JPH04166250A - Centrifugal dehydrating/drying device - Google Patents
Centrifugal dehydrating/drying deviceInfo
- Publication number
- JPH04166250A JPH04166250A JP29118090A JP29118090A JPH04166250A JP H04166250 A JPH04166250 A JP H04166250A JP 29118090 A JP29118090 A JP 29118090A JP 29118090 A JP29118090 A JP 29118090A JP H04166250 A JPH04166250 A JP H04166250A
- Authority
- JP
- Japan
- Prior art keywords
- carrier case
- weight
- rotation
- wafer
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims abstract description 12
- 235000012431 wafers Nutrition 0.000 claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 6
- 230000018044 dehydration Effects 0.000 claims description 8
- 238000006297 dehydration reaction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は遠心脱水乾燥装置に間し、特に回転駆動系に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a centrifugal dewatering and drying apparatus, and more particularly to a rotary drive system.
従来の遠心脱水乾燥装置は次のような構造になっていた
。即ち第３図に示すように、外槽１０の内部に置かれた
回転槽９にはキャリアケース収納部３が取り付けられて
いる。１は回転槽９の上蓋である。また回転槽９の底部
は、駆動装置８の動力を伝える回転軸７と連結されてい
る。Conventional centrifugal dehydration drying equipment had the following structure. That is, as shown in FIG. 3, a carrier case storage section 3 is attached to a rotary tank 9 placed inside the outer tank 10. 1 is the upper lid of the rotating tank 9. Further, the bottom of the rotating tank 9 is connected to a rotating shaft 7 that transmits the power of the drive device 8.
次に動作について説明すると、回転軸７と連結している
回転槽９は、駆動装置８の力によって回転し始める。す
ると、ウェハーの入ったキャリアケース収納部３は、回
転槽９に取り付けられているため、回転槽９の回転によ
りウェハーに遠心力が加わり、ウェハーに付着した水が
はじき飛ばされるようになっている。Next, the operation will be described. The rotating tank 9 connected to the rotating shaft 7 starts to rotate by the force of the driving device 8. Then, since the carrier case storage part 3 containing the wafer is attached to the rotating tank 9, centrifugal force is applied to the wafer by rotation of the rotating tank 9, and water adhering to the wafer is repelled.
従来の遠心脱水乾燥装置の構造では、回転中心から対称
となる２つのキャリアケース収納部の片方にキャリアケ
ースを収納し、回転させた際に発生する遠心力に釣り合
いが取れず、回転中心軸がぶれてしまい、振動が発生し
、キャリアケース内のウェハーが破損するという問題点
があった。また双方のキャリアケース収納部にキャリア
ケースを収納しても、キャリアケース内のウェハーの枚
数が同等でないと、前記の現象が発生し問題となってい
た。In the structure of conventional centrifugal dehydration drying equipment, the carrier case is stored in one of the two carrier case storage compartments that are symmetrical about the center of rotation, and the centrifugal force generated when rotating is not balanced, causing the center axis of rotation to There were problems in that the wafer would shake, generate vibrations, and damage the wafer inside the carrier case. Further, even if carrier cases are stored in both carrier case storage sections, if the number of wafers in the carrier cases is not equal, the above-mentioned phenomenon occurs, which poses a problem.
本発明の目的は、回転中心軸のぶれに伴なう振動でキャ
リアケース内のウェハーが破損することを防止した遠心
脱水乾燥装置を提供することにある。An object of the present invention is to provide a centrifugal dehydration/drying apparatus that prevents wafers in a carrier case from being damaged due to vibrations caused by vibrations of a central axis of rotation.
