JPH04202776A - Loading device - Google Patents

Abstract

PURPOSE:To reduce the load on a driving mechanism and to smoothly rotate and reciprocate a loading device by winding a pipeline on a rotating shaft, then connecting the pipeline to an external device and absorbing the shock produced when a suction head is reversed. CONSTITUTION:The vacuum chucks 41 and 41' for a substrate 2 are provided on both sides of a suction head 42 in plural stages. The head is vertically moved by an air cylinder 442, and the substrate 2 is loaded into a film forming chamber 5 and simultaneously delivered to a substrate conveyor from the chamber 5. A couple of pipelines 45 and 45' are wound on a rotating shaft 43 and then connected to external devices 46 and 46', and the momentum of the rotating shaft 43 is absorbed by the circumferential direction of the pipelines 45 and 45' to reduce the load on a driving mechanism 44. A couple of shock absorbers 47 and 47' are integrated with the moving part of the air cylinder 442 with the shaft 43 in between to absorb the shock produced when the head 42 is reversed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a loading device suitable for, for example, a continuous sputtering device.

(Prior Art) Compact discs (hereinafter abbreviated as CDs) have become widely used for recording large amounts of digitized audio information and image information.

A CD is constructed by forming a thin film layer of aluminum (A1) with high light reflectance on the surface of a transparent synthetic resin substrate such as polycarbonate by sputtering.
According to the digital information of "0", the bit (p
A small hole called lt) is made, and the recorded information can be read out by checking the presence or absence of a reflected wave or transmitted wave of a laser beam.

Since film formation on one substrate is performed by sputtering in a relatively short time, continuous film formation on a large number of substrates is possible.

A conventional continuous sputtering apparatus is constructed as shown in FIG.

First, substrates 2 such as CDs, which are sequentially transported by an external transport device 1 such as a held conveyor, rotate around an axis 3a (arrow
1 direction) and up and down (arrow Yl) directions, the substrate is attracted to the suction pad 21 of the substrate transport device 3, and the loading (
loading) device 4.

The loading device 4 is for loading the substrate 2 received from the substrate transfer device 3 into an internal transfer device 51 in the film forming chamber 5 while suctioning it with a vacuum chuck 41, and is configured as shown in an enlarged view in FIG. has been done.

That is, the suction head 42 provided with the vacuum chuck 41 is fixed to a rotating shaft 43, is configured to be rotatable in the direction of arrow X2 by a motor 441 of a drive mechanism 44 and a gear device 441a, and is rotated vertically by an air cylinder 442. It is configured to be movable in the direction (arrow Y2). The vacuum chuck 41 includes a suction head 42 and a suction/discharge cavity 431 within the rotating shaft 43. It is connected to an external device 46 via a pipe 45 via an outlet 432 .

The external device 46 serves as an operating source for the vacuum chuck 41 to attach and detach the substrate 2, and includes a branch pipe 46a, a valve 46b,
4[ic] and an exhaust pump 46d such as a vacuum pump.

When the loading device 4 receives the substrate 2 from the substrate transfer device 3 and loads it to the internal transfer device 51 in the film forming chamber 5, the valve 46b is first opened, the substrate 2 is suctioned and captured by the vacuum chuck 41, and then the motor 441 is turned on. By driving, the rotating shaft 43 is rotated 180 degrees and the substrate 2 is operated to face the film forming chamber 5 side.

Next, the suction head 42 is lowered into the film forming chamber 5 by the air cylinder 442, and when the substrate 2 approaches the transport table 51a raised within the film forming chamber 5 as shown in FIG. Close valve 46b and close valve 46C.
The substrate 2 is moved to the internal transfer device 51 by opening the chamber and introducing the atmosphere.

Similarly to the loading device 4, the internal conveyance device 51 also has a shaft 5.
Centered on 1b not only in the up and down (arrow Y3) direction but also in the arrow X3
Since the substrate 2 is configured to be rotatable in this direction, the substrate 2 is sequentially transported to the sputtering source 52 and a film is formed thereon.

The substrate 2 after sputtering film formation is transferred from the internal transport device 51 to the loading device 4. by the reverse operation to the above. After passing through the substrate transport device 3, the substrate is carried out by an external transport device consisting of another belt conveyor.

By the way, in the above-mentioned loading operation, the rotating shaft 4
3 and the suction head 42 are installed on a fixed external device 46.
Since the piping 45 repeatedly rotates 180 degrees with vertical movement, the piping 45 repeats reciprocating rotational movement with vertical movement together with the rotation shaft 43 while the other end is fixed to the external device 46.

