JPH04183282A - Drive controller for ultrasonic motor - Google Patents

Drive controller for ultrasonic motor

Info

Publication number
JPH04183282A
JPH04183282A JP2308303A JP30830390A JPH04183282A JP H04183282 A JPH04183282 A JP H04183282A JP 2308303 A JP2308303 A JP 2308303A JP 30830390 A JP30830390 A JP 30830390A JP H04183282 A JPH04183282 A JP H04183282A
Authority
JP
Japan
Prior art keywords
voltage
pulse
ultrasonic motor
signal
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2308303A
Other languages
Japanese (ja)
Other versions
JP2760148B2 (en
Inventor
Daisuke Satani
大助 佐谷
Tadao Takagi
忠雄 高木
Tsuneo Watanabe
渡辺 常雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2308303A priority Critical patent/JP2760148B2/en
Publication of JPH04183282A publication Critical patent/JPH04183282A/en
Application granted granted Critical
Publication of JP2760148B2 publication Critical patent/JP2760148B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To apply a higher pulse voltage than a normal driving voltage irrespective of whether it is a vibration deviation state and to surely start an ultrasonic motor by providing high frequency voltage generating means for generating a high frequency voltage to be applied to the motor. CONSTITUTION:When a start signal generator 10 outputs a start signal at a time t0, a pulse generator 11 generates a pulse signal for generating a pulse voltage higher than a driving voltage at a normal time. In this case, since an MPX 13 is so switched as to output a pulse signal from the generator 11, the signal is output. The signal is amplified to a pulse driving voltage by amplifiers 15a, 15b, and applied to driving electrodes 1b-R, 1b-L of an ultrasonic motor M. The pulse driving voltage at the time of starting is higher than the driving voltage at the normal time, the pulse voltage having a high frequency, and the motor M in which high vibration energy is applied, is stably started without falling in a vibration deviation state.

Description

【発明の詳細な説明】 A、産業上の利用分野 本発明は超音波モータの駆動制御装置に関する。[Detailed description of the invention] A. Industrial application field The present invention relates to a drive control device for an ultrasonic motor.

B、従来の技術 進行性振動波型の超音波モータは、例えば特開昭59−
111609号公報に示されるように、圧電体に交流電
圧を印加したときに生しる屈曲振動を利用して、圧電体
を貼り付けた弾性体に進行性振動波を生じさせ、この弾
性体に回転子を加圧接触させて摩擦師動するモータであ
る。
B. Conventional technology A progressive vibration wave type ultrasonic motor is disclosed in, for example, Japanese Patent Application Laid-open No. 1986-
As shown in Japanese Patent No. 111609, the bending vibration generated when an alternating current voltage is applied to a piezoelectric material is used to generate progressive vibration waves in an elastic body to which a piezoelectric material is attached. This is a motor that operates frictionally by bringing the rotor into pressure contact.

この超音波モータには、電子情報通信学会誌■o1.7
0.No、7.pp717−pp720(1987年7
月号)に示されるように、負荷が定格値を越えると共振
を逸脱して停止するという特性がある。このような状態
で停止した場合には、超音波モータの駆動電極の電圧(
以下、単に駆動電圧と呼ぶ)と、モニタ電極の電圧(以
下、単にモニタ電圧と呼ぶ)との位相差が正常な回転時
の値から逸脱し、ステータの振動がほとんどなくなる(
以下、本明細書では、このような状態を振動逸脱状態と
呼ぶ)。この振動逸脱状態は、呼動電圧が所定値よりも
低いときに発生する可能性が高い。
This ultrasonic motor has the following characteristics: IEICE Journal ■o1.7
0. No, 7. pp717-pp720 (July 1987
As shown in the following issue, it has a characteristic that when the load exceeds the rated value, it deviates from resonance and stops. If the ultrasonic motor stops under such conditions, the voltage of the drive electrode of the ultrasonic motor (
The phase difference between the voltage of the monitor electrode (hereinafter simply referred to as the drive voltage) and the voltage of the monitor electrode (hereinafter simply referred to as the monitor voltage) deviates from the value during normal rotation, and the vibration of the stator almost disappears (
Hereinafter, in this specification, such a state will be referred to as a vibration deviation state). This vibration deviation state is likely to occur when the expiration voltage is lower than a predetermined value.

