JPH0420527A - Modified polyimide resin and its production - Google Patents

Modified polyimide resin and its production

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Publication number
JPH0420527A
JPH0420527A JP12306490A JP12306490A JPH0420527A JP H0420527 A JPH0420527 A JP H0420527A JP 12306490 A JP12306490 A JP 12306490A JP 12306490 A JP12306490 A JP 12306490A JP H0420527 A JPH0420527 A JP H0420527A
Authority
JP
Japan
Prior art keywords
polyimide resin
general formula
integer
following general
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12306490A
Other languages
Japanese (ja)
Inventor
Hideo Sawada
英夫 沢田
Motohiro Mitani
元宏 三谷
Masaharu Nakayama
中山 雅陽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NOF Corp
Original Assignee
Nippon Oil and Fats Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Oil and Fats Co Ltd filed Critical Nippon Oil and Fats Co Ltd
Priority to JP12306490A priority Critical patent/JPH0420527A/en
Publication of JPH0420527A publication Critical patent/JPH0420527A/en
Pending legal-status Critical Current

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  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Abstract

PURPOSE:To obtain a modified polyimide resin lowered in moisture absorption, permittivity and a coefficient of thermal expansion by introducing specified fluoroalkyl groups into at least part of the aromatic rings of an aromatic hydrocarbon polyimide resin. CONSTITUTION:An aromatic hydrocarbon polyimide resin (A) is reacted with 0.1-50mol, per unit (mol) of the monomer of component A, of a di(haloacyl) peroxide (B) of formula I or II (wherein X is F, Cl or H; n is 1-10; and m is 0-8) at 0-100 deg.C for 30min to 20hr to obtain a modified polyimide resin wherein fluoroalkyl groups of formula III or IV are introduced into at least part of the aromatic rings of component A.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、電子材料等に有用な改質ポリイミド樹脂及び
その製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a modified polyimide resin useful for electronic materials, etc., and a method for producing the same.

〈従来の技術〉 従来、電子部品の眉間絶縁膜用材料としては、SiO,
、Si、N4等のシリコン系材料が用いられているが、
最近ポリイミド樹脂が、製造プロセスの容易さ一1更に
は平坦化可能といった特性のため注目されている。しか
し従来のポリイミド樹脂は、吸湿性が大きく電気的特性
、すなわち誘電率が大きくなるという欠点があり、また
シリコン等の基板と比較して、熱膨張率が大きいため、
歪やクラックが生じやすいという問題点がある。そこで
、前記問題点を解決するために、ポリイミド樹脂中にフ
ッ素を導入する試みがなされている。例えばPolym
er Preprints、 Japan、 vo13
8 、 No 3 。
<Conventional technology> Conventionally, SiO,
, Si, N4, and other silicon-based materials are used.
Recently, polyimide resins have attracted attention because of their ease of manufacturing process, as well as their ability to be flattened. However, conventional polyimide resins have the drawbacks of high hygroscopicity and high electrical properties, that is, high dielectric constants, and also have a high coefficient of thermal expansion compared to substrates such as silicon.
There is a problem that distortion and cracks are likely to occur. In order to solve the above problems, attempts have been made to introduce fluorine into polyimide resins. For example Poly
er Preprints, Japan, vo13
8, No. 3.

434 (1989)においては、ピロメリット酸無水
物にトリフルオロメチル基を導入し、製造されたポリイ
ミド樹脂が、またPolymer Preprints
434 (1989), a polyimide resin produced by introducing a trifluoromethyl group into pyromellitic anhydride was also produced by Polymer Preprints
.

Japan、vo138.No3.433 (1989
)においては、ジアミノベンゼン中に、フルオロアルコ
キシ基(CF、(CF2)n CH2O−1n”316
97.10)を導入し、製造されたポリイミド樹脂が各
々提案されている。
Japan, vol138. No.3.433 (1989
), a fluoroalkoxy group (CF, (CF2)n CH2O-1n"316
Polyimide resins produced by introducing 97.10) have been proposed.

しかしながら、前述のフッ素含有ポリイミド樹脂では、
前記問題点を満足させるものではなく、より吸湿性及び
誘電率が低く、しかも熱膨張率の低いポリイミド樹脂の
開発が強く望まれている。
However, with the above-mentioned fluorine-containing polyimide resin,
It is strongly desired to develop a polyimide resin that does not satisfy the above-mentioned problems and has lower hygroscopicity, lower dielectric constant, and lower coefficient of thermal expansion.

〈発明が解決しようとする課題〉 従って本発明の目的は、吸湿性及び誘電率が低く、しか
も熱膨張率の低いポリイミド樹脂及びその製造方法を提
供することにある。
<Problems to be Solved by the Invention> Therefore, an object of the present invention is to provide a polyimide resin having low hygroscopicity and low dielectric constant, and low coefficient of thermal expansion, and a method for producing the same.

〈課題を解決するための手段〉 本発明によれば、芳香族炭化水素基含有ポリイミド樹脂
中の芳香族環の少なくとも一部に、下記一般式(1) (I) (式中、Xはフッ素原子、塩素原子又は水素原子を示し
、nは1〜10の整数を示す)又は下記−般式(ff) (式中、mは0〜8の整数を示す)で表わされるフルオ
ロアルキル基を導入してなる改質ポリイミド樹脂が提供
される。
<Means for Solving the Problems> According to the present invention, at least a portion of the aromatic ring in the aromatic hydrocarbon group-containing polyimide resin is represented by the following general formula (1) (I) (wherein, X is fluorine). a chlorine atom or a hydrogen atom, and n represents an integer of 1 to 10) or a fluoroalkyl group represented by the following general formula (ff) (wherein m represents an integer of 0 to 8) A modified polyimide resin is provided.

