JPH0419521U - - Google Patents

Info

Publication number
JPH0419521U
JPH0419521U JP6037190U JP6037190U JPH0419521U JP H0419521 U JPH0419521 U JP H0419521U JP 6037190 U JP6037190 U JP 6037190U JP 6037190 U JP6037190 U JP 6037190U JP H0419521 U JPH0419521 U JP H0419521U
Authority
JP
Japan
Prior art keywords
ejection part
jetting section
workpiece
pressurized gas
ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6037190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6037190U priority Critical patent/JPH0419521U/ja
Publication of JPH0419521U publication Critical patent/JPH0419521U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP6037190U 1990-06-07 1990-06-07 Pending JPH0419521U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6037190U JPH0419521U (en:Method) 1990-06-07 1990-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6037190U JPH0419521U (en:Method) 1990-06-07 1990-06-07

Publications (1)

Publication Number Publication Date
JPH0419521U true JPH0419521U (en:Method) 1992-02-19

Family

ID=31587680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6037190U Pending JPH0419521U (en:Method) 1990-06-07 1990-06-07

Country Status (1)

Country Link
JP (1) JPH0419521U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007238288A (ja) * 2006-03-09 2007-09-20 Seiko Epson Corp ワーク搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007238288A (ja) * 2006-03-09 2007-09-20 Seiko Epson Corp ワーク搬送装置

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