C0発明が解決しようとする課題 このような特性を有する超音波モータを、第4図に示す
ように駆動周波数の1周期よりも長い時間で徐々に駆動
電圧を立上げて起動すると、起動途中で振動逸脱状態に
陥り起動しないという問題がある。
C0 Problem to be Solved by the Invention When an ultrasonic motor having such characteristics is started by gradually increasing the drive voltage for a time longer than one cycle of the drive frequency as shown in Fig. 4, the There is a problem that the device falls into a state of vibration deviation and does not start.

さらに、この振動逸脱状態から脱出するには、負荷を開
放し、駆動周波数を共振周波数より高い周波数にして再
起動しなければならない。しかし。
Furthermore, in order to escape from this vibration deviation state, the load must be released and the drive frequency must be set higher than the resonant frequency and restarted. but.

負荷を開放するためにクラッチ機構などが必要となり、
装置が複雑で大型になる上に、再起動に時間がかかる。
A clutch mechanism is required to release the load,
Not only is the device complicated and large, but it takes time to restart it.

本発明の目的は、振動逸脱状態にあると否とに関わらず
、超音波モータに通常の能動電圧よりも高いパルス電圧
を印加して確実に超音波モータを起動する駆動制御装置
を提供することにある。
An object of the present invention is to provide a drive control device that reliably starts an ultrasonic motor by applying a pulse voltage higher than a normal active voltage to the ultrasonic motor, regardless of whether the ultrasonic motor is in a vibration deviation state. It is in.

00課題を解決するための手段 一実施例を示す第1図に対応づけて本発明を説明すると
、本発明は、超音波モータMに印加する高周波電圧を発
生する高周波電圧発生手段12を備えた超音波モータN
1の暫動制御装置番二適用される。
The present invention will be explained in conjunction with FIG. 1 showing an embodiment of the present invention.Means for Solving the Problems 00 The present invention includes a high-frequency voltage generating means 12 that generates a high-frequency voltage to be applied to an ultrasonic motor M. Ultrasonic motor N
1, temporary control device number 2 is applied.

そして、高周波数電圧よりも高い電圧のパルス電圧を発
生するパルス電圧発生手段11と、超音波モータMの起
動時に所定時間だけ起動信号を出力する起動信号発生手
段10と、この起動信号発生手段10から起動信号が出
力さおだとき、超音波モータMに印加する電圧を、高周
波電圧発生手段12の高周波電圧からパルス電圧発生手
段11のパルス電圧に切り換える切換手段13とを備え
ることにより、上記目的が達成される。
A pulse voltage generating means 11 that generates a pulse voltage higher than the high frequency voltage, a starting signal generating means 10 that outputs a starting signal for a predetermined time when starting the ultrasonic motor M, and this starting signal generating means 10 The above object is achieved by comprising a switching means 13 that switches the voltage applied to the ultrasonic motor M from the high frequency voltage of the high frequency voltage generating means 12 to the pulse voltage of the pulse voltage generating means 11 when the starting signal is not output from the is achieved.

E3作用 起動信号発生装置10から起動信号が出力されたとき、
超音波モータMに印加する電圧は、切換手段13により
高周波電圧発生手段12の高周波電圧からパルス電圧発
生手段11のパルス電圧に切り換えられる。これによっ
て、起動時はパルス発生手段11のパルス電圧が超音波
モータMに印加され、超音波モータMは起動中に振動逸
脱状態に陥ることなく確実に起動する。
When the activation signal is output from the E3 action activation signal generator 10,
The voltage applied to the ultrasonic motor M is switched from the high frequency voltage of the high frequency voltage generating means 12 to the pulse voltage of the pulse voltage generating means 11 by the switching means 13. As a result, the pulse voltage of the pulse generating means 11 is applied to the ultrasonic motor M at the time of starting, and the ultrasonic motor M is reliably started without falling into a state of vibration deviation during starting.

