JPH04176533A - Temporary fixing device for plate like body - Google Patents

Abstract

PURPOSE:To surely fix a plate like body on to a suction table even in case of a leak being generated, by forming plural independent suction ports on the upper face of the suction table, also, connecting a vacuum pump individually to this suction port. CONSTITUTION:Plural independent suction ports 2-4 are formed on the upper face of a suction table 1. These each suction ports 2-4 show circular shapes and are formed so as to become in a normal circular shape as the whole, but they are independent respectively. Also, vacuum pumps 5-7 are individually connected to each suction ports 2-4. Consequently, an optical disk 14 is surely fixed with its suction onto the suction table 1 by other suction ports 3, 4 even in the case of the suction force due to the suction port 2 being dissipated with a leak being caused on one vacuum pump 5.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a temporary fixing device for a plate-shaped body. For more details,
The present invention relates to a temporary fixing device for a plate-like body, which is used to temporarily fix the plate-like body on a suction table when attaching another part to the plate-like body or processing the plate-like body further.

[Conventional technology]

Conventionally, as a device of this type, as shown in the schematic plan view of FIG. 4, there has been known a device in which a suction port B is provided on the top surface of a suction table A, and a vacuum pump D is connected to this via a solenoid valve C. There is. This device has one suction port B, and one vacuum pump D connected to it connects the suction table A.
A plate-like object placed on the top surface of the device is adsorbed and temporarily fixed.

[Problem to be solved by the invention]

The device described in the above-mentioned conventional technology has the problem that if a leak occurs in any one place, such as the suction surface, the vacuum pump, or their connection system, the plate cannot be fixed by suction. was.

The present invention was invented in view of the above-mentioned problems in the conventional art.The multiple suction ports are independent, and by individually connecting a vacuum pump to each suction port, leakage can occur. To provide a temporary fixing device for a plate-like body, which can reliably fix the plate-like body on a suction table even when the plate-like body is moved.

Means for Solving Problems] The device for temporarily fixing a plate-like object according to the present invention temporarily fixes a plate-like object on a suction table, and has a plurality of independent suction ports on the top surface of the suction table. It is formed. Moreover, a vacuum pump is individually connected to this suction port.

[Action of the invention]

In the plate-shaped body temporary fixing device according to the present invention, the plate-shaped body placed on the upper surface of the suction table is individually sucked by the plurality of suction ports and the vacuum pump.

That is, since suction is performed in multiple systems, even if a leak occurs in one system, the suction force can be maintained by the other systems.

〔Example〕

Next, embodiments of the present invention will be described in detail with reference to the attached FIGS. 1 to 3.

Figure 1 is a schematic plan view, Figure 2 is a schematic cross-sectional view of the state in use,
FIGS. 3A and 3B are plan views showing another embodiment of the suction table.

The temporary fixing device for a plate-like body according to the present invention is for temporarily fixing a plate-like body on a suction table, and as shown in FIG.
Multiple independent suction ports on the top surface of suction table l? , 3 and 4 are formed. Each of these suction ports 2.3 and 4 has an arcuate shape, and is formed so as to form a plane main gate shape as a whole, but each of them is independent. That is, suction ports 2 and 3
, suction ports 3 and 4, and suction ports 4 and 2 are separate and not in communication. Further, vacuum pumps 5.6 and 7 are individually connected to each suction port 2.3 and 4, respectively. In other words, a vacuum pump 5 is connected to the suction port 2, another vacuum pump 6 is connected to the suction port 3, and another vacuum pump 7 is connected to the suction port 4 through the solenoid valves 8.9.10. 11.12.
13, and each suction port 2, 3, 4 produces an adsorption effect.

However, the shape and number of suction ports 2.3.4, the number of vacuum pumps 5.6.7, etc. are not limited to those illustrated.

FIG. 3 shows another embodiment of the suction table, and (A) shows one in which six suction ports are formed. Although not shown, in the embodiment (a), suction ports 2 and 2, suction ports 3 and 3, and suction ports 4 and 4, which are located at opposite positions, are formed by communicating with each other, and a separate vacuum pump is connected to each. Good luck again (b)
1 shows an example in which a large number of relatively small suction ports are formed. In this case, it is also possible to select every second suction port into groups and connect a separate vacuum pump to each group.

This configuration is more preferable because it minimizes the decrease in adsorption force when leakage occurs.

The present invention as described above is used when, for example, a hub 15 is attached to the center of an optical disk 14 as shown in FIG. First, the optical disc 14 is placed on the top surface of the suction table l.
and set the hub 15. At this time, the hub 15 operates the zero-order vacuum pumps 5, 6, and 7 fixed at the origin position by the center bin 16, sucks and fixes the optical disk 14 to the suction table l, detects the group of optical disks, and detects the eccentricity. The suction table 1 is moved so that the amount becomes zero. If the optical disc 14 is securely fixed to the suction table 1 at this time, alignment of the optical disc 14 has been performed. That is, this position is the mounting position of the hub 15, but this positioning cannot be performed unless the optical disc 14 is securely fixed on the suction table 1. However, in the present invention, for example, one vacuum pump 5
Even if a leak occurs and the suction force of the suction port 2 is lost, the optical DIG 14 is reliably suctioned and fixed on the suction table 1 by the other suction ports 3 and 4.

〔Effect of the invention〕

As described above, according to the present invention, the plate-shaped object placed on the top surface of the suction table is individually suctioned by the plurality of suction ports and the vacuum pump, so even if a leak occurs at any location, the suction force is is held, and the plate-shaped body can be reliably suctioned and fixed.

[Brief explanation of drawings]

Figure 81 is a schematic plan view, Figure 2 is a schematic sectional view of the state in use,
FIGS. 3A and 3B are plan views showing another embodiment of the suction table, and FIG. 4 is a schematic plan view of a conventional suction table. In the figure, 1 is a suction table 2. 3 and 4 are suction ports 5. 6 and 7 are a vacuum pump 14 is a plate-shaped body.

Claims (1)

[Claims] A temporary fixing device for a plate-like body that temporarily fixes a plate-like body on a suction table, which comprises forming a plurality of independent suction ports on the top surface of the suction table, and each vacuum pump is individually connected to each suction port. A device for temporarily fixing a plate-shaped body, characterized in that the device is connected to the plate.