JPH0418657U - - Google Patents
Info
- Publication number
- JPH0418657U JPH0418657U JP5989290U JP5989290U JPH0418657U JP H0418657 U JPH0418657 U JP H0418657U JP 5989290 U JP5989290 U JP 5989290U JP 5989290 U JP5989290 U JP 5989290U JP H0418657 U JPH0418657 U JP H0418657U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- forming apparatus
- film forming
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989290U JPH0418657U (de) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989290U JPH0418657U (de) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418657U true JPH0418657U (de) | 1992-02-17 |
Family
ID=31586791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5989290U Pending JPH0418657U (de) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418657U (de) |
-
1990
- 1990-06-06 JP JP5989290U patent/JPH0418657U/ja active Pending