JPH04203995A - Sensitivity correction of detecting element and x-ray detection device - Google Patents
Sensitivity correction of detecting element and x-ray detection deviceInfo
- Publication number
- JPH04203995A JPH04203995A JP2333955A JP33395590A JPH04203995A JP H04203995 A JPH04203995 A JP H04203995A JP 2333955 A JP2333955 A JP 2333955A JP 33395590 A JP33395590 A JP 33395590A JP H04203995 A JPH04203995 A JP H04203995A
- Authority
- JP
- Japan
- Prior art keywords
- correction coefficient
- detection element
- detection
- sensor array
- abnormality
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 72
- 238000012937 correction Methods 0.000 title claims abstract description 50
- 230000035945 sensitivity Effects 0.000 title claims abstract description 26
- 230000005856 abnormality Effects 0.000 claims abstract description 32
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 238000004364 calculation method Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000012546 transfer Methods 0.000 claims description 7
- 229910004613 CdTe Inorganic materials 0.000 claims description 4
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000037182 bone density Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- YFDLHELOZYVNJE-UHFFFAOYSA-L mercury diiodide Chemical compound I[Hg]I YFDLHELOZYVNJE-UHFFFAOYSA-L 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は 医療用Ｘ線診断装置 骨密度定量装置 非破
壊検査装置 Ｘ線分析装置におけるＸ線等の検出素子の
感度補正方法とＸ線検出装置に関すム
従来の技術
複数のＸ線検出素子を用いたＸ線検出装置においては
一般に計測開始前に素子間の感度ばらつきを知るためく
−度計測を行（＼ 演算装置により素子間の補正係数
を得も その後、実際の計測を行し＼ そこで得た各素
子のＸ線強度を示す値に補正係数を乗算して測定結果と
すム
また 異常を示すＸ線検出素子について（戴 あらかじ
めその素子について記憶させておき、両隣の素子の計測
結果の平均をとり、補間していも発明が解決しようとす
る課題
従来の方法によれば Ｘ線検出素子に異常が発生しても
測定を行（（測定結果が表示されるまでまたは測定者が
知るまで異常素子を検出できな（〜また 異常な素子を
含むままに補正係数を算出するための測定を行１．％
補正係数を求めると、各素子の感度に対する正しい補
正係数を得ることができず、その結果 補正の効果を十
分に発揮できなｔ、Ｘｏ さらに異常検出素子につい
て、補間等によりデータの修正を行なうにしてＬ 操作
者が異常検出素子がいずれかを認識したの板 この処理
を行なうように演算装置に指令を送らなければならなｔ
℃
本発明は上記課題を解決するもので、異常検出素子を早
期に発見し その異常検出素子を除いた補正係数の算出
を補間処理を効率的に行うことができる検出素子の感度
補正方法とＸ線検出装置を提供することを目的としてい
も
課題を解決するための手段
本発明は上記目的を達成するために 複数の検出素子か
らなる検出部のデータを転送部で転送して、演算部で感
度補正係数を予め求めて記憶部で記憶させその記憶させ
た感度補正係数と新しく測定開始前に計測した感度補正
係数とを前記演算部で比較して検出素子の異常部を検出
し 自動的にその異常の検出素子の補間修正を行う構成
よりなム
作用
本発明は上記構成により、予め測定記憶させた感度補正
係数と測定開始前に計測した感度補正係数とを比較して
検出素子の異常を前もって知ることができ、再度異常検
出素子を除いて感度補正係数が求められているので、自
動的に測定精度が向上する。[Detailed Description of the Invention] Industrial Fields of Use The present invention relates to medical X-ray diagnostic equipment, bone density quantification equipment, non-destructive testing equipment, sensitivity correction method for X-ray detection elements in X-ray analysis equipment, and X-ray detection equipment. Related technology: In an X-ray detection device using multiple X-ray detection elements,
Generally, in order to know the sensitivity variation between elements before starting measurement, - degree measurement is performed (＼ Correction coefficients between elements are obtained by a calculation device. Afterwards, actual measurement is carried out＼ The X-ray intensity of each element obtained there. Multiply the value indicating the correction coefficient to obtain the measurement result.Also, for the X-ray detection element that shows an abnormality, you can memorize that element in advance, take the average of the measurement results of the elements on both sides, and interpolate. Problems to be Solved by the Invention According to the conventional method, even if an abnormality occurs in the X-ray detection element, the abnormal element cannot be detected until the measurement result is displayed or the operator knows (~ In addition, measurements were performed to calculate the correction coefficient while including abnormal elements.
