JPH0418443U - - Google Patents
Info
- Publication number
- JPH0418443U JPH0418443U JP5855690U JP5855690U JPH0418443U JP H0418443 U JPH0418443 U JP H0418443U JP 5855690 U JP5855690 U JP 5855690U JP 5855690 U JP5855690 U JP 5855690U JP H0418443 U JPH0418443 U JP H0418443U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating means
- temperature sensor
- substrate holder
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5855690U JPH0418443U (OSRAM) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5855690U JPH0418443U (OSRAM) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418443U true JPH0418443U (OSRAM) | 1992-02-17 |
Family
ID=31584276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5855690U Pending JPH0418443U (OSRAM) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418443U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008064551A (ja) * | 2006-09-06 | 2008-03-21 | Tokyo Electron Ltd | 測温装置 |
-
1990
- 1990-05-31 JP JP5855690U patent/JPH0418443U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008064551A (ja) * | 2006-09-06 | 2008-03-21 | Tokyo Electron Ltd | 測温装置 |
| TWI403702B (zh) * | 2006-09-06 | 2013-08-01 | Tokyo Electron Ltd | Temperature measuring device |
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