JPH0415231U - - Google Patents

Info

Publication number
JPH0415231U
JPH0415231U JP5531790U JP5531790U JPH0415231U JP H0415231 U JPH0415231 U JP H0415231U JP 5531790 U JP5531790 U JP 5531790U JP 5531790 U JP5531790 U JP 5531790U JP H0415231 U JPH0415231 U JP H0415231U
Authority
JP
Japan
Prior art keywords
magnetron
microwaves
semiconductor manufacturing
temperature
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5531790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5531790U priority Critical patent/JPH0415231U/ja
Publication of JPH0415231U publication Critical patent/JPH0415231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5531790U 1990-05-29 1990-05-29 Pending JPH0415231U (US06252093-20010626-C00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5531790U JPH0415231U (US06252093-20010626-C00008.png) 1990-05-29 1990-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5531790U JPH0415231U (US06252093-20010626-C00008.png) 1990-05-29 1990-05-29

Publications (1)

Publication Number Publication Date
JPH0415231U true JPH0415231U (US06252093-20010626-C00008.png) 1992-02-06

Family

ID=31578162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5531790U Pending JPH0415231U (US06252093-20010626-C00008.png) 1990-05-29 1990-05-29

Country Status (1)

Country Link
JP (1) JPH0415231U (US06252093-20010626-C00008.png)

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