JPH0421257B2 - - Google Patents

Info

Publication number
JPH0421257B2
JPH0421257B2 JP24020183A JP24020183A JPH0421257B2 JP H0421257 B2 JPH0421257 B2 JP H0421257B2 JP 24020183 A JP24020183 A JP 24020183A JP 24020183 A JP24020183 A JP 24020183A JP H0421257 B2 JPH0421257 B2 JP H0421257B2
Authority
JP
Japan
Prior art keywords
pit row
stamper
information recording
row signal
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24020183A
Other languages
Japanese (ja)
Other versions
JPS60131654A (en
Inventor
Koichi Konishi
Koichi Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP24020183A priority Critical patent/JPS60131654A/en
Publication of JPS60131654A publication Critical patent/JPS60131654A/en
Publication of JPH0421257B2 publication Critical patent/JPH0421257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/0057Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture

Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、映像,音響、もしくは他の情報信号
が面上の凸凹の形で記録される複製体の製造や、
トラツク溝が形成される複製体の製造に用いられ
る情報記録用スタンパーに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is applicable to the production of reproduction materials in which video, audio, or other information signals are recorded in the form of irregularities on the surface;
The present invention relates to an information recording stamper used for manufacturing replicas on which track grooves are formed.

従来例の構成とその問題点 第1図のaは従来例の情報記録用スタンパーの
平面図であり、bはその要部断面図である。
Structure of Conventional Example and Its Problems FIG. 1A is a plan view of a conventional information recording stamper, and FIG. 1B is a cross-sectional view of a main part thereof.

通常、情報記録用スタンパーは、洗浄されたガ
ラス原盤上にホトレジストを塗布後、そのガラス
原盤を回転台の上に載せ、レーザーで露光する。
この露光の際、回転台の回転が線速度一定ならば
レーザー出力も一定にし、角速度一定ならばレー
ザー出力を線速度に比例して大きくし、ともにレ
ーザー光の絞りを一定にして露光を行なう。次
に、現像処理により面上に凸凹状のピツト列信
号、もしくはトラツク溝を形成後、その面上にニ
ツケルをスパツターしてニツケル薄膜を、または
その銀鏡反応にて銀薄膜を形成し、ニツケル電解
メツキにて金属層を厚くし、剥離して情報記録用
マスタースタンパーとする。さらにその情報記録
用マスタースタンパーのピツト列信号、もしくは
トラツク溝形成面にニツケル電解メツキを行な
い、剥離して情報記録用マザースタンパーとし、
さらに、その情報記録用マザースタンパーのピツ
ト列信号、もしくはトラツク溝形成面にニツケル
電解メツキを行ない、これを剥離して情報記録用
スタンパーを作製する。
Typically, in the case of an information recording stamper, a cleaned glass master is coated with photoresist, and then the glass master is placed on a rotating table and exposed to laser light.
During this exposure, if the linear velocity of rotation of the rotary table is constant, the laser output is also kept constant, and if the angular velocity is constant, the laser output is increased in proportion to the linear velocity, and in both cases, exposure is carried out with the aperture of the laser beam kept constant. Next, after forming uneven pit row signals or track grooves on the surface by development processing, nickel is sputtered onto the surface to form a nickel thin film, or a silver mirror reaction is performed to form a silver thin film, and nickel electrolysis is performed. The metal layer is thickened by plating and peeled off to form a master stamper for recording information. Furthermore, nickel electrolytic plating is applied to the pit row signal or track groove forming surface of the information recording master stamper, and the stamp is peeled off to be used as the information recording mother stamper.
Furthermore, nickel electrolytic plating is performed on the pit row signal or track groove forming surface of the information recording mother stamper, and this is peeled off to produce an information recording stamper.

ところが、このようにして作製された情報記録
用スタンパーには、次のような問題点がある。
However, the information recording stamper produced in this manner has the following problems.

