JPH0417351A - Lead-pin bend measurement device of flat-package type ic - Google Patents

Lead-pin bend measurement device of flat-package type ic

Info

Publication number
JPH0417351A
JPH0417351A JP12145790A JP12145790A JPH0417351A JP H0417351 A JPH0417351 A JP H0417351A JP 12145790 A JP12145790 A JP 12145790A JP 12145790 A JP12145790 A JP 12145790A JP H0417351 A JPH0417351 A JP H0417351A
Authority
JP
Japan
Prior art keywords
camera
lead pin
image processing
optical system
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12145790A
Other languages
Japanese (ja)
Other versions
JPH0682735B2 (en
Inventor
Chiyousuke Iwata
岩田 暢祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M I TECHNOL KK
Original Assignee
M I TECHNOL KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M I TECHNOL KK filed Critical M I TECHNOL KK
Priority to JP12145790A priority Critical patent/JPH0682735B2/en
Publication of JPH0417351A publication Critical patent/JPH0417351A/en
Publication of JPH0682735B2 publication Critical patent/JPH0682735B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To obtain a simple structure for measuring by image processing by capturing measurement points at different height with a camera at one time for a relative bending at a root part and a tip part in a gull wing type lead pin by providing each specific optical system and one camera, an image processing device, and an arithmetic operation output part. CONSTITUTION:The title item is a lead-pin bending measurement device of a flat-package type IC 8 which measures bending between a root part 81 and a tip part 82 in a gull wing type lead pin 80 of the flat-package type IC 8 and has one camera 3 which captures an optical system 2 including an objective lens 23 which is placed on a line L2 which is perpendicular to a segment L1 and image light at both measurement points 81a and 82a in the above which passes the optical system 2, an image processing device 4 which measures a distance in a lead pin width direction between both measurement points 81a and 82a which are captured by the camera 3, and an arithmetic operation output part 5 which outputs a distance a which is obtained by the image processing device 4.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はフラットパッケージ形ICのリードピンの曲が
りを測定する装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for measuring bending of lead pins of flat packaged ICs.

〔従来の技術〕[Conventional technology]

フラットパッケージ形ICのリードピンは、パッケージ
本体から横方向に延びたのち、上下いずれかの方向に屈
曲し、再び横方向に延びるいわゆるガルウィング形のも
の、パッケージ本体下面へまわり込んだJ形のもの等が
ある。
The lead pins of flat package ICs are so-called gull-wing type, which extend laterally from the package body, bend upward or downward, and then extend laterally again, and J-type, which wrap around to the bottom surface of the package body. There is.

これらリードピンは、ICパッケージを基板に正確に接
続するために、正規の位置、方向、間隔を保持していな
くてはならず、これらに狂いがあるものは不良品として
除かなければならない。
These lead pins must maintain regular positions, directions, and spacing in order to accurately connect the IC package to the board, and those with deviations in these must be rejected as defective products.

ガルウィング形リードピンを例にとると、根元部と先端
部間の曲がり、浮き、ねじれ、高さ異常、ピッチ異常、
長さの不揃いや折れ、数本が同方向へ斜めに延びたカニ
足等の異常が考えられる。
Taking a gullwing lead pin as an example, bending, floating, twisting, abnormal height, abnormal pitch between the root and tip,
Possible abnormalities include irregular lengths, broken legs, and crab legs where several legs extend diagonally in the same direction.

これらリードピンの異常発見は、工具顕微鏡による目視
検査、治工具による検査等により行われてきたが、ピン
数が増加しつつある最近では、カメラおよび画像処理装
置を利用した測定、検査が提案されるに至っている。
Detecting abnormalities in these lead pins has been done through visual inspection using a tool microscope, inspection using jigs, etc., but recently, as the number of pins has been increasing, measurement and inspection using cameras and image processing devices have been proposed. It has reached this point.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

画像処理による測定の場合、正確な測定を行うには、分
解能を上げるためにカメラからリードピンに至る光学系
の倍率を高倍率とし、測定点をしぼり込まなければなら
ないが、倍率を上げると焦点深度が十分とれなくなるの
で、例えばガルウィング形リードピンの根元部と先端部
の相対曲がりを測定する場合、これを対物レンズ−枚で
行うとすると、該レンズからの距離が異なる根元部の測
定点および先端部の測定点を、カメラを対物レンズから
それぞれ異なる距離に配置してとらえなくてはならない
In the case of measurement using image processing, in order to make accurate measurements, the optical system from the camera to the lead pin must have a high magnification to narrow down the measurement point in order to increase the resolution, but as the magnification increases, the depth of focus increases. For example, when measuring the relative bending of the root and tip of a gullwing lead pin, if this is done using an objective lens, the measurement point at the root and the tip at different distances from the lens may be measured. The measurement points must be captured by placing the camera at different distances from the objective lens.