また本発明によれば、下記一般式(III)(式中、X
はフッ素原子、塩素原子又は水素原子を示し、nは1〜
10の整数を示す)又は下記−般式(mV) ・・・ (mV) (式中1mは0〜8の整数を示す)で表わされるジ(ハ
ロアシル)ペルオキシドと、芳香族炭化水素基含有ポリ
イミド樹脂とを反応させて、該ポリイミド樹脂中におけ
る芳香族環の少なくとも一部に下記一般式(1) (I) (式中、Xはフッ素原子、塩素原子又は水素原子を示し
、nは1〜10の整数を示す)又は下記−般式(II) (式中、mはO〜8の整数を示す。)で表わされるフル
オロアルキル基を導入することを特徴とする改質ポリイ
ミド樹脂の製造方法が提供される。
Further, according to the present invention, the following general formula (III) (wherein,
represents a fluorine atom, a chlorine atom, or a hydrogen atom, and n is 1 to
(represents an integer of 10) or a di(haloacyl) peroxide represented by the following general formula (mV) (mV) (in the formula, 1m represents an integer of 0 to 8) and an aromatic hydrocarbon group-containing polyimide At least a portion of the aromatic rings in the polyimide resin are reacted with the polyimide resin to form the following general formula (1) (I) (wherein, X represents a fluorine atom, a chlorine atom, or a hydrogen atom, and n represents 1 to A method for producing a modified polyimide resin, characterized by introducing a fluoroalkyl group represented by the following general formula (II) (in which m represents an integer of O to 8): is provided.

以下本発明を更に詳細に説明する。The present invention will be explained in more detail below.

本発明の改質ポリイミド樹脂は、芳香族炭化水素基含有
ポリイミド樹脂中における芳香族環中の少なくとも一部
にフルオロアルキル基を導入してなる樹脂である。
The modified polyimide resin of the present invention is a resin in which a fluoroalkyl group is introduced into at least a portion of the aromatic rings in an aromatic hydrocarbon group-containing polyimide resin.

本発明において用いる芳香族炭化水素基含有ポリイミド
樹脂とは、芳香族炭化水素基が含有されるポリイミド樹
脂であれば良く、例えば、下記−数式(I)で表わされ
る構造単位等を有する樹脂を好ましく挙げることができ
る。
The aromatic hydrocarbon group-containing polyimide resin used in the present invention may be any polyimide resin containing an aromatic hydrocarbon group, and preferably a resin having a structural unit represented by the following formula (I). can be mentioned.

〔式中、R□及びR2は同−又は異なる基であって、芳
香族炭化水素基を示し、R3は芳香族炭化水素基又はフ
ルオロ置換芳香族炭化水素基を示す。またYは酸素原子
、メチレン基、エチレン基、ジメチルメチン基、スルホ
ン基、ビス(トリフルオロメチル)メチン基又は (但し、Aは酸素原子、メチレン基、エチレン基、ジメ
チルメチン基、ビス(トリフルオロメチル)メチン基、
スルホン基を示し、jは0〜3の整数を示す。)を示す
、更にに、Qは各々0又は1を示す〕前記R1及びR2
の芳香族炭化水素基とじては、 例えば、 等を好ましく挙げることができ、 また前記R1の 芳香族炭化水素基としては、 例えば、 閣 等を好ましく挙げることができる。
[In the formula, R□ and R2 are the same or different groups and represent an aromatic hydrocarbon group, and R3 represents an aromatic hydrocarbon group or a fluoro-substituted aromatic hydrocarbon group. Y is an oxygen atom, methylene group, ethylene group, dimethylmethine group, sulfone group, bis(trifluoromethyl)methine group, or (A is an oxygen atom, methylene group, ethylene group, dimethylmethine group, bis(trifluoromethyl) methyl) methine group,
It represents a sulfone group, and j represents an integer of 0 to 3. ), and further, Q each represents 0 or 1] R1 and R2
Preferred examples of the aromatic hydrocarbon group include the following, and preferred examples of the aromatic hydrocarbon group of R1 include the following.

前記ポリイミド樹脂を調製するには、芳香族テトラカル
ボン酸二無水物およびその誘導体と、芳香族ジアミンと
を有機極性溶媒中で反応させることによって得ることが
できる。前記芳香族テトラカルボン酸二無水物及びその
誘導体としては1例えばピロメリット酸二無水物、3.
3’ 、4.4’−ベンゾフエノンテトラカルボン酸二
無水物、3゜3’ 4.4’ −ビフェニルテトラカル
ボン酸二無水物、2,3.3’ 、4’−ビフェニルテ
トラカルボン酸二無水物、4,4′−オキシシフタル酸
二無水物、4,4′−ビス(3,4−ジカルボキシフェ
ノキシ)ジフェニルスルフィドニ無水物、2.2−ビス
(3,4−ジカルボキシフェニル)へキサフルオロプロ
パンニ無水物、3.3’ 4゜4′−ジフェニルスルホ
ンテトラカルボン酸二無水物、2,3,6.7−ナフタ
レンテトラカルボン酸二無水物、1,2,5.6−ナフ
タレンテトラカルボン酸二無水物、1,4,5.8−ナ
フタレンテトラカルボン酸二無水物などが挙げられ、使
用に際しては単独若しくは混合物として用いることがで
きる。
The polyimide resin can be prepared by reacting an aromatic tetracarboxylic dianhydride and its derivative with an aromatic diamine in an organic polar solvent. Examples of the aromatic tetracarboxylic dianhydride and its derivatives include 1. pyromellitic dianhydride; 3.
3',4,4'-benzophenonetetracarboxylic dianhydride, 3゜3'4,4'-biphenyltetracarboxylic dianhydride, 2,3.3',4'-biphenyltetracarboxylic dianhydride Anhydride, 4,4'-oxysiphthalic dianhydride, 4,4'-bis(3,4-dicarboxyphenoxy)diphenylsulfide anhydride, 2,2-bis(3,4-dicarboxyphenyl) Hexafluoropropane dianhydride, 3.3'4゜4'-diphenylsulfonetetracarboxylic dianhydride, 2,3,6.7-naphthalenetetracarboxylic dianhydride, 1,2,5.6-naphthalene Examples include tetracarboxylic dianhydride and 1,4,5.8-naphthalenetetracarboxylic dianhydride, which can be used alone or as a mixture.

また、前記芳香族ジアミンとしては1例えばm−フェニ
レンジアミン、p−フェニレンジアミン。
Further, examples of the aromatic diamine include m-phenylenediamine and p-phenylenediamine.

