JPH04179622A - Conveyor device - Google Patents

Abstract

PURPOSE:To prevent any substance from contacting an after-treatment surface of a mount sheet and prevent contamination on a work placed thereon, by causing a rear surface of the mount sheet, having mounted thereon the work conveyed from an upstream side, to be attracted, thereby causing the mount sheet to be inverted and causing the front surface of the work to be directed downwards, and by causing the mount sheet to be moved downstream. CONSTITUTION:A conveyor device 9 is forwardly moved by operation of a rodless cylinder 14, and a glass sheet 2A on a mount portion 13 is transferred onto an attracting plate 43 of a second conveyor device 41, and a glass sheet 2A on an attracting plate 12 is transferred onto a temporary mount portion 1O. The attracting plate 43 is inverted by operating a movable plate 47 through operation of a rodless cylinder and thereby operating a rack 48 and a pinion 49. Subsequently, the glass sheet 2A is guided by a linear guide 52 through operation of a rodless cylinder 51 with its joining surface being directed downwards as shown to be advanced and carried into a glass sheet assembler 53.

Description

DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a conveying device for conveying a workpiece from an upstream device to a downstream device.

(B) Conventional Technology This kind of conventional technology is disclosed in Japanese Patent Application Laid-open No. 175307/1983. This conveys the workpiece to the downstream side using a feeding means such as a round belt.

However, when the workpiece has to be transported with the surface to be subjected to post-processing facing down, the round belt comes into contact with that surface, which may cause dust to adhere to it.

(c) Problems to be Solved by the Invention Accordingly, the present invention is to transport the work to the downstream side without contacting the surface to be subjected to post-processing.

(d) Means for Solving the Problems Therefore, the present invention provides a transport device that transports a workpiece from an upstream device to a downstream device, on which the back side of the workpiece sent from the upstream device is placed. A mounting plate for adsorption, a rotating device for inverting the mounting plate so that the surface of the workpiece faces downward, and a moving device for moving the mounting plate downstream in an inverted state by the rotating device. It has been established that

(f) Function With the above configuration, the mounting plate on which the back surface of the workpiece is placed by suction is rotated by the rotating device, so that the surface of the workpiece faces downward. In this state, the mounting plate can be completely moved downstream by the moving device.

Example) An example of the present invention will be described in detail below with reference to the drawings.

(1) is a magazine in which upper glass plates (2A) as workpieces are stored in stacks, and the upper glass plates (2A) are placed in grooves (3) and (4) with their joint surfaces facing up as shown in FIG. ) is supported. In addition, by joining the upper glass plate (2A) and the lower glass plate (2B) described later, the LCD (LI
This is the liquid crystal injection container before configuring the QUID CRYSTAL DISPLAY.

(5) is an elevator mechanism that moves the magazine (1) up and down to prepare the upper glass plate (2A) to the unloading position, and the mounting table (8) is moved by rotation of the ball screw (7) by the drive motor (6). The magazine (1) is moved up and down through it.

(9) is a suction plate (1) having a plurality of suction holes (11) communicating with a vacuum source (not shown) for taking out the upper glass plate (2A) in the magazine (1) and transporting it to the temporary mounting section (10>).
2) and the suction plate (2) of a second conveyance device (41), which will be described later, for the upper glass plate (2A) placed on the temporary placement section (10).
43). The first conveyance device (9) is driven by a rodless cylinder (14) to provide guides (Is), (1
6) to move back and forth.

(17) is a pole bush (1g
).

(It is a vertical movement cylinder that moves up and down guided by 19〉.
The suction plate (12) that has entered the magazine (1) by moving upward lifts the upper glass plate (2A), and
The mounting section (13) lifts the upper glass plate (2A) placed on the temporary mounting section (10).

(20) is a drive motor for swinging the suction plate (12) in the left-right direction as shown in FIG. That is, the rotation of the motor (20) is transmitted to the cam (25) through the coupling (24) via the pulleys (21), (22) and the belt (23). And the cam (25)
The cam follower (26) is rotated based on the rotation of the cam follower (26), thereby swinging via the linear guide (27).

Therefore, due to the swinging of the suction plate (12), the upper glass plate (2)
A) is also rocked. The cam (25) and cam follower (26) have one end attached to the suction plate (12) as shown in FIG.
) is attached to a mounting plate (28) that protrudes from the back side of the base plate (28), and the other end of the spring (31) is attached to a mounting plate (30) that protrudes from the base (29). Being forced.

(32) is a stopper device that restricts the swing range of the suction plate (12) of the transport device (9) by the drive motor (20), and the stopper device (32) that restricts the movement in the left and right direction in FIG. 33), (34), and the conveying device (
The stoppers (33), (3), which have been adjusted to a predetermined length, are mounted on the stopper plate (35) erected on the base (29) of (9).
4) are brought into contact with each other to restrict further swinging.

(36) is moved by the suction plate (1) by the stopper device (32).
2) is a spring for releasing the cam follower (26) from the rotation of the cam (25) by the drive motor (20), which allows the rotation to be further detected when the rotation is restricted midway. That is, one end of the spring (36) is attached to a mounting plate (37) protruding from the back surface of the suction plate (12), and the other end is attached to the movable part of the linear guide (38) to which the cam follower (26) is attached. (39) is attached to a mounting portion (40) protruding from the linear guide (39), and when the cam (25) further rotates, the cam follower (26) resists the biasing force of the spring (36) ) is moved in the direction away from the cam 25) to prevent damage due to overload.

(41) is the placement part (13) of the first conveyance device (9)
A second conveying device that carries the upper glass plate (2A) from
The glass plate (2A) is placed on a suction plate (43) having a plurality of suction holes (42) connected to a vacuum source (not shown).

(44) is the upper glass plate (2A) on the suction plate (43)
This is a positioning section that performs positioning.

(45) is a reversing device for reversing the suction plate (43) with the upper glass plate (2A) adsorbed, and the rodless cylinder (46) is driven by the rodless cylinder (46).
) is rotated by the pinion (49) meshed with the rack (48) provided on the movable part (47) of the shaft (
50).

(51) is a rodless cylinder that moves the suction plate (43) back and forth in an inverted state, and the moving beam is guided by near guides (52) and (52).

(53) is a suction plate (43) of the second conveyance device (41).
) and remove the upper glass plate (2A) from the upper glass plate (2A).
2A) is transported from another transport device (not shown).
A positioning unit (
55), the lower glass plate (2
This is a glass assembling machine that overlaps and joins B) with an adhesive applied to the joint surfaces in advance.

(56) is an upper glass plate (2A) that enters from above the gap (43A) of the suction plate (43) and is adsorbed by the suction plate (43) and is inverted so that its joint surface is on the lower side. This is a temporary attachment device that adsorbs. As shown in FIG. 30, the temporary mounting device (56) is attached to the ball screw (59) by the rotation of the drive motor (57), which allows the ball screw (59) to rotate through the coupling (58). A linear guide (61) via the fully fitted movable part (60),
It is guided by (61) and moved up and down.

(62) shown in FIG. 23 is a damage detection device for detecting damage to the coupling (58), which is installed on the light shielding plate (63) attached to the motor shaft side of the drive motor (57) and the ball screw (59) side. The coupling (58) is damaged by a control device (not shown) by detecting the notches (65) and (66) of the attached light shielding plate (64) with microphoto sensors (67) and (68), respectively. It can be detected whether or not. In addition, the light shielding plates (63), (6
As shown in FIGS. 24 and 25, the notches (65) and (66) in 4) are better than the notches (65) and (66).
) has been set to a higher value.

(69) is the coupling (
58) is detected, a command from the control device suppresses the ball screw (59), which continues to rotate due to the weight of the temporary attachment device (56), etc., and prevents the temporary attachment device (56), etc. from falling. It is an electromagnetic brake.

(70) in Figure 26 is the temporary attachment! This suction device has a suction mechanism (not shown) for picking up the upper glass plate (2A) from (56), and is attached below the movable plate (71). The movable plate (71) moves up and down in conjunction with the vertical movement of the movable part (60) by the ball screw (59) with its upper part (72) fully abutting the upper part (73) of the movable part (60). be moved.

(74) and (75) in FIG. 31 indicate the moving plate (71).
) is a pair of regulating devices that regulate the movement of the cylinder (76
), (77) causes the locking parts (7g), (
79) locks and releases both ends of the moving plate (71). Therefore, when the restriction of the movable plate (71) by the restriction devices (74) and (75) is released, the temporary attachment device (56) is lowered by the rotation of the ball screw (59), and the movement is The plate (71) is the guide (80),
(81), (82), (not shown) and is lowered, so the main suction device (70) is also lowered.

The operation will be explained below.

The first conveying device (9) positioned at the standby position as shown in FIGS. 1 and 2 is guided by the guides (Is) and (16) by the rodless cylinder (14) to the elevator mechanism (5 ) to keep the ready magazine in place (
1), and the suction plate (
12) enters the magazine (1). The conveyance device (9) is guided by the ball bushes (18) and (19) by the vertical movement cylinder (17) and moved upward, and the magazine (9) is moved upward as shown in FIGS. 1
) is supported. At this time, the upper glass plate (2A) is not suctioned by the suction plate (12).

Next, the drive motor (20) drives the pulley (21),
The cam (25) is rotated via the belt (22) and the belt (23), and the cam follower (26) is rotated by the rotation, and the suction plate (12) of the conveyance device (9) is oscillated by a predetermined amount. I can move.

As shown in Figure 35, the width of the upper glass plate (2A) is (L)
Assuming that the distance between both grooves (3) and (4) is (L+α), for example, as shown in FIG. Move the plate (2A) by (α) and insert the upper glass plate (2A) into the groove (3).
), then move it by (α/2) in the opposite direction (toward the left groove (4)) as shown in FIG.

This allows the side surface of the upper glass plate (2A) to be grooved (3),
(a), the upper glass plate (2A) can be sucked with the suction plate (12) while magazine
), but when pulling out the groove (3), (
4) The side surface of the upper glass plate (2A) comes into contact with the upper glass plate (2A) and the upper glass plate (
2A) Powder, dust, etc. will not adhere to the surface.

Then, as shown in FIG. 12, the first conveying device (9) is moved forward by the rodless cylinder (14) with the upper glass plate (2A) adsorbed on the suction plate (12), and after this movement, it is moved up and down. By the downward movement of the moving cylinder (17), the upper glass plate (2A) is transferred to the temporary mounting section (10) as shown in FIGS. 12 and 13. Again, the conveying device (9) (1) direction, and as described above, the upper glass plate (2A) is supported by the suction plate (12) by the upward movement of the vertical movement cylinder (17).
As shown in Fig. 5, the upper glass plate (2A>) placed on the temporary mounting section (10) is supported by the mounting section (13) raised by the cylinder (17).

After centering the upper glass plate (2A) as described above, the transport device (9) is moved forward by the rodless cylinder (14), and after this movement, the cylinder (17
), as shown in FIGS. 16 and 17, the upper glass plate (2A) on the placing part (13) is received by the suction plate (43) of the second conveying device (41). At the same time, the upper glass plate (2A) on the suction plate (12) is placed on the temporary mounting part (10).
43), the upper glass plate (2A) is not suctioned, and after being positioned by the positioning part (44), the suction plate <43>
It can be absorbed completely.

The suction plate (43) is connected to the rodless cylinder (46).
) moves the movable part (47), and the movable part (47)
As the rack (48) provided above is moved, the binion (49) is rotated, and the shaft (50) is rotated, so that the suction plate (43) can be inverted as shown in FIG.

The adsorption plate (43) is inverted, and with the joint surface of the upper glass plate (2A) facing down, it is guided by the linear guide (52) and moved forward by the rodless cylinder (51). , as shown in FIGS. 21, 22, and 26, it enters below the temporary mounting device (56) of the glass assembly machine (53).

Next, the ball screw (59) is driven by the drive motor (57).
Due to the rotation of the movable part (60), the linear guide (61)
, (61), the temporary attachment device (56) is moved downward, and as shown in FIG. Department (
43A) to attract the upper glass plate (2A). Furthermore, after the temporary mounting device (56) is moved down as shown in FIG. 28, the rodless cylinder (56) is moved down as shown in FIG.
51), the suction plate (43) is moved backward.

