JPH04190544A - Getter device - Google Patents
Getter deviceInfo
- Publication number
- JPH04190544A JPH04190544A JP2318477A JP31847790A JPH04190544A JP H04190544 A JPH04190544 A JP H04190544A JP 2318477 A JP2318477 A JP 2318477A JP 31847790 A JP31847790 A JP 31847790A JP H04190544 A JPH04190544 A JP H04190544A
- Authority
- JP
- Japan
- Prior art keywords
- getter
- linear
- face
- deposition
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 abstract description 7
- 230000008020 evaporation Effects 0.000 abstract description 6
- 238000001704 evaporation Methods 0.000 abstract description 6
- 230000000903 blocking effect Effects 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 description 4
- 235000008708 Morus alba Nutrition 0.000 description 1
- 240000000249 Morus alba Species 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は平板型の画像表示装置における真空度を維持す
るためのゲッタ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a getter device for maintaining the degree of vacuum in a flat panel image display device.
従来の技術
陰極線管等、真空内で電子線を制御する電子管において
、内部構成物よりのガス放出に対して、管内の高真空を
維持するために、従来よりゲッタ装置が用いられてきた
。平板型の画像表示装置に用いられているゲッタ装置を
例にとり、従来の技術を説明する。2. Description of the Related Art In electron tubes such as cathode ray tubes that control electron beams in a vacuum, getter devices have conventionally been used to maintain a high vacuum inside the tube against gas release from internal components. The conventional technology will be explained by taking as an example a getter device used in a flat panel image display device.
第3図は従来の技術のゲッタ装置の構成を示す斜視図で
ある。なお、同図において、ゲッタ装置に関係の無い部
分は煩雑になるため省略している。FIG. 3 is a perspective view showing the configuration of a conventional getter device. In addition, in the same figure, parts unrelated to the getter device are omitted to avoid complication.
−Cに内部空間の小さい平板型の画像表示装置では、電
流加熱でフラノンユする線状ゲッタを用いてゲッタ装置
を構成することで、装置体積を小さくしている。10は
線状ゲッタである。線状ゲッタ10は、本ゲッタ装置が
設けられている画像表示装置の容器裏面などの固定面1
1に、ハネ材を利用した架張手段12で架張されている
。-C In a flat plate type image display device having a small internal space, the volume of the device is reduced by configuring the getter device using a linear getter that is heated by electric current. 10 is a linear getter. The linear getter 10 is attached to a fixed surface 1 such as the back surface of a container of an image display device in which this getter device is provided.
1, it is stretched by a stretching means 12 using spring material.
次に線状ゲッタ10のフラッシュ動作について図を用い
て説明する。第4図は線状ゲッタ10の内部構成を示す
断面図であ、る。線状ゲッタ10の基材13の1面に溝
14が形成されており、溝14の内部にはミクスチャ−
15が充填されている。ミクスチャ−15の材料はその
一例を挙げると、ゲッタ材としてBaを用いる場合には
、(Ba、 AI、 Ni)合金等を用いている。基材
13に電流が流れると、基材13とともにミクスチャ−
15が加熱される。そしてミクスチャー15の構成元素
が反応し、ゲッタ材が遊離し蒸発する。この芸発したゲ
ッタ材は第4図の矢印で示した方向に飛散する。以上の
動作原理で線状ゲッタ】0が電流加熱によってフラッシ
ュする訳である。このようにして蒸発したゲッタ材は線
状ゲッタ10に対向する固定面11に蒸着されて、蒸着
表面で内部の残留気体分子と吸着反応することで、真空
度を維持する真空ポンプの役割をはだすわけである。真
空ポンプとしての能力は前記蒸着面積に比例する。Next, the flash operation of the linear getter 10 will be explained using the drawings. FIG. 4 is a sectional view showing the internal structure of the linear getter 10. A groove 14 is formed on one surface of the base material 13 of the linear getter 10, and a mixture is formed inside the groove 14.
15 is filled. As an example of the material of the mixture 15, when Ba is used as the getter material, a (Ba, AI, Ni) alloy or the like is used. When a current flows through the base material 13, a mixture flows along with the base material 13.
15 is heated. Then, the constituent elements of the mixture 15 react, and the getter material is liberated and evaporated. This released getter material scatters in the direction shown by the arrow in FIG. According to the above operating principle, the linear getter 0 is flashed by current heating. The getter material evaporated in this way is deposited on the fixed surface 11 facing the linear getter 10, and by adsorbing and reacting with residual gas molecules inside on the deposition surface, it plays the role of a vacuum pump to maintain the degree of vacuum. That's why. The capacity as a vacuum pump is proportional to the evaporation area.