従って測定をできるだけ短時間で行うために一度に二つ
の測定点をカメラでとらえようとすると、異なる位置に
配置した2台のカメラが必要となる。
Therefore, if two measurement points are to be captured at once by cameras in order to perform measurements in as short a time as possible, two cameras placed at different positions are required.

しかし、異なるカメラ位置といっても、両位置はそれほ
ど隔たっているわけではなく、しかもカメラの小形化に
は限界があるので、結局、一つの対物レンズに対する2
台のカメラ配置は困難となる。
However, even though the two camera positions are different, they are not that far apart, and there is a limit to the miniaturization of cameras, so in the end, two positions for one objective lens are used.
Camera placement on the stand will be difficult.

従って、それぞれが対物レンズを含む二つの光学系およ
び各光学系に対応するカメラを位置をずらせて配置する
ことが必要となり、その結果、測定装置全体が複雑化す
るとともにコスト高につくという問題がある。
Therefore, it is necessary to position two optical systems, each including an objective lens, and a camera corresponding to each optical system at different positions, which results in the problem of complicating the entire measuring device and increasing cost. be.

そこで本発明は、フラットパッケージ形ICのガルウィ
ング形リードピンにおける根元部と先端部の相対曲がり
を該根元部の測定点と先端部の測定点を一度にカメラで
とらえて画像処理により測定できる構造簡単な装置を提
供することを目的とする。
Therefore, the present invention has a simple structure in which the relative bending between the root and tip of a gullwing lead pin of a flat package IC can be measured by image processing by capturing the measurement point at the root and the measurement point at the tip at the same time. The purpose is to provide equipment.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は前記目的に従い、フラットパッケージ形ICの
ガルウィング形リードピンにおける根元部と先端部間の
曲がりを測定するフラットパッケージ形ICのリードピ
ン曲がり測定装置であって、所定測定位置に配置される
前記ICのり−ドピンにおける根元部測定点と先端部測
定点を結ぶ線分の中点を通り、該線分に垂直な線上に配
置した対物レンズを含む光学系および該光学系を通過す
る前記両測定点の画像光をとらえる一台のカメラと、前
記カメラでとらえた両測定点間のり−ドビン幅方向距離
を計測する画像処理装置と、該画像処理装置で求めた距
離を出力する演算出力部とを備えたことを特徴とする測
定装置を提供するものである。
In accordance with the above-mentioned object, the present invention provides a lead pin bending measuring device for a flat package IC, which measures the bend between the root and tip of a gull wing lead pin of a flat package IC. - an optical system including an objective lens that passes through the midpoint of a line segment connecting the root measurement point and the tip measurement point in the doping pin and is placed on a line perpendicular to the line segment; It includes one camera that captures image light, an image processing device that measures the distance in the dobbin width direction between both measurement points captured by the camera, and a calculation output unit that outputs the distance determined by the image processing device. The present invention provides a measuring device characterized by the following.

〔作 用〕[For production]

本発明測定装置によると、所定測定位置に配置したIC
のリードピンにおける根元部測定点および先端部測定点
は、一つの光学系を介して一台のカメラで同時にとらえ
られ、画像処理装置において該両測定点間のリードピン
幅方向距離が計測され、この計測値は演算出力部から出
力される。該出力値が予め定めた許容範囲を超えている
とリードピン不良と判断される。
According to the measuring device of the present invention, an IC placed at a predetermined measuring position
The root measurement point and the tip measurement point of the lead pin are simultaneously captured by one camera through one optical system, and the distance in the width direction of the lead pin between the two measurement points is measured by an image processing device. The value is output from the calculation output section. If the output value exceeds a predetermined allowable range, it is determined that the lead pin is defective.

〔実 施 例〕〔Example〕

以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図は1実施例の概略構成を示しており、第2図はリ
ードピンに対する光学系の配置状態を示し、第3図はデ
イスプレィ上にあられれたリードピン根元部および先端
部の画像を示している。
Fig. 1 shows the schematic configuration of one embodiment, Fig. 2 shows the arrangement of the optical system with respect to the lead pin, and Fig. 3 shows images of the base and tip of the lead pin on the display. There is.

この実施例装置は、フラットパッケージ形IC8の測定
対象リードピン80を所定測定位置に配置するためのテ
ーブル1を含んでおり、テーブル1は図示しない駆動手
段により第1の方向およびこれに直角な第2の方向に水
平面内で移動できる。
This embodiment device includes a table 1 for arranging lead pins 80 to be measured of a flat package IC 8 at a predetermined measurement position. Can move in the horizontal plane in the direction of .

