JPH0415231U - - Google Patents
Info
- Publication number
- JPH0415231U JPH0415231U JP5531790U JP5531790U JPH0415231U JP H0415231 U JPH0415231 U JP H0415231U JP 5531790 U JP5531790 U JP 5531790U JP 5531790 U JP5531790 U JP 5531790U JP H0415231 U JPH0415231 U JP H0415231U
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- microwaves
- semiconductor manufacturing
- temperature
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5531790U JPH0415231U (enExample) | 1990-05-29 | 1990-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5531790U JPH0415231U (enExample) | 1990-05-29 | 1990-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415231U true JPH0415231U (enExample) | 1992-02-06 |
Family
ID=31578162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5531790U Pending JPH0415231U (enExample) | 1990-05-29 | 1990-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415231U (enExample) |
-
1990
- 1990-05-29 JP JP5531790U patent/JPH0415231U/ja active Pending
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