JPH0416098Y2 - - Google Patents
Info
- Publication number
- JPH0416098Y2 JPH0416098Y2 JP1986152293U JP15229386U JPH0416098Y2 JP H0416098 Y2 JPH0416098 Y2 JP H0416098Y2 JP 1986152293 U JP1986152293 U JP 1986152293U JP 15229386 U JP15229386 U JP 15229386U JP H0416098 Y2 JPH0416098 Y2 JP H0416098Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- ceiling
- peripheral wall
- clean room
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 238000000926 separation method Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 5
- 238000004080 punching Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152293U JPH0416098Y2 (US06262066-20010717-C00315.png) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152293U JPH0416098Y2 (US06262066-20010717-C00315.png) | 1986-10-02 | 1986-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6357449U JPS6357449U (US06262066-20010717-C00315.png) | 1988-04-16 |
| JPH0416098Y2 true JPH0416098Y2 (US06262066-20010717-C00315.png) | 1992-04-10 |
Family
ID=31070139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986152293U Expired JPH0416098Y2 (US06262066-20010717-C00315.png) | 1986-10-02 | 1986-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416098Y2 (US06262066-20010717-C00315.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61168735A (ja) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | クリ−ンル−ム |
-
1986
- 1986-10-02 JP JP1986152293U patent/JPH0416098Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61168735A (ja) * | 1985-01-21 | 1986-07-30 | Hitachi Ltd | クリ−ンル−ム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6357449U (US06262066-20010717-C00315.png) | 1988-04-16 |
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