2.4−トリレンジアミン、2.6−トリレンジアミン
、4,6−ジメチル−m−フェニレンジアミン、4−ク
ロロ−m−フェニレンジアミン、3゜5−ジアミノ安息
香酸、5−ニトロ−m−フェニレンジアミン、3,3′
−ジアミノジフェニルエーテル、4,4′−ジアミノジ
フェニルエーテル、3.3′−ジアミノジフェニルメタ
ン、4,4′−ジアミノジフェニルメタン、3.3′−
ジアミノジフェニルスルホン、4,4′−ジアミノジフ
ェニルスルホン、3,3′−ジアミノベンゾフェノン、
4,4′−ジアミノベンゾフェノン、2゜2−ビス(3
−アミノフェニル)プロパン、2゜2−ビス(4−アミ
ノフェニル)プロパン、ベンジジン、3,3′−ジメチ
ルベンジジン、3゜3′−ジメトキシ−4,4′−ジア
ミノジフェニルメタン、3.3’−ジメチル−4,4′
−ジアミノジフェニルメタン、1,3−ビス(3−アミ
ノフェノキシ)ベンゼン、1,4−ビス(3−アミノフ
ェノキシ)ベンゼン、1,4−ビス(4−アミノフェノ
キシ)ベンゼン、1,4−ビス(4−アミノフェニル)
ベンゼン、ビス(4−(3−アミノフェノキシ)フェニ
ル〕スルホン、ビス[4−(4−アミノフェノキシ)フ
ェニル]スルホン、4.4’−ビス(3−アミノフェノ
キシ)ビフェニル、4,4′−ビス(4−アミノフェノ
キシ)ビフェニル、2,2−ビス(4−(3−アミノフ
ェノキシ)フェニル〕プロパン、2,2−ビス(4−ア
ミノフェニル)へキサフルオロプロパン、2,2−ビス
(4−(4−アミノフェノキシ)フェニル〕プロパン、
2,2−ビス〔4−(3−アミノフェノキシ)フェニル
〕へキサフルオロプロパン、2,2−ビス(4−(4−
アミノフェノキシ)フェニル〕へキサフルオロプロパン
などが挙げられ、使用に際しては単独若しくは混合物と
して用いることができる。また、前記ポリイミド樹脂の
数平均分子量は、500〜1.000,000の範囲で
あるのが好ましい。
2.4-tolylenediamine, 2.6-tolylenediamine, 4,6-dimethyl-m-phenylenediamine, 4-chloro-m-phenylenediamine, 3゜5-diaminobenzoic acid, 5-nitro-m- phenylene diamine, 3,3'
-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3.3'-diaminodiphenylmethane, 4,4'-diaminodiphenylmethane, 3.3'-
Diaminodiphenylsulfone, 4,4'-diaminodiphenylsulfone, 3,3'-diaminobenzophenone,
4,4'-diaminobenzophenone, 2゜2-bis(3
-aminophenyl)propane, 2゜2-bis(4-aminophenyl)propane, benzidine, 3,3'-dimethylbenzidine, 3゜3'-dimethoxy-4,4'-diaminodiphenylmethane, 3,3'-dimethyl -4,4'
-diaminodiphenylmethane, 1,3-bis(3-aminophenoxy)benzene, 1,4-bis(3-aminophenoxy)benzene, 1,4-bis(4-aminophenoxy)benzene, 1,4-bis(4-aminophenoxy)benzene, -aminophenyl)
Benzene, bis(4-(3-aminophenoxy)phenyl)sulfone, bis[4-(4-aminophenoxy)phenyl]sulfone, 4,4'-bis(3-aminophenoxy)biphenyl, 4,4'-bis (4-aminophenoxy)biphenyl, 2,2-bis(4-(3-aminophenoxy)phenyl)propane, 2,2-bis(4-aminophenyl)hexafluoropropane, 2,2-bis(4- (4-aminophenoxy)phenyl]propane,
2,2-bis[4-(3-aminophenoxy)phenyl]hexafluoropropane, 2,2-bis(4-(4-
Examples include aminophenoxy)phenyl]hexafluoropropane, which can be used alone or as a mixture. Further, the number average molecular weight of the polyimide resin is preferably in the range of 500 to 1.000,000.

前記数平均分子量が500未満の場合には、ポリイミド
の特性が発現せず、l、000,000を超えると製造
が困難である。
If the number average molecular weight is less than 500, the properties of polyimide will not be exhibited, and if it exceeds 1,000,000, it will be difficult to manufacture.

前記ポリイミド樹脂中における芳香族環の少なくとも一
部に導入するフルオロアルキル基は、下記一般式(I) −(CF2)nX           ・・・(1)
又は下記一般式(II)で示され、 式中、Xはフッ素原子、塩素原子又は水素原子を示し、
nは1〜10の整数を示し1mはO〜8の整数を示す。
The fluoroalkyl group introduced into at least a portion of the aromatic ring in the polyimide resin has the following general formula (I) -(CF2)nX (1)
or represented by the following general formula (II), where X represents a fluorine atom, a chlorine atom or a hydrogen atom,
n represents an integer of 1 to 10, and 1m represents an integer of 0 to 8.

前記一般式(1)で表わされるフルオロアルキル基とし
ては、−CF3゜ F (CF 2 + 2− F (CF z + 3 
、F(CF 2 + −。
The fluoroalkyl group represented by the general formula (1) is -CF3°F (CF 2 + 2- F (CF z + 3
, F(CF2+-.

F(CF、+、、F(CF、+、、F(CF、−)ff
tF(CF2−)−、、F(CF、−)−9,F(CF
2+、。。
F(CF,+,,F(CF,+,,F(CF,-)ff
tF(CF2-)-,,F(CF,-)-9,F(CF
2+,. .

ClCF2−、C1(CF2−)−2,C1(CF2−
)、。
ClCF2-, C1(CF2-)-2, C1(CF2-
),.

Cl (CF、+、、 Cl (CF、−)、、 CI
 (CF、+6゜Cl (CF2−)−、、Cl (C
F、+、、Cl (CF2+、。
Cl (CF, +,, Cl (CF, -),, CI
(CF, +6°Cl (CF2-)-,, Cl (C
F,+,,Cl (CF2+,.

CI (CF、+、。、HCF−2,H(CF2+2゜
H(CF、−)−、、H(CF2−)−、、H(CF、
+5゜H(CF2−)−、、H(CF2−)−、、H(
CF、±、。
CI (CF,+,.,HCF-2,H(CF2+2゜H(CF,-)-,,H(CF2-)-,,H(CF,
+5゜H(CF2-)-,,H(CF2-)-,,H(
CF,±,.

H(CF2−)−、、’H(CF2+、。を具体的に挙
げることができる。
Specific examples include H(CF2-)-, 'H(CF2+).

また前記一般式(II)で表わされるフルオロアルキル
基としては、−CF(CF、)QC3F7゜−CF(C
F、)(OCF、CF(CF、))□○C,F、。
Further, as the fluoroalkyl group represented by the general formula (II), -CF(CF,)QC3F7°-CF(C
F, ) (OCF, CF (CF, )) □○C,F,.

