JPH04214357A - Ink jet recording head and ink jet recording device - Google Patents

Abstract

PURPOSE:To improve the durability of an anti-cavitation layer and thereby, effect ink jet-recording conversion with improved reliability by providing an anti-cavitation layer for preventing the breakdown of a thermal energy- generating element due to a cavitation phenomenon caused by defoaming process, on an opposite surface to the communicating path of a thermal energy- generating element. CONSTITUTION:An ink jet recording head 20 generates bubbles in ink in a liquid path 30 to discharge the ink from a discharge orifice 31 using thermal energy generated by an element to generate thermal energy such as heat 21. An anti-cavitation layer for preventing the breakdown of the thermal energy generating element by a cavitation phenomenon caused when bubbles disappear, is provided on a surface opposite to the liquid path 30 of the thermal energy generating elements. As the internal stress of the anti-cavitation layer is compression stress, the anti-cavitation layer can be made more durable.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inkjet recording head that performs recording by ejecting ink droplets from an ejection opening, and an inkjet recording apparatus using the inkjet recording head.

0002

2. Description of the Related Art Conventionally, ink jet recording methods have been known in which recording is performed on a recording medium (paper in most cases) by ejecting and flying ink droplets from an ejection port. The inkjet recording method is a non-impact recording method with the following advantages: low noise, the ability to record directly on plain paper, and the ability to easily record color images by using multicolored inks. It is rapidly becoming popular. Among them, the bubble jet recording method, in which thermal energy is applied to the ink according to the recording signal to foam the ink, and the ink is ejected and sent flying due to the force exerted at this time, has a simple structure and high-density multi-nozzle recording device. It has the advantage that high resolution and high speed can be easily obtained.

[0003] Inkjet recording heads for this bubble jet recording method generally include fine ejection ports for ejecting ink, a liquid flow path provided for each ejection port and communicating with the ejection port, and a liquid flow path for each liquid flow path. It has a thermal energy generating element, that is, a heater, which is provided in the liquid flow path and forms part of the bottom wall of the liquid flow path, and which generates thermal energy for ejecting the ink. In many cases, one inkjet recording head is provided with a large number of ejection ports, and a common liquid chamber is provided for each liquid flow path to stably supply ink to each liquid flow path. In this inkjet recording head, the ink is foamed and ejected by energizing the heater, but the heater is easily damaged by cavitation when the bubbles generated in the ink disappear. For this reason, an anti-cavitation layer is provided on the surface of the heater on the liquid flow path side to prevent damage to the heater due to the cavitation.

[0004] Conventionally, anti-cavitation layers have been formed by sputtering, and it was thought that if stress remained inside the anti-cavitation layer, the strength of the anti-cavitation layer would decrease. The film was formed under suitable film-forming conditions.

[0005]

However, in the conventional inkjet recording head described above, the durability of the anti-cavitation layer varies greatly between lots, even though the anti-cavitation layer is formed under the same film forming conditions. There is a problem in that the residual rate of the anti-cavitation layer varies between 50 and 100% when electricity is repeatedly applied to the heater, making it impossible to ensure reliability as an inkjet recording head.

An object of the present invention is to provide an inkjet recording head with improved reliability by improving the durability of the anti-cavitation layer without being affected by subtle factors in film formation conditions, and an inkjet recording using this inkjet recording head. The objective is to provide equipment.

[0007]

[Means for Solving the Problems] To achieve the above object, the present invention includes a path communicating with an ejection port for ejecting ink;
a thermal energy generating element that is disposed in the path and generates thermal energy used to eject ink from the ejection port, and the thermal energy generated by the thermal energy generating element is used to ink in the path. In an inkjet recording head that generates air bubbles and ejects ink from the ejection ports, a surface of the thermal energy generating element facing the path is provided with a structure that prevents destruction of the thermal energy generating element due to cavitation when the air bubbles disappear. An anti-cavitation layer is provided to prevent cavitation, and the internal stress of the anti-cavitation layer is compressive stress.

The internal stress of the anti-cavitation layer is 1×1
The compressive stress is preferably from 0.8 to 3.times.10.sup.10 dyn/cm.sup.2, and the anti-cavitation layer is preferably made of tantalum. It is preferable to use an electrothermal converter as the thermal energy generating element. Further, it may be a full line type in which a plurality of ejection ports are provided over the entire width of the recording area of the recording medium.