As a result, the piping 45 is required to make a so-called torsional reciprocating motion, which applies shear stress to the piping 45, and the drive mechanism 44
Since the mechanical load will be applied to the piping 4.
5 was made longer to give it slack, and the load was reduced by using the slack.

However, since the piping 45 is long, a large space is required for the turning operation due to the twisting and reciprocating motion, which is disadvantageous in that it is dangerous for the operator.

The drive mechanism 44 repeatedly moves up and down and rotates back and forth around the rotating shaft 43, but the heavy suction head 4
The moment of inertia caused by the repeated reciprocating motion of 2 becomes a load on the motor 441 and the gear device 441a, causing overload on the motor 44 and wear of the gears.

In particular, when considering the application of loading devices, shortening the cycle of repeated reciprocating motion is often an important deciding factor that leads to improving the functionality of the applicable model. The challenge was to improve reliability.

(Problem to be solved by the invention) In the conventional C-ding device, when the head' is reversed and reciprocated with the pipe connected, the turning space of the pipe increases and the load on the drive mechanism becomes large. There was a drawback.

SUMMARY OF THE INVENTION An object of the present invention is to provide a loading device that eliminates the above-mentioned conventional drawbacks, reduces the load on the drive mechanism, and at the same time allows for a more compact overall structure.

[Structure of the Invention (Means for Solving the Problems) This invention provides a loading device that loads a substrate being transported into a film forming chamber while adsorbing it to a vacuum chuck of a suction head, in which the suction head is reciprocated up and down. a drive mechanism that rotates and reciprocates the suction head around a rotating shaft while being separated from the film forming chamber; a shock absorber that absorbs shock accompanying the rotation and reciprocation of the suction head; and a shock absorber connected to the vacuum chuck. It is characterized by comprising a pipe connected to an exhaust pump after being wound around the rotation axis.

(Function) In this invention, since the piping is connected to an external device after being wound around the rotating shaft, even if the repetitive rotation mechanism operates, the diameter of the wound piping does not widen significantly, and the entire The structure is compact and the load on the drive mechanism is reduced.

Furthermore, since the shock absorber is provided, the impact caused by the moment of inertia during reversal is absorbed, making it possible to further reduce the load on the drive mechanism.

(Embodiment) Hereinafter, an embodiment of a loading device according to the present invention will be described with reference to FIGS. 1 and 2. In addition, in the explanation of this embodiment, as in the conventional explanation, a case will be explained in which it is applied to a film forming apparatus using continuous sputtering, and the same components as the conventional apparatus shown in FIGS. 3 and 4 are denoted by the same reference numerals. Detailed explanation will be omitted.

FIG. 1 is a block diagram showing an embodiment of a loading device according to the present invention.

That is, the loading device 4 includes a disk-shaped suction head 42.
Vacuum chucks 41, 41' of the substrate 2 are placed on both sides of the board 2, respectively.
A plurality of suction and exhaust cavities 431 and 43 are provided, each having a corresponding suction and exhaust cavity.
1', a pair of external equipment 48 via piping 45, 45'
．． 46'.

The piping 45.45' consists of a transparent pipe made of flexible synthetic resin, and one end is connected to the outlet port 432.432' installed in the radial direction of the rotating shaft 43. After being gently wound several times, the other ends are connected to a pair of external devices 46.4G', respectively.

Therefore, the attachment and detachment of the board 2 with this rope ink device 4 is as follows.
As before, valve 4 in external equipment 48.46'
This is done by opening and closing operations of 6b, 46b', 46c, and 46c'. This valve opening/closing operation is controlled by a control device (not shown) together with the operation of the drive mechanism 44, and is controlled by a substrate transfer device (3) and an internal transfer device (
51,).

In this embodiment, vacuum chucks 41 and 41' are provided on both sides of the suction head 42, so that during one vertical movement by the air cylinder 442, loading into the film forming chamber (5) is simultaneously performed, and vice versa. Since the substrate 2 can be transferred from the film forming chamber (5) to the substrate transport device (3), the loading efficiency is significantly improved.

In addition, since the pair of pipes 45, 45' are coiled around the axis of the rotating shaft 43 and then connected to the external equipment 46, 46', even when subjected to rotational reciprocating motion on the rotating shaft 43 side, Since the momentum is absorbed in the circumferential direction of the wound pipe 45.45', the shear force applied to the pipe 45.45' itself becomes small. In other words, since the rotational reciprocating motion applied to the piping 45.45' is received in the circumferential direction of the coil, the expansion and contraction is limited to a small amount in the diameter of the piping 45.45' wound around the rotating shaft 43. 442
Even if repeated vertical movements are applied, the mechanical load applied to the drive mechanism 44 can be kept small. In addition, the rotating shaft 4
A stopper mechanism 433 provided at the end of the rotating shaft 43 prevents the pipe 45° 45' wound around the rotating shaft 43 from protruding from the rotating shaft 43, and is stored compactly.

