JPH04174349A - X-rays topography device - Google Patents

Abstract

PURPOSE:To enable a transmission placement, reflection placement, and section topography to be measured highly accurately by changing a gap between a first slit member which is provided at an upstream side of a sample and the sample regarding a direction where X rays advance. CONSTITUTION:In the case of measurement of transmission placement and section topography, a first slit member 3 is fitted to a tip of a cylinder 18 which first and second collimator cylinders 17 and 18 are connected. Also, in the case of measurement of reflection placement, the member 3 is fitted to a tip of the cylinder 17 while the cylinder 18 is removed from the cylinder 17. For example, in the case of the measurement of transmission placement, a single crystal sample 2 is set to a position closest to the member 3 which is fitted to the tip of the cylinder 18 while it is fixed on a scanning stand 11. Then, a 2theta rotary stand 7 is rotated at a proper angle and an X-rays detector 23 is fixed at an angle position corresponding to an X-rays diffraction surface of the sample 2. Then, the sample 2 is fixed to a position where the X-rays strength reaches the maximum by a omega rotary stand 8. Then, while X rays are emitted, the scanning stand 11 is moved and a diffraction X-rays image of the sample 2 is taken on a film 5.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an X-ray method for photographing a diffraction X-ray image on a film by irradiating the film with X-rays diffracted by a sample, that is, diffraction X-rays. Relating to a topography device.

In particular, it relates to a so-called Lang camera that can scan and move a sample and film to obtain a diffraction X-ray image over a wide range.

[Prior Art] A diffraction X-ray image taken on a film using an X-ray topography device is mainly visually observed when inspecting lattice defects and lattice distortion of a single crystal sample. .

Generally, an X-ray topography device, as shown in Fig. 6,
A first slit member 3 limits the line width of the X-rays emitted from the X-ray source 1 and allows the X-rays to enter the sample 2;
It has a second slit member 4 that limits the line width of the line, and a film 5 disposed downstream of the second slit member 4 in the X-ray traveling direction. The arrangement of the above-mentioned elements shown in FIG. 6 is set to a transmission arrangement in which X-rays are incident on the front surface of the sample 2 and diffracted X-rays are extracted from the back surface. Apart from this arrangement, as shown in FIG. 7, it is also possible to adopt a reflection arrangement in which X-rays are incident on the surface of the sample 2 and diffracted X-rays are extracted from the same surface.

The transmission arrangement (FIG. 6) is mainly applied when observing a lattice defect image inside a crystal. On the other hand, the reflection arrangement (7th
(Figure) is mainly used to observe lattice defects only in the surface layer of a crystal.

In X-ray topography equipment, especially Lang cameras,
The sample 2 and film 5 are placed on a scanning table (not shown), and during X-ray imaging, by moving the scanning table, the sample 2 and film 5 are scanned in parallel in the A-A direction. There is. This allows for a wide range of diffraction
Line images can be taken.

Incidentally, in recent years, the diameter of single crystal samples for which lI is determined has become larger. Therefore, large diameter, e.g. 11005a
When measuring a sample of about 200 am, the following problems arise, especially when measuring in the reflective configuration (FIG. 7). That is, if.

If the distance between the first slit member 3 and the sample 2 is set small, when the sample 2 is scanned in the A-A direction,
This means that the sample 2 and the first slit member 3 collide with each other. In order to avoid such collisions, in this type of conventional X-ray topography apparatus, the distance between the first slit member 3 and the sample 2 is set such that the distance between the first slit member 3 and the sample 2 is such that even when the sample 2 is scanned and moved, the two They were made large enough that they wouldn't collide.

[Problems to be Solved by the Invention] - As measurements performed using an X-ray topography apparatus, in addition to the measurements in the above-mentioned transmission arrangement and reflection arrangement, a measurement form called section topography measurement is known.

As shown in FIG. 8, this section topography measurement uses the elements of the first slit member 3, sample 2, second slit member 4, and film 5, which are the same as the above-mentioned arrangement forms. , and the arrangement itself is almost the same as the transmission arrangement shown in FIG. The difference is that the slit width Sw of the first slit member 3 is 1.
The width is set to be extremely narrow, about 0 μm, and the sample 2 and film 5 are fixed in position without scanning.

In this section topography measurement, the X-rays are limited to an extremely narrow line width by the first slit member 3,
The X-rays pass through the sample 2. At that time, X-rays diffracted inside the sample pass through the second slit member 4 and are imaged on the film 5. According to this section topography measurement, it is possible to observe the defect distribution in the cross-sectional direction of the sample.

