JPH04231000A - Sor light device and degassing method thereof - Google Patents

Abstract

PURPOSE:To provide an SOR light device which allows effective light seasoning, can improve the degree of vacuum in a short time, and can improve the availability factor for the normal operation. CONSTITUTION:Multiple acceleration tubes 12a-12c of an incidence device 17 used normally are prepared, multiple acceleration tubes 12a-12c are arranged in series at the time of the initial rise to constitute a high-energy incidence device 37, the light seasoning effect is increased in a short time with the high- energy SOR light, and the degree of vacuum is improved. For the normal operation after the preset degree of vacuum is obtained, multiple acceleration tubes 12a-12c are arranged in parallel to constitute an incidence device 17, when one acceleration tube fails, it is backed up by other acceleration tubes, and the availability factor of an SOR light device is improved.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to an SOR optical device (synchrotron radiation device) that enables the light drying operation necessary for starting up the device to be performed in a short time, and a method for degassing the same. Regarding SO, especially for low-energy incident
This is effective for R-light devices.

0002

[Prior Art] In recent years, synchrotrons have been developed as relatively small particle accelerators with a diameter of 10 m or less, and synchrotrons are being developed that use low-energy injection devices and have advantages such as low radiation generation and cost reduction. Yes, creating ultra-super LSI circuits using synchrotron radiation (SOR light),
It is expected to be applied to various fields such as diagnosis, molecular analysis, and structural analysis in the medical field.

The outline of this synchrotron radiation device is as follows:
For example, as shown in FIG. 2, a charged particle generator (electron gun, etc.) 10, an acceleration tube 12 such as a linear accelerator (linac),
Charged particle injection device 17 composed of a beam transport section 14
The charged particles generated by a charged particle generator (such as an electron gun) 10 are accelerated to near the speed of light by an acceleration tube 12 such as a linear accelerator (linac), and are deflected by a deflection electromagnet 16 of a beam transport unit 14. and enters the storage ring 22 via the inflector 18. The charged particles incident on the storage ring 22 are given energy by the high-frequency acceleration cavity 21, are held in a predetermined orbit by the focusing electromagnet 23, are deflected by the deflection electromagnet 24, and continue to circulate in the storage ring 22. Then, synchrotron radiation light (SOR light) generated when the charged particles accelerated by the storage ring 22 are deflected by the deflection electromagnet 24 passes through the beam channel 26.
For example, the light is sent to the exposure device 28 and used as a light source for creating ultra-super LSI circuits.

[0004] In such a synchrotron radiation device, the most important performance that the SOR light should have is the lifetime characteristic of the stored beam, and normally a lifetime of 10 hours or more is required. Since this life characteristic depends on scattering loss due to residual gas in the storage ring 22,
The storage ring 22 in which charged particles are stored and accelerated is constituted by a vacuum duct, and the inside thereof must be kept in an ultra-high vacuum state of 10 -9 Torr or less. Although it is possible to achieve this level of vacuum using normal high vacuum equipment, this type of degassing must be suppressed.

Therefore, after assembling the SOR optical device, baking is performed to promote the release of the adsorbed gas by heating with a heater or the like so that the gas adsorbed in each part of the device is thermally activated and taken out. . Furthermore, after reaching a predetermined degree of vacuum, charged particles are injected from the injection device 17, the SOR light device is operated, and the SOR light generated by the storage ring 22 is applied to the wall surface, so that the charged particles are injected inside the wall surface. An attempt is made to maintain an ultra-high vacuum state by performing light extinction to knock out the adsorbed gas. This S.O.
The improvement in the degree of vacuum due to light extinction performed using R light is greatly influenced by the energy of the SOR light generated in the storage ring 22 and the operating time.

[0006]

[Problems to be Solved by the Invention] Therefore, in a low-energy incident SOR optical device that has advantages such as less radiation generation and low cost, the light deadening effect can be avoided because the energy of the SOR light generated by the synchrotron is low. There are problems in that it takes a long time to improve the degree of vacuum, and it is difficult to extend the life of the stored beam. In particular, with low-energy incident SOR optical devices, even if the charged particle energy and storage current are set appropriately at the design stage, a certain amount of time must be taken to adjust the degree of vacuum, which has a large effect on the life of the storage beam. For example, it is difficult to maintain a predetermined degree of vacuum, and compared to a high-energy incident SOR optical device, there is a problem that it is difficult to start up the device efficiently.

[0007] The present invention solves the drawbacks of the conventional techniques, makes it possible to efficiently perform light depletion of an SOR optical device, improve the degree of vacuum in a short time, and improve the efficiency of normal operation. The present invention aims to provide an SOR optical device that can improve the operating rate. Further, the present invention aims to provide a degassing method for an SOR optical device that can efficiently dry out the light of the SOR optical device and improve the degree of vacuum in a short time.

[0008]

[Means for Solving the Problems] In the SOR optical device of the present invention, a plurality of accelerator tubes are arranged in series to perform degassing by performing a light drying operation at the initial start-up of the SOR optical device. The present invention is characterized in that, while forming an energy injection device, during normal operation, the plurality of acceleration tubes are arranged in parallel to form an injection device. In addition, in the degassing method of the SOR optical device of the present invention, when degassing using the SOR light generated by the SOR optical device, in place of the original input device of the SOR optical device, a high-energy input device is used to perform a light drying operation. The device is characterized in that after degassing is performed, the injection device is replaced with the original injection device.

[0009]

[Operation] According to the SOR optical device of the present invention, a plurality of incidence devices are prepared for use during normal operation, and when starting up the SOR optical device, a plurality of acceleration tubes are arranged in series to configure a high-energy incidence device. Then, high-energy SOR light is generated to enhance the light extinction effect in a short time and improve the degree of vacuum by knocking out the adsorbed gas inside the wall surface. During normal operation after a predetermined degree of vacuum is obtained, multiple accelerator tubes are arranged in parallel to form an injection device, and in the event of a failure of one injection device, other injection devices can be used as backup. SO
Improve the operating rate of R light equipment.

Further, according to the degassing method of the SOR optical device of the present invention, in addition to the input device used during normal operation of the SOR optical device, a high-energy incidence device is prepared, and when the SOR optical device is started up, However, a high-energy incident device is used to generate high-energy SOR light, which increases the light extinction effect in a short period of time and improves the degree of vacuum by knocking out the adsorbed gas inside the wall surface, thereby achieving the specified degree of vacuum. After that, replace it with a normal injection device and resume normal operation. Therefore, if a manufacturer of SOR optical equipment prepares one high-energy incidence device and moves and installs it in place of multiple low-energy incidence SOR optical devices, it is possible to use a low-energy incidence device. Even with an SOR optical device, it is possible to obtain a light-depleting effect and create a high vacuum state in a short time.

[0011]

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a plan configuration diagram of an embodiment of the SOR optical device of the present invention, in which (a) shows an initial start-up state and (b) shows a normal operating state. This SOR optical device includes a plurality of accelerating tubes 12 constituting an input device 17 used during normal operation, and for example, as shown in FIG. 1, it includes three accelerating tubes 12a, 12b, and 12c. For example, in the injection device 17 during normal operation, one accelerating tube 12 is designed to be able to perform injection with an energy of about 45 MeV. Further, the beam transport section 14 of the deflection electromagnet 16 on the entrance side is provided with a flange 14a to which the end of the acceleration tube 12 can be connected via a cutoff valve 19.

SO using a plurality of such acceleration tubes 12
The R light device operates as follows. ■ When performing light-depletion operation at initial start-up, a high-energy injection device 37 is configured by connecting a plurality of acceleration tubes 12a, 12b, and 12c in series, as shown in FIG. 1(a). . By using a high-energy injection device 37 in which the acceleration tubes 12a, 12b, and 12c are arranged in series, high-energy electrons can be supplied into the storage ring 22 via the beam transport section 14.