Note that the stopper mechanism 433 includes a disk-shaped stopper 433a.
and a screw 433 for fixing this perpendicularly to the rotating shaft 43
It is composed of b.

Furthermore, each of the pair of pipes 45.45' is configured with a different color so that the combination of the vacuum chuck 41.41' and the pipe 45.45' can be identified.
It is configured to be convenient during manufacturing and assembly or maintenance and inspection.

Further, in this embodiment, the driving source for the repetitive rotational operation of the loading device 4 is replaced with the conventional motor 441, and a pinion (small gear) 441a integrally attached to the rotating shaft 43 is meshed with a rack 441b. , Konutsuku 4
4) By slidingly moving b by alternately supplying high-pressure air with the vibrator 441c, linear reciprocating motion can be changed to rotational reciprocating motion, so the rotating shaft 43 is configured to perform 180 degree rotational reciprocating motion. .

This reciprocating rotational movement by the pinion 441a and the rack 441b is also affected by the reaction of the moment of inertia by the suction head 42, so a pair of newly installed shock absorbers 47, 47' absorbs the impact at the time of reversal, and the pinion 441a and the rack 441b This is intended to reduce the load on the rack 441b and the like.

That is, as shown in FIG. 2, a pair of shock absorbers 47 and 47' are integrally attached to the movable portion of the air cylinder 442 with the rotating shaft 43 in between, and the central portion thereof is filled with a rubber material 49a. Therefore, the arm 434, which is fixed integrally with the rotating shaft 43, is placed between the suction head 42 and the arrow Y.
Each time the arm 4 moves alternately in the direction and rotates 180 degrees,
The tip head 434a of 34 is a shock absorber 47.4
7' alternately, and is configured to absorb the impact when reversing.

However, this shock absorber 47.47' is
Instead of the rubber material 49a, for example, a structure may be adopted in which a coil spring is housed in a recess filled with oil and the elasticity of the coil spring is used to absorb shock.

As described above, in the loading device according to the present invention, the piping 45, 45' is wound around the rotating shaft 43 and then connected to the external device 46, 46'.
Even if a reciprocating rotational operation is performed, the diameter of the wound pipe does not increase significantly, and the load on the drive mechanism 44 also becomes smaller.

Further, since the shock absorber 47 is provided, the load on the drive mechanism 44 that absorbs the moment of inertia during reverse rotation and softens the impact during reverse rotation is further reduced, and the life of the drive mechanism can be extended.

[Effects of the Invention] The loading device according to the present invention has a simple structure, allows smooth rotation and reciprocation, and reduces and absorbs mechanical loads, thereby increasing reliability and extending life. , which has great practical effects.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing an embodiment of a loading device according to the present invention, FIG. 2 is a sectional view taken along line A-A of the device shown in FIG. 1, and FIG. 3 is a continuous sputtering process using a conventional loading device. FIG. 4 is a block diagram showing the loading device of FIG. 3. 1... External transport device, 2... Board, 3...
Substrate transfer device, 4...Loading device, 41 Vacuum chuck, 42... Suction head, 43
... Rotating shaft, 44... Drive mechanism, 441a
...Pinion, 441b...Rack, 442...
・Air cylinder, 45.45'... Piping, 46.46'... External equipment, 47.47'... Shock absorber, 5... Film forming chamber. Agent Patent Attorney Norio Ogo 2 Base box 45.45':
Evil Kikai 4+, 4+': Baki, Comb Charnoa 46d, 46d': 4 draws) LI
Ruf 042; to 7r47: Shihotsu 27f “Nova 43
;Rotary axis 5 ・Peg! 44. stupid
b Model O-view Figure 2

Claims (1)

[Claims] In a loading device that loads a transported substrate into a film formation chamber while adsorbing it to a vacuum chuck of a suction head, the suction head can be moved up and down and back and forth, and the suction head is sucked around a rotating shaft while being separated from the film formation chamber. The suction head is equipped with a drive mechanism that rotates and reciprocates the head, a shock absorber that absorbs shock caused by the rotation and reciprocation of the suction head, and a pipe connected to the vacuum chuck and connected to an exhaust pump after winding around the rotation axis. A loading device characterized by: