JPH0418446U - - Google Patents

Info

Publication number
JPH0418446U
JPH0418446U JP5921390U JP5921390U JPH0418446U JP H0418446 U JPH0418446 U JP H0418446U JP 5921390 U JP5921390 U JP 5921390U JP 5921390 U JP5921390 U JP 5921390U JP H0418446 U JPH0418446 U JP H0418446U
Authority
JP
Japan
Prior art keywords
sample
installation surface
adsorbing
measures
clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5921390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5921390U priority Critical patent/JPH0418446U/ja
Publication of JPH0418446U publication Critical patent/JPH0418446U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5921390U 1990-06-06 1990-06-06 Pending JPH0418446U (US06312121-20011106-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5921390U JPH0418446U (US06312121-20011106-C00033.png) 1990-06-06 1990-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5921390U JPH0418446U (US06312121-20011106-C00033.png) 1990-06-06 1990-06-06

Publications (1)

Publication Number Publication Date
JPH0418446U true JPH0418446U (US06312121-20011106-C00033.png) 1992-02-17

Family

ID=31585513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5921390U Pending JPH0418446U (US06312121-20011106-C00033.png) 1990-06-06 1990-06-06

Country Status (1)

Country Link
JP (1) JPH0418446U (US06312121-20011106-C00033.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006022328A1 (ja) * 2004-08-25 2006-03-02 Tokyo Electron Limited 成膜装置および成膜方法
JP2007052138A (ja) * 2005-08-16 2007-03-01 Fujifilm Holdings Corp ワーク固定装置及びその位置決め方法並びに画像形成装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006022328A1 (ja) * 2004-08-25 2006-03-02 Tokyo Electron Limited 成膜装置および成膜方法
JP2007052138A (ja) * 2005-08-16 2007-03-01 Fujifilm Holdings Corp ワーク固定装置及びその位置決め方法並びに画像形成装置
JP4606968B2 (ja) * 2005-08-16 2011-01-05 富士フイルム株式会社 ワーク固定装置及びその位置決め方法並びに画像形成装置

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