JPH041945A - Production of optical disk medium - Google Patents
Production of optical disk mediumInfo
- Publication number
- JPH041945A JPH041945A JP2102257A JP10225790A JPH041945A JP H041945 A JPH041945 A JP H041945A JP 2102257 A JP2102257 A JP 2102257A JP 10225790 A JP10225790 A JP 10225790A JP H041945 A JPH041945 A JP H041945A
- Authority
- JP
- Japan
- Prior art keywords
- signal intensity
- part signal
- film
- land
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000004544 sputter deposition Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光ディスク媒体の製造方法に関し、とくにラ
ンド巾とグルーブ巾が１：１に設計されたプリグルーブ
をもつ光ディスク基板を用いた媒体の製造方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing an optical disk medium, and in particular to a method of manufacturing an optical disk medium using an optical disk substrate having a pregroove designed with a land width and a groove width of 1:1. This relates to a manufacturing method.
（従来の技術）
光ディスク媒体においては、プラスチックもしくはガラ
スのプリグルーブをもつ基板に、記録膜、保護膜、反射
膜などが成膜されることによって作られている。そのほ
かの工程としては、基板のクリーニングあるいは膜の付
着力を増加させる目的で、基板に紫外線を照射させたり
、プラズマ雰囲気にさらすなどの工程がとりいれられる
場合もある。(Prior Art) Optical disk media are manufactured by forming a recording film, a protective film, a reflective film, etc. on a plastic or glass substrate having pregrooves. Other steps may include irradiating the substrate with ultraviolet light or exposing it to a plasma atmosphere for the purpose of cleaning the substrate or increasing the adhesion of the film.
ランド巾とグルーブ巾が１＝１になるように設計された
基板を用いた媒体は、主に、ランド部とグルーブ部の両
方に記録をおこない、３つのレーザービームを用いた読
み出しをおこない、信号処理によりクロストークをキャ
ンセルするというトラック倍密度記録方式において用い
られる。この方式においては１つのランド部（もしくは
グルーブ部）を読み出す場合、その前後のグルーブ部（
もしくはランド部）を読みだし、信号の遅延時間相関を
利用することによりクロストークをキャンセルする。こ
の場合、１周毎によみだそうとする部分がランドからグ
ルーブ、グルーブからランドへと変わる。信号処理のた
めには、ランドをよみだしているときの信号強度とグル
ーブを読みだしているときの信号強度が±１ｄＢ以内の
程度に同一であることが望ましい。Media using a substrate designed so that the land width and groove width are 1 = 1 mainly record on both the land and groove areas, read out using three laser beams, and read signals. It is used in a track double density recording method in which crosstalk is canceled through processing. In this method, when reading one land (or groove), the grooves (before and after) (
(or land portion) and cancels crosstalk by using the delay time correlation of the signals. In this case, the portion that is trying to move out each lap changes from land to groove and from groove to land. For signal processing, it is desirable that the signal strength when reading out the land and the signal strength when reading out the groove are the same within ±1 dB.
（発明が解決しようとする課題）
しかしながら、従来の光ディスク媒体の製造方法では、
ランド部信号強度とグルーブ部信号強度はそのグルーブ
形状のロット間のバラツキにより、同一とすることは困
難であった。(Problem to be solved by the invention) However, in the conventional method of manufacturing optical disk media,
It has been difficult to make the land portion signal strength and the groove portion signal strength the same due to variations in the groove shape between lots.
本発明は、ランド部信号強度とグルーブ部信号強度かつ
同一の基板を容易に製造できる光ディスク媒体の製造方
法を提供するものである。The present invention provides a method for manufacturing an optical disk medium that can easily manufacture a substrate with the same land and groove signal strengths.
（課題を解決するための手段）
本発明は、ランド部信号強度とグルーブ部信号強度を同
一とするように、基板面もしくは記録膜成膜前の成膜面
を逆スパッタする。(Means for Solving the Problems) According to the present invention, the substrate surface or the film-forming surface before the recording film is formed is reverse sputtered so that the signal strength of the land portion and the signal strength of the groove portion are the same.
（作用）
本発明は基板面もしくは記録膜成膜前の成膜面、たとえ
ば保護膜として用いられている窒化シリコン膜面を記録
膜形成前に逆スパッタすることにより、ランド部信号強
度は減少し、グルーブ部信号強度は増大するという現象
を発見したことにもとづいている。これは逆スパッタに
よりグルーブの側壁の肩の部分が優先的にスパッタされ
ることによっているものと考えられる。ランド部信号強
度とグルーブ部信号強度の差の原因となるグルーブ形状
のバラツキは、主としてスタンパによっており、同一ス
タンパの成形品内においては安定している。バラツキは
通常５％〜１０％程度である。(Function) The present invention reduces the signal intensity at the land portion by performing reverse sputtering on the substrate surface or the surface on which the recording film is formed, for example, the surface of the silicon nitride film used as a protective film, before forming the recording film. This is based on the discovery of the phenomenon that the signal strength in the groove area increases. This is considered to be because the shoulder portions of the side walls of the grooves are preferentially sputtered by reverse sputtering. The variation in the groove shape that causes the difference between the land part signal strength and the groove part signal strength is mainly due to the stamper, and is stable within a molded product of the same stamper. The variation is usually about 5% to 10%.
初期状態において、ランド部信号強度がグルーブ部信号
強度より大きければ、本発明により、ランド部信号強度
とグルーブ部信号強度を同一にすることができる。In the initial state, if the land portion signal strength is greater than the groove portion signal strength, the land portion signal strength and the groove portion signal strength can be made the same according to the present invention.
（実施例）
スタンパ設計において、ランド巾０．８νｍ、グルーブ
巾０゜８ｐｍとして、スタンパを作成した。グルーブ深
さは５ｏｏＡである。このスタンパを用いて、ポリカー
ボネート基板を出射成形した。この基板にテスト１とし
て５ｉＮ９００人、ＴｂＦｅＣｏ３５０人、５ｉＮ４０
０人、Ａ１５００人の成膜を行い、光ディスク（比較例
１）を作成した。このディスクのランド部Ｃ／Ｎは９．
４ｍ／ｓ、６．２ＭＨｚにて４９ｄＢ、グルーブ部Ｃ／
Ｎは同一条件にて４３ｄＢであった。次に、テスト２と
して５ｉＮ９５０人成膜後、この膜面を５分間逆スパッ
タした。その後ＴｂＦｅＣｏ３５０人、５ｉＮ４００人
、Ａ１５００人の成膜を行い光ディスク（比較例２）を
作成した。このディスクのランド部Ｃ／Ｎは上記条件で
、４７ｄＢ、グルーブ部Ｃ／Ｎは４５ｄＢであった。こ
れらの結果にもとづき、５ｉＮ９５０人成膜後この膜面
を７．５分間逆スパッタした。その後ＴｂＦｅＣｏ３５
０人、５ｉＮ４００人、Ａ１５００人の成膜を行ない光
ディスク（実施例１）を作成した。上記条件でのＣ／Ｎ
はランド部、グルーブ部ともに４６ｄＢであった。また
ノイズレベルもほぼ同一であった。(Example) In the stamper design, a stamper was created with a land width of 0.8 νm and a groove width of 0°8 pm. The groove depth is 5ooA. A polycarbonate substrate was injection molded using this stamper. As test 1 on this board, 5iN900 people, TbFeCo350 people, 5iN40 people
Film formation was performed by 0 people and A1500 people, and an optical disc (Comparative Example 1) was created. The land C/N of this disc is 9.