−CF(CF3)[OCF、CF(CF、)) 20C
3F、。
-CF (CF3) [OCF, CF (CF, )) 20C
3F.

−CF(CF、)(OCF、CF(CF、))、○C,
F、。
-CF(CF,)(OCF,CF(CF,)),○C,
F.

−CF(CF、)(OCF2CF(CF、))、OC,
F、。
-CF(CF,)(OCF2CF(CF,)),OC,
F.

−CF(CF、)(OCF、CF(CF、)] 、OC
,F、。
-CF(CF,)(OCF,CF(CF,)],OC
,F.

−CF(CF、)(OCF、CF(CF、))、OC,
F7゜−CF(CF、)(OCF、CF(CF、))、
OC,F、。
-CF(CF,)(OCF,CF(CF,)),OC,
F7゜-CF(CF,)(OCF, CF(CF,)),
OC,F.

−CF(CF3)(OCF2CF(CF、))、OC,
F、。
-CF(CF3)(OCF2CF(CF, )), OC,
F.

を具体的に挙げることができる。can be specifically mentioned.

前記一般式(I)又は(II)で表わされるフルオロア
ルキル基を、芳香族炭化水素基含有ポリイミド樹脂中に
おける芳香族環の少なくとも一部に導入するとは、フル
オロアルキル基が導入されておればよく、該芳香族環へ
のフルオロアルキル化率(芳香族環1個当りフルオロア
ルキル基が1個導入された場合を100%とする)が1
〜100%の範囲であるのが好ましい。
Introducing the fluoroalkyl group represented by the general formula (I) or (II) into at least a portion of the aromatic rings in the aromatic hydrocarbon group-containing polyimide resin may mean that the fluoroalkyl group is introduced. , the fluoroalkylation rate to the aromatic ring (100% is when one fluoroalkyl group is introduced per aromatic ring) is 1.
The range is preferably 100%.

本発明の改質ポリイミド樹脂は、特定のジ(ハロアシル
)ペルオキシドと、芳香族炭化水素基含有ポリイミド樹
脂とを直接反応させることにより得ることができる。
The modified polyimide resin of the present invention can be obtained by directly reacting a specific di(haloacyl)peroxide with an aromatic hydrocarbon group-containing polyimide resin.

本発明の製造方法において、前記特定のジ(ハロアシル
)ペルオキシドは、下記一般式([1)又は下記一般式
(IV)で示され、 ・・・ (IV) 式中、Xはフッ素原子、塩素原子又は水素原子を示し、
nは1〜10の整数を示し1mはO〜8の整数を示す。
In the production method of the present invention, the specific di(haloacyl)peroxide is represented by the following general formula ([1) or the following general formula (IV), ... (IV) where X is a fluorine atom, chlorine Indicates an atom or a hydrogen atom,
n represents an integer of 1 to 10, and 1m represents an integer of 0 to 8.

前記一般式(m)で表わされるジ(ハロアシル)ペルオ
キシドとしては、式中のフルオロアルキル基、即ちX 
(CF2) n−が、前記一般式(I)で表わされるフ
ルオロアルキル基として具体的に列挙したフルオロアル
キル基である化合物を好ましく挙げることができる。ま
た前記一般式(IV)で表わされるジ(ハロアシル)ペ
ルオキシドとしては、式中のフルオロアルキル基、(I
I)で表わされるフルオロアルキル基として具体的に列
挙したフルオロアルキル基である化合物を好ましく挙げ
ることができる。
As the di(haloacyl)peroxide represented by the general formula (m), the fluoroalkyl group in the formula, that is, X
(CF2) Compounds in which n- is a fluoroalkyl group specifically listed as the fluoroalkyl group represented by the above general formula (I) can be preferably mentioned. Further, as the di(haloacyl)peroxide represented by the general formula (IV), the fluoroalkyl group in the formula, (I
As the fluoroalkyl group represented by I), the compounds specifically listed as fluoroalkyl groups can be preferably mentioned.

前記ジ(ハロアシル)ペルオキシドを製造するには、例
えば対応するアシルクロリド又はアシルクロリドをアル
カリ触媒の存在下で、過酸化水素と反応させることによ
り得ることができる。
The di(haloacyl)peroxide can be produced, for example, by reacting the corresponding acyl chloride or acyl chloride with hydrogen peroxide in the presence of an alkali catalyst.

本発明の製造方法において、前記ジ(ハロアシル)ペル
オキシドと前記ポリイミド樹脂とを反応させる際の反応
温度は、0〜100℃の範囲であるのが好ましい。前記
反応温度が0℃未満では、反応時間が長くなり、また1
00℃を超えると、反応時の圧力が高くなって、反応操
作が困難となるので好ましくない。また、この際反応時
間は、30分〜20時間程度が好ましく、工業的には3
〜10時間の範囲で行なうのが特に好ましい。前記反応
時間が30分未満の場合には1反応が十分に進行せず、
また20時間を超えて反応させても反応の進行は認めら
れないので好ましくない。
In the production method of the present invention, the reaction temperature at which the di(haloacyl) peroxide and the polyimide resin are reacted is preferably in the range of 0 to 100°C. If the reaction temperature is less than 0°C, the reaction time becomes long and
If the temperature exceeds 00°C, the pressure during the reaction will become high and the reaction operation will become difficult, which is not preferable. In addition, the reaction time at this time is preferably about 30 minutes to 20 hours, and industrially it is about 30 minutes to 20 hours.
It is particularly preferable to carry out the treatment for a period of 10 hours. When the reaction time is less than 30 minutes, one reaction does not proceed sufficiently,
Further, even if the reaction is allowed to proceed for more than 20 hours, no progress of the reaction is observed, which is not preferable.

また前記ポリイミド樹脂と、ジ(ハロアシル)ペルオキ
シドとの仕込みモル比は、前記ポリイミド樹脂モノマー
1ユニツト(1モル)に対してジ(ハロアシル)ペルオ
キシド0.1〜50モルとするのが好ましい。
The molar ratio of the polyimide resin to the di(haloacyl) peroxide to be charged is preferably 0.1 to 50 moles of the di(haloacyl) peroxide per unit (1 mole) of the polyimide resin monomer.

