JPH04187769A - Substrate holder for dry coating process - Google Patents

Abstract

PURPOSE:To prevent the warpage, deformation, etc., of a substrate and to easily mount the substrate by fixing the substrate to one longitudinal side of a rectangular frame and to a first mobile plate between the first and second mobile plates capable of being slid between the opposed longitudinal sides of the frame and connected by a spring. CONSTITUTION:Both ends of a substrate P are fixed to one longitudinal side 2A enclosing a substrate treating space S1 in a reactangular frame 2 of a holder 1 and to a first mobile plate 3 by bolts and nuts 12 and 13, etc., and a second mobile plate 4 is drawn in by a buckkle 6, etc., and fastened to the other longitudinal side 2B. A spring 5 is elastically deformed by the movement of the plate 4 toward the longitudinal side 2B, a tensile force is exerted on the substrate P by the elasticity through the plate 3. Even if the substrate P is heated and thermally expanded, the end of the substrate P on the plate 3 side pulled by the spring 5 and the plate 3 are smoothly moved toward the plate 4, the thermal expansion is absorbed, and the substrate P is not deformed. The substrate is mounted outside a vacuum chamber, the frame 2 is inserted into the housing groove of a substrate holder receiver, and the work is easily and rapidly performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a substrate holder that holds a substrate undergoing surface treatment in a vacuum chamber in a dry coating process such as vacuum evaporation.

(Prior art) Dry coating such as vacuum evaporation and ion blating is a process in which metals and non-metals are heated and evaporated in vacuum, or ionized and accelerated, and then adhered to the surface of a substrate to form a thin film. Generally, the substrate needs to be heated to improve the film forming speed and film quality (from room temperature to 500 ℃).
(about °C).

FIG. 7 shows an example of vacuum evaporation, in which an evaporation container 50 is placed in the lower part of the vacuum chamber C, and a substrate holder 51 with a built-in heater is fixed in the upper part.
The substrate P is mounted on the lower surface of the substrate P with the processing surface facing downward.

In such a configuration, conventionally, bolts 52 are used to connect the board P and the board holder 51, and the board P is attached to the board holder 51 by tightening the bolts at several locations around the board P.

[Problems to be Solved by the Invention] In the conventional bolting method as described above, when the heated board expands thermally, it is restrained at the bolted part, which causes warpage and deformation due to thermal strain, especially when the board is a thin plate. etc., resulting in a decrease in coating quality.

Further, since the bolt tightening work is performed in a narrow vacuum chamber, the work is troublesome and takes a long time, resulting in poor work efficiency.

This invention has been made to solve the above-mentioned problems, and its purpose is to prevent warping and deformation of the board due to thermal distortion, and to make the work of mounting the board easy and quick. The purpose of the present invention is to provide a substrate holder that can be used in a dry coating process.

[Means to solve the problem]

In the present invention, a substrate P to be subjected to surface treatment is placed in a vacuum chamber C.
As shown in FIGS. 1 to 3, in the substrate holder for the dry coating process held in the substrate holder, a first The movable plate 3 and the second movable plate 4 are arranged so as to be slidable with the substrate processing space Sl apart using the other opposing horizontal side 2C12D as a guide,
Both ends of the substrate P are connected to a first
The movable plate 3 and one vertical side 2A are removably attached to each other with bolts and nands 12, 13, etc., the first movable plate 3 and the second movable plate 4 are connected by a spring 5, and the second movable plate 4 is attached to the other side. A buckle 6 or the like is used to connect the vertical side 2B by pulling it.

Further, the retractable connection is not limited to the buckle 6, but may be a C-shaped link 30 and a lever 31 (see FIG. 8), or a wire 40 and a worm mechanism 41 (see FIG. 9).

Furthermore, as shown in FIG. 10, the second moving plate 4 is omitted, one end of a C-shaped spring 50 is connected to the moving plate 3, and the other end of this C-shaped spring 50 is rotated to the vertical side 2B. It may also be connected to the supported lever 51.

In addition, as shown in FIG.
Make sure to insert it within 9.

[For production]

In FIGS. 1 to 3, both ends of the substrate P are fixed to one vertical side 2A sandwiching the substrate processing space S and the first moving plate 3 with bolts and nuts 12, 13, etc., and the second
The movable plate 4 is pulled in and fastened to the other vertical side 2B using a buckle 6 or the like.

As the second moving plate 4 moves toward the vertical side 2B, the spring 5 is elastically deformed, and the elastic force of the spring 5 applies initial tension to the substrate P via the first moving plate 3. Board P
Even if thermally expands due to heating, the first movable plate side end of the substrate P in tension due to the spring 5 and the first movable plate 3
moves smoothly toward the second moving plate 4, the thermal expansion is absorbed, and deformation of the substrate P is prevented.

In the case of FIG. 10, the C-shaped spring 50 and the lever 51 serve as both a spring and a connector, and there is an advantage that the second moving plate 4 can be omitted.

Further, since the substrate P can be attached outside the vacuum chamber C and the rectangular frame 2 only needs to be inserted into the storage groove 19 of the substrate holder receiver 7, the work can be carried out easily and quickly.

[Example] The present invention will be described below based on an illustrative example. As shown in FIGS. 1 to 3, the substrate holder 1 of the present invention mainly includes a rectangular frame 2, a first movable plate 3,
, second moving plate 4, tension coil spring 5, buckle 6
6, and is attached to the substrate holder receiver 7, as shown in FIG.

The rectangular frame 2 has a pair of opposing vertical sides 2A.

2B, and a pair of horizontal sides 2C and 2D, which is a rectangular frame in plan view, and the substrate P is mounted on the upper surface of the rectangular frame 2 so that its length direction coincides with the length direction of the horizontal sides, and
The size is such that a surface treatment space S1 for the substrate P and an installation space S2 for the first and second moving plates 3.4 etc. can be formed inside.

The first and second moving plates 3.4 have spaces s, , S,
It is disposed on the vertical side 2B side of the board so as to be parallel to the vertical sides 2A and 2B, and is guided and supported by a pair of horizontal sides 2C22D so as to be slidable in the horizontal side length direction (substrate length direction). This guide support is achieved, for example, by cutting out the inner side of the upper and lower surfaces of the horizontal side 2C12D on the space S2 side to form a protrusion 8, and forming a groove 9 that engages with the protrusion 8 between the first and second moving plates 3.4. This is done by forming it on both ends (see Figure 4).

The first moving plate 3 is a surface treatment space S.

A plurality of bolt holes 11 are formed at intervals in the length direction on the first moving plate 3 and the vertical side 2A, and both longitudinal ends of the board P are attached with bolts 12 and nuts 13. . As shown in FIG. 5, the bolt 12 is a bolt with a seat, and is inserted from above into the bolt hole 10 of the board P, the port hole 1 of the plate 3 and the vertical side 2A, and the nut 13 is screwed onto the tip of the bolt 12. do. Further, the bolt 12 is a knurled bolt, and the nut 13 is a wing nut so that they can be easily attached and detached.

The first moving plate 3 and the second moving plate 4 are connected by a plurality of tension coil springs 5 arranged at intervals in the length direction, and the second moving plate 4 and the vertical side 2B can be attached and detached with a buckle 6. Connect to.

The buckle 6 includes a lever 15 pinned to the mounting plate 14 so as to be swingable in the plate movement direction (board length direction), a hook 16 pinned to the lever 15 so as to be swingable up and down, and the hook 16 Hook receiver 17 to which is removably locked
It is a metal fitting that pulls the hook receiver 17 toward the mounting plate 14 side and fastens it by tilting the lever 15 in the {circle around (2)} direction. Fix it on the top surface of the

The tension coil spring 5 is attached to the hook 1 before the buckle is fastened.
6 has a free length that can be engaged with the hook receiver 17, and has a spring constant that can provide the substrate P with an initial tension that can sufficiently absorb the longitudinal thermal expansion of the substrate P after the buckle is fastened. Use.

The substrate holder receiver 7 is fixed to the upper part of the vacuum chamber C, and as shown in FIG. A heater H is installed on the top, and a substrate holder 1 is placed on the bottom.
to be inserted. The substrate holder 1 is inserted horizontally into the storage groove 19 with the substrate 1 and buckle 6 facing upward, and is supported by the lip support piece 18. One lip support piece 18
A protruding strip 20 is formed on the upper surface, and a groove 21 that engages with the protruding strip 20 is formed on the lower surface of the vertical or horizontal sides of the rectangular frame 2, so that the substrate holder 1 can be easily inserted and positioned accurately. It can be so. Note that positioning in the insertion direction is performed by attaching the frame 2 to a stopper (not shown) provided on the board holder receiver 7.
Place the end face of the Further, the substrate holder 1 is fixed by applying the tip of a butterfly bolt 22 screwed onto the substrate holder receiver 7 to the side surface of the frame 2.

In the above configuration, the board P is attached as follows.

(i) Outside the vacuum chamber C, place the rectangular frame 2 on a work table, desk, etc. with the buckle 6 facing upward.

(Pull the lever 15 of the jO buckle 6 in the direction ■ to release the hook 16 and hook receiver 17, and then
Both longitudinal ends thereof are vertical sides 2A, and the first moving plate 3
It is placed on the upper surface of the rectangular frame 2 so as to be positioned above.

The bolt holes 10 of the GiD substrate P are aligned with the bolt holes 11 of the vertical side 2A and the first moving plate 3, and both ends of the substrate P are fixed to the vertical side 2A and the first moving plate 3 using bolts and nuts 12 and 13.

GV) In this state, the hook 16 can be held in the hook receiver 17, and by pulling down the lever 15 in the {circle around (2)} direction, the second moving plate 4 is pulled toward the vertical side 2B and fastened to the vertical side 2B. Ru. The tension coil spring 5 is expanded by the movement of the second moving plate 4, and an initial tension proportional to the amount of extension and the spring constant is applied to the substrate P via the first moving plate 3.

(b) When the setting of the substrate P is completed in this way, the substrate holder 1 is placed in the vacuum chamber C, and the substrate holder holder 7
The protrusions 20 and the concave grooves 21 are aligned and pushed into the storage groove 19. When the board holder 1 hits the stopper, the butterfly bolt 22
Tighten to fix the board holder 1 to the board holder receiver 7.

(Vi) In this state, the substrate P is heated from above by the heater H, and surface treatment is performed from below in a vacuum state. Even if the substrate P thermally expands in the length direction, the tension coil spring 5 smoothly moves the plate side of the substrate P in tension and the first moving plate 3 toward the second moving plate 4 side, and the deformation of the substrate P is prevented. Prevented. Tension is applied to the substrate P even after the movement, and the substrate P is not restrained. Note that although the substrate P thermally expands in the width direction (longitudinal length direction) when heated by the heater, deformation in the width direction becomes extremely small under tension by the tension coil spring 5, and no special measures are required.

(b) When the surface treatment is completed, remove the substrate holder 1 from the substrate holder holder 7 in the reverse order as described above, remove the buckle 6 on a work table, etc., and then remove the bolts and nuts 12 and 13 to remove the substrate P. It can be easily removed from the substrate holder 1.

In the above embodiment, an example was shown in which the buckle 6 is used to retract the connection, but as shown in FIG.
Using the L-shaped lever 31 whose base is pivoted to the
The tip of the C-shaped link 30 may be locked to the shaft attachment part 32 of the lever 31 by the rotation of No. 9.
As shown in the figure, using a wire 40 and a worm mechanism 41, the wire 40 whose one end is connected to the second moving plate 4 is wound around the drum 42 of the wheel of the worm mechanism 41, and the wire 40 is pulled and retracted by the worm mechanism 41. They may be connected.