@1 Considering the case where a large-diameter sample is measured in a reflection configuration (Fig. 7) like a conventional X-ray topography device,
It has been found that if the distance between the slit 3 and the sample 2 is set large, good measurement results cannot be obtained in the above-mentioned section topography measurement. The reason is that the eight X-rays emitted from the first slit member 3 toward the sample 2 have a certain spread angle α, and therefore, if the distance between the slit and the sample is set large, the This is because the irradiation area W of the X-rays that irradiate 2 becomes too large, making it impossible to obtain highly accurate cross-sectional X-ray diffraction information.

The present invention has been made in view of the above-mentioned problems in conventional X-ray topography devices, and it is an object of the present invention to obtain clear diffraction X-ray images in measurements in all forms of transmission arrangement, reflection arrangement, and section topography. X that can be done
The purpose is to provide a line topography device.

[Means for Solving the Problems] In order to achieve the above object, the X-ray topography apparatus according to the present invention includes a first slit that limits the line width of the X-rays emitted from the X-ray source and allows the X-rays to enter the sample. A member, a second slit member that limits the line width of X-rays diffracted by the sample, a film disposed downstream of the second slit member with respect to the X-ray traveling direction, and the sample and film are scanned in parallel. an X-ray topography apparatus having a scanning drive means for rotating the sample, and an ω rotary table capable of rotating the sample to change the angle of incidence of the X-rays on the sample, wherein the first slit member and the sample The first step to relatively change the spacing between
It is characterized by providing a slit position changing means.

[Operation] The measurement mode by the X-ray topography device is the transmission arrangement (W
6), reflection arrangement (Fig. 7), and section topography (Fig. 8), the first slit member (3) and The distance (L) between the sample (2) and the sample (2) is changed. Specifically, in the case of a reflective arrangement, the distance (L) between the slit and the sample is set large. This prevents collision between the scanningly moving sample (2) and the IIl slit member (3).

On the other hand, in the case of section topograph measurement, the distance (L) between the slit and the sample is set small. This makes the X-ray irradiation @(W) on the sample (2) very narrow, making it possible to perform measurements with high precision, that is, high resolution.

In the case of a transmission arrangement, the slit/sample amount interval (L) may be wide or narrow.

[Embodiment] FIG. 1 shows a plan view of an embodiment of the X-ray topography apparatus according to the present invention, and FIG. 2 shows a side view of the X-ray topography apparatus.

In FIG. 1, an X-ray tube 16 is fixedly provided on the right side of the table 6, and an X-ray source 1 is provided within the X-ray tube 16. From this X-ray source 1, so-called point-shaped X-rays R are extracted. A first collimator tube 17 is fixedly provided on the table 6 on the left side of the X-ray tube 16. Further, a second collimator tube 18 is connected to the left end of the first collimator tube 17 . Second collimator tube 18
can be removed from the first collimator tube 17 by loosening the bolts 2o. Second
The first slit member 3 is removably attached to the left end of the collimator tube 18 with a bolt 19 . This first slit member 3 has a bolt 2 attached to the left end of the first collimator tube 17 with the second collimator tube 18 removed.
0, it can also be detachably attached.

As shown in FIG. 3, the first slit member 3 has a slit 21 formed substantially in the center thereof and extending in the vertical direction. The line width of the X-rays emitted from the X-ray source 1 is limited by the slit 21.

A disk-shaped 20-turn table 7 is provided on the table 6 located below the first collimator tube 17 and the second collimator tube 18, and further on the 20-turn table 7 is a disk-shaped ω-turn table 8. is provided. The ω rotary table 8 is driven by a 0-rotation shaft 9 (FIG. 2) and can rotate around a sample axis φ extending perpendicular to the table 6. Further, the 20-turn table 7 is driven by a 20-turn wheel 10 (FIG. 2) and can similarly rotate around the sample axis φ. In this case, the 20-turn table 7 and the ω-turn table 8 can be rotated independently of each other.

A scanning table 11 is arranged on the ω rotary table 8 . This scanning table 11 is driven by a pulse motor 12 (FIG. 1) fixed on the ω rotary table 8, and the guide rail 1
3 in the direction of arrow A-A (FIG. 1). On this scanning table 11, a single crystal sample 2 and a film 5 are fixed. Therefore, one scanning stage 11 is
When moving in the A direction, the sample 2 and film 5 also move in parallel in the same direction.

The sample 2 is fixed on the scanning table 11, and the sample 2 is placed on the second
It is set at a position as close as possible to the first slit member 3 attached to the tip of the collimator tube 18.

20 On the turntable 7, in addition to the ω turntable 8, there is a cylindrical support 1.
4 is fixedly arranged facing upward.

At the upper end of this support 14, an arm 15 extending in the horizontal direction is provided.
is fixed, and the second slit member 4 is attached to the tip of the arm 15. This second slit member 4 also has a slit extending in the vertical direction similar to the first slit member 3 shown in FIG. 3. Also, the second
The slit member 4 is disposed between the sample 2 and the film 5, and is held in a fixed position even when the sample 2 and the film 5 are moved in parallel due to the movement of the scanning table 11.

A protrusion 22 is provided at the left end of the 20-turn table 7, and an X-ray detector 23 is fixedly disposed on the protrusion 22.

In the X-ray topography apparatus having the above configuration, each component is arranged with measurement in a transmission arrangement in mind. The measurement method using the transmission arrangement will be explained below.

First, the 2θ rotary table 7 is rotated by the 20 rotary shaft 10 (Fig. 2).
is rotated by an appropriate angle to set the angular position of the X-ray detector 23 with respect to the single crystal sample 2 to an angular position corresponding to the X-ray diffraction plane specific to the sample 2 to be measured, and then Fixed to. Next, the zero rotation axis 9 (Fig. 2)
Rotate the ω rotary table 8 by an appropriate angle by
The ω rotary table 8 and therefore the sample 2 are fixed at an angular position where the X-ray intensity measured by the ray detector 23 is maximum.

This completes the initial settings.

After that, while continuing to emit X-rays from the X-ray source 1, the scanning table 11 is moved in the A-A direction (Fig. 1) by the pulse motor 12.
Move parallel to . As a result, a diffraction X-ray image of the interior of the sample 2 over a wide range is photographed on the surface of the film 5. This is the topographic measurement using the transmission configuration shown in FIG.

When performing section topography measurement (Fig. 8) using this device, the following processing is performed.

That is, the first collimator tube 17 and the second collimator tube 18 are left in the above state, and the first slit member 3 is changed to one having a narrower slit width Sv (see FIG. 3), for example, a slit width of 10 μm. Replace with something similar. Then, the sample 2 is irradiated with X-rays without moving the scanning table 11, that is, with the sample 2 fixed. As a result, as shown in FIG. 8, a section topographic image, that is, a diffraction X-ray image of the new inner surface of the sample 2 is photographed on the film 5.

In addition to the anti-H111 method, when the present apparatus is used to perform topographic measurement using a reflection configuration, the following processing is performed.

First, the second collimator tube 18 is removed from the first collimator tube 17, and the first slit member 3 is attached to the sample-side tip of the first collimator tube 17. In this case, the slit 21 (FIG. 3) of the first slit member 3 attached to the first collimator tube 17 has a wider slit width than the slit used in the section topography measurement described above. .

As described above, when the second collimator tube 18 is removed, the distance between the first slit member 3 attached to the tip of the first collimator tube 17 and the sample 2 is greatly expanded. Therefore, sample 2. When the second slit member 4 and the film 5 are rotated into the reflective configuration shown in FIG. 7, the inconvenience that these elements collide with the first slit member 3 is eliminated.

In addition, in the reflection arrangement measurement, the sample 2 and the film 5 are
- It is scanned and moved in the A direction (FIG. 7). In that case, according to this embodiment, since the second collimator cylinder 18 is removed and the distance between the first slit member 3 and the sample 2 is sufficiently large, the sample 2 or the film 5
This eliminates the inconvenience of collision with the first slit member 3.

As described above, according to this embodiment, the second collimator tube 1
By removing 8, it becomes possible to perform topographic measurement using a reflection arrangement. - On the other hand, by using the second collimator tube 18, the first slit 3 can be placed very close to the sample 2, and as a result, a section topographic image with high precision, that is, good resolution can be obtained. .

In the above description, it is assumed that topographic measurement is performed using the transmission configuration (FIG. 6) using the second collimator tube 18. However, regarding the measurement using the transmission arrangement, the measurement can be performed with or without using the second collimator tube 18, that is, with the first slit member 3 close to the sample 2 or with it away from the sample 2. Is possible.

Figure w4 shows another embodiment of the first slit position changing means, which is a mechanism for changing the distance between the first slit member 3 and the sample 2.

In this embodiment, a 312 collimator tube 18 is fitted onto the outer periphery of the first collimator tube 17, and the arrow B-
As shown by B-, the second collimator cylinder 18 can be relatively linearly moved in the axial direction of the first collimator cylinder 17. And IJ! The one-slit member 3 is always attached to the tip of the second collimator tube 18.

In this embodiment, when performing section topography measurement (Fig. 8), the second collimator cylinder 1 is
8 toward the sample 2, and the first slit member 3 is placed in a position extremely close to the sample 2. On the other hand, when performing measurement using the reflection arrangement (FIG. 7), the second collimator tube 18 is pushed in the B- direction, that is, in the direction of the J11 collimator tube 17, and the M1 slit member 3 is moved away from the sample 2. Thereby, the parallel scanning movement of the sample 2 and the film 5 is performed without any problem.

FIG. 5 shows yet another embodiment of the X-ray topography apparatus according to the present invention.

In this embodiment, the 20-turn table 7 is not directly installed on the table 6, but a rectangular base 2 when viewed from above.
4 on the table 6. On the other hand, the collimator tube 25 is different from the previous embodiment shown in FIG. 2 or FIG.

Its length is not changeable. Therefore, the position of the first slit member 3 remains unchanged.

The rear side surface of the base 24 is pressed against a linear guide rail 26 installed on the table 6. This base 24 is not fixed on the table 6, but is movable on the table 6 along the guide rail 26. This guide rail 26 is provided parallel to the axial direction of the collimator tube 25, and therefore the base 26 moves along the guide rail 26.
4 moves toward or away from the first slit member 3 attached to the left end of the collimator tube 25 (to the right in the figure) or away from the first slit member 3 (to the left in the figure). In this way, by displacing the position of the base 24 on which the sample 2 is placed, the distance between the sample 2 and the first slit member 3 is widened when measuring the reflection arrangement form (FIG. 7), and the distance between the sample 2 and the first slit member 3 is widened. ,
When measuring the section topography (FIG. 8), the distance between the two should be made as close as possible.

[Effects of the Invention] According to the present invention, in the X-ray topography apparatus, the distance between the first slit member disposed on the upstream side of the sample with respect to the X-ray traveling direction and the sample can be changed. It is now possible to perform each measurement of transmission arrangement, reflection arrangement, and section topography with high precision using a single device.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the X-ray topography apparatus according to the present invention, FIG. 2 is a side view of the embodiment, and FIG. 3 is a perspective view showing the main parts of the X-ray topography apparatus.
The figure is a plan view showing a modified embodiment of the first slit position changing means, FIG. 5 is a side view showing another embodiment of the X-ray topography apparatus according to the present invention, and FIG. Diagrammatic representation of an X-ray topography device, FIG. 7 is a diagrammatic representation of an X-ray topography device set in reflective configuration, I! FIG. 8 is a diagram schematically showing how section topography is measured by an X-ray topography device. 1... Xll source, 2... Sample, 3... First slit member. 4... Second slit member, 5-... Film, 8...
・ω rotating table, 11... scanning table, 12... pulse motor, 13... guide rail, 17... first collimator tube, 18... second collimator tube, 24... base ,
25... Collimator tube, 26... Guide rail second
Figure 3

Claims (4)

[Claims] (1) A first slit member that limits the line width of the X-rays emitted from the X-ray source and allows them to enter the sample; a second slit member that limits the line width of the X-rays diffracted by the sample; A film disposed downstream of the second slit member in terms of direction; a scanning drive means for scanning and moving the sample and the film in parallel; and rotating the sample to change the angle of incidence of X-rays on the sample. An X-ray topography apparatus having an ω rotary table capable of Line topography device. (2) The first slit position changing means is removably attached to a first collimator tube disposed in a fixed position between the X-ray source and the sample, and a sample-side tip of the first collimator tube. and a second collimator tube to be connected, and the first slit member is attached to either the tip of the first collimator tube or the tip of the second collimator connected to the first collimator. The X-ray topography apparatus according to claim 1, characterized in that: (3) The first slit position changing means includes a first collimator tube disposed in a fixed position between the X-ray source and the sample, and a first collimator tube arranged on the outer periphery of the first collimator. 2. The X-ray topography apparatus according to claim 1, further comprising: a second collimator tube that is provided so as to be relatively movable; and the first slit member is attached to the tip of the second collimator tube. . (4) The first slit position changing means includes a base on which the second slit member, the film, the scanning drive means, and the ω rotary table are placed, and a direction in which the base approaches or moves away from the first slit member. 2. The X-ray topography apparatus according to claim 1, further comprising a guide rail for guiding the X-ray topography apparatus to move to.