[0009]

[Operation] Since the internal stress of the anti-cavitation layer is compressive stress, the anti-cavitation layer is not destroyed even if the thermal energy generating element is repeatedly driven, as is clear from the experimental results in the examples described later.

0010

Embodiments Next, embodiments of the present invention will be described with reference to the drawings.

First, the inkjet recording head of the present invention will be explained.

FIG. 1 is a fragmentary perspective view showing the structure of an embodiment of the inkjet recording head of the present invention, and FIG. FIG. The heater 21 is a thermal energy generating element and converts electrical energy into thermal energy. The inkjet recording head 20 is manufactured using semiconductor manufacturing process techniques such as etching, vapor deposition, and sputtering. For example, a large number of thin film heaters 21 are formed all at once on a silicon substrate 22, and the heaters 21 are further covered. As shown, an oxidation-resistant layer 41 and an anti-cavitation layer 42 are formed. The oxidation-resistant layer 42 is made of SiO2, for example, and is a layer for preventing the heater 21 from deteriorating due to oxidation. The anti-cavitation layer 42 is a layer for protecting the heater 21 and the oxidation-resistant layer 41 from cavitation during defoaming, and its internal stress is compressive stress.

The heater 21 has a resistor layer 23 made of a thin film of an electrically resistive material formed on a substrate 22, and an aluminum wiring 24 for supplying current to the heater 21 on top of the resistor layer 23.
It is formed by providing To explain in more detail, by leaving a part of the aluminum wiring 24 missing and applying a voltage to both ends of the aluminum wiring 24, electricity flows to the resistor layer 23 in the missing part and this part generates heat. It looks like this.

Furthermore, the inkjet recording head 20 includes a liquid passage wall 2 that separates adjacent liquid passages (liquid passages) 30.
5. Top plate 26, common liquid chamber 28 communicating with each liquid path 30, liquid supply pipe 27 for supplying recording liquid 32 to common liquid chamber 28, connector connecting liquid supply pipe 27 and common liquid chamber 28 It is composed of 29. The heater 21 is provided for each liquid path 30.

The recording liquid 32 is supplied to the common liquid chamber 28 from a liquid storage chamber (not shown) through a liquid supply pipe 27. The recording liquid 32 supplied into the common liquid chamber 28 is supplied into the liquid path 30 by capillary action, and is stably held by forming a meniscus at the discharge port 31 at the tip of the liquid path 30. Here, the heater 2 is connected via the aluminum wiring 24.
1, the heater 21 generates heat, and the recording liquid 3 is heated through the oxidation-resistant layer 41 and the cavitation-resistant layer 42.
2 is heated and foams, and droplets are discharged from the discharge port 31 by the energy of the foam.

Further, the ejection ports 31 can be formed in a number of 128 or 256 or even more at a high density of 16/mm, and furthermore, the number of ejection ports 31 can be formed to cover the entire width of the recording area of the recording medium. It can also be formed into a full line type.

In this inkjet recording head 20, the anti-cavitation layer 42 is formed so that its internal stress becomes compressive stress, so the durability of the anti-cavitation layer 42 is improved as will be described later, and it can be used as an inkjet recording head. reliability has been improved.

Next, the anti-cavitation layer 42 will be explained in detail.

As mentioned above, the anti-cavitation layer 42
This is to prevent the oxidation-resistant layer 41 and the heater 21 from being destroyed by cavitation when the bubbles generated by heating and foaming the ink disappear, and the stress in the cavitation-resistant layer 42 is compressive stress. It has become. Any material can be used as the material for the anti-cavitation layer 42 as long as it has resistance to cavitation.
2 comes into direct contact with the recording liquid 32 such as ink, so it is necessary to consider corrosion resistance. Usually tantalum (Ta)
It is formed by depositing a thin film of by sputtering.

Next, the results of an experiment conducted to clarify the relationship between internal stress and durability of the anti-cavitation layer 42 will be explained. (Experiment 1) First, the relationship between the conditions during film formation and internal stress was investigated. That is, when forming a tantalum thin film on a substrate by sputtering, the relationship between the pressure within the sputtering apparatus and the internal stress of the tantalum thin film was investigated. The sputtering device is MRC 603.
A model sputtering device and a model 1015 sputtering device manufactured by Nichiden Anelva were used. Further, the internal stress was measured by using a laser beam to measure the warpage of the substrate due to the formation of the tantalum thin film on the substrate. Further, for the samples prepared using the MRC sputtering apparatus, after film formation, the samples were annealed by heating at 300° C. for 1.5 hours in a nitrogen atmosphere at atmospheric pressure, and the internal stress after the annealing was also measured. The results of these measurements are shown in FIG. In Figure 3, curve F is MRC
Curve G represents the result when annealing was performed using an apparatus manufactured by Nichiden Anelva, and curve H represents the result when annealing was performed using an apparatus manufactured by MRC. As is clear from this result, the relationship between the pressure during sputtering and the internal stress of the film differs depending on the structure of the film forming apparatus. Furthermore, by heating and annealing the film-formed sample, the internal stress shifts to the compression side.

It can be seen that the internal stress responds sensitively to changes in pressure, especially in the vicinity where the internal stress becomes 0. That is, even if an attempt is made to reduce the internal stress to zero, internal stress in the film tends to occur on the compression side or the tension side. Furthermore, it has been known that the internal stress of the film deposited varies depending on the position of the pressure sensor used to monitor the pressure during sputtering, even if the sputtering pressure is the same. It can be seen that in order to make the internal stress of the anti-cavitation layer near zero, delicate control of the film forming conditions is required. (Experiment 2) Next, we investigated how the durability of the cavitation-resistant layer changes when the internal stress of the cavitation-resistant layer changes. In the inkjet recording head 20 described above, the durability of the anti-cavitation layer 42 depends on the liquid path wall 25 and the top plate 26.
Since it is clear that this is not involved, we created a heater board with only a large number of heaters, an oxidation-resistant layer, and an anti-cavitation layer on the board, and evaluated the durability of the anti-cavitation layer using this heater board as a sample. did.

First, a silicon substrate with a thickness of 100
A resistor layer made of hafnium boride (HfB2) with a thickness of 0 Å is formed by sputtering, and a resistor layer with a thickness of 6000 Å is further formed on this by sputtering.
An aluminum layer having a thickness of .ANG. was formed by sputtering, and then the aluminum layer was removed except for a portion by a photolithography process to form aluminum wiring, and a heater was formed on the substrate. Hundreds of heaters are provided per board. Next, a 1.9 μm thick Si film was applied as an oxidation-resistant layer to the surface of the substrate where the heater was provided.
A film of O2 was formed by sputtering, and an anti-cavitation layer made of tantalum was further formed on the oxidation-resistant layer by sputtering. At this time, the five types of samples mentioned above were obtained by changing the film forming conditions in five ways. Thereafter, the oxidation-resistant layer and the cavitation-resistant layer were formed into predetermined shapes by photolithography, and a heater board sample was created.

[0023] Here, the conditions for forming the anti-cavitation layer will be described in detail.

Assuming that the five samples are samples A to E, the pressures during film formation of each sample correspond to A to E in FIG. That is, for samples A to C, MRC 603
An anti-cavitation layer made of tantalum with a thickness of 5000 Å was formed using a mold sputtering device, applying a high frequency power of 1.5 kW and keeping the substrate temperature at room temperature. The sputtering pressure at this time was 10 mTorr for sample A, and 10 mTorr for sample B.
3 mTorr for sample C, 1 mTorr for sample C
It is. For sample D, a 5000 Å thick anti-cavitation layer made of tantalum was prepared using a 1015 type sputtering device manufactured by Nichiden Anelva Co., Ltd., with a DC power of 2.0 kW, a substrate temperature of 150° C., and a sputtering pressure of 13.5 mTorr. was formed. Sample E was formed under the same conditions as Sample B above, and then heated at 300°C in a nitrogen atmosphere at atmospheric pressure.
．． Annealing was performed by heating for 5 hours. By referring to FIG. 3, the internal stress of the anti-cavitation layer of each sample is 7×109dyn/c for sample A.
m2 tensile stress, sample B is 2 x 109 dyn/cm2
It can be seen that samples C to E have a compressive stress of 5×10 9 dyn/cm 2 .