まず第1に、射出成形,圧縮成形、または射出
圧縮成形などの方法により複製体を作製した場
合、第1図bに示すように、情報記録用スタンパ
ーのピツト列信号部2の内周3,中間4,外周5
のピツト列信号幅、もしくはトラツク溝幅を全面
的に均一にしているため、成形にともなう複製体
の収縮により、外周5のピツト信号幅、もしくは
トラツク溝幅が内周3よりも狭くなる。しかし、
トラツク幅は、ピツト列信号幅、もしくはトラツ
ク溝幅の3〜4倍あるのでほとんど無視できる。
第2に、そのピツト列信号幅、もしくはトラツク
溝幅の違いにより、電気特性が変化する。第3
に、不良品が多くなる。第4に、コストが高くな
る。
First of all, when a replica is produced by a method such as injection molding, compression molding, or injection compression molding, as shown in FIG. Middle 4, outer 5
Since the pit row signal width or track groove width of the outer circumference 5 is made uniform over the entire surface, the pit signal width or track groove width of the outer circumference 5 becomes narrower than that of the inner circumference 3 due to shrinkage of the replica due to molding. but,
The track width is three to four times the pit row signal width or track groove width, so it can be almost ignored.
Second, the electrical characteristics change depending on the pit row signal width or the track groove width. Third
, the number of defective products increases. Fourth, it increases costs.

発明の目的 本発明の目的は、情報記録用スタンパー面上の
凸凹状のピツト列信号幅、もしくはトラツク溝幅
を複製体の材料、および成形条件によつて決まる
収縮率と半径との正比例関係にて連続的に変える
ことにより、作製された複製体のピツト列信号の
幅、もしくはトラツク溝の幅を全面的に均一に
し、上記欠点を除去することである。
Purpose of the Invention It is an object of the present invention to adjust the width of the uneven pit row signal or track groove width on the surface of a stamper for information recording to a directly proportional relationship between the shrinkage rate and the radius, which is determined by the material of the replica and the molding conditions. The purpose is to make the width of the pit row signal or the width of the track groove uniform over the entire surface of the manufactured replica by changing the pitch continuously, thereby eliminating the above-mentioned drawbacks.

発明の構成 面上に凸凹状のピツト列信号、もしくはトラツ
ク溝を形成する情報記録用スタンパーにおいて、
そのピツト列信号の幅、もしくはトラツク溝の幅
を複製体の材料、および成形条件によつて決まる
収縮率と半径との正比例関係にて連続的に変える
ことにより、射出成形,圧縮成形,射出圧縮成形
などによつて成形された複製体のピツト列信号の
幅、もしくはトラツク溝の幅は、成形にともなう
収縮後、全面的に均一になるものである。
Structure of the Invention In an information recording stamper that forms uneven pit row signals or track grooves on its surface,
By continuously changing the width of the pit row signal or the width of the track groove in a direct proportional relationship between the shrinkage rate and radius determined by the material of the replica and the molding conditions, injection molding, compression molding, injection compression, etc. The width of the pit row signal or the width of the track groove of a replica formed by molding or the like becomes uniform over the entire surface after shrinkage due to molding.

実施例の説明 以下本発明の一実施例について、図面を参照し
ながら説明する。
DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

