JPH041853U - - Google Patents
Info
- Publication number
- JPH041853U JPH041853U JP4295690U JP4295690U JPH041853U JP H041853 U JPH041853 U JP H041853U JP 4295690 U JP4295690 U JP 4295690U JP 4295690 U JP4295690 U JP 4295690U JP H041853 U JPH041853 U JP H041853U
- Authority
- JP
- Japan
- Prior art keywords
- transport
- drive shafts
- substrates
- driven shaft
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000005540 biological transmission Effects 0.000 claims 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Description
第１図は本考案の一実施例である搬送機構を示
す概略斜視図、第２図は第１図の搬送機構を示す
断面図、第３図及び第４図は処理槽を示す概略断
面図、第５図Ａ，Ｂは従来の搬送機構を示す断面
図である。
１，２……処理槽、４……駆動シヤフト、８…
…従動シヤフト、１１ａ，１１ｂ……搬送ローラ
、１２……基板、１３……回転軸、１４……ピニ
オン、１５ａ，１５ｂ……ラツク、１６ａ，１６
ｂ……幅寄せ部材、１７ａ，１７ｂ……ローラ。
Fig. 1 is a schematic perspective view showing a transport mechanism which is an embodiment of the present invention, Fig. 2 is a sectional view showing the transport mechanism of Fig. 1, and Figs. 3 and 4 are schematic sectional views showing a processing tank. , FIGS. 5A and 5B are sectional views showing a conventional conveyance mechanism. 1, 2...processing tank, 4...drive shaft, 8...
... Driven shaft, 11a, 11b ... Conveyance roller, 12 ... Board, 13 ... Rotating shaft, 14 ... Pinion, 15a, 15b ... Rack, 16a, 16
b... Width adjustment member, 17a, 17b... Roller.
Claims (1)
シヤフトと、この駆動シヤフト間を連結する連結
部材と、前記駆動シヤフトの軸方向と直交する方
向に回転可能に配された複数の従動シヤフトと、
前記駆動シヤフトの回転を従動シヤフトに伝達す
る回転伝達機構と、前記従動シヤフトに取付けら
れ、かつ基板を搬送する複数の搬送ローラとを有
する搬送機構であつて、前記搬送ローラが平滑面
を有するローラであり、基板の搬送方向と直交す
る方向に基板を整列させる整列機構を有すること
を特徴とするローラ搬送機構。 Rotatable drive shafts arranged in parallel in adjacent processing tanks, a connecting member connecting the drive shafts, and a plurality of driven shafts rotatably arranged in a direction orthogonal to the axial direction of the drive shafts. and,
A transport mechanism including a rotation transmission mechanism that transmits the rotation of the drive shaft to a driven shaft, and a plurality of transport rollers that are attached to the driven shaft and transport the substrate, the transport rollers having a smooth surface. A roller conveyance mechanism characterized by having an alignment mechanism for aligning substrates in a direction perpendicular to the direction of conveyance of the substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4295690U JPH041853U (en) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4295690U JPH041853U (en) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH041853U true JPH041853U (en) | 1992-01-09 |
Family
ID=31554954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4295690U Pending JPH041853U (en) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041853U (en) |
-
1990
- 1990-04-20 JP JP4295690U patent/JPH041853U/ja active Pending
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