Next, a durability test was conducted by actually immersing a sample of the heater board in ink and energizing each heater. FIG. 4 is an explanatory diagram showing a method of carrying out this durability test. For a large number of heaters 52 included in a sample 51 of one heater board, every other one is connected in parallel to a power source 53, and this sample 51 is placed in a container 55 containing ink 54, and the heat generating part of each heater 52 is connected to the power source 53 in parallel. is the ink 54
I tried to immerse myself in it. From power supply 53, pulse width 7μsec
, pulses with a pulse repetition frequency of 4.5 kHz were applied until the total number of pulses reached 1×10 8 . The voltage of the pulse is usually 1 of the drive voltage applied to this heater 52.
．． It was set to 25 times. A large number of heaters 52 are provided.
Among them, the number of heaters 52 whose anti-cavitation layer was not destroyed was determined, and the survival rate was calculated. The results are shown in FIG.

As is clear from FIG. 5, the anti-cavitation layer has compressive stress in sample B~ compared to sample A in tensile stress.
E has better durability, especially 5 x 109 dyn/cm
It can be seen that the durability of samples C to E with the compressive stress of No. 2 is improved. Here, when comparing Sample B and Sample E, we can see that the conditions for forming the anti-cavitation layer during sputtering are the same, but by annealing afterwards, the internal stress becomes stronger on the compressive side. Sample E is superior in durability, although the only difference is in the quality. Furthermore, since the durability of sample E is almost the same as samples C and D with the same internal stress, the durability of the anti-cavitation layer depends more on whether the internal stress is compressive stress than on the detailed conditions during sputtering. It can be seen that they are heavily involved.

Although the structure of the anti-cavitation layer has been described above, the present invention is not limited to making the internal stress of the anti-cavitation layer compressive stress by controlling the pressure during sputtering. The present invention also includes applying a negative bias potential or using other light element gas instead of argon gas to make the internal stress of the anti-cavitation layer compressive stress.

Next, the inkjet recording apparatus of the present invention will be explained.

In FIG. 6, an inkjet recording head 101 that discharges ink based on a predetermined recording signal to record a desired image has the same structure as that shown in the embodiment of the inkjet recording head of the present invention described above. belongs to.

The carriage 102 on which the inkjet recording head 101 is mounted has two guide shafts 103, 1
04 so as to be slidable in the direction of arrow I, and coupled to a portion of the timing belt 108 that is passed around a pulley 107 fixed to the output shaft of the carriage motor 105 and a pulley 016 rotatably supported. ing. The inkjet recording head 101 is configured such that a pulley 107 rotates forward and reversely due to the driving force of a carriage motor 105, thereby causing a timing belt 108 to rotate forward and backward, thereby reciprocating in the direction of arrow B.

Recording paper 109, which is a recording medium, is guided by a paper pan 110 and conveyed by a paper feed roller (not shown) that is pressed against a pinch roller. This conveyance is performed using the paper feed motor 116 as a driving source. The conveyed recording paper 109 is delivered to the paper ejection roller 1
13 and spurs 114, and is pressed against the heater 111 by the paper presser plate 112 formed of an elastic member, the paper is conveyed while being brought into close contact with the heater 111. Recording paper 109 to which ink ejected by the inkjet recording head 101 is attached
is heated by a heater 111, the water content of the attached ink evaporates, and the ink is fixed on the recording paper 109.

The recovery system unit 115 is for maintaining the ejection characteristics in a normal state by removing foreign matter adhering to the ejection ports (not shown) of the inkjet recording head 101 and ink with increased viscosity. It is. The recovery system unit 115 is provided with a cap 118a for capping the ejection ports of the inkjet recording head 101 to prevent clogging. An ink absorber 118 is provided inside the cap 118a.
is installed. Further, the recording area side of the recovery system unit 115 is in contact with the surface of the inkjet recording head 101 where the ejection ports are formed, and is used for cleaning to clean foreign matter and ink droplets that have adhered to the surface where the ejection ports are formed. A blade 117 is provided.

Next, another embodiment of the inkjet recording apparatus of the present invention will be described.

FIG. 7 is a schematic perspective view showing only the essential parts of this inkjet recording apparatus.The inkjet recording head 121, which discharges ink based on a predetermined recording signal and records a desired image, is the inkjet recording head 121 described above. This is a full-line type having a configuration similar to that shown in the embodiment of the recording head.

The inkjet recording head 121 is mounted on the main body of the inkjet recording apparatus (not shown).
A discharge port surface 121a on which a plurality of discharge ports are arranged in a row is located at a position separated from the conveyance surface 122a of the conveyance belt 122 by a predetermined gap.