IC8はトレイ9に数個、所定間隔で入れられ、該トレ
イはテーブル1上の所定位置に配置される。
Several ICs 8 are placed in a tray 9 at predetermined intervals, and the tray is placed at a predetermined position on the table 1.

かくして、トレイ9中のICの被測定リードピン80は
テーブル1の移動により所定の測定位置に配置される。
Thus, the lead pins 80 to be measured of the IC in the tray 9 are placed at a predetermined measurement position by the movement of the table 1.

リードピン測定位置上方には光学系2が設けられている
。光学系2は、下側筒体21、これに出入自在の上側筒
体22および下側筒体下端に設けた対物レンズ23を備
えている。
An optical system 2 is provided above the lead pin measurement position. The optical system 2 includes a lower cylinder 21, an upper cylinder 22 that can be moved in and out of the lower cylinder, and an objective lens 23 provided at the lower end of the lower cylinder.

上側筒体22の上端にはCCDカメラ3が固定されてい
る。
A CCD camera 3 is fixed to the upper end of the upper cylinder 22.

光学系2およびカメラ3の中心線L2は、第2図に示す
ように、被測定リードピン80における根元部81の測
定点81aと先端部82の測定点82aを結ぶ線分L1
の中点Mを通り、該線分に垂直な線であり、また、上側
筒体22およびカメラ3は、図示しないう・ツク・ピニ
オン機構等を利用した駆動手段により昇降できる。従っ
て、対物レンズ23下方の測定位置に配置されるICの
リードピン80の根元部測定点81aおよび先端部測定
点82aの双方に一度にカメラ焦点が合わされる。
As shown in FIG. 2, the center line L2 of the optical system 2 and the camera 3 is a line segment L1 connecting the measurement point 81a of the root portion 81 and the measurement point 82a of the tip portion 82 of the lead pin 80 to be measured.
This is a line that passes through the midpoint M of and is perpendicular to the line segment, and the upper cylinder 22 and the camera 3 can be raised and lowered by a driving means that utilizes a hook-and-pinion mechanism (not shown) or the like. Therefore, the camera is focused on both the root measurement point 81a and the tip measurement point 82a of the IC lead pin 80 located at the measurement position below the objective lens 23 at the same time.

カメラ3は画像処理装置4に接続され、該画像処理装置
は演算出力部5に接続されている。画像処理装置4には
、被測定リードピン80の根元部81および先端部82
の双方を第3図に示すように同時に表示するデイスプレ
ィ6も接続されて(、sる。
The camera 3 is connected to an image processing device 4, which in turn is connected to an arithmetic output section 5. The image processing device 4 includes a root portion 81 and a tip portion 82 of a lead pin 80 to be measured.
A display 6 for simultaneously displaying both images is also connected as shown in FIG.

演算出力部5にはプリンタ等の記録装置7および(また
は)図示しないデイスプレィが接続される。
A recording device 7 such as a printer and/or a display (not shown) are connected to the calculation output section 5.

画像処理装置4は、カメラ3でとらえたリードピン根元
部測定点81aおよびリードピン先端部測定点82aの
間のり−ドビン幅方向距離aを計測し、出力するように
構成されている。
The image processing device 4 is configured to measure and output the distance a in the width direction between the lead pin base measurement point 81a and the lead pin tip measurement point 82a captured by the camera 3.

演算出力部5は、画像処理装置5からの入力に応じ、距
離aを記録装置7および(または)図示しないデイスプ
レィに出力するように構成されている。
The calculation output unit 5 is configured to output the distance a to the recording device 7 and/or a display (not shown) in response to an input from the image processing device 5.

従って、被測定IC8はトレイ9に入れられ、テーブル
1上の所定位置に載置され、該テーブルの移動により該
ICの被測定リードピン80が測定位置に配置される。
Therefore, the IC 8 to be measured is placed in the tray 9 and placed at a predetermined position on the table 1, and as the table is moved, the lead pins 80 to be measured of the IC are placed at the measurement position.

一つのリードピンの測定が終了すると次のリードピンが
同測定位置に配置される。
When the measurement of one lead pin is completed, the next lead pin is placed at the same measurement position.

測定位置上のリードピン80は、その根元部81および
先端部82の双方が同時に光学系2を介してカメラ3に
とらえられ、該カメラはそれらの画像信号を画像処理装
置4へ入力する。
Both the root portion 81 and the tip portion 82 of the lead pin 80 at the measurement position are simultaneously captured by the camera 3 via the optical system 2, and the camera inputs their image signals to the image processing device 4.

画像処理装置4はリードピン根元部測定点81aとリー
ドピン先端部測定点82aの間の距離aを計測してこれ
を演算出力部5へ入力する。
The image processing device 4 measures the distance a between the lead pin root measurement point 81 a and the lead pin tip measurement point 82 a and inputs this to the calculation output section 5 .

演算出力部5は距離aを出力し、記録装置7がこれを記
録し、同時に(または)図示しないデイスプレィがこれ
を表示する。
The calculation output unit 5 outputs the distance a, the recording device 7 records this, and at the same time (or) a display (not shown) displays this.

距離aが予め定めた許容範囲を超えると、被測定TC8
は不良リードピンを有するものとして除かれる。
When the distance a exceeds the predetermined tolerance range, the measured TC8
are excluded as having defective lead pins.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、フラットパッケージ形I
Cのリードピン曲がり測定装置であって、フラットパッ
ケージ形ICのガルウィング形リードピンにおける根元
部と先端部の相対面がりを該根元部の測定点と先端部の
測定点を一つの光学系を介して1台のカメラで一度にと
らえて画像処理により測定できる構造簡単な測定装置を
提供することができる。
As explained above, the present invention is a flat package type I
This is a lead pin bending measurement device of C, which measures the relative surface curvature of the root and tip of a gullwing lead pin of a flat package IC by measuring the measurement point of the root and the measurement point of the tip through one optical system. It is possible to provide a measuring device with a simple structure that can capture images at once with a camera and perform measurements through image processing.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の一実施例を示すもので、第1図は全体の
概略構成図、第2図はり−ドピンに対する光学系および
カメラの配置状態説明図、第3図はリードピンのデイス
プレィ画像図である。 1・・・テーブル 2・・・光学系 23・・・対物レンズ 3・・・カメラ 4・・・画像処理装置 5・・・演算出力部 出願   人  株式会社   エム、アイ・テクノ■
ンーげっ 一〜CVJr0寸〔
The drawings show one embodiment of the present invention, and FIG. 1 is a schematic diagram of the overall configuration, FIG. 2 is an explanatory diagram of the arrangement of the optical system and camera with respect to the beam and dowel, and FIG. 3 is a display image of the lead pin. be. 1...Table 2...Optical system 23...Objective lens 3...Camera 4...Image processing device 5...Arithmetic output unit Applicant Person: M, I-Techno Co., Ltd.■
N-get-ichi~CVJr0 sun〔

Claims (1)

【特許請求の範囲】[Claims] (1)フラットパッケージ形ICのガルウィング形リー
ドピンにおける根元部と先端部間の曲がりを測定するフ
ラットパッケージ形ICのリードピン曲がり測定装置で
あって、所定測定位置に配置される前記ICのリードピ
ンにおける根元部測定点と先端部測定点を結ぶ線分の中
点を通り、該線分に垂直な線上に配置した対物レンズを
含む光学系および該光学系を通過する前記両測定点の画
像光をとらえる一台のカメラと、前記カメラでとらえた
両測定点間のリードピン幅方向距離を計測する画像処理
装置と、該画像処理装置で求めた距離を出力する演算出
力部とを備えたことを特徴とする測定装置。
(1) A lead pin bending measuring device for a flat package IC that measures the bend between the root and tip of a gull wing lead pin of a flat package IC, the root part of the lead pin of the IC being placed at a predetermined measurement position. an optical system that passes through the midpoint of a line segment connecting the measurement point and the tip measurement point and includes an objective lens placed on a line perpendicular to the line segment; The present invention is characterized by comprising a camera on the stand, an image processing device that measures the distance in the width direction of the lead pin between both measurement points captured by the camera, and an arithmetic output unit that outputs the distance determined by the image processing device. measuring device.
JP12145790A 1990-05-10 1990-05-10 Flat package type IC lead pin bending measuring device Expired - Lifetime JPH0682735B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12145790A JPH0682735B2 (en) 1990-05-10 1990-05-10 Flat package type IC lead pin bending measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12145790A JPH0682735B2 (en) 1990-05-10 1990-05-10 Flat package type IC lead pin bending measuring device

Publications (2)

Publication Number Publication Date
JPH0417351A true JPH0417351A (en) 1992-01-22
JPH0682735B2 JPH0682735B2 (en) 1994-10-19

Family

ID=14811610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12145790A Expired - Lifetime JPH0682735B2 (en) 1990-05-10 1990-05-10 Flat package type IC lead pin bending measuring device

Country Status (1)

Country Link
JP (1) JPH0682735B2 (en)

Also Published As

Publication number Publication date
JPH0682735B2 (en) 1994-10-19

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