JPH04157467A - Photosensitive resin composition and photosensitive resin composition laminate using the same - Google Patents
Photosensitive resin composition and photosensitive resin composition laminate using the sameInfo
- Publication number
- JPH04157467A JPH04157467A JP28398690A JP28398690A JPH04157467A JP H04157467 A JPH04157467 A JP H04157467A JP 28398690 A JP28398690 A JP 28398690A JP 28398690 A JP28398690 A JP 28398690A JP H04157467 A JPH04157467 A JP H04157467A
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- photosensitive resin
- weight
- film
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 29
- 150000001875 compounds Chemical class 0.000 claims abstract description 20
- 229920000642 polymer Polymers 0.000 claims abstract description 12
- 229920001515 polyalkylene glycol Polymers 0.000 claims abstract description 11
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 6
- 239000001257 hydrogen Substances 0.000 claims abstract description 6
- 239000003999 initiator Substances 0.000 claims abstract description 6
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 5
- 239000002253 acid Substances 0.000 claims abstract description 4
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 4
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 4
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims abstract description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 3
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Chemical group BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052794 bromium Chemical group 0.000 claims abstract description 3
- 239000000460 chlorine Substances 0.000 claims abstract description 3
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 3
- 125000001309 chloro group Chemical group Cl* 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims description 5
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 abstract 2
- 239000005977 Ethylene Substances 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- -1 benzoin ethers Chemical class 0.000 description 16
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 12
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- 239000007864 aqueous solution Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 10
- 239000004698 Polyethylene Substances 0.000 description 9
- 229920000573 polyethylene Polymers 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 6
- 239000005020 polyethylene terephthalate Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 229920001451 polypropylene glycol Polymers 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 238000010526 radical polymerization reaction Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- GXSSZJREKCITAD-ONEGZZNKSA-N (e)-4-ethenoxy-4-oxobut-2-enoic acid Chemical compound OC(=O)\C=C\C(=O)OC=C GXSSZJREKCITAD-ONEGZZNKSA-N 0.000 description 1
- GXSSZJREKCITAD-ARJAWSKDSA-N (z)-4-ethenoxy-4-oxobut-2-enoic acid Chemical compound OC(=O)\C=C/C(=O)OC=C GXSSZJREKCITAD-ARJAWSKDSA-N 0.000 description 1
- WDCYWAQPCXBPJA-UHFFFAOYSA-N 1,3-dinitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC([N+]([O-])=O)=C1 WDCYWAQPCXBPJA-UHFFFAOYSA-N 0.000 description 1
- 150000005208 1,4-dihydroxybenzenes Chemical class 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- HSKPJQYAHCKJQC-UHFFFAOYSA-N 1-ethylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2CC HSKPJQYAHCKJQC-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- MDKSQNHUHMMKPP-UHFFFAOYSA-N 2,5-bis(4-methoxyphenyl)-4-phenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC(OC)=CC=2)N1 MDKSQNHUHMMKPP-UHFFFAOYSA-N 0.000 description 1
- CTWRMVAKUSJNBK-UHFFFAOYSA-N 2-(2,4-dimethoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 CTWRMVAKUSJNBK-UHFFFAOYSA-N 0.000 description 1
- NSWNXQGJAPQOID-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-diphenyl-1h-imidazole Chemical class ClC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 NSWNXQGJAPQOID-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- SNFCQJAJPFWBDJ-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 SNFCQJAJPFWBDJ-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- VTWDKFNVVLAELH-UHFFFAOYSA-N 2-methylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C=CC1=O VTWDKFNVVLAELH-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- GPNYZBKIGXGYNU-UHFFFAOYSA-N 2-tert-butyl-6-[(3-tert-butyl-5-ethyl-2-hydroxyphenyl)methyl]-4-ethylphenol Chemical compound CC(C)(C)C1=CC(CC)=CC(CC=2C(=C(C=C(CC)C=2)C(C)(C)C)O)=C1O GPNYZBKIGXGYNU-UHFFFAOYSA-N 0.000 description 1
- BKZXZGWHTRCFPX-UHFFFAOYSA-N 2-tert-butyl-6-methylphenol Chemical compound CC1=CC=CC(C(C)(C)C)=C1O BKZXZGWHTRCFPX-UHFFFAOYSA-N 0.000 description 1
- UZPSEGIMBGXXFB-UHFFFAOYSA-N 3-ethenoxycarbonylbut-3-enoic acid Chemical compound OC(=O)CC(=C)C(=O)OC=C UZPSEGIMBGXXFB-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical class CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- IHZXTIBMKNSJCJ-UHFFFAOYSA-N 3-{[(4-{[4-(dimethylamino)phenyl](4-{ethyl[(3-sulfophenyl)methyl]amino}phenyl)methylidene}cyclohexa-2,5-dien-1-ylidene)(ethyl)azaniumyl]methyl}benzene-1-sulfonate Chemical compound C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S(O)(=O)=O)=C1 IHZXTIBMKNSJCJ-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- ARNIZPSLPHFDED-UHFFFAOYSA-N [4-(dimethylamino)phenyl]-(4-methoxyphenyl)methanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 ARNIZPSLPHFDED-UHFFFAOYSA-N 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 229910000318 alkali metal phosphate Inorganic materials 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- JPIYZTWMUGTEHX-UHFFFAOYSA-N auramine O free base Chemical compound C1=CC(N(C)C)=CC=C1C(=N)C1=CC=C(N(C)C)C=C1 JPIYZTWMUGTEHX-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical class [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 1
- 229940117841 methacrylic acid copolymer Drugs 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
- 229940012189 methyl orange Drugs 0.000 description 1
- NZYCYASKVWSANA-UHFFFAOYSA-M new methylene blue Chemical compound [Cl-].CCNC1=C(C)C=C2N=C(C=C(C(NCC)=C3)C)C3=[S+]C2=C1 NZYCYASKVWSANA-UHFFFAOYSA-M 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- IWDCLRJOBJJRNH-UHFFFAOYSA-N para-hydroxytoluene Natural products CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 1
- 229940059574 pentaerithrityl Drugs 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- UGNWTBMOAKPKBL-UHFFFAOYSA-N tetrachloro-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(Cl)=C(Cl)C1=O UGNWTBMOAKPKBL-UHFFFAOYSA-N 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- MPCYPRXRVWZKGF-UHFFFAOYSA-J tetrasodium 5-amino-3-[[4-[4-[(8-amino-1-hydroxy-3,6-disulfonatonaphthalen-2-yl)diazenyl]phenyl]phenyl]diazenyl]-4-hydroxynaphthalene-2,7-disulfonate Chemical compound [Na+].[Na+].[Na+].[Na+].C1=C(S([O-])(=O)=O)C=C2C=C(S([O-])(=O)=O)C(N=NC3=CC=C(C=C3)C3=CC=C(C=C3)N=NC3=C(C=C4C=C(C=C(C4=C3O)N)S([O-])(=O)=O)S([O-])(=O)=O)=C(O)C2=C1N MPCYPRXRVWZKGF-UHFFFAOYSA-J 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、感光性樹脂組成物及びこれを用いた感光性樹
脂組成物積層体に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a photosensitive resin composition and a photosensitive resin composition laminate using the same.