[0013] Then, high-energy SOR light is generated within the storage ring 22, hits the wall of the vacuum duct, and knocks out the adsorbed gas adsorbed inside, causing it to separate.
This can be discharged to the outside by vacuum suction, and so-called light extinction is performed. This light extinction is more effective as the energy of the SOR light generated in the storage ring 22 is higher, so the light extinction is achieved in a shorter time by the high-energy SOR light than when using a normal low-energy incident device 17. It can be performed.

[0014] After the light extinction using SOR light is completed in this way, in order to return to the normal operating state, as shown in Fig. 1 (b
), the high-energy injection device 37, which has acceleration tubes 12a, 12b, and 12c connected in series, is removed from the cutoff valve 19, and a normal low-energy injection device consisting of one acceleration tube 12a, etc. 17 and perform subsequent operations. The other removed acceleration pipes 12b and 12c are each connected to the cutoff valve 19 in parallel,
Be ready to connect at any time.

In this way, a plurality of acceleration tubes 12a, 12b, 1
By placing 2c in parallel, in case one accelerating tube 1
If the acceleration tube 2a fails, the other acceleration tube 12b or 12
By switching to c, the operation of the SOR optical device can be restarted without taking time for repairs, etc., and the operating rate can be improved.

According to such an SOR optical device, a high-energy SOR light is generated by a high-energy input device 37 in which a plurality of acceleration tubes 12a, 12b, and 12c are connected in series to perform a light-depletion operation. The vacuum level can be improved quickly and efficiently, and the system can be started up efficiently while taking advantage of the low energy injection. Further, during normal operation, the SOR optical device can be equipped with a plurality of incident devices, and even if there is a failure of the accelerator tube, the operation can be continuously operated without stopping the operation, and the operating rate can be improved.

Next, an embodiment of the degassing method for the SOR optical device of the present invention will be described with reference to the planar configuration diagram shown in FIG. In this method of degassing the SOR optical device, in addition to the normal injection device 17, a high-energy injection device 37 that can supply electrons with higher energy than the injection device 17 is used.

Each of the injection devices 17 and 37 is composed of a charged particle generator 10 and 30, an acceleration tube 12 and 32 such as a linear accelerator (linac), and a deflection electromagnet 16 and 36 of the beam transport section 14 and 34. For example, the normal injection device 17 has a low energy of about 45 MeV, and the high-energy injection device 37 has an incident energy higher than that of the normal injection device 17, for example, 100 MeV.
Prepare something with a MeV level. Further, the inflector 18 of the storage ring 22 is provided with a cutoff valve 40, so that the two injection devices 17 and 37 can be exchanged via the cutoff valve 40 while the storage ring 22 is isolated from the inside. It is set as.

Degassing using the SOR light of the SOR optical device using such two incident devices 17 and 37 is performed as follows. (2) First, the inside of the vacuum duct of the storage ring 22 is brought to an ultra-high vacuum state of 10@-9 Torr or less while baking the storage ring 22 by using a high vacuum device or the like and wrapping a heater around the storage ring 22. (2) A high-energy injection device 37 is connected to the isolation valve 40 of the inflector 18 of the storage ring 22 to supply high-energy electrons into the storage ring 22.

[0020] Then, high-energy SOR light is generated within the storage ring 22 and hits the wall of the vacuum duct,
The adsorbed gas adsorbed inside is knocked out and released, and by vacuum suction, it can be discharged to the outside, resulting in so-called light extinction. This light withering is caused by the storage ring 22.
The higher the energy of the SOR light generated by the SOR light, the greater the effect. Therefore, compared to the case using a normal low-energy incident device 17, light extinction can be performed in a short time using the high-energy SOR light.