第2図aは、本発明の一実施例における情報記
録用スタンパーの平面図であり、bはその要部断
面図である。従来と同様に、洗浄されたガラス原
盤上にホトレジストを塗布した。次にそのガラス
原盤を回転台の上に載せ、ヘリウム−カドミウム
レーザーにより露光を行なつた。その露光の際、
回転台の回転を線速度一定にし、露光は内周より
外周へと行ない、複製体の材料として、ポリカー
ボネイト樹脂を用い、成形法として射出成形法を
用いた場合、作製される複製体の収縮率は0.5%
になるので、これに合わせ、レーザー光の絞りレ
ンズ(対物レンズ)を内周から外周へ向うにつ
れ、少しずつガラス原磐に近ずけ、絞り込み径を
収縮率0.5%と半径との正比例関係により大きく
しながら露光を行なつた。後の工程は従来法と同
様に現像処理にて、凸凹状のピツト列信号を形成
し、その面上にニツケルのスパツターによりニツ
ケル薄膜を形成し、ニツケル電解メツキにより情
報記録用マスタースタンパー、および情報記録用
マザースタンパー、そして情報記録用スタンパー
を作製した。
FIG. 2a is a plan view of an information recording stamper according to an embodiment of the present invention, and FIG. 2b is a sectional view of a main part thereof. As before, photoresist was applied onto the cleaned glass master. Next, the glass master disk was placed on a rotating table and exposed to light using a helium-cadmium laser. During that exposure,
When the rotary table is rotated at a constant linear speed, the exposure is performed from the inner circumference to the outer circumference, polycarbonate resin is used as the material of the copy, and injection molding is used as the molding method, the shrinkage rate of the produced copy is is 0.5%
Therefore, in accordance with this, the aperture lens (objective lens) for the laser beam is gradually brought closer to the glass substrate from the inner circumference to the outer circumference, and the aperture diameter is determined by the direct proportional relationship between the shrinkage rate of 0.5% and the radius. Exposure was carried out while enlarging the image. The subsequent process is similar to the conventional method, in which uneven pit array signals are formed through development processing, a nickel thin film is formed on the surface using a nickel sputter, and a master stamper for information recording is formed using nickel electrolytic plating. A mother stamper for recording and a stamper for information recording were produced.

以上のようにして作製された情報記録用スタン
パーはピツト列信号部6のピツト列信号幅を内周
ピツト列信号部7、中間ピツト列信号8、外周ピ
ツト列信号9と連続的に広くなるように構成して
いるため、これを用い複製体材料としてポリカー
ボネイトを用い、成形法として射出成形法を用い
て複製体を作製した結果、複製体のピツト列信号
の幅は成形にともなう収縮後、全面的に均一にな
り、電気特性も内外周における差がほとんどなく
なつた。
In the information recording stamper manufactured as described above, the pit row signal width of the pit row signal section 6 is successively widened from the inner pit row signal section 7, the intermediate pit row signal 8, and the outer pit row signal 9. As a result, the width of the pit row signal of the replica is the same as that of the entire surface after shrinkage due to molding. The electrical characteristics became uniform, and there was almost no difference in the electrical characteristics between the inner and outer circumferences.

他実施例として、次のことを行なつた。 As another example, the following was performed.

ほとんどの工程は上記実施例と同様に行ない、
露光時のみレーザー光の絞り込み径を複製体の成
形にともなう収縮率0.5%と半径との正比例関係
により内周から外周に向け大きくする代りに、レ
ーザー出力を大きくしながら露光を行ない情報記
録用スタンパーを作製した。結果は、上記実施例
と同様であつた。
Most of the steps were performed in the same manner as in the above example,
Only during exposure, instead of increasing the aperture diameter of the laser beam from the inner circumference to the outer circumference due to the direct proportional relationship between the shrinkage rate of 0.5% accompanying the molding of the replica and the radius, exposure is performed while increasing the laser output. was created. The results were similar to the above examples.

なお、上記実施例では、露光の際、ガラス原盤
を載せた回転台は線速度一定の回転を用いたが、
本発明はこれに限定されるものではなく、角速度
一定の回転においても、同様の結果を得ることが
できる。また、成形法として射出成形,複製体の
材料としてポリカーボネイト樹脂を用いたが、成
形にともない複製体が収縮する成形法(例えば圧
縮成形法,射出圧縮成形法など)、および材料
(例えばアクリル樹脂,塩化ビニールとカーボン
粉末との混合物など)でも同様の結果が得られ
る。
In the above example, during exposure, the rotating table on which the glass master was mounted was rotated at a constant linear velocity.
The present invention is not limited to this, and similar results can be obtained even in rotation at a constant angular velocity. In addition, injection molding was used as the molding method, and polycarbonate resin was used as the material for the replica, but other molding methods (such as compression molding and injection compression molding) in which the replica shrinks during molding and materials (such as acrylic resin, Similar results can be obtained with mixtures of vinyl chloride and carbon powder (such as mixtures of vinyl chloride and carbon powder).