When calculating the correction coefficient, it is not possible to obtain the correct correction coefficient for the sensitivity of each element, and as a result, the effect of correction cannot be fully demonstrated. When the operator recognizes which abnormality detection element is detected, a command must be sent to the arithmetic unit to perform this process.
℃ The present invention solves the above-mentioned problems, and includes a detection element sensitivity correction method and X In order to achieve the above-mentioned object, the present invention transfers data from a detection unit consisting of a plurality of detection elements in a transfer unit, and calculates the sensitivity in a calculation unit. A correction coefficient is determined in advance and stored in a storage unit, and the arithmetic unit compares the stored sensitivity correction coefficient with a new sensitivity correction coefficient measured before the start of measurement to detect an abnormality in the detection element and automatically detect the abnormality. Effects of the Structure for Interpolation Correction of Abnormality Detecting Elements With the above structure, the present invention detects abnormalities in the detecting elements in advance by comparing the sensitivity correction coefficients measured and stored in advance with the sensitivity correction coefficients measured before the start of measurement. Since the sensitivity correction coefficient is calculated again excluding the abnormality detection element, the measurement accuracy is automatically improved.
実施例
以下に 本発明の一実施例について第１図を参照しなが
ら説明すも
第１図に本発明の一実施例のＸ線検出装置の構成図を示
す。Ｘ線検出部１は５１２個の検出素子からなるＣｄＴ
ｅセンサアレイ２である。このＣｄＴｅセンサアレイ２
１；ＡＸ線ファンビームを放射するＸ線発生装置３と連
動し移動する。これによりＸ線強度の２次元情報を得る
ことができも 測定された情報１よ データ転送部４に
より演算部５および記憶部６に転送されも ７は表示部
であムＣｄＴｅセンサアレイ２の素子間のばらつきを補
正するたべ 測定前に補正係数算出のための測定を行う
。Ｘ線の透過率が一定になるよう均一な材質、厚さの吸
収体 例えば厚さ１５ｃｍのアクリル板を設置ＬＸ線発
生装置３とセンサアレイ２を走査して各検出素子につい
て、５１２個のデータを得も これにより得られた５１
２Ｘ ５１２全データの平均値ＡＶを求めも ｎ番目の
検出素子のｍラインのカウント数データをＣｎ（ｍ）と
す４Ｃｎ（１）からＣｎ（５１２）までの５１２個のデ
ータの平均値Ｃｎａｖを計算し 各検出素子ごとに補正
係数ＣｎＨを
ＣｎＨ＝ＡＶ／Ｃｎａｖ
（ｎ＝１から５１２）
として求め池
このようにして算出する補正係数ＣｎＨを検出素子がす
べて正常に動作している時にあらかじめ求めておき、記
憶部６に保存しておいたこの抵 検査対象を測定前に補
正係数を同じ方法で求めた この際の各検出素子の補正
係数を、記憶部６に保存しである値と演算部５により比
較Ｌ １０％の差が見られる検出素子を異常が発生し
たも°のとする。 ２５番目の検出素子のあらかじめ保
管しである補正係数が０．９７５であったのに対し 計
測した結果が０．８６７であっ九 これを異常検出素子
とじへ 同時＆へ 表示部７に異常が発生したことを表
示し また異常検出素子の番号を示し 操作者に異常検
出素子の発生を認識させた これにより、操作者は測定
を行なう前に検出素子の異常を知ることができ、測定精
度を損なうことがなくなった
さら区 演算部５に次の補正方法を自動的に実行させた
異常検出素子がある場合 これを含めて補正係数を算
出すると、異常検出素子だけでなく、全体の補正係数が
素子間の感度ばらつきを正確に表わしたものでなくなる
。 したがって、記憶部６に保管されていた補正係数と
大きく異なり、異常検出素子として認識された素子を除
いて、平均値ＡＶｓを再計算した このＡＶｓにより、
さきほどと同様に各検出素子の補正係数ＣｎＨｓを算出
した
この補正係数を記憶させておき、検出物体を設置し 測
定を行なっ九 各検出素子で得た測定データＤｎ （ｍ
） （ｎ、 ｍ＝ １〜５１２）に対しさきに求め
た補正係数ＣｎＨｓを乗算しＤｒｎ （ｍ）＝Ｄｎ （
ｍ）ｘＣｎＨｓ（ｍ＝１〜５１２）
を検出素子間のばらつきを補正した測定データとした
ま？Ｑ２５番目の検出素子が異常であったので、この場
合、各ラインについて、 ２４番目と２６番目のデータ
の平均をとり、
Ｄ ｒ２５ （ｍ） ＝（Ｄ ｒ２４ （ｍ） ＋Ｄ
ｒ２６ （ｍ） ） ／２を２５番目の検出素子のデー
タとした
異常検出素子が、 １番目の場合には ２番目と３番目
の平均を、 ５１２１２番目合に＋１５１０番目と５１
１１１番目均をとり、補間処理し島以上により、検出素
子に異常がある場合Ｌ 正確な測定が行えた
な耘 あらかじめ保管しである補正係数との差は Ｘ線
検出部１により任意に設定することができるようにしｋ
５〜２０％が好適である。EXAMPLE Below, an embodiment of the present invention will be described with reference to FIG. 1, which shows a configuration diagram of an X-ray detection apparatus according to an embodiment of the present invention. The X-ray detection section 1 is a CdT consisting of 512 detection elements.