[0021] After the light extinction using SOR light is completed in this way, the high-energy input device 37 is connected to the cutoff valve 40.
, and replace it with a normal low-energy injection device 17 for further operation. The removed high-energy incident device 37 is stored for use when starting up the next low-energy incident SOR optical device.

According to such a method of degassing the SOR optical device, high-energy SOR light can be generated by the temporarily installed high-energy incident device 37 to perform a light-depleting operation, and the degassing can be carried out in a short time and efficiently. The degree of vacuum can be improved, and the system can be started up efficiently while taking advantage of the low energy injection. Furthermore, by preparing one high-energy incident device, it is possible to use it when starting up a low-energy SOR optical device that will be constructed thereafter, and to improve the degree of vacuum.

[0023] In the above embodiment, as an example, the normal injection device is set to 45 MeV, and the high-energy injection device is set to 100 MeV. For example, it is possible to improve the efficiency of light extinction, and the greater the incident energy, the greater the effect of light extinction. Further, the high-energy injection device may be configured by arranging a plurality of acceleration tubes in series. Furthermore, changes may be made to each component without changing the gist of the invention.

[0024]

Effects of the Invention As specifically explained in conjunction with the embodiments above, according to the SOR optical device of the present invention, a plurality of accelerator tubes constituting the input device used during normal operation are prepared, and the SOR
When starting up the OR light device, multiple accelerator tubes were arranged in series to form a high-energy input device, which generated high-energy SOR light and increased the light extinction effect in a short time. The degree of vacuum can be improved by knocking out the adsorbed gas inside the wall surface. Furthermore, during normal operation after a predetermined degree of vacuum has been obtained, the injection device is constructed by arranging multiple accelerator tubes in parallel, so in the event of a failure of one injection device, etc. It can be backed up with another input device, and the operating rate of the SOR optical device can be improved.

Furthermore, according to the degassing method for an SOR optical device of the present invention, in addition to the input device used during normal operation of the SOR optical device, a high-energy incidence device is prepared, and when the SOR optical device is started up, However, since a high-energy incident device is used, it is possible to generate high-energy SOR light, increase the light extinction effect in a short time, and improve the degree of vacuum by knocking out the adsorbed gas inside the wall surface. . In addition, after a predetermined degree of vacuum has been obtained, the system is designed to replace the incident device with a normal incident device and proceed to normal operation, so that manufacturers of SOR optical devices can use one If a high-energy injection device is prepared and moved and installed, SOR using a low-energy injection device can be performed.
Even with optical equipment, it is possible to obtain a light-depleting effect and create a high vacuum state in a short time.

[Brief explanation of the drawing]

FIG. 1 is a plan configuration diagram of an embodiment of the SOR optical device of the present invention, in which (a) shows an initial start-up state and (b) shows a normal operating state.

FIG. 2 is a plan configuration diagram of an embodiment of the degassing method for the SOR optical device of the present invention.

[Explanation of symbols]

10 Charged particle generator 12 Linear accelerator (acceleration tube) 12a to 12c Accelerator tube 14 Beam transport unit 16 Bending electromagnet 17 Low energy injection device (normal use) 19 Shutoff valve 22 Storage ring 30 Charged particle generator 32 Linear accelerator (Acceleration tube) 34 Beam transport section 36 Bending electromagnet 37 High energy injection device (for light extinction) 38 Shutoff valve

Claims (2)

[Claims] [Claim 1] When degassing is performed by performing a photobleaching operation at the initial start-up of the SOR optical device, a plurality of accelerator tubes are arranged in series to constitute a high-energy injection device, whereas during normal operation, An SOR optical device characterized in that the plurality of acceleration tubes are arranged in parallel to constitute an input device. [Claim 2] When degassing using the SOR light generated by the SOR optical device, degassing is performed by performing a light drying operation using a high-energy input device instead of the original input device of the SOR optical device. A degassing method for an SOR optical device, characterized in that the original input device is replaced.