JPH042023U - - Google Patents

Info

Publication number
JPH042023U
JPH042023U JP4295590U JP4295590U JPH042023U JP H042023 U JPH042023 U JP H042023U JP 4295590 U JP4295590 U JP 4295590U JP 4295590 U JP4295590 U JP 4295590U JP H042023 U JPH042023 U JP H042023U
Authority
JP
Japan
Prior art keywords
substrate
cleaning device
decompose
conveyance path
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4295590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2553857Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990042955U priority Critical patent/JP2553857Y2/ja
Publication of JPH042023U publication Critical patent/JPH042023U/ja
Application granted granted Critical
Publication of JP2553857Y2 publication Critical patent/JP2553857Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • ing And Chemical Polishing (AREA)
JP1990042955U 1990-04-20 1990-04-20 光洗浄装置 Expired - Lifetime JP2553857Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042955U JP2553857Y2 (ja) 1990-04-20 1990-04-20 光洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042955U JP2553857Y2 (ja) 1990-04-20 1990-04-20 光洗浄装置

Publications (2)

Publication Number Publication Date
JPH042023U true JPH042023U (OSRAM) 1992-01-09
JP2553857Y2 JP2553857Y2 (ja) 1997-11-12

Family

ID=31554952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042955U Expired - Lifetime JP2553857Y2 (ja) 1990-04-20 1990-04-20 光洗浄装置

Country Status (1)

Country Link
JP (1) JP2553857Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267827A (ja) * 1992-03-19 1993-10-15 Matsushita Electric Works Ltd 回路基板における金層の表面の浄化方法
WO2002055224A1 (fr) * 2001-01-15 2002-07-18 Japan Storage Battery Co., Ltd. Dispositif de traitement optique

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190730A (ja) * 1986-02-17 1987-08-20 Nec Corp 半導体装置の洗浄装置
JPS63204729A (ja) * 1987-02-20 1988-08-24 Fujitsu Ltd 半導体基板の乾式洗浄方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190730A (ja) * 1986-02-17 1987-08-20 Nec Corp 半導体装置の洗浄装置
JPS63204729A (ja) * 1987-02-20 1988-08-24 Fujitsu Ltd 半導体基板の乾式洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267827A (ja) * 1992-03-19 1993-10-15 Matsushita Electric Works Ltd 回路基板における金層の表面の浄化方法
WO2002055224A1 (fr) * 2001-01-15 2002-07-18 Japan Storage Battery Co., Ltd. Dispositif de traitement optique

Also Published As

Publication number Publication date
JP2553857Y2 (ja) 1997-11-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term