4m/s, 49dB at 6.2MHz, groove section C/
N was 43 dB under the same conditions. Next, as Test 2, after 950 5iN films were formed, the film surface was reverse sputtered for 5 minutes. Thereafter, 350 TbFeCo films, 400 5iN films, and 1500 A films were formed to produce an optical disc (Comparative Example 2). The land C/N of this disc was 47 dB and the groove C/N was 45 dB under the above conditions. Based on these results, after 950 5iN films were formed, the film surface was reverse sputtered for 7.5 minutes. Then TbFeCo35
An optical disk (Example 1) was fabricated by 0 person, 5iN by 400 people, and A by 1500 people. C/N under the above conditions
was 46 dB for both the land and groove portions. Also, the noise level was almost the same.
本実施例においては基板上に形成されたＳｉＮ膜を逆ス
パッタする方法をのべたが、基板面を直接逆スパッタし
てもよい。初期状態でランド部信号強度側がおおきくな
るように調整する方法はスタンパ作成条件によっである
程度可能であるが、他の方法として、基板上に、基板と
ほぼ同一の屈折率をもつ、たとえば５ｉ０２膜を成膜す
ることにより、ランド部信号強度を増加させることがで
きる。この膜面を逆スパッタしても同一の効果が得られ
る。Although this embodiment describes a method of reverse sputtering the SiN film formed on the substrate, reverse sputtering may be performed directly on the substrate surface. Although it is possible to some extent to adjust the land signal strength side to be large in the initial state depending on the stamper production conditions, another method is to use a 5i02 film on the substrate that has almost the same refractive index as the substrate. By forming a film, the signal strength of the land portion can be increased. The same effect can be obtained by reverse sputtering this film surface.
（発明の効果）
本発明により、ランド部信号強度とグルーブ部信号強度
が同一である基板を容易に作成できるようになった。(Effects of the Invention) According to the present invention, it has become possible to easily create a substrate in which the land portion signal strength and the groove portion signal strength are the same.
Claims (1)
膜面を逆スパッタすることによりランド巾とグルーブ巾
とを１：１に制御し、その後記録膜を成膜することを特
徴とする光ディスク媒体の製造方法。A method for manufacturing an optical disk medium, which comprises controlling the land width and groove width to 1:1 by reverse sputtering the substrate surface or film-forming surface of an optical disk substrate having pregrooves, and then forming a recording film. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2102257A JP2661323B2 (en) | 1990-04-18 | 1990-04-18 | Manufacturing method of optical disk medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2102257A JP2661323B2 (en) | 1990-04-18 | 1990-04-18 | Manufacturing method of optical disk medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH041945A true JPH041945A (en) | 1992-01-07 |
| JP2661323B2 JP2661323B2 (en) | 1997-10-08 |
Family
ID=14322541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2102257A Expired - Lifetime JP2661323B2 (en) | 1990-04-18 | 1990-04-18 | Manufacturing method of optical disk medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2661323B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01271936A (en) * | 1988-04-23 | 1989-10-31 | Hitachi Maxell Ltd | Optical information recording medium |
| JPH027245A (en) * | 1988-06-25 | 1990-01-11 | Hitachi Maxell Ltd | Production of optical information recording medium and apparatus for producing optical information recording medium |
| JPH0244545A (en) * | 1988-08-03 | 1990-02-14 | Matsushita Electric Ind Co Ltd | Production of master disk for optical disk |
-
1990
- 1990-04-18 JP JP2102257A patent/JP2661323B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01271936A (en) * | 1988-04-23 | 1989-10-31 | Hitachi Maxell Ltd | Optical information recording medium |
| JPH027245A (en) * | 1988-06-25 | 1990-01-11 | Hitachi Maxell Ltd | Production of optical information recording medium and apparatus for producing optical information recording medium |
| JPH0244545A (en) * | 1988-08-03 | 1990-02-14 | Matsushita Electric Ind Co Ltd | Production of master disk for optical disk |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2661323B2 (en) | 1997-10-08 |
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