なお、本発明の詳細な説明する上記り項およびE項では
、本発明を分りゃすくするために実施例の図を用いたが
、これにより本発明が実施例に限定されるものではない
In the above-mentioned sections and Section E that describe the present invention in detail, figures of embodiments are used to make the present invention easier to understand, but the present invention is not limited to the embodiments.

F、実施例 第1図は一実施例の全体構成を示すブロック図、第2図
は超音波モータの断酊図である。
F. Embodiment FIG. 1 is a block diagram showing the overall configuration of one embodiment, and FIG. 2 is an exploded view of the ultrasonic motor.

超音波モータMの駆動制御装置は5第1図に示す機器か
ら構成される。1oは起動信号発生装置であり、超音波
モータMの起動時に起動信号を発生する。11はパルス
発生装置であり、起動信号発生装置10から起動信号が
供給されるとパルス信号を発生する。このパルス信号は
、定常時の能動電圧よりも電圧が高いパルス跣動電圧を
発生させるものである。12は高周波信号発生装置であ
り、定常時の駆動電圧および能動周波数を決定する高周
波信号を発生する。13は久方信号を切り換えるマルチ
プレクサ(以下、MPXと呼ぶ)であり、起動信号発生
装置1oがら起動信号が供給されたときパルス発生装置
11からのパルス信号を出力し、それ以外のとき;よ高
周波信号発生装置12からの高周波信号を出力する。1
4は移相器であり、不図示の超音波モータMの回転方向
指令に応じてMPX13からの信号位相を互いに+π/
2または−π/2だけ移相する。さらに、15a、15
bは増幅器であり、M P X 13がらの信号、およ
びその信号より+π/2または−π/2だけ位相のずれ
た移相器14からの信号をそれぞれ電力増幅する。
The drive control device for the ultrasonic motor M is composed of five devices shown in FIG. 1o is a starting signal generating device, which generates a starting signal when the ultrasonic motor M is started. A pulse generator 11 generates a pulse signal when the activation signal is supplied from the activation signal generator 10. This pulse signal generates a pulsed traction voltage that is higher in voltage than the active voltage in steady state. Reference numeral 12 denotes a high-frequency signal generator, which generates a high-frequency signal that determines the drive voltage and active frequency in steady state. Numeral 13 is a multiplexer (hereinafter referred to as MPX) for switching the signal, which outputs the pulse signal from the pulse generator 11 when the activation signal is supplied from the activation signal generator 1o, and otherwise outputs the pulse signal from the pulse generator 11; A high frequency signal from the signal generator 12 is output. 1
4 is a phase shifter, which shifts the signal phase from MPX 13 to +π// in accordance with a rotation direction command of an ultrasonic motor M (not shown).
2 or −π/2. Furthermore, 15a, 15
Reference numeral b denotes an amplifier, which amplifies the power of the signal from the M P X 13 and the signal from the phase shifter 14 whose phase is shifted by +π/2 or −π/2 from that signal.

超音波モータMは、第2図に示すステータ1とロータ2
とから構成される。さらにステータ1は。
The ultrasonic motor M has a stator 1 and a rotor 2 shown in FIG.
It consists of Furthermore, stator 1.

弾性体1aとこの弾性体1aに接着された圧電体1bと
から構成され、ロータ2は、リング状のロータ母材2a
とこのロータ母材2aに接着されたスライダー材2bと
から構成される。
The rotor 2 is composed of an elastic body 1a and a piezoelectric body 1b bonded to the elastic body 1a, and the rotor 2 has a ring-shaped rotor base material 2a.
and a slider material 2b bonded to the rotor base material 2a.

超音波モータMの圧電体1bには、電極1b−R,1b
−L、1b−G、lb−Mが設けられている。電極1b
−R,1b−Lは能動電極であり。
The piezoelectric body 1b of the ultrasonic motor M has electrodes 1b-R, 1b
-L, 1b-G, and lb-M are provided. Electrode 1b
-R and 1b-L are active electrodes.