発明の効果 以上の説明から明らかなように、本発明は面上
に凸凹状のピツト列信号、もしくはトラツク溝を
形成する情報記録用スタンパーのピツト列信号の
幅、もしくはトラツク溝の幅を、複製体の材料、
および成形条件によつて決まる収縮率と半径との
比例関係に従つて連続的に変えるように構成して
いるので、成形にともなう収縮後の複製体のピツ
ト列信号の幅、トラツク溝の幅は全面的に均一に
なるという優れた効果が得られる。その効果によ
り、内外周における電気特性の変化がなくなると
いう効果が得られる。また、電気特性の変化によ
る不良率も低下し、さらにコストも低下するとい
う効果も得られる。
Effects of the Invention As is clear from the above description, the present invention is capable of duplicating the width of a pit row signal or the width of a track groove of an information recording stamper that forms uneven pit row signals on a surface or track grooves. body materials,
The width of the pit row signal and the width of the track groove of the replica after shrinkage due to molding are changed continuously according to the proportional relationship between the shrinkage rate and the radius determined by the molding conditions. An excellent effect of uniformity over the entire surface can be obtained. As a result, it is possible to obtain the effect that there is no change in electrical characteristics between the inner and outer circumferences. In addition, the defective rate due to changes in electrical characteristics is reduced, and costs are also reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図aは従来の情報記録用スタンパーの平面
図、第1図bはその要部断面図、第2図のaは本
発明の情報記録用スタンパーの平面図、第2図b
はその要部断面図である。 1……無ピツト列信号部、2……従来の情報記
録用スタンパーのピツト列信号部、3……従来の
情報記録用スタンパー内周部のピツト列信号、4
……従来の情報記録用スタンパー中周部のピツト
列信号、5……従来の情報記録用スタンパー外周
部のピツト列信号、6……本発明の情報記録用ス
タンパーのピツト列信号部、7……本発明の情報
記録用スタンパー内周部のピツト列信号、8……
本発明の情報記録用スタンパー中周部のピツト列
信号、9……本発明の情報記録用スタンパー外周
部のピツト列信号。
FIG. 1a is a plan view of a conventional information recording stamper, FIG. 1b is a cross-sectional view of a main part thereof, FIG. 2a is a plan view of an information recording stamper of the present invention, and FIG. 2b
is a sectional view of the main part thereof. DESCRIPTION OF SYMBOLS 1...Pit row signal part without pits, 2...Pit row signal part of a conventional information recording stamper, 3...Pit row signal of the inner peripheral part of a conventional information recording stamper, 4
. . . Pit row signal on the middle circumference of the conventional information recording stamper, 5 . . . Pit row signal on the outer periphery of the conventional information recording stamper, 6 . ...Pit row signal of the inner peripheral part of the information recording stamper of the present invention, 8...
Pit row signal at the middle circumference of the information recording stamper of the present invention, 9... Pit row signal at the outer circumference of the information recording stamper of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 1 面上に形状した凸凹状のピツト列信号もしく
はトラツク溝の幅を、複製体の材料、および成形
条件によつて決まる収縮率と半径との正比例関係
に従つて連続的に変えたことを特徴とする情報記
録用スタンパー。
1. The width of the uneven pit row signal or track groove formed on the surface is continuously changed in accordance with the direct proportional relationship between the shrinkage rate and the radius, which is determined by the material of the replica and the molding conditions. A stamper for recording information.
JP24020183A 1983-12-20 1983-12-20 Information recording stamper Granted JPS60131654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24020183A JPS60131654A (en) 1983-12-20 1983-12-20 Information recording stamper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24020183A JPS60131654A (en) 1983-12-20 1983-12-20 Information recording stamper

Publications (2)

Publication Number Publication Date
JPS60131654A JPS60131654A (en) 1985-07-13
JPH0421257B2 true JPH0421257B2 (en) 1992-04-09

Family

ID=17055958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24020183A Granted JPS60131654A (en) 1983-12-20 1983-12-20 Information recording stamper

Country Status (1)

Country Link
JP (1) JPS60131654A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8127820B1 (en) * 2005-06-28 2012-03-06 Anwell Technologies Limited System for producing optical recording medium

Also Published As

Publication number Publication date
JPS60131654A (en) 1985-07-13

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