The conveyor belt 122 is wound around two rollers 123a and 123b which are rotatably supported on the main body of the inkjet recording apparatus, and when at least one roller is forcibly rotated, the conveyor belt 122 moves in the direction indicated by the arrow J.
It rotates in the direction. In the inkjet recording apparatus of this embodiment, a recording medium fed from a paper feed section (not shown on the right side of the figure) toward a conveyor belt 122 is attracted to the conveyance surface 122a of the conveyor belt 122, and the inkjet recording head 121 ejects the recording medium. Exit surface 121a and conveyance surface 12
2a, and at this time, ink is ejected from each ejection port of the inkjet recording head 121 to perform recording.

The present invention brings about excellent effects particularly in inkjet recording heads and inkjet recording apparatuses of bubble jet type among inkjet recording types.

For its typical configuration and principle, see, for example, US Pat. Nos. 4,723,129 and 4,740.
Preferably, it is carried out using the basic principles disclosed in the '796 specification. This method can be applied to both the so-called on-demand type and continuous type, but
In particular, in the case of the on-demand type, the electrothermal transducer placed corresponding to the sheet holding the liquid (ink) or the liquid path is required to respond to the recorded information and rapidly exceed nucleate boiling. By applying at least one drive signal that causes a temperature increase, the electrothermal transducer generates thermal energy that causes a film boiling on the thermally active surface of the recording head, resulting in a liquid in one-to-one correspondence with this drive signal. This is effective because it can form air bubbles within the (ink). The growth and contraction of the bubble causes liquid (ink) to be ejected through the ejection opening to form at least one drop. It is more preferable to use this drive signal in a pulse form, since the growth and contraction of bubbles can be carried out immediately and appropriately, so that ejection of liquid (ink) with particularly excellent responsiveness can be achieved. This pulse-shaped drive signal is described in U.S. Pat. Nos. 4,463,359 and 434.
5262 is suitable. Further, if the conditions described in US Pat. No. 4,313,124 concerning the temperature increase rate of the heat acting surface are adopted, even more excellent recording can be achieved.

The configuration of the recording head may include combinations of ejection ports, liquid paths, and electrothermal converters (straight liquid flow path or right-angled liquid flow path) as disclosed in the above-mentioned specifications. U.S. Pat. No. 4,558,333 and U.S. Pat. No. 44 disclose a structure in which a heat acting part is disposed in a bending region.
The configuration using the specification of No. 59600 is also effective for the present invention. In addition, Japanese Patent Application Laid-open No. 123670 of 1982 discloses a configuration in which a common slit is used as a discharge part for a plurality of electrothermal converters, and a hole that absorbs pressure waves of thermal energy is disclosed. The present invention is also effective as a configuration based on Japanese Patent Application Laid-Open No. 138461 of 1981, which discloses a configuration in which a discharge portion corresponds to a discharge portion.

Furthermore, as a full-line type recording head having a length corresponding to the width of the maximum recording medium that can be recorded by an inkjet recording apparatus, a combination of multiple recording heads as disclosed in the above-mentioned specification can be used. , a configuration that satisfies that length or a configuration as a single recording head formed integrally may be used, but the present invention can more effectively exhibit the above-mentioned effects.

In addition, a replaceable chip-type recording head that is attached to the apparatus main body enables electrical connection with the apparatus main body and ink supply from the apparatus main body, or a print head that is integrated into the print head itself. The present invention is also effective when a cartridge type recording head is used.

[0042] Also, recovery means for the recording head, which is provided as a component of the inkjet recording apparatus of the present invention,
It is preferable to add preliminary auxiliary means, etc., since this can further stabilize the effects of the present invention. Specifically, these include capping means for the recording head;
It is also stable to use a cleaning means, a pressure or suction means, a preheating means using an electrothermal transducer or a separate heating element, or a combination thereof, and a preliminary ejection mode in which ejection is performed separately from recording. It is effective for recording

Furthermore, the recording mode of the inkjet recording apparatus is not only a recording mode of only mainstream colors such as black, but also a recording mode of multiple colors of different colors, although the recording head may be configured integrally or by a combination of multiple heads. The present invention is also extremely effective for devices equipped with at least one of color or full color by color mixture.

In the embodiments of the present invention described above, the ink is explained as a liquid, but it is an ink that solidifies at room temperature or lower, and is softened or liquid at room temperature, or in the above-mentioned inkjet, the ink itself is ℃ or more 7
Since the temperature is generally controlled within a range of 0° C. or lower so that the viscosity of the ink is within a stable ejection range, it is sufficient that the ink is in a liquid state when the recording signal is applied. In addition, the temperature rise caused by thermal energy can be actively prevented by using the energy to change the state of the ink from a solid state to a liquid state, or an ink that solidifies when left standing is used to prevent ink evaporation. In any case, the ink may be liquefied by application of thermal energy in accordance with the recording signal and ejected as liquid ink, or the ink may have already begun to solidify by the time it reaches the recording medium. The present invention is also applicable to the use of ink that is liquefied for the first time. In such a case, the ink used is JP-A-54-56847.
No. 60-71260 or Japanese Patent Application Laid-open No. 60-71260, it is held as a liquid or solid in the recesses or through holes of a porous sheet and faces an electrothermal converter. Also good. In the present invention, the most effective method for each of the above-mentioned inks is to perform the above-mentioned film boiling method.

[0045]

[Effects of the Invention] As explained above, the present invention provides compressive stress as the internal stress of the anti-cavitation layer.
The durability of the anti-cavitation layer has been improved, and even if the thermal energy generating element is driven repeatedly, the anti-cavitation layer will not be destroyed, and the thermal energy generating element will not be destroyed, making it reliable as an inkjet recording head. This has the effect of improving durability and being able to withstand multiple recordings.

[Brief explanation of the drawing]

FIG. 1 is a cutaway perspective view of essential parts showing the configuration of an inkjet recording head of the present invention.

FIG. 2 is a sectional view of a main part showing the configuration of a heater portion of an inkjet recording head.

FIG. 3 is a characteristic diagram showing the correlation between pressure and internal stress during sputtering.

FIG. 4 is an explanatory diagram showing a method of carrying out a durability test of an anti-cavitation layer.

FIG. 5 is a characteristic diagram showing the durability of an anti-cavitation layer.

FIG. 6 is a perspective view of essential parts of an embodiment of the inkjet recording apparatus of the present invention.

FIG. 7 is a perspective view of main parts of another embodiment of the inkjet recording apparatus of the present invention.

[Explanation of symbols]

20... Inkjet recording head 21, 5
2... Heater 22... Board
23...Resistor layer 24...Aluminum wiring
25...Liquid path wall 26...Top plate

27...Liquid supply pipe 28...Common liquid chamber
29...Connector 30...Liquid path
31...Discharge port 32
…Recording liquid
41... Oxidation-resistant layer 42... Cavitation-resistant layer
51...Sample 52...Heater
53...Power supply 54...Ink
55... Container 101, 121... Inkjet recording head 102... Carriage 103, 104... Guide shaft 1
05... Carriage motor 106, 107... Pulley
108...Timing belt 109...Recording paper
110...Paper pan 111...Heater
112...Paper presser plate 113...Paper discharge roller
114...Spur 115...Recovery unit
117...Cleaning blade 118...Ink absorber
118a...Cap 121a...Discharge port surface
122...Conveyance belt 122a...Conveyance surface
123a, 123b...roller

Claims (6)

[Claims] 1. A method comprising: a path communicating with an ejection port for ejecting ink; and a thermal energy generating element disposed in the path and generating thermal energy used to eject ink from the ejection port; In an inkjet recording head that uses thermal energy generated by the thermal energy generating element to generate bubbles in the ink in the path and ejects ink from the ejection port, the thermal energy generating element has a surface that faces the path. An inkjet recording head characterized in that an anti-cavitation layer is provided to prevent destruction of the thermal energy generating element due to cavitation when bubbles disappear, and the internal stress of the anti-cavitation layer is compressive stress. [Claim 2] The internal stress of the anti-cavitation layer is 1
The ink jet recording head according to claim 1, wherein the compressive stress is from x108 to 3 x 1010 dyn/cm2. 3. The ink jet recording head according to claim 1, wherein the anti-cavitation layer is made of tantalum. 4. The ink jet recording head according to claim 1, wherein the thermal energy generating element is an electrothermal converter. 5. The inkjet recording head according to claim 1, wherein the inkjet recording head is of a full line type in which a plurality of ejection ports are provided over the entire width of the recording area of the recording medium. 6. An inkjet recording head according to any one of claims 1 to 5, comprising a conveying means for conveying a recording medium, and ejecting ink from an ejection port of the inkjet recording head based on a recording signal. An inkjet recording device that performs recording.