それぞれ増幅器15a、15bと接続されて駆動電圧が
印加される。電極1b−Gはアース電極であり、接地さ
れる。さらに電極上し−Mはモニタ電極であり、弾性体
1aの振動に応じた交、ft電圧。
They are connected to amplifiers 15a and 15b, respectively, and drive voltages are applied thereto. Electrode 1b-G is a ground electrode and is grounded. Further, the upper electrode -M is a monitor electrode, and the AC and ft voltages correspond to the vibrations of the elastic body 1a.

すなわちモニタ電圧を発生する。That is, a monitor voltage is generated.

第3図は、上記駆動制御装置で超音波モータMを起動し
た時の各信号の変化を示すタイムチャートである。この
タイムチャートを参照して駆動制御装置の動作を説明す
る。
FIG. 3 is a time chart showing changes in each signal when the ultrasonic motor M is started by the drive control device. The operation of the drive control device will be explained with reference to this time chart.

時刻10において、起動信号発生装置10から起動信号
が出力されると、パルス発生装置11は、定常時の駆動
電圧よりも高いパルス電圧を発生させるためのパルス信
号を発生する。このときMPX13は、パルス発生装置
11からのパルス信号を出力するように切り換わってい
るので、第3図に示すようにMPX13からパルス信号
が出力される。このパルス信号は、増幅器15a、15
bによりパルス駆動電圧に増幅され、超音波モータMの
駆動電極1b−R,1b−Lに印加される。
At time 10, when the activation signal is output from the activation signal generation device 10, the pulse generation device 11 generates a pulse signal for generating a pulse voltage higher than the drive voltage during normal operation. At this time, the MPX 13 has been switched to output the pulse signal from the pulse generator 11, so the pulse signal is output from the MPX 13 as shown in FIG. This pulse signal is transmitted to the amplifiers 15a and 15.
b is amplified into a pulse drive voltage and applied to the drive electrodes 1b-R and 1b-L of the ultrasonic motor M.

この起動時のパルス駆動電圧は定常時の能動電圧よりも
高く、シかも周波数が高いパルス電圧であり、このよう
な高い振動エネルギを与えられた超音波モータMは、振
動逸脱状態に陥ることなく。
This pulse drive voltage at the time of startup is higher than the active voltage at steady state, and is also a pulse voltage with a high frequency, and the ultrasonic motor M given such high vibration energy does not fall into a state of vibration deviation. .

安定に起動する。また、起動前に振動逸脱状態で停止し
ていても、二のような高いパルス電圧を印加する二とに
より容易に振動逸脱状態を脱して起動する。
Starts stably. Furthermore, even if the device is stopped in a vibration deviation state before starting, it can easily escape from the vibration deviation state and start by applying a high pulse voltage such as 2.

超音波モータMの起動後の時刻t1で、MPX13は高
周波発生装置12からの高周波信号を出力するように切
り換えるので、第3図に示すようにMPX13から高周
波信号が出力されるにの高周波信号は、移相器14およ
び増幅器15a。
At time t1 after starting the ultrasonic motor M, the MPX 13 switches to output the high frequency signal from the high frequency generator 12, so as shown in FIG. , phase shifter 14 and amplifier 15a.

15bにより互いに+π/2または一π/2だけ位相の
異る一対の駆動電圧に増幅され、超音波モータMの駆動
電極1b−R,1b−Lに印加される。すなわち、超音
波モータMは、定常時の駆動電圧および駆動周波数が印
加されて回転を継続する。
15b, the amplified voltages are amplified into a pair of drive voltages having phases different from each other by +π/2 or 1π/2, and are applied to the drive electrodes 1b-R and 1b-L of the ultrasonic motor M. That is, the ultrasonic motor M continues to rotate with the drive voltage and drive frequency applied during normal operation.