更に前記反応を行う際、ジ(ハロアシル)ペルオキシド
の取り扱い及び反応をよりすみやかに行なう目的で、溶
媒を、用いることができる。該溶媒としては、ハロゲン
化脂肪族溶媒を好ましく挙げることができ、具体的には
、例えば2−クロロ−1,2−ジブロモ−1,1,2−
)−リフルオロエタン、1.2−ジブロモへキサフルオ
ロプロパン、1.1−ジフルオロテトラクロロエタン、
1.2−ジフルオロテトラクロロエタン、フルオロトリ
クロロメタン、ヘプタフルオロ−2,3,3−トリクロ
ロブタン、l、1,1.3−テトラクロロテトラフルオ
ロプロパン、1,1.1’−トリクロロペンタフルオロ
プロパン、1,1.2−トリクロロトリフルオロエタン
、塩化メチレン、クロロホルム、四塩化炭素等が挙げら
れ、使用に際しては単独又は混合物として用いることが
できる。また使用に際しては、溶媒中の前記ジ(ハロア
シル)ペルオキシドの濃度が1〜30重量%となるよう
に調製し、反応を行なうのが望ましい。
Furthermore, when carrying out the above reaction, a solvent can be used for the purpose of handling the di(haloacyl)peroxide and carrying out the reaction more quickly. As the solvent, halogenated aliphatic solvents can be preferably mentioned, and specifically, for example, 2-chloro-1,2-dibromo-1,1,2-
)-lifluoroethane, 1,2-dibromohexafluoropropane, 1,1-difluorotetrachloroethane,
1,2-difluorotetrachloroethane, fluorotrichloromethane, heptafluoro-2,3,3-trichlorobutane, l,1,1,3-tetrachlorotetrafluoropropane, 1,1,1'-trichloropentafluoropropane, Examples include 1,1,2-trichlorotrifluoroethane, methylene chloride, chloroform, and carbon tetrachloride, which can be used alone or as a mixture. In addition, when using the solvent, it is desirable to adjust the concentration of the di(haloacyl)peroxide in the solvent to 1 to 30% by weight before carrying out the reaction.

本発明の製造方法では、副生成物として、フルオロアル
カンカルボン酸の生成も認められるが、反応終了後に、
得られた樹脂を分別し、アルカリ水溶液等で洗浄を行な
うことにより、十分に精製することができる。
In the production method of the present invention, fluoroalkane carboxylic acid is also produced as a by-product, but after the reaction is completed,
The obtained resin can be sufficiently purified by fractionating and washing with an aqueous alkaline solution or the like.

〈発明の効果〉 本発明の改質ポリイミド樹脂は、芳香族炭化水素基含有
ポリイミド樹脂中における芳香族環にフルオロアルキル
基が直接共有結合しているので、フルオロアルキル基に
起因する有用な性質、すなわち撥水撥油性、耐薬品性、
耐熱性、低誘電性を極めて永続的に持続させることがで
き、従って、低吸湿性及び低誘電性が強く要求されるL
SI等の絶縁膜用材料として有用である。また本発明の
改質ポリイミド樹脂の製造方法により、芳香族炭化水素
基含有ポリイミド樹脂に、短時間で容易に。
<Effects of the Invention> Since the modified polyimide resin of the present invention has a fluoroalkyl group directly covalently bonded to the aromatic ring in the aromatic hydrocarbon group-containing polyimide resin, it has useful properties due to the fluoroalkyl group, In other words, water and oil repellency, chemical resistance,
Heat resistance and low dielectric properties can be maintained extremely permanently, and therefore low moisture absorption and low dielectric properties are strongly required.
It is useful as a material for insulating films such as SI. Furthermore, by the method for producing a modified polyimide resin of the present invention, an aromatic hydrocarbon group-containing polyimide resin can be easily produced in a short time.

しかも反応触媒及び特殊な装置を使用せずに、直接フル
オロアルキル基を導入することができる。
Furthermore, a fluoroalkyl group can be directly introduced without using a reaction catalyst or special equipment.

〈実施例〉 以下本発明を実施例及び比較例に基づいて具体的に説明
するが、本発明はこれらに限定されるものではない。
<Examples> The present invention will be specifically described below based on Examples and Comparative Examples, but the present invention is not limited thereto.

失亀剪よ 2.2−ビス(3,4−ジカルボキシフェニル)へキサ
フルオロプロパンニ無水物と2,2−ビス(4−アミノ
フェノキシフェニル)へキサフルオロプロパンとの重縮
合反応により、下記構造式で示されるポリイミド樹脂(
以下樹脂Aと称す)を得た。
2. By polycondensation reaction of 2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride and 2,2-bis(4-aminophenoxyphenyl)hexafluoropropane, the following Polyimide resin shown by the structural formula (
(hereinafter referred to as resin A) was obtained.

(Mn=159000.Mw/Mn=2.0 (分子量
はGPCにより測定、測定溶媒: DMF)]また、過
酸化ペルフルオロヘプタノイル24 mmo nを含む
1,1.2−トリフルオロトリクロロエタン溶液219
.5gを、反応溶液として調製した0次いで得られたポ
リイミド樹脂3.7gを前記溶液中に加え、反応温度4
0℃にて、撹拌下、窒素気流下にて5時間反応を行なっ
た。反応終了後、反応溶液にクロロホルムを加え。
(Mn=159000.Mw/Mn=2.0 (Molecular weight measured by GPC, measurement solvent: DMF)] Also, a 1,1.2-trifluorotrichloroethane solution containing 24 mmon of perfluoroheptanoyl peroxide 219
.. Then, 3.7 g of the polyimide resin prepared as a reaction solution was added to the solution, and the reaction temperature was 4.
The reaction was carried out at 0°C for 5 hours under stirring and nitrogen flow. After the reaction is complete, add chloroform to the reaction solution.

均一溶液にした後、水洗、1%水酸化ナトリウム水溶液
洗浄をそれぞれ行い、不純物の除去を行なった。次いで
、モレキュラシーブにて乾燥を行ない、溶媒を除去して
、真空下にて乾燥を行なった。
After making a homogeneous solution, impurities were removed by washing with water and washing with a 1% aqueous sodium hydroxide solution. Next, drying was performed using a molecular sieve to remove the solvent, and drying was performed under vacuum.

その結果ペルフルオロヘキシル基がポリイミド樹脂中の
芳香族環に導入された改質ポリイミド樹脂が収量6.8
gで得られた。なお得られたペルフルオロヘキシル化ポ
リイミド樹脂の分子量、13F−NMRデータ及び”F
−NMRにより求めたペルフルオロヘキシル化率の結果
について以下に示す。
As a result, a modified polyimide resin in which a perfluorohexyl group was introduced into the aromatic ring in the polyimide resin was obtained with a yield of 6.8
Obtained in g. The molecular weight, 13F-NMR data and "F" of the obtained perfluorohexylated polyimide resin
-The results of the perfluorohexylation rate determined by NMR are shown below.

分子量:Mn=175000 (Mw/Mn=1.6) ”F−NMR(CDCQ3. ext、 CF3CO2
H)δ=12.1 (CF、)、11.0 (CF、)
Molecular weight: Mn=175000 (Mw/Mn=1.6) "F-NMR (CDCQ3.ext, CF3CO2
H) δ=12.1 (CF,), 11.0 (CF,)
.

−5,3(CF、) 、 −32,7(、CF2) 。-5,3 (CF, ), -32,7 (,CF2).

−46,0(CF、)、−47,1(CF、)。−46,0 (CF, ), −47,1 (CF, ).

−50,0(CF、) ペルフルオロヘキシル化率:18% なお、ペルフルオロアルキル化率は、前記ポリイミド樹
脂中の芳香族環1個当りフルオロアルキル基1個が導入
された場合を100%として計算した。
-50,0 (CF,) Perfluorohexylation rate: 18% The perfluoroalkylation rate was calculated assuming that 100% is the case where one fluoroalkyl group is introduced per one aromatic ring in the polyimide resin. .

また、得られた改質ポリイミド樹脂を有機溶剤に溶解し
て、フィルムを作成し、4274AMulti−Fre
quency  LCRメーター(YF(P)を用いて
誘電率を測定した。更に得られたフィルムの、温度23
℃の条件下における24時間後の吸水率についても測定
した。その結果を表1に示す。
In addition, the obtained modified polyimide resin was dissolved in an organic solvent to create a film, and 4274A Multi-Fre
The dielectric constant was measured using a quench LCR meter (YF(P). Furthermore, the temperature of the obtained film was 23.
The water absorption rate after 24 hours at ℃ was also measured. The results are shown in Table 1.

寒亀叢ス 過酸化ペルフルオロヘプタノイルの仕込み量219.5
gを329 g (36mmoQ)に代えた以外は実施
例1と同様に反応、精製を行ない改質ポリイミド樹脂7
.5gを得た。また得られた樹脂について実施例1と同
様に試験を行なった。分子量、1′F−NMR、ペルフ
ルオロヘキシル化率は以下に、誘電率、吸水性について
は表1に示す。
Amount of perfluoroheptanoyl peroxide: 219.5
The reaction and purification were carried out in the same manner as in Example 1 except that g was replaced with 329 g (36 mmoQ) to obtain modified polyimide resin 7.
.. 5g was obtained. Further, the obtained resin was tested in the same manner as in Example 1. The molecular weight, 1'F-NMR, and perfluorohexylation rate are shown below, and the dielectric constant and water absorption are shown in Table 1.

分子量:Mn=190000 (Mw/Mn=1.5) 19F−NMR(CDCIA、、 ext、 CF、C
o、H)δ=12.1 (CF、)、11.0 (CF
、)。
Molecular weight: Mn=190000 (Mw/Mn=1.5) 19F-NMR (CDCA, ext, CF, C
o, H) δ=12.1 (CF, ), 11.0 (CF
,).

−5,3(CF、)、−32,7(CF、)。−5,3 (CF, ), −32,7 (CF, ).

−46,0(CF2)、−47,1(CF2)。-46,0 (CF2), -47,1 (CF2).

−50,4(CF2) ペルフルオロヘキシル化率:32% ス」1【灸 過酸化ペルフルオロヘプタノイルの代わりに、過酸化ペ
ルフルオロブチリル409.2g(48mmo n )
を用いた以外は実施例1と同様に反応、精製を行ない改
質ポリイミド樹脂6.2gを得た。
-50,4 (CF2) Perfluorohexylation rate: 32% 1
The reaction and purification were carried out in the same manner as in Example 1 except that 6.2 g of modified polyimide resin was obtained.

また得られた樹脂について実施例1と同様に試験を行な
った。分子量、”F−NMR、ペルフルオロプロピル化
率については以下に、フィルム特性については表1に示
す。
Further, the obtained resin was tested in the same manner as in Example 1. The molecular weight, F-NMR, and perfluoropropylation rate are shown below, and the film properties are shown in Table 1.

分子量:Mn=155000 (Mw/Mn=1.6) 1″F−NMR(CDCQ、、ext、CF、Co2H
)δ=12.5 (CF、)、11.7 (CF、)。
Molecular weight: Mn=155000 (Mw/Mn=1.6) 1″F-NMR (CDCQ, ext, CF, Co2H
) δ=12.5 (CF, ), 11.7 (CF, ).

−4,5(CF、)、−49,7(CF、)。−4,5 (CF, ), −49,7 (CF, ).

−50,2(CF、) ペルフルオロプロピル化率=25% 失胤旌± 過酸化ペルフルオロヘプタノイルの代わりに。-50,2 (CF,) Perfluoropropylation rate = 25% Lost seed ± Instead of perfluoroheptanoyl peroxide.

過酸化ペルフルオロブチリル204.6g (24mv
so Q )を用いた以外は実施例1と同様に反応精製
を行ない改質ポリイミド樹脂5.9gを得た。また得ら
れた樹脂について実施例1と同様に試験を行なった。分
子量、”F−NMR,ペルフルオロプロピル化率は以下
に、誘電率、吸水性については表1に示す。
Perfluorobutyryl peroxide 204.6g (24mv
Reaction and purification was carried out in the same manner as in Example 1, except that SOQ) was used to obtain 5.9 g of a modified polyimide resin. Further, the obtained resin was tested in the same manner as in Example 1. The molecular weight, F-NMR, and perfluoropropylation rate are shown below, and the dielectric constant and water absorption are shown in Table 1.

分子量: Mn = 142000 (Mw/Mn =
1.8) 1″F−NMR(CDCQ、、ext、CF、Co2H
)δ=12.5 (CF、)、11.8 (CF、)。
Molecular weight: Mn = 142000 (Mw/Mn =
1.8) 1″F-NMR (CDCQ, ext, CF, Co2H
) δ=12.5 (CF, ), 11.8 (CF, ).

−4,5(CF、)、−49,6(CF、)。−4,5 (CF, ), −49,6 (CF, ).

−50,1(CF2) ペルフルオロプロピル化率:18% 寒In旦 過酸化ペルフルオロヘプタノイルの代わりに過酸化ω−
ヒドロペルフルオロブチリル200.8g(24■■o
Q)を用いた以外は実施例1と同様に反応、精製を行な
い改質ポリイミド樹脂9.9gを得た。また得られた樹
脂について実施例1と同様に試験を行なった。分子量、
”F−NMR1ω−ヒドロペルフルオロプロピル化率は
以下に、誘電率、吸水性については表1に示す。
-50,1 (CF2) Perfluoropropylation rate: 18% When cold, perfluoroheptanoyl peroxide was replaced with peroxide ω-
Hydroperfluorobutyryl 200.8g (24■■o
The reaction and purification were carried out in the same manner as in Example 1 except that Q) was used to obtain 9.9 g of a modified polyimide resin. Further, the obtained resin was tested in the same manner as in Example 1. molecular weight,
The F-NMR1ω-hydroperfluoropropylation rate is shown below, and the dielectric constant and water absorption are shown in Table 1.

分子量:Mn=166000 (Mw/Mn=1.9) 1gF  NMR(CDCM3.ext、CF、C02
H)δ=12.3 (CF、) 、 11.6 (CF
、) 。
Molecular weight: Mn=166000 (Mw/Mn=1.9) 1gF NMR (CDCM3.ext, CF, C02
H) δ=12.3 (CF, ), 11.6 (CF
,).

−45,6(CF2)、−52,2(CFよ)。-45,6 (CF2), -52,2 (CF).

−60,1(CF2) ω−ヒドロペルフルオロプロピル化率:50%失産叢旦 ベンゾフェノン−3,3’ 、4.4’−テトラカルボ
ン酸二無水物と2,2−ビス(4−アミノフェノキシフ
ェニル)へキサフルオロプロパンとの重縮合反応により
得られた。下記構造式で示されるポリイミド樹脂(以下
樹脂Bと称す)(Mn=135000.Mw/Mn=2
.2)を3.3g用いた以外は実施例1と同様に反応、
精製を行ない改質ポリイミド樹脂を5.3g得た。
-60,1(CF2) ω-Hydroperfluoropropylation rate: 50% benzophenone-3,3',4,4'-tetracarboxylic dianhydride and 2,2-bis(4-aminophenoxy) Obtained by polycondensation reaction with (phenyl)hexafluoropropane. Polyimide resin shown by the following structural formula (hereinafter referred to as resin B) (Mn=135000.Mw/Mn=2
.. Reaction was carried out in the same manner as in Example 1 except that 3.3 g of 2) was used.
Purification was performed to obtain 5.3 g of modified polyimide resin.

なお得られたペルフルオロヘキシル化ポリイミドの分子
量、”F−NMR及び”F−NMRにより求めたペルフ
ルオロヘキシル化率の結果について以下に、また誘電率
、吸水性については表1に示す。
The results of the molecular weight, "F-NMR" and perfluorohexylation rate determined by "F-NMR" of the obtained perfluorohexylated polyimide are shown below, and the dielectric constant and water absorption properties are shown in Table 1.

分子量:Mn=143000 (Mw/Mn=1.8) 19F−NMR(CDCQ、、 ext、 CF、C0
2H)δ=11.3 (CF、) 、 −5,4(CF
、) 。
Molecular weight: Mn=143000 (Mw/Mn=1.8) 19F-NMR (CDCQ, ext, CF, CO
2H) δ=11.3 (CF, ) , -5,4(CF
,).

−32,5(CF2) 、 −46,8(CF2) 。-32,5 (CF2), -46,8 (CF2).

−47,3(CF2) 、 −50,3(CF2)ペル
フルオロヘキシル化率:26% 寒産貫ヱ 2.2−ビス(3,4−ジカルボキシフェニル)へキサ
フルオロプロパンニ無水物と2,2−ビス(4−アミノ
フェニル)へキサフルオロプロパンとの重縮合反応によ
り得られた、下記構造式で示されるポリイミド樹脂(以
下樹脂Cと称す)(Mn=113000.Mw/Mn=
2.1)を用いた以外は実施例1と同様に反応精製を行
ない改質ポリイミド樹脂を5.4g得た。なお得られた
ペルフルオロヘキシル化ポリイミド樹脂の分子量、”F
−NMR及びペルフルオロヘキシル化率について以下に
、また誘電率、吸水性については表1に示す。
-47,3(CF2), -50,3(CF2) Perfluorohexylation rate: 26% Kansankane 2.2-bis(3,4-dicarboxyphenyl)hexafluoropropanihydride and 2, A polyimide resin (hereinafter referred to as resin C) obtained by a polycondensation reaction with 2-bis(4-aminophenyl)hexafluoropropane and represented by the following structural formula (Mn=113000.Mw/Mn=
Reaction and purification was carried out in the same manner as in Example 1 except that 2.1) was used to obtain 5.4 g of a modified polyimide resin. The molecular weight of the obtained perfluorohexylated polyimide resin, "F
-NMR and perfluorohexylation rate are shown below, and dielectric constant and water absorption are shown in Table 1.

分子量: M n = 123000 (Mw/M n
 =1.9) ”F−NMR(CDCM、、ext、CF、Co2H)
δ=12.3 (CF、)、−5,3(CF、)。
Molecular weight: M n = 123000 (Mw/M n
= 1.9) "F-NMR (CDCM, ext, CF, Co2H)
δ=12.3 (CF, ), -5,3 (CF, ).

−32,5(CF、)、−46,9(CF2)。−32,5 (CF, ), −46,9 (CF2).

;、47.0 (CF2)、−50,8(CF2)ペル
フルオロヘキシル化率:44% 失亀璽旦・ 過酸化ペルフルオロヘプタノイルの代わりに過酸化ペル
フルオロ−2−メチル−3−オキサ−ヘキサノイル20
4.6g (24mmoR)を用いた以外は実施例1と
同様に反応、精製を行ない改質ポリイミド樹脂7.9g
を得た。分子量、”F−NMR及びペルフルオロ−2−
(3−オキサ)ヘキシル化率は以下に、誘電率、吸水性
については表1に示す。
;, 47.0 (CF2), -50,8 (CF2) Perfluorohexylation rate: 44% Perfluoro-2-methyl-3-oxa-hexanoyl peroxide 20 instead of perfluoroheptanoyl peroxide
Reaction and purification were carried out in the same manner as in Example 1, except that 4.6 g (24 mmoR) was used, and 7.9 g of modified polyimide resin was obtained.
I got it. Molecular weight, "F-NMR and perfluoro-2-
The (3-oxa)hexylation rate is shown below, and the dielectric constant and water absorption are shown in Table 1.

分子量:Mn=172000 (Mw/Mn=1.7) ”F−NMR(CDCQ、、ext、CF、Co2H)
δ=12.5 (CF3)、11.8 (CF、)。
Molecular weight: Mn=172000 (Mw/Mn=1.7) "F-NMR (CDCQ, ext, CF, Co2H)
δ=12.5 (CF3), 11.8 (CF, ).

−〇、4〜−5.24 (8F)、−53,1(2F)
、−47,3(21F) ペルフルオロ−2−(3−オキサ)ヘキシル化率:34
% 比較例1〜3 樹脂A(比較例1)、樹脂B(比較例2)、樹脂C(比
較例3)をそれぞれ用いてフィルムを調製し、実施例1
と同様に誘電率、吸水性を測定した。その結果を表1に
示す。
-〇, 4 to -5.24 (8F), -53,1 (2F)
, -47,3(21F) Perfluoro-2-(3-oxa)hexylation rate: 34
% Comparative Examples 1 to 3 Films were prepared using each of Resin A (Comparative Example 1), Resin B (Comparative Example 2), and Resin C (Comparative Example 3).
The dielectric constant and water absorption were measured in the same manner as above. The results are shown in Table 1.

表 表1より明らかなように1本発明の改質ポリイミド樹脂
は、未改質のポリイミド樹脂に比べて吸水性が著しく低
く、誘電率も小さいことが判った。
As is clear from Table 1, it was found that the modified polyimide resin of the present invention had significantly lower water absorption and lower dielectric constant than unmodified polyimide resin.

Claims (1)

【特許請求の範囲】 1)芳香族炭化水素基含有ポリイミド樹脂中における芳
香族環の少なくとも一部に、下記一般式( I ) −(CF_2)nX・・・( I ) (式中、Xはフッ素原子、塩素原子又は水素原子を示し
、nは1〜10の整数を示す)又は下記一般式(II) ▲数式、化学式、表等があります▼・・・(II) (式中、mは0〜8の整数を示す)で表わされるフルオ
ロアルキル基を導入してなる改質ポリイミド樹脂。 2)下記一般式(III) ▲数式、化学式、表等があります▼・・・(III) (式中、Xはフッ素原子、塩素原子又は水素原子を示し
、nは1〜10の整数を示す)又は下記一般式(IV) ▲数式、化学式、表等があります▼・・・(IV) (式中、mは0〜8の整数を示す)で表わされるジ(ハ
ロアシル)ペルオキシドと、芳香族炭化水素基含有ポリ
イミド樹脂とを反応させて、該ポリイミド樹脂中におけ
る芳香族環の少なくとも一部に下記一般式( I ) −(CF_2)nX・・・( I ) (式中、Xはフッ素原子、塩素原子又は水素原子を示し
、nは1〜10の整数を示す)又は下記一般式(II) ▲数式、化学式、表等があります▼・・・(II) (式中、mは0〜8の整数を示す)で表わされるフルオ
ロアルキル基を導入することを特徴とする改質ポリイミ
ド樹脂の製造方法。
[Claims] 1) At least a part of the aromatic ring in the aromatic hydrocarbon group-containing polyimide resin has the following general formula (I) -(CF_2)nX...(I) (wherein, X is represents a fluorine atom, chlorine atom, or hydrogen atom, and n represents an integer from 1 to 10) or the following general formula (II) ▲There are numerical formulas, chemical formulas, tables, etc.▼...(II) (In the formula, m is A modified polyimide resin into which a fluoroalkyl group represented by (representing an integer from 0 to 8) is introduced. 2) The following general formula (III) ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(III) (In the formula, X represents a fluorine atom, chlorine atom, or hydrogen atom, and n represents an integer from 1 to 10. ) or the following general formula (IV) ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ ... (IV) (In the formula, m represents an integer from 0 to 8) di(haloacyl) peroxide and aromatic A hydrocarbon group-containing polyimide resin is reacted with the polyimide resin to form at least a portion of the aromatic ring in the polyimide resin with the following general formula (I) -(CF_2)nX...(I) (wherein, X is a fluorine atom) , represents a chlorine atom or a hydrogen atom, and n represents an integer from 1 to 10) or the following general formula (II) ▲There are numerical formulas, chemical formulas, tables, etc.▼...(II) (In the formula, m is 0 to 10) 1. A method for producing a modified polyimide resin, which comprises introducing a fluoroalkyl group represented by (representing an integer of 8).
JP12306490A 1990-05-15 1990-05-15 Modified polyimide resin and its production Pending JPH0420527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12306490A JPH0420527A (en) 1990-05-15 1990-05-15 Modified polyimide resin and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12306490A JPH0420527A (en) 1990-05-15 1990-05-15 Modified polyimide resin and its production

Publications (1)

Publication Number Publication Date
JPH0420527A true JPH0420527A (en) 1992-01-24

Family

ID=14851307

Family Applications (1)

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JP12306490A Pending JPH0420527A (en) 1990-05-15 1990-05-15 Modified polyimide resin and its production

Country Status (1)

Country Link
JP (1) JPH0420527A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005303271A (en) * 2004-03-19 2005-10-27 Mitsubishi Chemicals Corp Field effect transistor
US7364771B2 (en) 2003-03-06 2008-04-29 Nippon Shokubai Co., Ltd. Method and apparatus for production of fluorine-containing polyimide film
WO2019159652A1 (en) 2018-02-16 2019-08-22 ダイキン工業株式会社 Perfluoro diacyl peroxide, solution, polymerization initiator, polymer preparation method, and perfluoro acyl chloride

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7364771B2 (en) 2003-03-06 2008-04-29 Nippon Shokubai Co., Ltd. Method and apparatus for production of fluorine-containing polyimide film
JP2005303271A (en) * 2004-03-19 2005-10-27 Mitsubishi Chemicals Corp Field effect transistor
WO2019159652A1 (en) 2018-02-16 2019-08-22 ダイキン工業株式会社 Perfluoro diacyl peroxide, solution, polymerization initiator, polymer preparation method, and perfluoro acyl chloride

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