から出射された投光ビームαの一部が物
体61で遮蔽され、受光部53の受光量(受光電圧V)
が変化するので、物体の寸法が求められる。
[0004]The projected light beam α emitted from the light projecting section 52 is irradiated onto an area including the slit 57 of the light receiving section 53, as shown in FIG. At this time, when an opaque or translucent object 61 being conveyed by a conveyor or the like passes between the light projecting section 52 and the light receiving section 53, a portion of the projected light beam α emitted from the light projecting section 52 is blocked by the object 61, and the amount of light received by the light receiving section 53 (light receiving voltage V)
changes, so the dimensions of the object can be found.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、従来の
寸法測定装置では、受光部における受光電圧の変化に基
づいて物体の寸法を求めているので、以下のような原因
によって測定精度の悪化や誤検出の問題が発生していた
[Problems to be Solved by the Invention] However, with conventional dimension measuring devices, the dimensions of an object are determined based on changes in the light-receiving voltage at the light-receiving section. A problem was occurring.

【0006】■  投光部に内蔵されている半導体レー
ザ素子等の発光源には、投光パワーの温度による変動や
、素子劣化による投光パワーの減衰といった問題がある
ため、同一物体を測定した場合でも、受光部の受光量が
変動する。
■ Light emitting sources such as semiconductor laser elements built into the light emitting unit have problems such as fluctuations in the emitted light power due to temperature and attenuation of the emitted light power due to element deterioration. Even in this case, the amount of light received by the light receiving section fluctuates.

【0007】■  受光部に内蔵されている発光ダイオ
ード等の受光素子は、温度によって光−電流(o−i)
変換効率が変動するので、受光量が同じでも受光回路か
ら出力される受光電圧が変化する。
[0007] The light-receiving element such as a light-emitting diode built into the light-receiving section changes light-current (o-i) depending on the temperature.
Since the conversion efficiency varies, the light receiving voltage output from the light receiving circuit changes even if the amount of light received is the same.

【0008】■  また、発光源の投光パワーや受光素
子の効率に変化がない場合でも、レンズ等の汚れによっ
て受光量が変化することがある。
[0008]Furthermore, even if there is no change in the light emitting power of the light emitting source or the efficiency of the light receiving element, the amount of light received may change due to dirt on the lens or the like.

【0009】本発明は、叙上の従来技術の問題点に鑑み
てなされたものであり、その目的とするところは、透過
型寸法測定装置において、投光部の投光パワーや受光部
の変換効率の変動、あるいはレンズの汚れ等の原因によ
る寸法測定精度の悪化や誤検出を防止することにある。
The present invention has been made in view of the problems of the prior art described above, and its purpose is to improve the power of the light emitting part and the conversion of the light receiving part in a transmission type dimension measuring device. The objective is to prevent deterioration in dimensional measurement accuracy and erroneous detection due to factors such as fluctuations in efficiency or dirt on the lens.

【0010】0010

【課題を解決するための手段】本発明の透過型寸法測定
装置は、投光部から投光ビームを物体に照射し、その物
体で遮蔽されることにより変化する受光量を受光部で検
出して当該物体の寸法を測定する装置であって、検出領
域内に物体が存在している時と存在していない時とを判
別する手段と、検出領域内の全受光量及び物体で遮蔽さ
れた受光量を受光部によって検出させ、物体で遮蔽され
た受光量の全受光量に対する比より物体の寸法を演算す
る手段とからなることを特徴としている。
[Means for Solving the Problems] The transmission type dimension measuring device of the present invention irradiates an object with a light beam from a light projector, and detects the amount of received light that changes when the object is blocked by the light receiver. It is a device for measuring the dimensions of an object, and includes a means for determining when an object is present in the detection area and when it is not, and a means for determining the total amount of light received within the detection area and the amount of light shielded by the object. It is characterized by comprising means for detecting the amount of light received by the light receiving section and calculating the dimensions of the object from the ratio of the amount of light received blocked by the object to the total amount of light received.

【0011】また、検出領域内に物体が存在している時
と存在していない時とを判別するためには、例えば、検
出領域内の全受光量と物体で遮蔽された受光量を測定す
るタイミング信号を得るための補助受光素子を受光部に
設けるとよい。
[0011] Furthermore, in order to determine when an object is present in the detection area and when it is not, for example, the total amount of received light within the detection area and the amount of received light blocked by the object are measured. It is preferable that an auxiliary light-receiving element for obtaining a timing signal is provided in the light-receiving section.

【0012】0012

【作用】本発明にあっては、検出領域内の全受光量及び
物体で遮蔽された受光量を受光部によって検出させ、物
体で遮蔽された受光量の全受光量に対する比、すなわち
投光ビームの遮蔽量の比率より物体の寸法を演算してい
る。
[Operation] In the present invention, the total amount of received light within the detection area and the amount of received light blocked by the object are detected by the light receiving section, and the ratio of the amount of received light blocked by the object to the total amount of received light, that is, the projected beam The dimensions of the object are calculated from the ratio of the amount of shielding.

【0013】したがって、投光部の温度による投光パワ
ーの変動や受光部の温度による光−電流変換効率の変動
等の投受光部の特性変化があっても、物体で遮蔽された
受光量は投光ビームが遮蔽されていない時の全受光量に
よって補正され、高い精度で物体の寸法測定あるいは寸
法判別を行うことができ、誤検出も防止される。
Therefore, even if there are changes in the characteristics of the light emitting/receiving section, such as fluctuations in the light emitting power due to the temperature of the light emitting section or fluctuations in light-to-current conversion efficiency due to the temperature of the light receiving section, the amount of received light blocked by the object is It is corrected by the total amount of light received when the projected beam is not blocked, and the dimensions of the object can be measured or determined with high precision, and erroneous detections are also prevented.

【0014】[0014]

【実施例】以下、本発明の実施例を添付図に基づいて詳
述する。図2に本発明の一実施例の概略構成図を示す。 投光部1には、半導体レーザ素子や発光ダイオード(L
ED)、ランプ等の発光源2とコリメート用のレンズ3
が内蔵されており、発光源2は駆動回路4で駆動されて
光を出射し、出射された光はレンズ3を通して平行光の
投光ビームαに変換され、受光部5に向けて出射される
DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will now be described in detail with reference to the accompanying drawings. FIG. 2 shows a schematic configuration diagram of an embodiment of the present invention. The light projecting unit 1 includes a semiconductor laser element and a light emitting diode (L
ED), a light emitting source 2 such as a lamp, and a collimating lens 3
The light emitting source 2 is driven by a drive circuit 4 to emit light, and the emitted light is converted into a collimated projection beam α through a lens 3 and emitted toward a light receiving unit 5. .

【0015】受光部5には、フォトダイオード(PD)
やPDアレイ、電荷結合素子(CCD)等の受光量を検
出するための受光素子6と、入射光を受光素子6に集光
させるためのレンズ7と、検出領域内に物体が存在する
か否かを判別するための補助受光素子8とが内蔵されて
おり、受光部ケース9の受光素子6と対向する箇所には
縦長のスリット10が開口されており、受光部ケース9
の補助受光素子8と対向する箇所には比較的小さな丸孔
状の透孔11が開口されており、スリット10の長手方
向の開口長さが物体寸法の検出範囲(検出領域)となっ
ている。しかも、図1に示すように、透孔11は、スリ
ット10の下端部とほぼ同じ高さで、物体12が移動し
てくる側に設けられている。
The light receiving section 5 includes a photodiode (PD).
A light receiving element 6 for detecting the amount of light received by a PD array, a charge-coupled device (CCD), etc., a lens 7 for focusing incident light on the light receiving element 6, and a sensor for determining whether an object exists within the detection area. A vertically long slit 10 is opened at a portion of the light receiving unit case 9 facing the light receiving element 6, and the light receiving unit case 9 has an auxiliary light receiving element 8 built therein.
A relatively small circular hole 11 is opened at a location facing the auxiliary light-receiving element 8, and the length of the opening in the longitudinal direction of the slit 10 is the detection range (detection area) of the object size. . Moreover, as shown in FIG. 1, the through hole 11 is provided at approximately the same height as the lower end of the slit 10, and on the side from which the object 12 moves.

【0016】しかして、投光部1から出射された投光ビ
ームαは、受光部5のスリット10及び透孔11を含む
領域(図1に斜線を施した領域)に照射されており、ス
リット10を通過した光の遮蔽状態は受光素子6で検知
され、透孔11を通過した光の遮蔽状態は補助受光素子
8で検知されている。
The projected beam α emitted from the projecting section 1 is irradiated onto a region (shaded region in FIG. 1) including the slit 10 and the through hole 11 of the light receiving section 5, and the slit The shielding state of the light passing through the hole 10 is detected by the light receiving element 6, and the shielding state of the light passing through the through hole 11 is detected by the auxiliary light receiving element 8.

【0017】また、図2に示すように、受光素子6の出
力は受光回路13に接続されており、受光回路13から
は受光量に応じた受光電圧Vが出力されている。さらに
、受光回路13の出力は、割算部14に直接に接続され
、また、アナログスイッチ15を介してホールド回路1
6に接続されている。このアナログスイッチ15の制御
端子には、増幅器17を介して補助受光素子8が接続さ
れており、補助受光素子8が透孔11を通過した光を検
出している時にはアナログスイッチ15はオフとなり、
透孔11へ入射する光が遮蔽されている時にはアナログ
スイッチ15はオンとなり、ホールド回路16は、アナ
ログスイッチ15の立ち上がり動作に同期して保持デー
タ(受光電圧V)を更新される。さらに、ホールド回路
16の保持している受光電圧の値は、割算部14へ出力
されており、割算部14では受光回路13から直接入力
されている受光電圧VBをホールド回路16で保持され
ている受光電圧VAで割った値(VB/VA)を演算し
出力する。
Further, as shown in FIG. 2, the output of the light receiving element 6 is connected to a light receiving circuit 13, and the light receiving circuit 13 outputs a light receiving voltage V corresponding to the amount of light received. Furthermore, the output of the light receiving circuit 13 is directly connected to the divider 14 and is also connected to the hold circuit 1 through an analog switch 15.
6. An auxiliary light receiving element 8 is connected to the control terminal of this analog switch 15 via an amplifier 17, and when the auxiliary light receiving element 8 is detecting the light passing through the through hole 11, the analog switch 15 is turned off.
When the light entering the through hole 11 is blocked, the analog switch 15 is turned on, and the held data (light receiving voltage V) in the hold circuit 16 is updated in synchronization with the rising operation of the analog switch 15. Further, the value of the light receiving voltage held by the hold circuit 16 is output to the dividing unit 14, and the dividing unit 14 holds the light receiving voltage VB directly input from the light receiving circuit 13 in the hold circuit 16. The value (VB/VA) divided by the received light voltage VA is calculated and output.

【0018】次に、図3のタイムチャートに従って本発
明の寸法測定装置の動作を説明する。図3において、(
a)は補助受光素子8のオン、オフ出力を示し、(b)
はアナログスイッチ15のオン、オフ状態を示し、(c
)はホールド回路16のデ−タ更新動作を示し、(d)
は物体12で遮蔽された受光量の受光素子6による測定
タイミングを示し、(e)は割算部14の演算及び出力
動作を示している。
Next, the operation of the dimension measuring apparatus of the present invention will be explained according to the time chart shown in FIG. In Figure 3, (
(a) shows the on/off output of the auxiliary light receiving element 8, (b)
indicates the on/off state of the analog switch 15, and (c
) shows the data update operation of the hold circuit 16, and (d)
(e) shows the timing of measuring the amount of light received by the object 12 by the light receiving element 6, and (e) shows the calculation and output operation of the dividing unit 14.

【0019】図1のように、今、ベルトコンベア上に寸
法測定される物体12が流れてくるものとすると、物体
12が検出領域(スリット位置)に達する直前に透孔1
1が物体12で遮られて時刻T1に補助受光素子8の出
力がオフからオンに変化し〔図3(a)〕、同時にアナ
ログスイッチ15がオンになる〔図3(b)〕。さらに
、アナログスイッチ15の立ち上がり動作と同期してホ
ールド回路16のデータが更新され、受光素子6で検出
された全受光量(物体による遮蔽のない受光量)を示す
受光電圧VAがホールド回路16で保持される〔図3(
c)〕。補助受光素子8及びアナログスイッチ15がオ
ンからオフになった後、時刻T2に物体12がスリット
10の位置に達し、物体12の寸法に応じて投光ビーム
αの一部が遮蔽されると、物体12に遮蔽された受光量
が測定され〔図3(d)〕、受光回路13から割算部1
4へ物体12に遮蔽された受光量に対する受光電圧VB
が出力され、全受光量電圧VAに対する物体に遮蔽され
た受光量電圧VBの比が割算部14で演算され、時刻T
3に物体12がスリット10を通過すると、この比率に
応じたアナログ電圧(VB/VA)が出力される〔図3
(e)〕。ここで、検出範囲は設定したスリット長に一
致しているため、演算結果の比率により、物体の寸法が
測定される。そして、被測定物体12が流れてくる毎に
、ホールド回路16の全受光量電圧VAを更新し、寸法
測定を繰り返す。なお、図3において、dは被測定物体
12の間の間隔である。
As shown in FIG. 1, if an object 12 whose dimensions are to be measured is now flowing onto the belt conveyor, the through hole 1 is inserted just before the object 12 reaches the detection area (slit position).
1 is blocked by the object 12, and the output of the auxiliary light receiving element 8 changes from off to on at time T1 [FIG. 3(a)], and at the same time, the analog switch 15 turns on [FIG. 3(b)]. Furthermore, data in the hold circuit 16 is updated in synchronization with the rising operation of the analog switch 15, and the light reception voltage VA indicating the total amount of light received by the light receiving element 6 (the amount of light received without being blocked by an object) is updated in the hold circuit 16. It is retained [Figure 3 (
c)]. After the auxiliary light receiving element 8 and the analog switch 15 are turned from on to off, the object 12 reaches the position of the slit 10 at time T2, and a portion of the projected beam α is blocked depending on the size of the object 12. The amount of light received that is blocked by the object 12 is measured [FIG. 3(d)], and the amount of light received by the object 12 is measured [FIG. 3(d)].
4. Light receiving voltage VB for the amount of light received blocked by the object 12
is output, the ratio of the received light amount voltage VB blocked by the object to the total received light amount voltage VA is calculated by the dividing unit 14, and the ratio is calculated at time T.
3, when the object 12 passes through the slit 10, an analog voltage (VB/VA) according to this ratio is output [Fig.
(e)]. Here, since the detection range matches the set slit length, the dimensions of the object are measured based on the ratio of the calculation results. Then, each time the object to be measured 12 flows, the total received light amount voltage VA of the hold circuit 16 is updated, and the dimension measurement is repeated. Note that in FIG. 3, d is the distance between the objects 12 to be measured.

【0020】なお、上記実施例では、補助受光素子でス
リット位置を通過する前の物体を検出し、全受光量電圧
をホールド回路に記憶させておくようにしたが、これと
は逆にしてもよい。すなわち、透孔及び補助受光素子を
スリットよりも物体の通過して行く方向に設け、物体が
スリット位置を通過した時の受光電圧をホールド回路に
記憶させておき、補助受光素子で物体がスリット位置を
通過し終わったことを検出して受光素子で全受光量の受
光電圧を検出し、割算部でホールド回路で記憶している
受光電圧と全受光量の受光電圧の比を演算してもよい。
In the above embodiment, the object before passing through the slit position is detected by the auxiliary light receiving element, and the total received light amount voltage is stored in the hold circuit. good. In other words, the through hole and the auxiliary light receiving element are provided in the direction in which the object passes relative to the slit, the light receiving voltage when the object passes through the slit position is stored in a hold circuit, and the auxiliary light receiving element is used to detect the object at the slit position. The light-receiving element detects the light-receiving voltage of the total amount of light received, and the dividing section calculates the ratio of the light-receiving voltage stored in the hold circuit and the light-receiving voltage of the total amount of light received. good.

【0021】[0021]

【発明の効果】本発明によれば、投光ビームの遮光量の
比率より物体の寸法を演算しているので、投光部及び受
光部の特性変化等により受光量が変動しても、受光量の
変動に影響されることなく、高い精度で物体の寸法測定
あるいは寸法判別を行うことができ、寸法測定装置の誤
検出も防止できる。
According to the present invention, the dimensions of the object are calculated based on the ratio of the amount of light blocked by the light emitting beam, so even if the amount of light received changes due to changes in the characteristics of the light emitting part and the light receiving part, the received light remains constant. It is possible to measure or determine the dimensions of an object with high accuracy without being affected by variations in quantity, and it is also possible to prevent erroneous detection by the dimension measuring device.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例における受光部を示す一部破
断した斜視図である。
FIG. 1 is a partially cutaway perspective view showing a light receiving section in an embodiment of the present invention.

【図2】同上の実施例の概略構成図である。FIG. 2 is a schematic configuration diagram of the embodiment same as above.

【図3】(a)(b)(c)(d)(e)はそれぞれ補
助受光素子、アナログスイッチ、ホールド回路、受光素
子及び割算部の動作を示すタイムチャートである。
3A, 3B, 3C, 3D, and 3E are time charts showing the operations of an auxiliary light receiving element, an analog switch, a hold circuit, a light receiving element, and a dividing section, respectively.

【図4】従来例における受光部の一部破断した斜視図で
ある。
FIG. 4 is a partially cutaway perspective view of a light receiving section in a conventional example.

【図5】従来例の概略構成図である。FIG. 5 is a schematic configuration diagram of a conventional example.

【図6】物体による遮光量と受光電圧との関係を示す図
である。
FIG. 6 is a diagram showing the relationship between the amount of light blocked by an object and the received light voltage.

【符号の説明】[Explanation of symbols]

1  投光部 5  受光部 6  受光素子 8  補助受光素子 10  スリット 11  透孔 12  物体 14  割算部 15  アナログスイッチ 16  ホールド回路 1 Light projecting section 5 Light receiving part 6 Photo receiving element 8 Auxiliary light receiving element 10 slit 11 Through hole 12 Object 14 Division part 15 Analog switch 16 Hold circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  投光部から投光ビームを物体に照射し
、その物体で遮蔽されることにより変化する受光量を受
光部で検出して当該物体の寸法を測定する装置であって
、検出領域内に物体が存在している時と存在していない
時とを判別する手段と、検出領域内の全受光量及び物体
で遮蔽された受光量を受光部によって検出させ、物体で
遮蔽された受光量の全受光量に対する比より物体の寸法
を演算する手段とからなることを特徴とする透過型寸法
測定装置。
1. A device that measures the dimensions of an object by emitting a light beam from a light projecting section onto an object and detecting the amount of received light that changes due to being blocked by the object using a light receiving section, A means for determining when an object exists and when an object does not exist within the detection area, and a light receiving unit detects the total amount of received light within the detection area and the amount of received light that is blocked by the object, and detects the amount of received light that is blocked by the object. A transmission type dimension measuring device comprising means for calculating the dimensions of an object from the ratio of the amount of received light to the total amount of received light.
【請求項2】  検出領域内の全受光量と物体で遮蔽さ
れた受光量を測定するタイミング信号を得るための補助
受光素子を前記受光部に設けたことを特徴とする請求項
1の透過型寸法測定装置。
2. The transmission type according to claim 1, wherein the light receiving section is provided with an auxiliary light receiving element for obtaining a timing signal for measuring the total amount of light received within the detection area and the amount of light received that is blocked by an object. Dimension measuring device.
JP2527791A 1991-01-24 1991-01-24 Device for measuring dimension of transmission type Pending JPH04240505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2527791A JPH04240505A (en) 1991-01-24 1991-01-24 Device for measuring dimension of transmission type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2527791A JPH04240505A (en) 1991-01-24 1991-01-24 Device for measuring dimension of transmission type

Publications (1)

Publication Number Publication Date
JPH04240505A true JPH04240505A (en) 1992-08-27

Family

ID=12161529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2527791A Pending JPH04240505A (en) 1991-01-24 1991-01-24 Device for measuring dimension of transmission type

Country Status (1)

Country Link
JP (1) JPH04240505A (en)

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