JPH0418656U - - Google Patents

Info

Publication number
JPH0418656U
JPH0418656U JP5742490U JP5742490U JPH0418656U JP H0418656 U JPH0418656 U JP H0418656U JP 5742490 U JP5742490 U JP 5742490U JP 5742490 U JP5742490 U JP 5742490U JP H0418656 U JPH0418656 U JP H0418656U
Authority
JP
Japan
Prior art keywords
holder
evaporated
groove
substrate holder
vacuum evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5742490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5742490U priority Critical patent/JPH0418656U/ja
Publication of JPH0418656U publication Critical patent/JPH0418656U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5742490U 1990-05-31 1990-05-31 Pending JPH0418656U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5742490U JPH0418656U (enExample) 1990-05-31 1990-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5742490U JPH0418656U (enExample) 1990-05-31 1990-05-31

Publications (1)

Publication Number Publication Date
JPH0418656U true JPH0418656U (enExample) 1992-02-17

Family

ID=31582115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5742490U Pending JPH0418656U (enExample) 1990-05-31 1990-05-31

Country Status (1)

Country Link
JP (1) JPH0418656U (enExample)

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