印刷配線板の製造分野において、エツチング、めっき等
の工法に用いられるレジスト材料として感光性樹脂組成
物及び感光性樹脂組成物積層体(以下、感光性フィルム
と称する。)が広く用いられている。In the field of manufacturing printed wiring boards, photosensitive resin compositions and photosensitive resin composition laminates (hereinafter referred to as photosensitive films) are widely used as resist materials used in methods such as etching and plating.
感光性樹脂組成物としては、未露光部をアルカリ水溶液
により除去(現像)されるアルカリ現像型と、有機溶剤
により除去される溶剤現像型の両者が主に知られている
。As photosensitive resin compositions, both an alkali-developable type in which unexposed areas are removed (developed) with an alkaline aqueous solution and a solvent-developable type in which the unexposed areas are removed by an organic solvent are known.
アルカリ現像型樹脂組成物を用いる感光性積層体を使用
するに際しては、まず感光性積層体から保護フィルムを
取り除いて、予め約40〜70℃に加熱(予熱処理)し
た印刷配線板用基板(以下基板と称する)に、感光層が
接するようにロールにより加熱圧着(80〜160℃、
2〜4kg/cd)してラミネートする。基板は絶縁層
上に金属箔が積層されているもので、前処理により研磨
され、水分が除去されている。次いで、ネガフィルム等
を用いて画像的に露光を行った後、アルカリ水溶液を用
いて未露光部を除去(現像)し、フォトレジスト画像を
形成する。更に形成されたフォトレジスト画像をマスク
として金属箔をエツチング又はめっき処理し、次いでフ
ォトレジスト画像を現像液により更に強アルカリ性の水
溶液を用いて剥離することにより、印刷配線板が製造さ
れる。When using a photosensitive laminate using an alkali-developable resin composition, first remove the protective film from the photosensitive laminate and use a printed wiring board substrate (hereinafter referred to as The photosensitive layer is heat-pressed (80 to 160°C,
2-4 kg/cd) and laminate. The substrate consists of a metal foil laminated on an insulating layer, and is pre-treated by polishing to remove moisture. Next, after imagewise exposure is performed using a negative film or the like, unexposed areas are removed (developed) using an alkaline aqueous solution to form a photoresist image. Furthermore, a printed wiring board is manufactured by etching or plating a metal foil using the formed photoresist image as a mask, and then peeling off the photoresist image using a developer and a strongly alkaline aqueous solution.
近年、印刷配線板の分野では、カメラや自動車等の電気
回路材としてフレキシブルな配線材料が要求されており
、この回路形成用の感光性フィルムとしても硬化後の可
とう性が強く望まれている。In recent years, in the field of printed wiring boards, there has been a demand for flexible wiring materials as electrical circuit materials for cameras, automobiles, etc., and flexibility after curing is also strongly desired for photosensitive films for forming these circuits. .
また、アルカリ現像型樹脂組成物の剥離には水酸化ナト
リウム水溶液のスプレー等が使用されており、この水酸
化ナトリウムにより、銅面の変色や半田の焼けなどの問
題があり、剥離時間の早い感光性フィルムが望まれてい
る。これらの可どう性や剥離時間を早い感光性樹脂組成
物としては、可塑剤の添加や単官能モノマーと多官能モ
ノマーの組み合わせが重要であるが、可塑剤や単官能モ
ノマーを増量すると、感光性樹脂の膜強度が低下し、印
刷回路板等に存在するスルーホールを保護する性能(テ
ンティング性)が低下する。したがって、これらの可塑
剤や単官能モノマーの選択が重要である。In addition, a spray of sodium hydroxide aqueous solution is used to remove alkaline-developable resin compositions, and this sodium hydroxide causes problems such as discoloration of the copper surface and burnt solder. A sex film is desired. Addition of a plasticizer and combination of monofunctional monomers and polyfunctional monomers are important for creating photosensitive resin compositions with fast flexibility and peeling time. The strength of the resin film decreases, and the ability to protect through holes present in printed circuit boards (tenting properties) decreases. Therefore, selection of these plasticizers and monofunctional monomers is important.
本発明の目的は、前記の可どう性や剥離性能を向上し、
かつ、テンティング性が良好なアルカリ現像可能な感光
性樹脂組成物及びこれを用いた感光性樹脂組成物積層体
を提供することにある。The purpose of the present invention is to improve the above-mentioned flexibility and peelability,
Another object of the present invention is to provide an alkali-developable photosensitive resin composition with good tenting properties and a photosensitive resin composition laminate using the same.
本発明は、
(A)カルボキシル基含有フィルム性付与ポリマ(B)
−数式(I)
〔式中、Zは環式二塩基酸残基を表し、R1は炭素原子
数1〜6のアルキレン基を表し、R3は水素又はメチル
基を表し、Yは水素、炭素原子数1〜4のアルキル基又
は−CH,−X (Xは塩素又は臭素である)を表す〕
で示される化合物、(C)少な(とも2個のエチレン性
不飽和基を含有する化合物、
(D)光重合開始剤及び
(E)ポリアルキレングリコール
を含有してなる感光性樹脂組成物及び該組成物を用いた
感光性樹脂組成物積層体に関する。The present invention includes (A) a carboxyl group-containing film-like polymer (B)
- Formula (I) [In the formula, Z represents a cyclic dibasic acid residue, R1 represents an alkylene group having 1 to 6 carbon atoms, R3 represents hydrogen or a methyl group, and Y represents hydrogen or a carbon atom Represents an alkyl group of numbers 1 to 4 or -CH, -X (X is chlorine or bromine)]
A photosensitive resin composition comprising a compound represented by (C) a compound containing a small number (both of which contain two ethylenically unsaturated groups), (D) a photopolymerization initiator, and (E) a polyalkylene glycol; The present invention relates to a photosensitive resin composition laminate using the composition.
本発明に用いられる(A)成分であるカルボキシル基含
有フィルム性付与ポリマーは、アルカリ現像液に対して
溶解又は膨潤可能なポリマーであり、例えば、メタクリ
ル酸、アクリル酸、フマル酸モノビニルエステル、マレ
イン酸モノビニルエステル、イタコン酸モノビニルエス
テル、マレイン酸モノビニルエステル等のカルボキシル
基と不飽和基を有するモノマーとメタクリル酸メチル、
アクリル酸メチル、メタクリル酸エチル、アクリル酸エ
チル、メタクリル酸ブチル、アクリル酸ブチル、メタク
リル酸2−エチルヘキシル、アクリル酸2−エチルヘキ
シル等のアクリル酸又はメタクリル酸のアルキルエステ
ル、スチレン、ビニルトルエン、アクリルアミド、メタ
クリルアミドなどモノマーとの共重合体が用いられる。The carboxyl group-containing film-forming polymer used in the present invention as component (A) is a polymer that can be dissolved or swelled in an alkaline developer, such as methacrylic acid, acrylic acid, fumaric acid monovinyl ester, maleic acid, etc. Monomers having a carboxyl group and an unsaturated group such as monovinyl ester, monovinyl itaconate, and monovinyl maleate, and methyl methacrylate;
Alkyl esters of acrylic acid or methacrylic acid such as methyl acrylate, ethyl methacrylate, ethyl acrylate, butyl methacrylate, butyl acrylate, 2-ethylhexyl methacrylate, 2-ethylhexyl acrylate, styrene, vinyltoluene, acrylamide, methacryl A copolymer with a monomer such as amide is used.
カルボキシル基と不飽和基とを有するモノマーの使用量
としては、アルカリ現像性を付与する点から15〜85
モル%とすることが好ましい。この使用量が15モル%
未満であると、現像性が悪くなる傾向があり、35モル
%を越えると、硬化部の耐現像液性が低下する傾向があ
る。(A)フィルム性付与ポリマーの分子量は、重量平
均分子量でso、ooo〜soo、oooの範囲にある
ことが好ましい。この分子量が小さすぎるとフィルム性
付与性や膜強度が悪化する傾向があり、分子量が大きす
ぎると、現像性が悪化する傾向がある。The usage amount of the monomer having a carboxyl group and an unsaturated group is 15 to 85% from the viewpoint of imparting alkaline developability.
It is preferable to set it as mol%. This usage amount is 15 mol%
If it is less than 35 mol %, the developability tends to deteriorate, and if it exceeds 35 mol %, the developer resistance of the cured part tends to decrease. (A) The molecular weight of the film property imparting polymer is preferably in the range of so, ooo to soo, ooo in terms of weight average molecular weight. If the molecular weight is too small, film properties and film strength will tend to deteriorate, and if the molecular weight is too large, developability will tend to deteriorate.
(A)カルボキシル基含有フィルム性付与ポリマーの配
合量は、(A)フィルム性付与ポリマーと(B)一般式
(I)で示される化合物と(C)エチレン性不飽和基を
含有する化合物の総和〔(A)+ (B)+ (C))
を100重量部として(以下、重量部と示す場合はこの
定義とする。)、これに対して30〜80重量部が好ま
しく、40〜70重量部がより好ましい。また、(A)
成分のフィルム性付与ポリマーを2種以上使用しても良
い。The blending amount of (A) the carboxyl group-containing film property-imparting polymer is the sum of (A) the film property-imparting polymer, (B) the compound represented by general formula (I), and (C) the compound containing an ethylenically unsaturated group. [(A)+(B)+(C))
is defined as 100 parts by weight (hereinafter referred to as "parts by weight", this definition applies), preferably 30 to 80 parts by weight, more preferably 40 to 70 parts by weight. Also, (A)
Two or more types of component film-imparting polymers may be used.
(B)成分である一般式(I)で示される化合物は、例
えば、特公昭61−25736号公報に示されている製
法により製造できる。即ち、環式二塩基酸無水物との次
式による反応により容易に製造される。The compound represented by the general formula (I), which is the component (B), can be produced, for example, by the method disclosed in Japanese Patent Publication No. 61-25736. That is, it is easily produced by reaction with a cyclic dibasic acid anhydride according to the following formula.
/
一+Z
\
−OH
\
−OH
/
−〉 Z
\
〔式中、R1、R1、Z及びYは式(I)で定義したち
のと同一である〕。/ 1 + Z \ -OH \ -OH / -> Z \ [wherein R1, R1, Z and Y are the same as defined in formula (I)].
R1は炭素原子数1〜6のアルキレン基を表すが、炭素
原子数7以上では、その化合物の合成が困難となり、ま
た、アルカリ現像性が悪化する。R1 represents an alkylene group having 1 to 6 carbon atoms, but if the number of carbon atoms is 7 or more, it becomes difficult to synthesize the compound and the alkali developability deteriorates.
Yの炭素原子数1〜4のアルキル基としては、メチル基
、エチル基、プロピル基、イソプロピル基、ブチル基、
5ee−ブチル基、tert−ブチル基かあげられる。Examples of the alkyl group having 1 to 4 carbon atoms of Y include methyl group, ethyl group, propyl group, isopropyl group, butyl group,
Examples include 5ee-butyl group and tert-butyl group.
炭素原子数が5以上では、その化合物の合成が困難とな
り、また、アルカリ現像性が悪化する。When the number of carbon atoms is 5 or more, it becomes difficult to synthesize the compound and the alkali developability deteriorates.
環式二塩基酸無水物としては、例えば、コハク酸無水物
、無水フタル酸、無水へキサヒドロフタル酸、無水テト
ラヒドロフタル酸等を挙げることができる。Examples of the cyclic dibasic acid anhydride include succinic anhydride, phthalic anhydride, hexahydrophthalic anhydride, and tetrahydrophthalic anhydride.
(B)一般式(I)で示される化合物のうち、一般式(
1)中Yが−CHs又は−CH,CIのものがテンティ
ング性の点で好ましい。(B) Among the compounds represented by general formula (I), general formula (
1) Those in which Y is -CHs, -CH, or CI are preferred from the viewpoint of tenting properties.
(B)一般式(I)で示される化合物の配合量は、5〜
85重量部が好ましい。この量が5重量部未満であると
、剥離時間の短縮、可どう性の向上に効果が少な(なる
傾向があり、35重量部を越えると硬化速度が低下する
傾向がある。この化合物の配合量は、一義的に決定され
るのではなく、混合する少な(とも2個以上のエチレン
性不飽和基を含有する化合物の種類や配合量及びポリア
ルキレングリコールの種類や配合量により、剥離時間・
テンティング性・可とう性の特性から決定される。(B) The compounding amount of the compound represented by general formula (I) is 5 to 5.
85 parts by weight is preferred. If this amount is less than 5 parts by weight, it tends to be less effective in shortening the peeling time and improving flexibility, and if it exceeds 35 parts by weight, the curing rate tends to decrease. The amount is not uniquely determined, but depends on the type and amount of the compound (both containing two or more ethylenically unsaturated groups) to be mixed and the type and amount of polyalkylene glycol.
Determined from the properties of tenting and flexibility.
(C)成分である少なくとも2個のエチレン性不飽和基
を含有する化合物の例としては、多価アルコールにα、
β−不飽和カルボン酸を付加させて得られるもの、例え
ば、テトラエチレングリコールジ(メタ)アクリレート
〔(メタ)アクリレートはアクリレート又はメタクリレ
ートを意味する。以下、同じ)、ポリアルレングリコー
ルジ(メタ)アクリレート(エチレン基の数が2〜14
個のもの)、トリメチロールブロバンジ(メタ)アクリ
レート、トリメチロールプロパントリ(メタ)アクリレ
ート、テトラメチロールメタントリ(メタ)アクリレー
ト、テトラメチロールメタンテトラ(メタ)アクリレー
ト、ポリアルキレングリコールジ(メタ)アクリレート
(プロピレン基の数が2〜14個のもの)、ジペンタエ
リスリトールペンタ(メタ)アクリレート、ジペンタエ
リスリトールヘキサ(メタ)アクリレート、2,2−ビ
ス(4−((メタ)アクリロキシ−ジェトキシ)フェニ
ル〕プロパン、2,2−ビス〔4−((メタ)アクリロ
キシ−ポリエトキシ)フェニル〕プロパン等が挙げられ
る。(C)成分は、常温で150℃以上の沸点を有して
いることが好ましい。Examples of the compound containing at least two ethylenically unsaturated groups, which is component (C), include polyhydric alcohols containing α,
Those obtained by adding β-unsaturated carboxylic acid, for example, tetraethylene glycol di(meth)acrylate [(meth)acrylate means acrylate or methacrylate. The same applies hereinafter), polyallene glycol di(meth)acrylate (the number of ethylene groups is 2 to 14),
trimethylolbroban di(meth)acrylate, trimethylolpropane tri(meth)acrylate, tetramethylolmethane tri(meth)acrylate, tetramethylolmethanetetra(meth)acrylate, polyalkylene glycol di(meth)acrylate( (having 2 to 14 propylene groups), dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2,2-bis(4-((meth)acryloxy-jethoxy)phenyl]propane , 2,2-bis[4-((meth)acryloxy-polyethoxy)phenyl]propane, etc. Component (C) preferably has a boiling point of 150° C. or higher at room temperature.
(D)成分の光重合開始剤としては、例えば、ベンゾフ
ェノン、N、N’ −テトラメチル−4゜4′−ジアミ
ノベンゾフェノン(ミヒラーのケトン)、N、N−テト
ラメチル−4,4′−ジアミノベンゾフェノン、4−メ
トキシ−4′ −ジメチルアミノベンゾフェノン、2−
エチルアントラキノン、フェナントレンキノン等の芳香
族ケトン、ベンゾインメチルエーテル、ベンゾインエチ
ルエーテル、ベンゾインフェニルエーテル等のベンゾイ
ンエーテル、メチルベンゾイン、エチルベンゾイン等の
ベンゾイン、2−(o−クロロフェニル)−4,5−ジ
フェニルイミダゾールニ量体、2−(0−クロロフェニ
ル)−4,5−ジ(m−メトキシフェニル)イミダゾー
ルニ量体、2− (o −フルオロフェニル)−4,5
−ジフェニルイミダゾールニ量体、2−(o−メトキシ
フェニル)=4.5−ジフェニルイミダゾールニ量体、
2−(p−メトキシフェニル)−4,5−ジフェニルイ
ミダゾールニ量体、2,4−ジ(p−メトキシフェニル
)−5−フェニルイミダゾールニ量体、2−(2,4−
ジメトキシフェニル)−4,5−ジフェニルイミダゾー
ルニ量体、2−(p−メチルメルカプトフェニル)−4
,5−ジフェニルイミダゾールニ量体の2.4.5−1
リアリ一ルイミダゾールニ量体などを単独又は組み合わ
せて用いられる。(D)光重合開始剤の配合量は0.1
〜15重量部が好ましい。この配合量が0.1重量部未
満の場合には光感度が低下する傾向があり、15重量部
を越える場合には、露光の際に組成物の表面での光の吸
収が増大し、内部の光硬度が不十分となる傾向がある。Examples of the photopolymerization initiator as component (D) include benzophenone, N,N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), N,N-tetramethyl-4,4'-diamino Benzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 2-
Aromatic ketones such as ethyl anthraquinone and phenanthrenequinone, benzoin ethers such as benzoin methyl ether, benzoin ethyl ether, and benzoin phenyl ether, benzoins such as methylbenzoin and ethylbenzoin, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(0-chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl)-4,5
-diphenylimidazole dimer, 2-(o-methoxyphenyl)=4.5-diphenylimidazole dimer,
2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2,4-di(p-methoxyphenyl)-5-phenylimidazole dimer, 2-(2,4-
dimethoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methylmercaptophenyl)-4
, 2.4.5-1 of 5-diphenylimidazole dimer
Really imidazole dimers and the like can be used alone or in combination. (D) The amount of photopolymerization initiator is 0.1
~15 parts by weight is preferred. If the amount is less than 0.1 part by weight, photosensitivity tends to decrease, and if it exceeds 15 parts by weight, absorption of light on the surface of the composition increases during exposure, and the internal tends to have insufficient optical hardness.
(E)成分のポリアルキレングリコールとしては、例え
ば、ポリプロピレングリコール、ポリエチレングリコー
ル、ポリブチレングリコール、ポリプロピレングリコー
ルとポリエチレングリコールのブロック共重合体及びこ
れらのポリアルキレングリコールのモノアルキルエステ
ル化物等が挙げられる。(E)ポリアルキレングリコー
ルの重量平均分子量は300〜io、oooが好ましい
。Examples of the polyalkylene glycol of component (E) include polypropylene glycol, polyethylene glycol, polybutylene glycol, block copolymers of polypropylene glycol and polyethylene glycol, and monoalkyl esters of these polyalkylene glycols. (E) The weight average molecular weight of the polyalkylene glycol is preferably 300 to io, ooo.
(E)ポリアルキレングリコールの配合量は1〜10重
量部であることが好ましい。1重量部未満であると、可
とう性に対して効果は少な(なる傾向があり、10重量
部を越えるとテンティング性が低下する傾向がある。(E) The blending amount of polyalkylene glycol is preferably 1 to 10 parts by weight. If it is less than 1 part by weight, the effect on flexibility tends to be small, and if it exceeds 10 parts by weight, tenting properties tend to decrease.
一般的に、加熱工程中及び保存中における熱重合を防止
するために、感光層にラジカル重合抑制剤を含有させる
ことが好ましい。このようなラジカル重合抑制剤として
は、例えば、p−メトキシフェノール、ハイドロキノン
、ピロガロール、ナフチルアミン、フェノチアジン、ピ
リジン、ニトロベンゼン、ジニトロベンゼン、p−トル
キノン、クロラニル、アリールフォスファイト等が用い
られるが、200℃以下の低揮発性であることが好まし
く、そのようなものとしてアルキル置換ハイドロキノン
、tert−ブチルカテコール、塩化第一銅、2,6−
シーtert−ブチルp−クレゾール、2.2−メチレ
ンビス(4−エチル−6−t−ブチルフェノール)、2
.2−メチレンビス(2−メチル−6−t−ブチルフェ
ノール)等がある。Generally, in order to prevent thermal polymerization during the heating process and during storage, it is preferable that the photosensitive layer contains a radical polymerization inhibitor. Examples of such radical polymerization inhibitors include p-methoxyphenol, hydroquinone, pyrogallol, naphthylamine, phenothiazine, pyridine, nitrobenzene, dinitrobenzene, p-toluquinone, chloranil, and arylphosphite, but at temperatures below 200°C. are preferred, such as alkyl-substituted hydroquinone, tert-butylcatechol, cuprous chloride, 2,6-
C-tert-butyl p-cresol, 2,2-methylenebis(4-ethyl-6-t-butylphenol), 2
.. Examples include 2-methylenebis(2-methyl-6-t-butylphenol).
前述の感光性樹脂組成物の中には染料、顔料などの着色
物質を含有してもよい。着色物質はフォトレジストとし
ての特性に影響を与えずに、また、200℃以下の温度
では分解、揮発しないものが好ましい。使用しうる着色
剤としては、例えば、ツクシン、オーラミン塩基、カル
コシトグリーンS、パラマジエンタ、クリスタルバイオ
レット、メチルオレンジ、ディルブルー2B、ビクトリ
アブルー、マラカイトグリーン、ペイシックブルー20
、アイオレンジグリーン、ナイトグリーンB、トリパロ
サン、ニューマジエンタ、アシッドバイオレットRRH
,レッドバイオレット5R3,ニューメチレンブルーG
G等がある。The photosensitive resin composition described above may contain coloring substances such as dyes and pigments. The colored substance is preferably one that does not affect the properties of the photoresist and does not decompose or volatilize at temperatures below 200°C. Colorants that can be used include, for example, Tsukusin, Auramine Base, Calcocyto Green S, Paramazienta, Crystal Violet, Methyl Orange, Dill Blue 2B, Victoria Blue, Malachite Green, and Paysic Blue 20.
, Eye Orange Green, Night Green B, Tripalosan, New Marienta, Acid Violet RRH
, Red Violet 5R3, New Methylene Blue G
There are G, etc.
感光性樹脂組成物を支持体上に積層する場合には、感光
性樹脂組成物に溶剤を加えても良い。溶剤としては、該
感光性樹脂組成物を溶解する溶剤であれば特に制限はな
く、1種又は数種の溶剤を使用しても良い。溶剤として
は、例えば、アセトン、メチルエチルケトン、メチルイ
ソブチルケトン、メチルセロソルブ、エチルセロソルブ
、ジクロルメタン、クロロホルム、メチルアルコール、
エチルアルコール等が用いられる。この感光性樹脂組成
物は、ロールコータ−、カーテンコーター、各種の印刷
法などの公知の手段で直接、基板に施しても良いし、ま
た、感光性樹脂組成物積層体、即ち、感光性フィルムと
して、−旦、フィルムなどの支持体に塗布し、溶剤を乾
燥して積層し用いても良い。感光層の厚さは、通常の厚
さとされ、10〜100μmが好ましく、20〜60μ
mがより好ましい。When laminating the photosensitive resin composition on a support, a solvent may be added to the photosensitive resin composition. The solvent is not particularly limited as long as it dissolves the photosensitive resin composition, and one or more solvents may be used. Examples of the solvent include acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl cellosolve, ethyl cellosolve, dichloromethane, chloroform, methyl alcohol,
Ethyl alcohol etc. are used. This photosensitive resin composition may be directly applied to the substrate by known means such as a roll coater, curtain coater, or various printing methods, or may be applied to a photosensitive resin composition laminate, that is, a photosensitive film. Alternatively, it may be used by first applying it to a support such as a film, drying the solvent, and then laminating the layers. The thickness of the photosensitive layer is a normal thickness, preferably 10 to 100 μm, and 20 to 60 μm.
m is more preferred.
感光層とフィルム状支持体の2層から成る感光性フィル
ムは、そのまま、或いは感光層の他の面に保護フィルム
を更に積層し、ロール状に巻き取って貯蔵される。A photosensitive film consisting of two layers, a photosensitive layer and a film-like support, is stored as it is or after a protective film is further laminated on the other side of the photosensitive layer and the film is wound up into a roll.
フィルム状支持体としては、例えば、ポリエチレンテレ
フタレート、ポリプロピレン、ポリエチレン等のフィル
ムがあり、ポリエチレンテレフタレートフィルムが好ま
しい。このフィルムの厚さは、5〜100μmが好まし
く、10〜30μmがより好ましい。Examples of the film-like support include films of polyethylene terephthalate, polypropylene, polyethylene, etc., with polyethylene terephthalate film being preferred. The thickness of this film is preferably 5 to 100 μm, more preferably 10 to 30 μm.
また、上記フィルムを保護フィルムとして用いることが
でき、ポリエチレンフィルムが好ましい。Moreover, the above-mentioned film can be used as a protective film, and a polyethylene film is preferable.
フォトレジスト画像の製造に際しては、前記保護フィル
ムが存在している場合には、これを除去した後、感光層
を加熱しながら基板に対して圧着させることによりラミ
ネートされる。ラミネートされる表面には特に制限はな
いが、感光層を加熱する温度(ラミネート温度)により
基板の加熱は不必要であるが、さらにラミネート性を向
上させるために加熱を行ってもよい。When producing a photoresist image, if the protective film is present, it is removed and then the photosensitive layer is laminated by pressing the photosensitive layer against the substrate while heating. Although there are no particular restrictions on the surface to be laminated, heating of the substrate is not necessary depending on the temperature at which the photosensitive layer is heated (laminating temperature), but heating may be performed to further improve lamination properties.
次いで、ラミネートが完了した感光層は、ネガフィルム
又はポジフィルムを用いて活性光に画像的に露光される
。この際感光層上に存在する重合体フィルムが透明の場
合には、そのまま露光してもよく、不透明の場合には、
当然除去する必要がある。感光層の保護の面から重合体
フィルムが透明であり、その重合体フィルムを残存させ
たまま、これを通して露光することが好ましい。活性光
線としては、例えばカーボンアーク、水銀蒸気アーク、
キセノンアークなとの活性光源から発生される光が用い
られる。感光層に含まれる光重合開始剤の感受性は通常
紫外線領域において最大であるため、活性光源は紫外線
を有効に放射するものにすべきであるが、光重合開始剤
が可視光線に感受性のもの、例えば9,10−フェナン
スレンキノンなどである場合には、活性光線として可視
光線が用いられ、この光源は前記のものの他に写真用フ
ラッド電球、太陽ランプなども用いられる。露光後、感
光層上にフィルム状支持体が存在している場合には、こ
れを除去後、アルカリ水溶液を用いて、例えば、スプレ
ー、揺動浸漬、ブラッシング、スクラッピングなどの公
知の方法により未露光部を除去して現像する。この際用
いられるアルカリ水溶液の塩基としては、例えば、リチ
ウム、ナトリウム又はカリウムの水酸化物等の水酸化ア
ルカリ、リチウム、ナトリウム又はカリウムの炭酸塩又
は重炭酸塩等の炭酸アルカリ、リン酸カリウム又はリン
酸ナトリウム等のアルカリ金属リン酸塩、ピロリン酸ナ
トリウム又はビロリン酸カリラム等のアルカリビロリン
酸塩などが挙げられ、特に、炭酸ナトリウムの水溶液が
好ましい。現像には、0.5〜3重量%のアルカリ水溶
液を用いるのが好ましく、そのpHは、9〜12が好ま
しい。The laminated photosensitive layer is then imagewise exposed to actinic light using a negative or positive film. At this time, if the polymer film present on the photosensitive layer is transparent, it may be exposed as is; if it is opaque,
Of course it needs to be removed. In order to protect the photosensitive layer, it is preferable that the polymer film is transparent and that the polymer film is exposed through it while remaining. Examples of active rays include carbon arc, mercury vapor arc,
Light generated from an active light source such as a xenon arc is used. Since the sensitivity of the photopolymerization initiator contained in the photosensitive layer is usually maximum in the ultraviolet region, the active light source should be one that effectively emits ultraviolet light. For example, in the case of 9,10-phenanthrenequinone, visible light is used as the active light, and in addition to the above-mentioned light sources, a photographic flood light bulb, a solar lamp, etc. can also be used as the light source. After exposure, if a film-like support is present on the photosensitive layer, it is removed and then removed by a known method such as spraying, shaking dipping, brushing, or scraping using an alkaline aqueous solution. The exposed area is removed and developed. The base of the alkaline aqueous solution used at this time includes, for example, alkali hydroxide such as hydroxide of lithium, sodium or potassium, alkali carbonate such as carbonate or bicarbonate of lithium, sodium or potassium, potassium phosphate or phosphorus. Examples include alkali metal phosphates such as sodium acid, alkali birophosphates such as sodium pyrophosphate and potassium birophosphate, and particularly preferred is an aqueous solution of sodium carbonate. For development, it is preferable to use an alkaline aqueous solution of 0.5 to 3% by weight, and the pH thereof is preferably 9 to 12.
また、現像温度は感光層の現像性に合わせて調節するこ
とができる。Further, the development temperature can be adjusted depending on the developability of the photosensitive layer.
さらに、アルカリ水溶液中には表面活性剤、消泡剤又は
現像を促進させるための少量の有機溶剤を混入させるこ
ともできる。Furthermore, a surfactant, an antifoaming agent, or a small amount of an organic solvent for accelerating development can be mixed into the alkaline aqueous solution.
さらに、印刷配線板の製造に際しては、現像されたフォ
トレジスト画像をマスクとして露出している基板の表面
をエツチング又はめっきの常法により処理する。次いで
、フォトレジスト画像は通常現像に用いるアルカリ水溶
液よりさらに強アルカリ性の水溶液によって剥離される
。強アルカリ性の水溶液としては、例えば2〜10重量
%の水酸化ナトリウム等が用いられる。Further, in manufacturing printed wiring boards, the exposed surface of the substrate is treated by conventional etching or plating methods using the developed photoresist image as a mask. The photoresist image is then stripped with an aqueous solution that is more strongly alkaline than the alkaline aqueous solution normally used for development. As the strongly alkaline aqueous solution, for example, 2 to 10% by weight of sodium hydroxide is used.
以下、実施例及び比較例により本発明をさらに詳しく説
明する。Hereinafter, the present invention will be explained in more detail with reference to Examples and Comparative Examples.
実施例1〜4及び比較例1〜4
メタクリル酸メチル/アクリル酸エチル/メタクリル酸
の共重合体の40重量%エチルセロソルブ溶液(重量比
60/20/20、重量平均分子量的100,000)
150gミヒラーズケトン
0.2 gベンゾフェノン
5−0gビクトリアピュアブルー
o、 o s gロイコクリスタルバイオレット
1.0gトリブロモメチルフェニルスルホン 0.
6 gp−トルエンスルホンアミド zogメ
チルエチルケトン 21.17 gを配合
して溶液Aを得た。Examples 1 to 4 and Comparative Examples 1 to 4 40% by weight ethyl cellosolve solution of methyl methacrylate/ethyl acrylate/methacrylic acid copolymer (weight ratio 60/20/20, weight average molecular weight 100,000)
150g Michler's Ketone
0.2 g benzophenone
5-0g Victoria Pure Blue
o, o s g leuco crystal violet
1.0g tribromomethylphenylsulfone 0.
Solution A was obtained by blending 21.17 g of 6 gp-toluenesulfonamide zog methyl ethyl ketone.
次いで、この溶液Aに第1表に示す割合の各成*12.
2−ビス〔4−(メタクリロキシ−ポリエトキシ)フェ
ニレン〕プロパンの商品名(新中村化学株製)
*2 無水フタル酸と2−ヒドロキシエチルメタクリレ
ートとエピクロルヒドリンから合成である化合物〕
*8 無水フタル酸と2−ヒドロキシエチルメタクリレ
ートとプロピレングリコールから合*4 フェノキシポ
リエチレングリコールアクリレートの商品名(新中村化
学■製)
*5 ポリプロピレングリコール(重量平均分子量的2
000、商品名、旭電化■製)
*6 エチレンオキサイド−プロピレンオキサイド共重
合体(重量平均分子量的2000、商品名、ダウケミカ
ル■製)
実施例1〜4及び比較例1〜4の感光性樹脂組放物の溶
液をそれぞれ第1図に示す塗工装置を用いて支持体上に
積層した。第1図に示したように、感光性樹脂組成物の
溶液1は繰り出しロール1゜から繰り出される厚み23
μmを有するポリエチレンテレフタレートフィルム(東
し■ルミラー)2上に、乾燥後の膜厚が30μmとなる
ように塗工され、乾燥機3内で乾燥され、ポリエチレン
フィルム繰り出しロール10から繰り出される厚み85
μmのポリエチレンフィルム4で被覆され、得られる感
光性フィルムは、感光性フィルム巻き取りロール13に
巻き取られる。なお、第1図において、6.7.8.1
1及び12はロールであり、9はナイフである。Next, each component *12. was added to this solution A in the proportions shown in Table 1.
Trade name of 2-bis[4-(methacryloxy-polyethoxy)phenylene]propane (manufactured by Shin Nakamura Chemical Co., Ltd.) *2 A compound synthesized from phthalic anhydride, 2-hydroxyethyl methacrylate, and epichlorohydrin] *8 Phthalic anhydride and 2 -Made from hydroxyethyl methacrylate and propylene glycol *4 Trade name of phenoxypolyethylene glycol acrylate (manufactured by Shin Nakamura Chemical) *5 Polypropylene glycol (weight average molecular weight 2
000, trade name, manufactured by Asahi Denka ■) *6 Ethylene oxide-propylene oxide copolymer (weight average molecular weight 2000, trade name, manufactured by Dow Chemical ■) Photosensitive resins of Examples 1 to 4 and Comparative Examples 1 to 4 Each of the solutions of the assembled materials was laminated on a support using the coating apparatus shown in FIG. As shown in FIG.
It is coated on a polyethylene terephthalate film (East Lumirror) 2 having a film thickness of 30 μm after drying, dried in a dryer 3, and fed out from a polyethylene film feed roll 10 to a thickness of 85 μm.
The photosensitive film obtained by being coated with a .mu.m polyethylene film 4 is wound onto a photosensitive film winding roll 13. In addition, in Figure 1, 6.7.8.1
1 and 12 are rolls, and 9 is a knife.
得られた感光性フィルムからポリエチレンフィルムを剥
離しながら、その感光層面を、スコッチフライト0バフ
ロール(住人スリーM製)により研磨し、乾燥し、洗浄
された銅張積層板(100m+X200mn)の銅面上
に日立製作所製高温ラミネーターを用いて連続的に積層
して試験片を得た。While peeling off the polyethylene film from the obtained photosensitive film, the photosensitive layer surface was polished with Scotchflite 0 Buff Roll (manufactured by Jujum Three M), dried, and washed on the copper surface of a copper-clad laminate (100 m + x 200 mm). A test piece was obtained by continuously laminating layers using a high-temperature laminator manufactured by Hitachi.
この際の積層条件を第2表に示す。The lamination conditions at this time are shown in Table 2.
第2表
(注)* エアシリンダー圧力
このようにして得られた各試験片につき、次に示す試験
を行った。Table 2 (note) *Air cylinder pressure The following tests were conducted on each of the test pieces thus obtained.
(a) 感度試験
21段ステップタブレットを備えたネガを通し、超高圧
水銀灯により100mJ/cmで試験片を露光した。3
0分放置後、ポリエチレンテレフタレートフィルムを剥
離し、1重量%の炭酸ナトリウム水溶液で現像し、ステ
ップタブレットの残存段数を読み取った。実施例1〜4
、比較例1〜4ともほぼ同じ感度を示し、残存段数はほ
ぼ8であった。(a) Sensitivity test The specimen was exposed to light at 100 mJ/cm using an ultra-high pressure mercury lamp through a negative equipped with a 21-step step tablet. 3
After standing for 0 minutes, the polyethylene terephthalate film was peeled off, developed with a 1% by weight aqueous sodium carbonate solution, and the number of remaining steps on the step tablet was read. Examples 1-4
, Comparative Examples 1 to 4 showed almost the same sensitivity, and the number of remaining plates was approximately 8.
(b) 剥離時間
試験片を21段ステップで8段になるように露光し、そ
の後1重量%炭酸ナトリウム水溶液を用い、30℃で現
像した。現像後、8重量%水酸化ナトリウム水溶液を用
い、50℃で剥離し、剥離が終了するまでの時間を測定
した。結果を第3表に示す。(b) Peeling time test The specimen was exposed to light in 8 steps of 21 steps, and then developed at 30° C. using a 1% by weight aqueous sodium carbonate solution. After development, the film was peeled off at 50° C. using an 8% by weight aqueous sodium hydroxide solution, and the time until the peeling was completed was measured. The results are shown in Table 3.
(d) 密着性
試験片を21段ステップで8段になるように露光し、そ
の後1重量%炭酸ナトリウム水溶液を用い、30℃で現
像した。現像後、50℃の塩化第二銅溶液でエツチング
を行い、次いでナイフで2關角のゴバン目を4個作成し
、テープで剥離し、レジストの剥がれる状態を評価した
。その結果を第8表に示す。(d) Adhesion The test piece was exposed to light in 21 steps to form 8 steps, and then developed at 30° C. using a 1% by weight aqueous sodium carbonate solution. After development, etching was performed with a cupric chloride solution at 50° C., and then four diagonal goblets were made with a knife and peeled off with tape, and the peeling state of the resist was evaluated. The results are shown in Table 8.
表中の○、△及び×は次の意味を示す。○, △ and × in the table have the following meanings.
○:剥がれなし
△ニ一部剥がれあり
×:全面に剥がれあり
(e) テンティング性
直径8■のスルーホール穴を有する銅張り積層板をスコ
ッチブライド[F]バフロール(住人スリーM製)によ
り研磨し、乾燥し、洗浄し、第2表に示す積層条件によ
り、各感光性フィルムをポリエチレンフィルムを除去し
ながら両面に積層した。○: No peeling △ Partial peeling ×: Peeling on the entire surface (e) Tenting property A copper-clad laminate with a through-hole hole of 8 cm in diameter was polished with Scotchbride [F] Buff Roll (manufactured by Jubiru Three M). After drying and washing, each photosensitive film was laminated on both sides while removing the polyethylene film under the lamination conditions shown in Table 2.
この基板を21段ステップタブレットで8段になるよう
に露光し、その後1重量%炭酸ナトリウム水溶液を用い
、30゛Cで60秒間現像した。現像後、50℃の塩化
第二銅溶液、スプレー圧力2kg/cdで120秒間エ
ツチングを行い、テント破れを観察し、下記の基準で評
価した。This substrate was exposed to light in 8 stages using a 21-stage step tablet, and then developed at 30°C for 60 seconds using a 1% by weight aqueous sodium carbonate solution. After development, etching was performed for 120 seconds using a cupric chloride solution at 50° C. at a spray pressure of 2 kg/cd, and tent tearing was observed and evaluated using the following criteria.
○:破れなし
△:330穴中9穴以下の破れ
X:830穴中10穴以上の破れ
第8表
第3表に示した結果から明らかなとおり、本発明の感光
性樹脂組成物は比較例のものと比べて、剥離性、密着性
及びテンティング性において優れている。○: No tears △: Tears in 9 holes or less out of 330 holes It is superior in releasability, adhesion and tenting properties.
本発明の感光性樹脂組成物及びこれを用いた感光性樹脂
組成物積層体は、可どう性や剥離性能が極めて良好で、
かつ、テンティング性に優れており、これによって高品
質のプリント配線板を得ることができる。The photosensitive resin composition of the present invention and the photosensitive resin composition laminate using the same have extremely good flexibility and peelability,
Moreover, it has excellent tenting properties, and as a result, a high-quality printed wiring board can be obtained.
第1図は、実施例で用いた感光性フィルムの製造装置の
概略図である。
符号の説明
1・・・感光性樹脂組成物の溶液、2・・・ポリエチレ
ンテレフタレートフィルム、3・・・乾燥機、4・・・
ポリエチレンフィルム、5・・・繰り出しロール、10
・・・ポリエチレンフィルム繰り出しロール、18・・
・感光性フィルム巻き取りロール
第1図
1・・・感光性樹脂組成物
2・・・ポリエチレンテレフタレートフィルム3・・・
乾燥機
4・・・ポリエチレンフィルム
5・・・繰り出しロールFIG. 1 is a schematic diagram of a photosensitive film manufacturing apparatus used in Examples. Explanation of symbols 1... Solution of photosensitive resin composition, 2... Polyethylene terephthalate film, 3... Dryer, 4...
Polyethylene film, 5...Feeding roll, 10
...Polyethylene film feed roll, 18...
・Photosensitive film winding roll FIG. 1 1...Photosensitive resin composition 2...Polyethylene terephthalate film 3...
Dryer 4...Polyethylene film 5...Feeding roll
Claims (4)
子数1〜6のアルキレン基を表し、R_2は水素又はメ
チル基を表し、Yは水素、炭素原子数1〜4のアルキル
基又は−CH_2−X(Xは塩素又は臭素である)を表
す〕で示される化合物、 (C)少なくとも2個のエチレン性不飽和基を含有する
化合物、 (D)光重合開始剤及び (E)ポリアルキレングリコール を含有してなる感光性樹脂組成物。1. (A) Carboxyl group-containing film properties imparting polymer (B) General formula (I) ▲ Numerical formulas, chemical formulas, tables, etc. are available▼ [In the formula, Z represents a cyclic dibasic acid residue, and R_1 has a carbon atom number of 1 ~6 alkylene group, R_2 represents hydrogen or a methyl group, Y represents hydrogen, an alkyl group having 1 to 4 carbon atoms, or -CH_2-X (X is chlorine or bromine)] A photosensitive resin composition comprising: (C) a compound containing at least two ethylenically unsaturated groups; (D) a photopolymerization initiator; and (E) polyalkylene glycol.
と一般式( I )で示される化合物(B)と少なくとも
2個のエチレン性不飽和基を含有する化合物(C)の総
和100重量部に対して、カルボキシル基含有フィルム
性付与ポリマー(A)を30〜80重量部、式( I )
の化合物(B)を5〜35重量部、ポリアルキレングリ
コール(E)を1〜10重量部含有してなる請求項1記
載の感光性樹脂組成物。2. Carboxyl group-containing film properties imparting polymer (A)
For a total of 100 parts by weight of the compound (B) represented by general formula (I) and the compound (C) containing at least two ethylenically unsaturated groups, carboxyl group-containing film properties imparting polymer (A) is added. 30-80 parts by weight, formula (I)
The photosensitive resin composition according to claim 1, comprising 5 to 35 parts by weight of the compound (B) and 1 to 10 parts by weight of the polyalkylene glycol (E).
して成る感光性樹脂組成物積層体。3. A photosensitive resin composition laminate comprising the photosensitive resin composition according to claim 1 laminated on a support.
載の感光性樹脂組成物積層体。4. The photosensitive resin composition laminate according to claim 3, wherein the photosensitive layer has a thickness of 10 to 100 μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28398690A JPH04157467A (en) | 1990-10-22 | 1990-10-22 | Photosensitive resin composition and photosensitive resin composition laminate using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28398690A JPH04157467A (en) | 1990-10-22 | 1990-10-22 | Photosensitive resin composition and photosensitive resin composition laminate using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04157467A true JPH04157467A (en) | 1992-05-29 |
Family
ID=17672804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28398690A Pending JPH04157467A (en) | 1990-10-22 | 1990-10-22 | Photosensitive resin composition and photosensitive resin composition laminate using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04157467A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106970502A (en) * | 2016-06-17 | 2017-07-21 | 长兴材料工业股份有限公司 | Polymerizable composition and application thereof |
-
1990
- 1990-10-22 JP JP28398690A patent/JPH04157467A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106970502A (en) * | 2016-06-17 | 2017-07-21 | 长兴材料工业股份有限公司 | Polymerizable composition and application thereof |
CN106970502B (en) * | 2016-06-17 | 2020-04-28 | 长兴材料工业股份有限公司 | Polymerizable composition and application thereof |
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