発明が解決しようとする課題
しかしながら、以上のような構成では、ゲッタ材の蒸着
膜厚が線状ゲッタの直下では厚く、離れるに従い蒸着距
離の増大と蒸着角度との関係から急激に減少し、このた
め十分な蒸着面積が得られず、ゲッタの真空ポンプとし
ての能力が小さいものとなってしまっている。Problems to be Solved by the Invention However, in the above configuration, the thickness of the vapor deposited getter material is thick directly below the linear getter, and as it moves away from the linear getter, it rapidly decreases due to the relationship between the increase in the vapor deposition distance and the vapor deposition angle. Therefore, a sufficient evaporation area cannot be obtained, and the getter's ability as a vacuum pump is reduced.
そこで本発明は、上記課題に鑑み、装置体積を小さくで
きる線状ゲッタを使用しながら、大きな蒸着面積を得る
ことで、より大きな真空ポンプとしての能力をもつゲッ
タ装置を提供しようとするものである。Therefore, in view of the above-mentioned problems, the present invention aims to provide a getter device that has the ability to function as a larger vacuum pump by obtaining a large evaporation area while using a linear getter that can reduce the device volume. .
課題を解決するための手段
本発明のゲッタ装置は、電流加熱でフラッシュする線状
ゲッタを用いたゲッタ装置であって、前記線状ゲッタと
、前記線状ゲッタを固定面に対して空間を設けて架張す
る架張手段を存し、架張された前記線状ゲッタのゲッタ
材の蔑着面に網状の蒸着板を設けたものである。Means for Solving the Problems The getter device of the present invention is a getter device using a linear getter flashed by current heating, the linear getter and a space provided between the linear getter and a fixed surface. A net-like vapor-deposited plate is provided on the surface of the getter material of the stretched linear getter.
作用
本発明のゲッタ装置によれば、電流加熱でフラッシュす
る線状ゲッタを用いたゲッタ装置であることにより、装
置体積を小さくしたまま、前記線状ゲッタと、前記線状
ゲッタを固定面に対して空間を設けて架張する架張手段
を有し、架張された前記線状ゲッタのゲッタ材の蒸着面
に網状の蒸着板を設けたことで、前記蒸着板に前記ゲッ
タ材を蒸着するようにすれば、前記固定面の対向平面以
外に網目部分にも蒸着され、大きな蒸着面積を得ること
ができ、より大きな真空ポンプとしての能力をもつこと
ができる。Function: According to the getter device of the present invention, since the getter device uses a linear getter that is flashed by current heating, the linear getter and the linear getter can be attached to a fixed surface while keeping the device volume small. and a net-like vapor deposition plate is provided on the vapor deposition surface of the getter material of the stretched linear getter, so that the getter material is vapor deposited on the vapor deposition plate. By doing so, the vapor is deposited not only on the opposing plane of the fixed surface but also on the mesh portion, and a large vapor deposition area can be obtained, thereby providing a larger capacity as a vacuum pump.
実施例
本発明のゲッタ装置の一実施例について、図を用いて説
明する。Embodiment An embodiment of the getter device of the present invention will be described with reference to the drawings.
第1図は、本発明の一実施例のゲッタ装置の構成を示す
斜視図である。なお、同図において、ゲッタ装置に関係
の無い部分は煩雑になるため省略している。内部空間の
小さい平板型の画像表示装置では、電流加熱でフラッシ
ュする線状ゲッタを用いてゲッタ装置を構成することで
、装置体積を小さくできる。1は線状ゲッタである。線
状ゲッタ1は、本ゲッタ装置が設けられている画像表示
装置の容器裏面などの固定面2に、バネ材を利用した架
張手段3で架張されているとともに、固定面2との間に
空間が設けられている。蒸着板4は綿状の部材で形成さ
れ、前記線状ゲッタのゲッタ材の蒸着面に設置されてい
る。FIG. 1 is a perspective view showing the configuration of a getter device according to an embodiment of the present invention. In addition, in the same figure, parts unrelated to the getter device are omitted to avoid complication. In a flat-plate image display device with a small internal space, the volume of the device can be reduced by configuring the getter device using a linear getter that is flashed by current heating. 1 is a linear getter. The linear getter 1 is stretched by a tensioning means 3 using a spring material to a fixed surface 2 such as the back surface of a container of an image display device in which this getter device is installed, and there is no space between the linear getter 1 and the fixed surface 2. A space is provided for. The vapor deposition plate 4 is formed of a cotton-like member, and is installed on the vapor deposition surface of the getter material of the linear getter.
次に、本発明のゲッタ装置の動作を説明する。Next, the operation of the getter device of the present invention will be explained.
第2Vは、本発明のゲッタ装置を線状ゲッタ1の線方向
に垂直に切った断面図である。線状ゲッタ1を電流加熱
すると内部のゲッタ材が同図の矢印の方向に蒸発、飛散
する。蒸発しガス化したゲッタ材は、網目5の遮断面積
が小さいため固定面2の表面にまわり込み、固定面2の
対向平面部6に蒸着されるとともに、網目表面7にも蒸
着されることになり、網目表面7に蒸着された分だけ大
きな蒸着面積を得ることができ、より大きな真空ポンプ
としての能力をもつことができる。2nd V is a cross-sectional view of the getter device of the present invention taken perpendicularly to the line direction of the linear getter 1. FIG. When the linear getter 1 is heated with electric current, the getter material inside evaporates and scatters in the direction of the arrow in the figure. The evaporated and gasified getter material wraps around the surface of the fixed surface 2 because the blocking area of the mesh 5 is small, and is deposited on the opposing flat part 6 of the fixed surface 2, as well as on the mesh surface 7. Therefore, a larger evaporation area can be obtained by the amount of evaporation on the mesh surface 7, and a larger capacity as a vacuum pump can be obtained.
発明の効果
本発明のゲッタ装置によれば、電流加熱でフラッシュす
る線状ゲッタを用いたゲッタ装置であることにより、装
置体積を小さくしたまま、前記線状ゲッタと、前記線状
ゲッタを固定面に対して空間を設けて架張する架張手段
を有し、架張された前記線状ゲッタのゲッタ材の蒸着面
に網状の蒸着板を設けたことで、前記蒸着板に前記ゲッ
タ材を蒸着するようにすれば、前記固定面の対向平面以
外に網目部分にも蒸着され、大きな芸着面積を得ること
ができ、より大きな真空ポンプとしての能力をもつこと
ができる。以上のように装置をより小型化しながら、よ
り高い到達真空度の得られることで、性能向上に益する
ところが大きいと言える。Effects of the Invention According to the getter device of the present invention, since the getter device uses a linear getter that is flashed by current heating, the linear getter and the linear getter can be attached to a fixed surface while keeping the device volume small. By providing a net-like vapor deposition plate on the vapor deposition surface of the getter material of the stretched linear getter, the getter material can be applied to the vapor deposition plate. If it is vapor-deposited, it will be vapor-deposited not only on the opposing plane of the fixed surface but also on the mesh portion, and a large surface area can be obtained, and a larger capacity as a vacuum pump can be obtained. As described above, it can be said that achieving a higher ultimate degree of vacuum while making the device more compact will greatly benefit performance improvement.
第1図は本発明の一実施例のゲッタ装置の構成を示す斜
視図、第2図は同断面口、第3図は従来の技術のゲッタ
装置の構成を示す斜視図、第4図は線状ゲッタの内部構
成を示す断面図である。
1・・・・・・線状ゲッタ、2・・・・・固定面、3・
・・・・・架張手段、4・・・・・・蒸着板。
代理人の氏名 弁理士 小鍜冶 明 ほか2名り
桑FIG. 1 is a perspective view showing the configuration of a getter device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of the getter device, FIG. FIG. 3 is a cross-sectional view showing the internal configuration of a shaped getter. 1... Linear getter, 2... Fixed surface, 3...
...Stretching means, 4... Vapor deposited plate. Name of agent: Patent attorney Akira Kokaji and 2 others
mulberry
Claims (1)
置であって、前記線状ゲッタと、前記線状ゲッタを固定
面に対して空間を設けて架張する架張手段を有し、架張
された前記線状ゲッタのゲッタ材の蒸着面に網状の蒸着
板を設けたゲッタ装置。A getter device using a linear getter flashed by electric current heating, comprising the linear getter and a stretching means for stretching the linear getter with a space provided relative to a fixed surface, A getter device in which a net-like vapor deposition plate is provided on the vapor deposition surface of the getter material of the linear getter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2318477A JPH04190544A (en) | 1990-11-22 | 1990-11-22 | Getter device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2318477A JPH04190544A (en) | 1990-11-22 | 1990-11-22 | Getter device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04190544A true JPH04190544A (en) | 1992-07-08 |
Family
ID=18099550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2318477A Pending JPH04190544A (en) | 1990-11-22 | 1990-11-22 | Getter device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04190544A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5734226A (en) * | 1992-08-12 | 1998-03-31 | Micron Technology, Inc. | Wire-bonded getters useful in evacuated displays |
-
1990
- 1990-11-22 JP JP2318477A patent/JPH04190544A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5734226A (en) * | 1992-08-12 | 1998-03-31 | Micron Technology, Inc. | Wire-bonded getters useful in evacuated displays |
US5909202A (en) * | 1992-08-12 | 1999-06-01 | Micron Technology, Inc. | Wire-bonded getter in an evacuated display and method of forming the same |
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