前記目的を達成するため、本発明に係る遠心脱水乾燥装
置においては、回転軸より対称な位置にあるキャリアケ
ース収納部に被乾燥物をセットし、回転による遠心力を
作用させて被乾燥物の乾燥を行う遠心脱水乾燥装置にお
いて、
キャリアケース収納部のキャリアケースの有無及びウェ
ハーの枚数を感知するセンサーと、回転軸にかかるトル
クに釣り合いがとれる位置に移動可能な重りと、
センサーからの信号を読み取り質量差を演算して重りの
位置餌整を行う機構とを有するものである。In order to achieve the above object, in the centrifugal dehydration drying apparatus according to the present invention, the material to be dried is set in a carrier case storage section located symmetrically with respect to the rotation axis, and centrifugal force due to rotation is applied to the material to be dried. Centrifugal dehydration drying equipment that performs drying uses a sensor that detects the presence or absence of a carrier case in the carrier case storage section and the number of wafers, a weight that can be moved to a position that balances the torque applied to the rotating shaft, and a signal from the sensor. It has a mechanism that calculates the read mass difference and adjusts the position of the weight.
回転中心から対称となる２つのキャリアケース収納部内
のキャリアケースの有無、及びウェハーの枚数をセンサ
ーによって感知し、回転軸に加わるモーメントが等しく
なるように、トルク調整重りの位置調整を行い、回転中
心軸のぶれを防止する。A sensor detects the presence or absence of a carrier case and the number of wafers in two carrier case storage compartments that are symmetrical about the rotation center, and adjusts the position of the torque adjustment weight so that the moment applied to the rotation axis is equal. Prevents shaft wobbling.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
（実施例１） 第１図は、本発明の実施例１を示す構成図である。(Example 1) FIG. 1 is a configuration diagram showing a first embodiment of the present invention.
図において、外槽１０の内部に設置された回転槽９には
、キャリアケース収納部３が回転中心から対称的な位置
に取付けられ、外槽１０の上ｌｉｔの内部には六ヤリア
ケースの有無、及びウェハーの枚数を感知する光センサ
−２が取り付けられている。In the figure, a carrier case storage part 3 is attached to a rotary tank 9 installed inside an outer tank 10 at a symmetrical position from the center of rotation, and inside the upper lit of the outer tank 10, whether or not there is a rear case is determined. And an optical sensor 2 for sensing the number of wafers is attached.
また回転槽９の底部は、駆動装置８の動力を伝える回転
軸７と連結されている。さらに回転槽９の下部には、ね
じ山が切られた重り移動軸４及びトルク調整重り５が取
り付けられてあり、その重り移動軸４の延長上にモータ
６が設！されており、モータ６は制御部６ａにより駆動
制御される。Further, the bottom of the rotating tank 9 is connected to a rotating shaft 7 that transmits the power of the drive device 8. Furthermore, a threaded weight moving shaft 4 and a torque adjustment weight 5 are attached to the lower part of the rotating tank 9, and a motor 6 is installed on the extension of the weight moving shaft 4! The motor 6 is driven and controlled by a control section 6a.
次に本発明の遠心脱水乾燥装！の動作過程について説明
すると、ウェハーが入ったキャリアケースを回転中心か
ら対称的な位置に取り付けられたキャリアケース収納部
３にそれぞれ収納する。この際、片方のキャリアケース
には、２０枚のウェハーを、他方のキャリアケースには
、１０枚のウェハーを入れることにする。ウェハーの直
径を６インチとすると、１枚当りの質量は約２５ｇであ
るので、双方のキャリアケース収納部３の質量差は２５
０ ｇとなる０回転中心からウェハーキャリアケース収
納部３！ｔでの距離を３０Ｃ１１とし、回転数を８００
ｒ。Next is the centrifugal dehydration drying device of the present invention! To explain the operation process, carrier cases containing wafers are respectively stored in carrier case storage sections 3 installed at symmetrical positions with respect to the center of rotation. At this time, 20 wafers are placed in one carrier case, and 10 wafers are placed in the other carrier case. Assuming that the diameter of the wafer is 6 inches, the mass of each wafer is approximately 25 g, so the difference in mass between both carrier case storage sections 3 is 25 g.
Wafer carrier case storage part 3 from the 0 rotation center which is 0 g! The distance at t is 30C11, and the number of rotations is 800.
r.
