JPH0418656U - - Google Patents
Info
- Publication number
- JPH0418656U JPH0418656U JP5742490U JP5742490U JPH0418656U JP H0418656 U JPH0418656 U JP H0418656U JP 5742490 U JP5742490 U JP 5742490U JP 5742490 U JP5742490 U JP 5742490U JP H0418656 U JPH0418656 U JP H0418656U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- evaporated
- groove
- substrate holder
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の真空蒸着装置の基
板保持具の平面図、第２図は本考案の基板保持具
に被蒸着物を取付けた状態の側面図、第３図は本
考案の基板保持具の板バネで被蒸着物を固定する
部分の詳細を示す図、第４図は板バネの他の実施
例を示す図、第５図は基板保持具の他の実施例を
示す図、第６図は基板保持具の他の実施例を示す
図、第７図は真空蒸着装置の概要を示す図、第８
図は従来の第１の基板保持具を示す図、第９図は
従来の第２の基板保持具を示す図である。
１２……被蒸着物、２２……ホルダ、２２ａ…
…凹部、２２ｂ……受け部、２４……板バネ、２
４ａ……ガイド部、２４ｂ……固定部、２５……
基板保持具。
Fig. 1 is a plan view of a substrate holder of a vacuum evaporation apparatus according to an embodiment of the present invention, Fig. 2 is a side view of a substrate holder according to the present invention with an object to be deposited attached, and Fig. 3 is a plan view of a substrate holder according to the present invention. Fig. 4 shows another embodiment of the plate spring, and Fig. 5 shows another embodiment of the substrate holder. 6 is a diagram showing another embodiment of the substrate holder, FIG. 7 is a diagram showing an outline of the vacuum evaporation apparatus, and FIG.
The figure shows a conventional first substrate holder, and FIG. 9 shows a conventional second substrate holder. 12...Deposited object, 22...Holder, 22a...
...Recessed portion, 22b...Receiving portion, 24...Plate spring, 2
4a...Guide part, 24b...Fixing part, 25...
Board holder.
Claims (1)
持具において、内周側に上記被蒸着物を載置する
とともに上記被蒸着物の蒸着範囲を制限する受け
部と外周に複数の凹部が形成されたホルダと、こ
のホルダの外周に一端が取着されかつ上記凹部に
挿入される他端側に上記蒸着物をガイドするガイ
ド部と固定する固定部がそれぞれ逆傾斜を有して
形成されたＵ字状の板バネとを具備したことを特
徴とする真空蒸着装置の基板保持具。 (2) 凹部に対向する受け部の下部に溝部を形成
し、この溝部に対向する板バネの他端側先端を折
曲して溝部に挿入する突起部を形成したことを特
徴とする請求項１項記載の真空蒸着装置の基板保
持具。[Scope of Claim for Utility Model Registration] (1) In a substrate holder of a vacuum evaporation apparatus that holds an object to be evaporated, there is provided a support for placing the object to be evaporated on the inner circumferential side and limiting the evaporation range of the object to be evaporated. a holder having a plurality of recesses formed on the outer periphery of the holder; one end of the holder is attached to the outer periphery of the holder, and the other end, which is inserted into the recess, has a guide part that guides the deposit and a fixing part that fixes the deposit, respectively. 1. A substrate holder for a vacuum evaporation apparatus, comprising a U-shaped leaf spring formed with a reverse slope. (2) A claim characterized in that a groove is formed in the lower part of the receiving part facing the recess, and the tip of the other end of the leaf spring facing the groove is bent to form a protrusion that is inserted into the groove. A substrate holder for a vacuum evaporation apparatus according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742490U JPH0418656U (en) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742490U JPH0418656U (en) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418656U true JPH0418656U (en) | 1992-02-17 |
Family
ID=31582115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5742490U Pending JPH0418656U (en) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418656U (en) |
-
1990
- 1990-05-31 JP JP5742490U patent/JPH0418656U/ja active Pending
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