Further, as shown in FIG. 10, using a C-shaped spring 50 and a cross-shaped lever 51 similar to that shown in FIG. In addition, the tip of the C-shaped spring 50 may be locked to the shaft attachment portion 52 of the lever 51. In this case, the second
This has the advantage that the moving plate 4 can be omitted.

Note that the substrate P can also be provided on the lower surface of the frame 2. Further, although an example has been shown in which the substrate P is mounted with the processing surface facing downward, it goes without saying that the present invention is not limited to this and can be applied to other substrate processing positions.

[Effects of the Invention] As described above, the substrate holder according to the present invention slides the first and second movable plates parallel to the opposing vertical sides between the opposing vertical sides of the rectangular frame using the other opposing horizontal sides as guides. both ends of the board are removably attached to the first moving plate and one vertical side, and the first moving plate and the second
A second moving plate is connected to the moving plate by a spring, and the second moving plate is pulled and connected to the other vertical side, or one end of a C-shaped spring is connected to the moving plate, and the other end of this spring is rotated to the other vertical side. Since the frame is connected to the supported lever and the frame is inserted into the storage groove of the board frame holder, the following effects are achieved.

(i) Even if the substrate expands thermally due to heating, since tension is applied to the substrate, the end of the substrate on the moving plate side moves smoothly and absorbs the thermal expansion, preventing warpage, deformation, etc. of the substrate. be done. This makes it possible to improve coating quality.

(The board can be mounted on the rectangular frame outside the jO vacuum chamber, and the rectangular frame with the board mounted can be easily inserted and held in the vacuum chamber, making the mounting work easy and quick. It is possible to improve work efficiency.

[Brief explanation of drawings]

1 and 2 are a plan view and a front view showing a substrate holder according to the present invention, FIGS. 3 and 4 are a view taken along the line m-■ of FIG. 1, a cross-sectional view taken along the line ■, and FIG. 6 is an enlarged sectional view showing the mounting part of the board, FIG. 6 is a front view showing the board holder receiver of the present invention, and FIG.
The figure is a schematic view showing a vacuum chamber with a conventional substrate holder attached, and FIGS. 8, 9, and 10 are plan views showing modifications of the present invention. 1... Board holder, 2... Rectangular frame 2A
, 2B... Vertical side 2C12D... Horizontal side 3...
・First moving plate 4...Second moving plate 5...Tension coil spring, 6...Hatsukuru...
Board holder holder, 8... Convex line 9... Concave groove,
10.11...Bolt hole 12...Bolt,
13... Nut 14... Installation 1.15... Lever 16... Hook, 17... Hook receiver 18
... Lip support piece, 19 ... Storage groove 20 ... Convex strip, 21 ... Concave groove 22 ... Bolt. Figure 6

Claims (3)

[Claims] (1) In a substrate holder for a dry coating process that holds a substrate to be surface-treated in a vacuum chamber, a first moving plate and a second moving plate parallel to the opposing vertical sides are arranged between opposing vertical sides of a rectangular frame. , with a substrate processing space in between, the other opposite horizontal sides are arranged to be slidable as guides, and both ends of the substrate P are removably attached to a first moving plate sandwiching the substrate processing space and one vertical side, respectively. A substrate holder for use in a dry coating process, characterized in that a first moving plate and a second moving plate are connected by a spring, and the second moving plate is retracted and connected to the other vertical side. (2) In a substrate holder for a dry coating process that holds a substrate undergoing surface treatment in a vacuum chamber, a moving plate parallel to the opposite vertical sides of the rectangular frame is placed between the opposite vertical sides with a substrate processing space, It is arranged to be slidable using the other opposite horizontal side as a guide, and both ends of the substrate P are removably attached to a moving plate sandwiching the substrate processing space and one vertical side, and one end of a C-shaped spring is attached to the moving plate. A substrate holder for use in a dry coating process, characterized in that the other end of the spring is connected to a lever rotatably supported by the other vertical side. (3) A substrate holder for use in a dry coating process according to claim (1) or (2), characterized in that the frame and the substrate holder receiver are separate bodies, and the frame is inserted into a storage groove of the substrate holder receiver.