This is an e-sensor array 2. This CdTe sensor array 2
1; Moves in conjunction with the X-ray generator 3 that emits an AX-ray fan beam. As a result, two-dimensional information on the X-ray intensity can be obtained. The measured information 1 is transferred to the calculation section 5 and the storage section 6 by the data transfer section 4. 7 is the display section and the elements of the CdTe sensor array 2. Before measurement, perform measurements to calculate the correction coefficient. An absorber made of a uniform material and thickness, for example, an acrylic plate with a thickness of 15 cm, is installed so that the X-ray transmittance is constant.The LX-ray generator 3 and sensor array 2 are scanned to obtain 512 data for each detection element 51 obtained by this
2X Calculate the average value AV of all 512 data. Let the count number data of m line of the nth detection element be Cn (m). 4 Calculate the average value Cnav of 512 data from Cn (1) to Cn (512). Calculate the correction coefficient CnH for each detection element as CnH=AV/Cnav (n=1 to 512).The correction coefficient CnH calculated in this way is calculated in advance when all the detection elements are operating normally. The correction coefficients for each detection element at this time were calculated using the same method as the values stored in the storage unit 6 and the calculation unit 5, it is assumed that an abnormality has occurred in the detection element in which a difference of 10% is observed in comparison L. The pre-stored correction coefficient of the 25th detection element was 0.975, but the measured result was 0.867.9 This is the abnormality detection element. Simultaneous & Go An abnormality has occurred in the display section 7. It also shows the number of the abnormality detection element, making the operator aware of the occurrence of an abnormality detection element.This allows the operator to know the abnormality of the detection element before making a measurement, which may impair measurement accuracy. When the calculation unit 5 automatically executes the following correction method.If there is an abnormality detection element, when calculating the correction coefficient including this, the correction coefficient of the entire element, not just the abnormality detection element. It no longer accurately represents the sensitivity variations between the two. Therefore, the average value AVs is recalculated by excluding the elements that are significantly different from the correction coefficients stored in the storage unit 6 and recognized as abnormality detection elements.
In the same way as before, calculate the correction coefficient CnHs for each detection element, store this correction coefficient, set up the detection object, and perform measurement.9 Measurement data Dn (m
) (n, m = 1 to 512) is multiplied by the correction coefficient CnHs found earlier to obtain Drn (m) = Dn (
m) xCnHs (m = 1 to 512) as measurement data corrected for variations between detection elements? Q25th detection element was abnormal, so in this case, for each line, take the average of the 24th and 26th data, D r25 (m) = (D r24 (m) + D
If r26 (m) ) /2 is the data of the 25th detection element, and the abnormality detection element is the 1st, then the average of the 2nd and 3rd is the 51212th, +1510th and 51st.