And a ball screw (59) driven by a drive motor (57)
The temporary attachment device (5) is attached via the movable part (60) by the reverse rotation of the
6) is moved upward to a predetermined position as shown in FIG. 32, and then the upper glass plate (2A) is sucked by the main suction device (70).

Then, the upper part (73) of the movable part (60) is connected to the movable plate (
The movable plate (71) is raised while contacting the upper part (72) of the control device (71).
4), (75), each cylinder (76), (77
), the restriction of the movable plate (71) by the locking parts (78) and (79) is released. Thereafter, the rotation of the ball screw (59) by the drive motor (57) causes the upper part (72) of the movable plate (71>
3), the suction device (70) is lowered to the point shown in FIGS. 33 to 35F! ! As shown in J, the upper glass plate (2A) that has been completely suctioned by the suction device (70) and the glass plate (2B) on the suction table (54)
The two pieces come into contact and the joint is completed.

By the way, if the coupling (58) is damaged when the ball screw (59) is rotated by the aforementioned drive motor (57), the following operation is performed. That is, the notch (65) of the light shielding plate (63) attached to the motor shaft side and the notch (65) of the light shielding plate (64) attached to the ball screw (59) side.
66) respectively microphotosensors (67) and (6
8), and the control device detects the notches (65) and (66) of the light shielding plates (63) and (64) based on the detection result.
) micro 7t sensor (67), (68)
(7) ON, OF 〉 micro photo sensor (68
) is detected, the drive motor (57) is stopped, the electromagnetic brake (69) is activated, and the temporary mounting device (
Ball screw (59) that continues to rotate due to its own weight, such as 56)
to prevent temporary attachment devices, etc. from falling. Note that FIG. 37 is an example of a normal state.

(G) Effects of the Invention According to the present invention, the workpiece can be transported to the downstream side without contacting the surface to be subjected to post-processing, and dust does not adhere to the workpiece.

[Brief explanation of the drawing]

1 and 2 are a front view and a plan view of the semiconductor assembly equipment, FIGS. 3 and 4 are diagrams showing the state in which the first conveying device takes out the first upper glass plate, and FIGS. Figure 6 is the first
Partial plan view and front view of the conveying device, FIGS. 7 to 11
The figure shows the swinging operation of the first conveying device, Figures 12 and 13 are views with the upper glass plate placed on the temporary placement section, and Figures 14
Figures 15 and 15 show the state in which the second upper glass plate is taken out, Figures 16 and 17 show the state in which the upper glass plate is transferred to the second conveying device, and Figure 18. to 20th
The figure shows the reversing operation of the second conveyor, Figures 21, 22, and 26 show the inverted conveyor of apprentice 2 entering the glass assembly machine, and Figure 23 shows damage. FIGS. 24 and 25 are diagrams showing the shape of the light shielding plate, FIGS. 27 to 29 are diagrams showing the temporary mounting operation of the upper glass plate by the temporary mounting device, and FIGS. 30 to 32 are diagrams showing the detection device. 33 to 35 are diagrams showing the state in which the upper glass plate is properly suctioned by the present suction device, and FIGS. 33 to 35 are diagrams showing the bonded state of the upper glass plate,
Figure 36 is a diagram showing the width of the upper glass plate and the distance between both grooves;
FIG. 37 and FIG. 38 are diagrams showing detection results by the damage detection device. (2A)...Top glass plate, (41)...Second conveyance device, (43)...Adsorption plate, (45)...Reversing device, (46), (51)... Rodless cylinder, (47)...Movable part, (48)...Rack, (49)...Pinion, (50)...Shaft.

Claims (1)

[Claims] (1) In a conveyance device that conveys a workpiece from an upstream device to a downstream device, there is a mounting plate on which the back side of the workpiece sent from the upstream device is placed and adsorbed, and the mounting plate. A conveyance device comprising: a rotation device that inverts the workpiece so that the surface of the workpiece faces downward; and a movement device that moves the mounting plate downstream while the workpiece is inverted by the rotation device.