ｐ、１．、回転軸７からキャリアケース収納部３までの
高さを５０３とする０両ウェハーキャリアケース収納部
３の質量差が２５０ｇなので、回転軸７には２６．７π
２Ｎ−ｍの釣り合いの取れないトルクがかかることにな
る。そこで、制御部６ａは光センサ−２からの信号より
自動的に質量差１回転軸７にかかるトルク、及びそのト
ルクに釣り合いが取れるトルク調整重り５の位置を計算
し、モータ６により移動させる。この場合は回転軸７か
ら高さ２０１の位！に取り付けられた質量１ ｋｇのト
ルク調整重り５を、ウェハーが２０枚入ったキャリアケ
ース収納部３と反対方向に中心から１９（＋１１の位置
にモータ６で重り移動軸４を回転させて移動するので、
回転軸７にかかるトルクは釣り合いが取れて、振動は発
生しなくなる。p, 1. , the height from the rotating shaft 7 to the carrier case storing section 3 is 503. Since the mass difference between the two wafer carrier case storing sections 3 is 250 g, the rotating shaft 7 has a weight of 26.7π.
An unbalanced torque of 2 N-m will be applied. Therefore, the control unit 6a automatically calculates the torque applied to the rotation shaft 7 for one mass difference and the position of the torque adjustment weight 5 that can balance the torque based on the signal from the optical sensor 2, and moves the torque adjustment weight 5 using the motor 6. In this case, the height is 201 from the rotation axis 7! A torque adjustment weight 5 with a mass of 1 kg attached to the wafer is moved from the center to a position 19 (+11) by rotating the weight moving shaft 4 with the motor 6 in the opposite direction to the carrier case storage section 3 containing 20 wafers. So,
The torques applied to the rotating shaft 7 are balanced and no vibration occurs.
また、重り５の翻整機構を第２図に示すように変更して
もよい、すなわち、第２図では、重り移動軸４の片側に
スプリング１１が取り付けられており、更に重り移動軸
４の片側が回転槽９に差し込まれて固定されるようにな
っている。トルク＃整重り５を移動する際にはモータ６
が重り移動軸４を突き押し、回転可能な状態にする。そ
してトルク調整重り５を移動し終った際には、モータ６
を元の位置に戻す、モータ６が元の位置に戻ると、スプ
リング１１の復元力によって、重り移動軸４が再び回転
４ｗ９に差し込まれて固定されるようになる。この第２
図の機構では回転中のトルク調整重り５の位置が全くず
れることがないという利点を有する。Further, the adjustment mechanism for the weight 5 may be changed as shown in FIG. 2. In FIG. 2, a spring 11 is attached to one side of the weight moving shaft 4, One side is inserted into the rotating tank 9 and fixed. Torque #When moving the set weight 5, use the motor 6.
pushes the weight moving shaft 4 and makes it rotatable. When the torque adjustment weight 5 has been moved, the motor 6
When the motor 6 returns to its original position, the restoring force of the spring 11 causes the weight moving shaft 4 to be inserted into the rotation 4w9 again and fixed. This second
The mechanism shown in the figure has the advantage that the position of the torque adjustment weight 5 during rotation does not shift at all.
（実施例２） 第４図は、本発明の実施例２を示す構成図である。(Example 2) FIG. 4 is a configuration diagram showing a second embodiment of the present invention.
本実施例では、実施例１と異なり、トルク調整重り５を
移動させるのに、リニア誘導モータを使用している。ト
ルク調整重り５が移動する通路の下部にコイルが内蔵さ
れた固定子１２が設置されており、制御部６ａは、セン
サー２の出力に基いて固定子１２のコイルへの通電量を
制御し、磁束の作用によってトルク調整重り５が移動す
る仕組みになっている。In this embodiment, unlike the first embodiment, a linear induction motor is used to move the torque adjustment weight 5. A stator 12 with a built-in coil is installed at the bottom of the passage where the torque adjustment weight 5 moves, and the control unit 6a controls the amount of current applied to the coil of the stator 12 based on the output of the sensor 2. The mechanism is such that the torque adjustment weight 5 is moved by the action of magnetic flux.