If there is an abnormality in the detection element by taking the 111th average and performing interpolation processing, the difference from the correction coefficient stored in advance can be set arbitrarily by the X-ray detection unit 1. be able to
5-20% is suitable.
また 記憶部６に保存しである補正係数を得た時の計測
条件と、必ずしも同条件で行なう必要はない力丈 同条
件で行なうのが最適である。各種計測条件下での補正係
数を検出素子が正常なときに記憶させておき、測定条件
ごとに比較する補正係数を変えてもよりｔ
上記の方法１ｔｃｄＴｅセンサアレイのほかにＣｄＳセ
ンサアレイ、 ＣｄＳｅセンサアレイ、 ＨｇＩ２セン
サアレイ、ＧａＡｓセンサアレイなどの半導体Ｘ線検出
部１でも行えた
な耘 本実施例ではＸ線検出素子として記述した力＼
それ以外の波長の光検出素子等 検出素子全般に適用で
きも
発明の効果
以上の実施例から明らかなように本発明によれば 複数
の検出素子からなる検出部のデータを転送部で転送して
、演算部で感度補正係数を予め求めて記憶部で記憶させ
、その記憶させた感度補正係数と新しく測定開始前に計
測した感度補正係数とを前記演算部で比較して前記検出
素子の異常部を検出し 自動的にその異常の検出素子の
補間修正を行う構成によるので、測定者は検査対象物の
測定前の補正係数を求める段階で、異常検出素子を知る
ことができ、異常を従来より早期に発見し対処できる。Further, it is best to carry out the measurement under the same conditions as those stored in the storage unit 6 when obtaining a certain correction coefficient, although it is not necessarily necessary to carry out the measurement under the same conditions. It is also possible to memorize correction coefficients under various measurement conditions when the detection element is normal, and change the correction coefficients to be compared for each measurement condition.In addition to the above method 1tcdTe sensor array, CdS sensor array, CdSe sensor This could also be done with a semiconductor X-ray detection unit 1 such as an array, HgI2 sensor array, or GaAs sensor array.In this example, the force described as an X-ray detection element\
Although it can be applied to all detection elements such as photodetection elements of other wavelengths, the present invention has the advantage that, as is clear from the above embodiments, the data of the detection unit consisting of a plurality of detection elements is transferred by the transfer unit. A sensitivity correction coefficient is determined in advance by a calculation unit and stored in a storage unit, and the calculation unit compares the stored sensitivity correction coefficient with a sensitivity correction coefficient newly measured before starting measurement to determine the abnormality of the detection element. Since the system detects the abnormality and automatically interpolates and corrects the abnormality detection element, the measurer can know the abnormality detection element at the stage of calculating the correction coefficient before measuring the object to be inspected, making it easier to detect abnormalities than before. It can be detected and dealt with early.
また異常検出素子を除いた補正係数の算出や補間処理が
、 １度の補正係数算出のための測定のみで行え 再度
の測定が不要になり、測定が効率的に行える検出素子の
感度補正方法とＸ線検出装置を提供できる。In addition, calculation of correction coefficients and interpolation processing excluding abnormality detection elements can be performed with only one measurement for calculation of correction coefficients, eliminating the need for repeated measurements and making measurements more efficient. An X-ray detection device can be provided.
第１図は本発明の一実施例の検出素子の感度補正方法を
説明するためのブロック図である。FIG. 1 is a block diagram for explaining a method for correcting sensitivity of a detection element according to an embodiment of the present invention.
Claims (4)
で転送して、演算部で感度補正係数を予め求めて記憶部
で記憶させ、その記憶させた感度補正係数と新しく測定
開始前に計測した感度補正係数と前記演算部で比較して
前記検出素子の異常部を検出し、自動的にその異常の検
出素子の補間修正を行うことを特徴とする検出素子の感
度補正方法。(1) The data of the detection section consisting of multiple detection elements is transferred by the transfer section, the sensitivity correction coefficient is determined in advance by the calculation section and stored in the storage section, and the stored sensitivity correction coefficient and the new sensitivity correction coefficient are used before starting measurement. A method for correcting the sensitivity of a detection element, characterized in that an abnormality in the detection element is detected by comparing the measured sensitivity correction coefficient with the calculation unit, and the abnormality in the detection element is automatically corrected by interpolation.
Ｓセンサアレイ、ＣｄＳｅセンサアレイ、ＨｇＩ＿２セ
ンサアレイまたはＧａＡｓセンサアレイであることを特
徴とする請求項１記載の検出素子の感度補正方法。(2) The plurality of detection elements are CdTe sensor array, CdTe sensor array,
2. The method for correcting sensitivity of a detection element according to claim 1, wherein the sensor array is an S sensor array, a CdSe sensor array, a HgI_2 sensor array, or a GaAs sensor array.
求項（１）または（２）記載の検出素子の感度補正方法
。(3) The method for correcting sensitivity of a detection element according to claim 1 or (2), wherein the plurality of detection elements are a plurality of X-ray detection elements.
のＸ線検出部による計測結果を転送するデータ転送部と
、その転送されたデータ等を演算比較補正処理する演算
部と、その補正処理されたデータを記憶する記憶部と、
その記憶部で記憶された前記各Ｘ線検出素子の補正係数
と新しく転送されてきたデータの補正係数とを前記演算
部で比較し、異常のＸ線検出素子を表示する表示部とを
有するＸ線検出装置。(4) an X-ray detection unit equipped with a plurality of X-ray detection elements, a data transfer unit that transfers measurement results from the X-ray detection unit, and a calculation unit that performs calculation comparison correction processing on the transferred data, etc.; a storage unit that stores the corrected data;
an X-ray detector having a display section that compares the correction coefficients of each of the X-ray detection elements stored in the storage section with the correction coefficients of the newly transferred data in the calculation section and displays an abnormal X-ray detection element; Line detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2333955A JP2882048B2 (en) | 1990-11-29 | 1990-11-29 | Sensing element sensitivity correction method and X-ray detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2333955A JP2882048B2 (en) | 1990-11-29 | 1990-11-29 | Sensing element sensitivity correction method and X-ray detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04203995A true JPH04203995A (en) | 1992-07-24 |
| JP2882048B2 JP2882048B2 (en) | 1999-04-12 |
Family
ID=18271856
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2333955A Expired - Fee Related JP2882048B2 (en) | 1990-11-29 | 1990-11-29 | Sensing element sensitivity correction method and X-ray detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2882048B2 (en) |
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| JPH11253439A (en) * | 1998-03-12 | 1999-09-21 | Hitachi Medical Corp | X-ray ct |
| JP2000079114A (en) * | 1998-08-25 | 2000-03-21 | General Electric Co <Ge> | Method of monitoring difference of detector cells and computerized tomography system |
| JP2000300547A (en) * | 1999-04-20 | 2000-10-31 | Torsana Osteoporosis Diagnostics As | Method of estimating bone density |
| JP2001099720A (en) * | 1999-09-30 | 2001-04-13 | Yokogawa Electric Corp | Temperature compensating device of terminal block |
| JP2015190867A (en) * | 2014-03-28 | 2015-11-02 | 株式会社島津製作所 | sensitivity correction coefficient calculation system and X-ray analyzer |
| JP2018096796A (en) * | 2016-12-12 | 2018-06-21 | 株式会社 システムスクエア | X-ray inspection device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09182741A (en) * | 1995-12-28 | 1997-07-15 | Shimadzu Corp | Radioactive ray image pickup apparatus |
| JPH11253439A (en) * | 1998-03-12 | 1999-09-21 | Hitachi Medical Corp | X-ray ct |
| JP2000079114A (en) * | 1998-08-25 | 2000-03-21 | General Electric Co <Ge> | Method of monitoring difference of detector cells and computerized tomography system |
| JP2000300547A (en) * | 1999-04-20 | 2000-10-31 | Torsana Osteoporosis Diagnostics As | Method of estimating bone density |
| JP2001099720A (en) * | 1999-09-30 | 2001-04-13 | Yokogawa Electric Corp | Temperature compensating device of terminal block |
| JP2015190867A (en) * | 2014-03-28 | 2015-11-02 | 株式会社島津製作所 | sensitivity correction coefficient calculation system and X-ray analyzer |
| JP2018096796A (en) * | 2016-12-12 | 2018-06-21 | 株式会社 システムスクエア | X-ray inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2882048B2 (en) | 1999-04-12 |
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