以上説明したように、超音波モータの起動時に定常時の
駆動電圧よりも高い電圧のパルス電圧を印加するように
したので、起動時に振動逸脱状態に陥ることなく確実に
起動でき、駆動制御装置の信頼性が向上する。また、起
動前L:振動逸脱状態にあってもその状態を脱して容易
に起動できる。
As explained above, when starting the ultrasonic motor, a pulse voltage higher than the normal drive voltage is applied, so that the ultrasonic motor can be started reliably without falling into a vibration deviation state, and the drive control device Improved reliability. In addition, even if the device is in the pre-start L: vibration deviation state, it can be easily started after exiting the state.

なお、上記実施例では回転形の超音波モータを例にあげ
て説明したが1本発明はリニア型の超音波モータにも適
用できる。
Although the above embodiments have been described using a rotary type ultrasonic motor as an example, the present invention can also be applied to a linear type ultrasonic motor.

また、上記実施例では、超音波モータMの起動時にパル
ス発生装置11のパルス信号と高周波信号発生装置12
の高周波信号とをMPX13により切り換えたが、パル
ス発生装置11に移相器および増幅器を設けてパルス駆
動電圧を生成するとともに、高周波信号発生器12にも
移相器および増幅器を設けて高周波駆動電圧を生成し、
周駆動電圧を切換器により切り換えて超音波モータに印
加してもよい。
Further, in the above embodiment, when the ultrasonic motor M is started, the pulse signal of the pulse generator 11 and the high frequency signal generator 12 are
The high frequency signal of generate,
The circumferential drive voltage may be switched by a switch and applied to the ultrasonic motor.

以上の実施例の構成において、高周波信号発生装置12
が高周波電圧発生手段を、パルス発生装置11がパルス
電圧発生手段を、起動信号発生装置10が起動信号発生
手段を、マルチプレクサ13が切換手段をそれぞれ構成
する。
In the configuration of the above embodiment, the high frequency signal generator 12
constitutes a high frequency voltage generating means, the pulse generating device 11 constitutes a pulse voltage generating means, the starting signal generating device 10 constitutes a starting signal generating means, and the multiplexer 13 constitutes a switching means.

G0発明の詳細 な説明したように本発明によれば、超音波モータの起動
時に定常時の高周波電圧よりも高い電圧のパルス電圧を
印加するようにしたので、超音波モータは起動時に振動
逸脱状態に陥ることなく確実に起動され、能動制御装置
の信頼性が向上する。また、起動前に振動逸脱状態にあ
ってもその状態を脱して容易に起動できる。
G0 Detailed Description of the Invention According to the present invention, when starting the ultrasonic motor, a pulse voltage higher than the high frequency voltage in the steady state is applied, so that the ultrasonic motor is in a vibration deviation state when starting. This improves the reliability of the active control device. Furthermore, even if the device is in a vibration deviation state before starting, it can be easily started after getting out of that state.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の全体構成を示すブロック図
、第2図は超音波モータの断面図、第3図は超音波モー
タ起動時の装置各部の出力信号の変化を示すタイムチャ
ート、第4図は従来装置による超音波モータ起動時の駆
動電圧の変化を示すタイムチャートである。 10:起動信号発生装置 11:パルス発生装置12:
高周波信号発生装置  13:MPX14:移相器  
 15a、15b:増幅器M:超音波モータ
Fig. 1 is a block diagram showing the overall configuration of an embodiment of the present invention, Fig. 2 is a sectional view of the ultrasonic motor, and Fig. 3 is a time chart showing changes in output signals of various parts of the device when the ultrasonic motor is started. , FIG. 4 is a time chart showing changes in drive voltage when starting an ultrasonic motor using a conventional device. 10: Starting signal generator 11: Pulse generator 12:
High frequency signal generator 13: MPX14: Phase shifter
15a, 15b: Amplifier M: Ultrasonic motor

Claims (1)