実施例１では回転槽９が目標回転速度に達するまでの過
程では回転軸７にかかるトルクに釣り合いが取れず振動
が発生してしまう場合があるが、この実施例２では目標
回転速度以前での回転数に合わせて、トルク調整重り５
の位置を調節するため、回転数が安定する前においても
、回転軸７にかかるトルクは釣り合いがとれ、常時にお
いて振動が発生しないという利点を有する。In the first embodiment, during the process until the rotating tank 9 reaches the target rotation speed, the torque applied to the rotating shaft 7 may be unbalanced and vibration may occur, but in the second embodiment, vibrations may occur before the target rotation speed. Torque adjustment weight 5 according to the rotation speed
Since the position of the rotating shaft 7 is adjusted, the torque applied to the rotating shaft 7 is balanced even before the rotational speed becomes stable, and there is an advantage that vibration does not occur at all times.
以上説明したように本発明によれば、回転槽内に設置さ
れたトルク調整重りの回転中心からの距離を変化させる
ことにより、回転中心から対称となったキャリアケース
収納部の質量が異なる場合、従来の技術では１０％程度
生じたウェハー破損を、０．０１％以下におさえること
ができる。As explained above, according to the present invention, by changing the distance from the rotation center of the torque adjustment weight installed in the rotating tank, when the mass of the carrier case storage section symmetrical with respect to the rotation center differs, Wafer damage, which occurs in conventional techniques at about 10%, can be suppressed to 0.01% or less.
第１図、第２図は、本発明の実施例１を示す構成図、第
３図は、従来の例を示す構成図、第４図は、本発明の実
施例２を示す構成図である。
１・・・上ｌｌ ２・・・光センサ−３
・・・キャリアケース収納部
４・・・重り移動軸 ５・・・トルク調整重り６
・・・モータ ６ａ・・・制御部７・・・回
転軸 ８・・・駆動装置９・・・回転槽
１ｏ・・・外槽１１・・・スプリング
１２・・・固定子特許出願人 日本電気株式会社
代 理 人 弁理士 菅 野 中１霞・
ス1 and 2 are block diagrams showing a first embodiment of the present invention, FIG. 3 is a block diagram showing a conventional example, and FIG. 4 is a block diagram showing a second embodiment of the present invention. . 1...Upper ll 2...Light sensor-3
...Carrier case storage section 4...Weight moving axis 5...Torque adjustment weight 6
...Motor 6a...Control unit 7...Rotating shaft 8...Drive device 9...Rotating tank
1o...outer tank 11...spring
12... Stator patent applicant NEC Corporation Representative Patent attorney Nakaichi Kasumi Sugano
Claims (1)
部に被乾燥物をセットし、回転による遠心力を作用させ
て被乾燥物の乾燥を行う遠心脱水乾燥装置において、 キャリアケース収納部のキャリアケースの有無及びウェ
ハーの枚数を感知するセンサーと、回転軸にかかるトル
クに釣り合いがとれる位置に移動可能な重りと、 センサーからの信号を読み取り質量差を演算して重りの
位置調整を行う機構とを有することを特徴とする遠心脱
水乾燥装置。(1) In a centrifugal dehydration/drying device that sets the material to be dried in a carrier case storage section located symmetrically with respect to the rotation axis and dries the material by applying centrifugal force due to rotation, the carrier in the carrier case storage section A sensor that detects the presence or absence of a case and the number of wafers, a weight that can be moved to a position that balances the torque applied to the rotating shaft, and a mechanism that reads the signal from the sensor and calculates the mass difference to adjust the position of the weight. A centrifugal dehydration drying device characterized by having.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29118090A JP3182761B2 (en) | 1990-10-29 | 1990-10-29 | Centrifugal dehydration dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29118090A JP3182761B2 (en) | 1990-10-29 | 1990-10-29 | Centrifugal dehydration dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04166250A true JPH04166250A (en) | 1992-06-12 |
| JP3182761B2 JP3182761B2 (en) | 2001-07-03 |
Family
ID=17765498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29118090A Expired - Fee Related JP3182761B2 (en) | 1990-10-29 | 1990-10-29 | Centrifugal dehydration dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3182761B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106391329A (en) * | 2016-11-10 | 2017-02-15 | 中国农业大学 | Centrifugal drier for vegetable seeds |
| CN107073485A (en) * | 2014-11-11 | 2017-08-18 | Gea机械设备有限公司 | For the method for the operation for monitoring and/or adjusting centrifuge |
| CN108981294A (en) * | 2018-07-03 | 2018-12-11 | 金寨崟鑫电子科技有限公司 | Dehydration device after a kind of cleaning of diode |
| CN110542290A (en) * | 2019-08-15 | 2019-12-06 | 太湖县木子峰农业发展有限公司 | a drying device for agriculture and forestry plant seed |
| CN111430264A (en) * | 2019-08-16 | 2020-07-17 | 合肥晶合集成电路有限公司 | Semiconductor processing equipment and control method for loading wafer box thereof |
| CN114636288A (en) * | 2022-03-13 | 2022-06-17 | 江苏富邦纺织集团有限公司 | Energy-saving fabric air-dries equipment |
-
1990
- 1990-10-29 JP JP29118090A patent/JP3182761B2/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107073485A (en) * | 2014-11-11 | 2017-08-18 | Gea机械设备有限公司 | For the method for the operation for monitoring and/or adjusting centrifuge |
| CN107073485B (en) * | 2014-11-11 | 2020-04-24 | Gea机械设备有限公司 | Method for monitoring and/or regulating the operation of a centrifuge |
| US10639650B2 (en) | 2014-11-11 | 2020-05-05 | Gea Mechanical Equipment Gmbh | Method for monitoring and/or regulating the operation of a centrifuge |
| CN106391329A (en) * | 2016-11-10 | 2017-02-15 | 中国农业大学 | Centrifugal drier for vegetable seeds |
| CN108981294A (en) * | 2018-07-03 | 2018-12-11 | 金寨崟鑫电子科技有限公司 | Dehydration device after a kind of cleaning of diode |
| CN110542290A (en) * | 2019-08-15 | 2019-12-06 | 太湖县木子峰农业发展有限公司 | a drying device for agriculture and forestry plant seed |
| CN111430264A (en) * | 2019-08-16 | 2020-07-17 | 合肥晶合集成电路有限公司 | Semiconductor processing equipment and control method for loading wafer box thereof |
| CN114636288A (en) * | 2022-03-13 | 2022-06-17 | 江苏富邦纺织集团有限公司 | Energy-saving fabric air-dries equipment |
| CN114636288B (en) * | 2022-03-13 | 2023-05-26 | 江苏富邦纺织集团有限公司 | Energy-saving textile air drying equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3182761B2 (en) | 2001-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW316884B (en) | ||
| US5006774A (en) | Torque angle control system for controlling the torque angle of a permanent magnet synchronous motor | |
| PL305540A1 (en) | Method of determining weight of laundering machine charge | |
| GB2131977A (en) | Centrifuging devices | |
| JPH04166250A (en) | Centrifugal dehydrating/drying device | |
| JPH0436278B2 (en) | ||
| US6155134A (en) | Rotation control apparatus | |
| US5229670A (en) | Linear motor device having vibration reduction unit | |
| ATE189863T1 (en) | LABORATORY CENTRIFUGE WITH UNBALANCE SHUTOFF | |
| CA1098739A (en) | Gyro motor control | |
| JPH07114875B2 (en) | Unbalance correction device | |
| JPH0642531A (en) | Magnetic bearing device and control thereof | |
| WO1997036361B1 (en) | Active electromagnetic damping system for spindle motors | |
| US5239340A (en) | Linear motor device having vibration reduction unit | |
| US20190186066A1 (en) | Washing machine and control method of the same | |
| SU1009530A1 (en) | Vibration exciter | |
| JPH11179091A (en) | Vibration insulating device in drum type washing machine | |
| SU864478A1 (en) | Electric drive | |
| JPH0641853A (en) | Circular knitting machine for manufacturing socks, stockings etc. | |
| JPS6417226A (en) | Objective lens driving device | |
| JPH05208093A (en) | One-tub type washing machine | |
| SU567500A2 (en) | Driveless separatos | |
| SU1200147A1 (en) | Arrangement for measuring force of flexible material tensioning | |
| JPH05184101A (en) | Motor | |
| JPH11134786A (en) | Disk device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |