JPH0415844U - - Google Patents

Info

Publication number
JPH0415844U
JPH0415844U JP5685790U JP5685790U JPH0415844U JP H0415844 U JPH0415844 U JP H0415844U JP 5685790 U JP5685790 U JP 5685790U JP 5685790 U JP5685790 U JP 5685790U JP H0415844 U JPH0415844 U JP H0415844U
Authority
JP
Japan
Prior art keywords
wafers
temperature measurement
groove
wafer
brought
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5685790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5685790U priority Critical patent/JPH0415844U/ja
Publication of JPH0415844U publication Critical patent/JPH0415844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5685790U 1990-05-30 1990-05-30 Pending JPH0415844U (US06174465-20010116-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5685790U JPH0415844U (US06174465-20010116-C00003.png) 1990-05-30 1990-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5685790U JPH0415844U (US06174465-20010116-C00003.png) 1990-05-30 1990-05-30

Publications (1)

Publication Number Publication Date
JPH0415844U true JPH0415844U (US06174465-20010116-C00003.png) 1992-02-07

Family

ID=31581058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5685790U Pending JPH0415844U (US06174465-20010116-C00003.png) 1990-05-30 1990-05-30

Country Status (1)

Country Link
JP (1) JPH0415844U (US06174465-20010116-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107104A (ja) * 2009-11-20 2011-06-02 Hugle Electronics Inc 温度検出装置
JP2011107103A (ja) * 2009-11-20 2011-06-02 Nikon Corp 温度検出装置、及び温度検出装置の製造方法
JP2013178279A (ja) * 2013-06-13 2013-09-09 Nikon Corp 温度検出装置、及び温度検出装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107104A (ja) * 2009-11-20 2011-06-02 Hugle Electronics Inc 温度検出装置
JP2011107103A (ja) * 2009-11-20 2011-06-02 Nikon Corp 温度検出装置、及び温度検出装置の製造方法
JP2013178279A (ja) * 2013-06-13 2013-09-09 Nikon Corp 温度検出装置、及び温度検出装置の製造方法

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