【特許請求の範囲】 超音波モータに印加する高周波電圧を発生する高周波電
圧発生手段を備えた超音波モータの駆動制御装置におい
て、 前記高周波数電圧よりも高い電圧のパルス電圧を発生す
るパルス電圧発生手段と、 前記超音波モータ起動時に所定時間だけ起動信号を出力
する起動信号発生手段と、 この起動信号発生手段から前記起動信号が出力されたと
き、前記超音波モータに印加する電圧を、前記高周波電
圧発生手段の前記高周波電圧から前記パルス電圧発生手
段の前記パルス電圧に切り換える切換手段とを備えるこ
とを特徴とする超音波モータの駆動制御装置。
[Scope of Claims] An ultrasonic motor drive control device comprising a high-frequency voltage generating means for generating a high-frequency voltage to be applied to the ultrasonic motor, comprising: a pulse voltage generator for generating a pulse voltage higher than the high-frequency voltage; means for outputting a starting signal for a predetermined period of time when starting the ultrasonic motor; and when the starting signal is output from the starting signal generating means, the voltage to be applied to the ultrasonic motor is set to the high frequency voltage. A drive control device for an ultrasonic motor, comprising: switching means for switching from the high frequency voltage of the voltage generating means to the pulse voltage of the pulse voltage generating means.
JP2308303A 1990-11-14 1990-11-14 Drive control device for vibration actuator Expired - Fee Related JP2760148B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2308303A JP2760148B2 (en) 1990-11-14 1990-11-14 Drive control device for vibration actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2308303A JP2760148B2 (en) 1990-11-14 1990-11-14 Drive control device for vibration actuator

Publications (2)

Publication Number Publication Date
JPH04183282A true JPH04183282A (en) 1992-06-30
JP2760148B2 JP2760148B2 (en) 1998-05-28

Family

ID=17979430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2308303A Expired - Fee Related JP2760148B2 (en) 1990-11-14 1990-11-14 Drive control device for vibration actuator

Country Status (1)

Country Link
JP (1) JP2760148B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010220297A (en) * 2009-03-13 2010-09-30 Seiko Epson Corp Piezoelectric driving device, piezoelectric driving method, and electronic apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010220297A (en) * 2009-03-13 2010-09-30 Seiko Epson Corp Piezoelectric driving device, piezoelectric driving method, and electronic apparatus

Also Published As

Publication number Publication date
JP2760148B2 (en) 1998-05-28

Similar Documents

Publication Publication Date Title
JPH0467784A (en) Driving method of ultrasonic motor
JP6112835B2 (en) Drive device and drive control method for vibration actuator
JP2012016262A (en) Control method and drive apparatus for oscillation motor
JP2952815B2 (en) Ultrasonic motor device
US6573636B1 (en) Ultrasonic motor having single booster circuit and electronic device with ultrasonic motor
JP2737420B2 (en) Ultrasonic motor drive system
US5210454A (en) Driving circuit for an ultrasonic motor
JPH03270678A (en) Driver for ultrasonic wave motor
JPH04183282A (en) Drive controller for ultrasonic motor
JP2952807B2 (en) Ultrasonic motor and electronic equipment with ultrasonic motor
JP3209545B2 (en) Ultrasonic drive
JP2002112564A (en) Actuator drive
JP3476949B2 (en) Ultrasonic actuator
JP6279119B2 (en) Drive device and drive control method for vibration actuator
JPH01148080A (en) Controller for ultrasonic motor
JP2003284365A (en) Ultrasonic motor unit and electronic equipment with ultrasonic motor
JP2667811B2 (en) Vibration type motor
JP2018068112A (en) Driving device and driving control method for vibration type actuator
JP3065177B2 (en) Ultrasonic motor
JPH11225488A (en) Vibration actuator driver
JP3618930B2 (en) Drive control device for vibration wave motor and device using vibration wave motor as drive source
JPH0286874A (en) Driving circuit for ultrasonic wave vibrator
JPH0759235B2 (en) Drive circuit for ultrasonic calculus breaking
JP3262185B2 (en) Ultrasonic motor controller
JPH02303379A (en) Ultrasonic motor

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees